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1. 发明申请

WO2005013440A2 ELECTRODES FOR FLUORINE GAS DISCHARGE LASERS 审中-公开
标题翻译：氟化物放电激光电极
公开(公告)号：WO2005013440A2
公开(公告)日：2005-02-10
申请号：PCT/US2004022809
申请日：2004-07-16
申请人： CYMER INC , MORTON RICHARD G , MOOSMAN BRYAN , DYER TIMOTHY , CARMICHAEL JAMES A , ZHANG JIPING
发明人： MORTON RICHARD G , MOOSMAN BRYAN , DYER TIMOTHY , CARMICHAEL JAMES A , ZHANG JIPING
IPC分类号： H01S20060101 , H01S3/036 , H01S3/038 , H01S3/097 , H01S3/0971 , H01S3/225 , H01S
CPC分类号： H01S3/0385 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0382 , H01S3/0384 , H01S3/0388 , H01S3/097 , H01S3/09702 , H01S3/0971 , H01S3/225 , H01S3/2251
摘要： Fluorine gas discharge laser electrodes and electrode systems are disclosed that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition disclosed are electrodes that may comprise a first discharge shaping magnet mounted in a first elongated gas discharge electrode and a second discharge shaping magnet mounted in a second elongated gas discharge electrode. This may also comprise at least one of the first and second gas discharge electrodes has imbedded therein a first and a second auxiliary field creating magnet. Also disclosed is an electrode that may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode and a pair of elongated high erosion regions on either side of the crown comprising a second material with a relatively higher erosion rate during gas discharge than that of the first material. Also disclosed are electrodes that may comprise a first insert in the electrode body comprising an electrically conductive material having a different coefficient of thermal conductivity than the electrode body. Also disclosed are electrodes that may have a thin film of semi-conductive material coating at least the discharge footprint of the gas discharge electrode, or at least a portion of the discharge region covered with a pre-formed reef having generally uniform pore size and distribution, and methods of making such coatings or reef. Also disclosed is a method of forming an electrode by diffusion bonding a first piece of a first material to a second piece of a second material utilizing a diffusion bonding catalyst between the first piece of material and the second piece of material during the diffusion bonding step and machining the bonded pieces to form an electrode.
摘要翻译：公开了氟气放电激光电极和电极系统，其可以包括延伸小于第二细长气体放电电极的相应长度的多个电流返回脚。另外公开了可以包括安装在第一细长气体放电电极中的第一放电成形磁体和安装在第二细长气体放电电极中的第二放电成形磁体的电极。这也可以包括第一和第二气体放电电极中的至少一个嵌入其中的第一和第二辅助场产生磁体。还公开了一种电极，其可以包括跨越一对侧壁和一对端壁之间的中心线轴线的冠，包括形成电极的放电区域的至少一部分的第一材料和一对细长的高度在冠的任一侧的侵蚀区域包括在气体放电期间具有比第一材料的侵蚀速率相对较高的第二材料。还公开了可以包括电极体中的第一插入物的电极，其包括具有与电极体不同的导热系数的导电材料。还公开了电极，其可以具有至少涂覆气体放电电极的放电足迹的半导电材料薄膜，或至少一部分用预先形成的具有大致均匀的孔径和分布的预定形式的礁，以及制造这种涂层或珊瑚礁的方法。还公开了一种通过在扩散接合步骤期间利用第一片材料和第二片材料之间的扩散接合催化剂将第一片材料扩散接合到第二片材的第二片材来形成电极的方法，以及加工粘合片以形成电极。

2. 发明申请

WO2005050794A3 HALOGEN GAS DISCHARGE LASER ELECTRODES 审中-公开
标题翻译：卤化物放电激光电极
公开(公告)号：WO2005050794A3
公开(公告)日：2006-01-05
申请号：PCT/US2004024062
申请日：2004-07-27
申请人： CYMER INC , STEIGER THOMAS D , UJAZDOWSKI RICHARD C , DYER TIMOTHY S , DUFFEY THOMAS P , GILLESPIE WALTER D , MOOSMAN BRYAN G , MORTON RICHARD G , STRATE BRIAN D
发明人： STEIGER THOMAS D , UJAZDOWSKI RICHARD C , DYER TIMOTHY S , DUFFEY THOMAS P , GILLESPIE WALTER D , MOOSMAN BRYAN G , MORTON RICHARD G , STRATE BRIAN D
IPC分类号： H01S20060101 , H01S3/038 , H01S3/097 , H01S3/0971 , H01S3/22 , H01S3/225 , H01S3/97
CPC分类号： H01S3/225 , H01S3/0381 , H01S3/0385 , H01S3/0388 , H01S3/0971 , H01S3/09713
摘要： A method and apparatus for operating a gas discharge laser is disclosed which may comprise a laser chamber containing a laser gas, the laser gas comprising a halogen, two elongated electrode elements defining a cathode and an anode, each of the cathode and anode having an elongated discharge receiving region having a discharge receiving region width defining a width of an electric discharge between the electrode elements in the laser gas, the discharge receiving region defining two longitudinal edges, and the anode comprising: a first elongated anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region of the anode, a pair of second elongated anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an elongated electrode center base portion integral with the first elongated anode portion; and wherein each of the respective pair of second elongated anode portions is mechanically bonded to the center base portion. The electrode element may comprise a cathode. The first and second materials may be different materials such as different brass alloys with different erosion rates in the halogen gas. The first elongated cathode portion may comprising a first cathode material, located entirely within the discharge receiving region comprising a first portion of an ellipse intersecting elongated side walls, with a bottom wall opposite the portion of the ellipse; and a pair of second elongated cathode side portions comprising a second cathode material with the intersection of each respective second cathode portion and the portion of the ellipse forming the discharge receiving region of the first cathode portion, forming respective ellipsoidal extensions of the first portion. The members may be mechanically bonded to the center base portion. Some may be diffusion bonded to the center base portion and/or each other. The electrode assembly may have a hooded discharge receiving region extension at respective ends of the electrode and the electrode portion may be formed with or bonded to the center base portion and may have slanted side walls.
摘要翻译：公开了一种用于操作气体放电激光器的方法和装置，其可以包括包含激光气体的激光室，激光气体包括卤素，限定阴极和阳极的两个细长电极元件，阴极和阳极中的每一个具有细长的放电接收区域具有限定激光气体中的电极元件之间的放电宽度的放电接收区域宽度，放电接收区域限定两个纵向边缘，阳极包括：第一细长阳极部分，包括限定第一阳极材料侵蚀速率，完全位于阳极的放电接收区域内;一对第二细长阳极部分，包括限定第二阳极材料侵蚀速率的第二阳极材料，第二阳极材料分别位于第一阳极部分的每一侧，最少部分地在放电接收区域内; 与所述第一细长阳极部分成一体的细长电极中心基部; 并且其中相应的一对第二细长阳极部分中的每一个机械地结合到中心基部。电极元件可以包括阴极。第一和第二材料可以是不同的材料，例如在卤素气体中具有不同侵蚀速率的不同的黄铜合金。第一细长阴极部分可以包括第一阴极材料，其全部位于放电接收区域内，包括与细长侧壁相交的椭圆的第一部分，其中与壁的部分相对的底壁; 以及一对第二细长阴极侧部分，其包括第二阴极材料，每个相应的第二阴极部分和形成第一阴极部分的放电接收区域的椭圆形部分的交点形成第一部分的相应的椭圆形延伸部分。构件可以机械地结合到中心基部。一些可以扩散结合到中心基部和/或彼此。电极组件可以在电极的相应端部处具有连接的放电接收区域延伸部，并且电极部分可以形成有或结合到中心基部并且可以具有倾斜的侧壁。

3. 发明申请

WO03023910A3 HIGH REP-RATE LASER WITH IMPROVED ELECTRODES 审中-公开
标题翻译：具有改进电极的高倍率激光
公开(公告)号：WO03023910A3
公开(公告)日：2003-05-30
申请号：PCT/US0228463
申请日：2002-09-06
申请人： CYMER INC , MORTON RICHARD G , DYER TIMOTHY S , STEIGER THOMAS D , UJAZDOWSKI RICHARD C , WATSON TOM A , MOOSMAN BRYAN , IVASCHENKO ALEX P , GILLESPIE WALTER D , RETTIG CURTIS L
发明人： MORTON RICHARD G , DYER TIMOTHY S , STEIGER THOMAS D , UJAZDOWSKI RICHARD C , WATSON TOM A , MOOSMAN BRYAN , IVASCHENKO ALEX P , GILLESPIE WALTER D , RETTIG CURTIS L
IPC分类号： C22C9/04 , H01S3/036 , H01S3/038 , H01S3/225 , H01S3/22 , H01S3/223
CPC分类号： H01S3/038 , H01S3/036 , H01S3/0381 , H01S3/0388 , H01S3/09702 , H01S3/225
摘要： The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the elctrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material (42) is positioned at a desired anode discharge region of the electrode. The second anode material (40) is located adjacent to the first anode material (42) along at least two long sides of the first material (42). During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material (40) assures that any tendency of the discharge to spread onto the second material (40) will quickly erode away the second material (40) enough to stop the spread of the discharge. In a preferred embodiment the anode is as described above and the cathode is also a two-material electrode with the first material at the discharge region being C26000 brass and the second material being C36000 brass. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
摘要翻译：本发明提供了一种气体放电激光器，其具有至少一个长寿命的细长电极，用于在含氟激光气体中产生至少120亿个高压放电。在优选实施方案中，至少一个电极由具有相对低的阳极侵蚀速率的第一材料和具有相对较高的阳极侵蚀速率的第二阳极材料构成。第一阳极材料（42）位于电极的期望的阳极放电区域。第二阳极材料（40）沿着第一材料（42）的至少两个长边位于第一阳极材料（42）附近。在两种材料的激光冲蚀操作过程中，第二材料（40）的侵蚀速率都较高，确保放电扩散到第二材料（40）上的任何趋势都将迅速地将第二材料（40）剥离成足够的停止放电的传播。在优选实施例中，阳极如上所述，阴极也是双材料电极，其中第一材料在放电区域为C26000黄铜，第二材料为C36000黄铜。脉冲功率系统以至少1KHz的速率提供电脉冲。鼓风机以至少5m / s的速度在电极之间循环激光气体，并且提供热交换器以去除由鼓风机和排出物产生的热量。

4. 发明申请

WO2005013441A3 CATHODES FOR FLUORINE GAS DISCHARGE LASERS 审中-公开
标题翻译：氟气排放激光灯
公开(公告)号：WO2005013441A3
公开(公告)日：2005-10-20
申请号：PCT/US2004023663
申请日：2004-07-21
申请人： CYMER INC , STEIGER THOMAS D , BROWN JOSHUA C , DUFFEY THOMAS P , GILLESPIE WALTER D , MORTON RICHARD G , DYER TIMOTHY S
发明人： STEIGER THOMAS D , BROWN JOSHUA C , DUFFEY THOMAS P , GILLESPIE WALTER D , MORTON RICHARD G , DYER TIMOTHY S
IPC分类号： H01R43/00 , H01S20060101 , H01S3/00 , H01S3/036 , H01S3/038 , H01S3/097 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/038 , H01S3/036 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0388 , H01S3/097 , H01S3/09702 , H01S3/0971 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258
摘要： A fluorine gas discharge laser electrode (70) for a gas discharge laser having a laser gas containing fluorine is disclosed which may comprise a copper and copper alloy cathode body having an upper curved region containing the discharge footprint (74) for the cathode comprising copper and a lower portion comprising a copper alloy.
摘要翻译：公开了一种用于具有含氟激光气体的气体放电激光器的氟气放电激光电极（70），该氟气气体放电激光电极（70）包括铜和铜合金阴极体，该铜和铜合金阴极体具有上部弯曲区域，该上部弯曲区域包含用于阴极的放电足迹（74）包括铜合金的下部。

5. 发明申请

WO0019568A8 LINE NARROWING APPARATUS WITH HIGH TRANSPARENCY PRISM BEAM EXPANDER 审中-公开
标题翻译：具有高透明度光束扩展器的线性纳米装置
公开(公告)号：WO0019568A8
公开(公告)日：2000-09-14
申请号：PCT/US9921324
申请日：1999-09-13
申请人： CYMER INC , DAS PALASH P , ERSHOV ALEXANDER I , MORTON RICHARD G
发明人： DAS PALASH P , ERSHOV ALEXANDER I , MORTON RICHARD G
IPC分类号： G03F7/20 , H01S3/03 , H01S3/08 , H01S3/1055 , H01S3/137 , H01S3/225
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70558 , G03F7/70575 , H01S3/03 , H01S3/08009 , H01S3/1055 , H01S3/225
摘要： A grating based line-narrowing apparatus having a prism beam expander with at least four prisms (26, 28, 30, 32). Each prism is positioned at an incidence angle between 67 and 71 degrees. A single layer coating of high refractive index, robust material, such as A1/2O/3, is applied to the hypotenuse face of each prism, providing an efficient, antireflection coating. In a preferred embodiment the incident angle of the four prisms (26, 28, 30, 32) are each at about 68.2 degrees. The laser (21) of the preferred embodiment has similar line narrowing efficiency and bandwith as that for a laser (21) with a 3 prism, ideal multi-layer anti-reflection coated beam expander. The primary benefit of the new four prism (26, 28, 30, 32) arrangement is that the prism coatings should be much less expensive and have greatly increased durability. Applicants have tested the new prisms for 30 million, 10mJ pulses in air with no noticeable degradation. No present day dielectic multi-layer stack coating could survive such exposure.
摘要翻译：一种基于光栅的线条变窄装置，具有具有至少四个棱镜（26,28,30,32）的棱镜扩束器。每个棱镜定位在67和71度之间的入射角。高折射率的单层涂层，诸如A1 / 2O / 3的坚固材料被施加到每个棱镜的斜边面，从而提供有效的抗反射涂层。在优选实施例中，四个棱镜（26,28,30,32）的入射角分别为约68.2度。优选实施例的激光器（21）具有与具有3棱镜，理想的多层抗反射涂覆光束扩展器的激光器（21）相似的线窄化效率和带宽。新的四棱镜（26,28,30,32）布置的主要优点是棱镜涂层应该便宜得多，并且耐久性大大提高。申请人已经在空气中测试了新的棱镜3000万，10mJ脉冲，没有明显的退化。没有现在的介电多层叠层涂层可以经受这样的曝光。

6. 发明申请

WO03096497A8 HIGH POWER DEEP ULTRAVIOLET LASER WITH LONG LIFE OPTICS 审中-公开
标题翻译：高功率深紫外线激光与长寿命光学
公开(公告)号：WO03096497A8
公开(公告)日：2004-12-29
申请号：PCT/US0312819
申请日：2003-04-23
申请人： CYMER INC , YAGER THOMAS A , PARTLO WILLIAM N , SANDSTROM RICHARD L , PAN XIAOJIANG , MELCHIOR JOHN T , ALGOTS JOHN M , BALL MATTHEW , ERSHOV ALEXANDER I , FLEUROV VLADIMIR , GILLESPIE WALTER D , GLATZEL HOLGER K , LUBLIN LEONARD , MARSH ELIZABETH , MORTON RICHARD G , UJAZDOWKI RICHARD C , WARKENTIN DAVID J , WEBB R KYLE
发明人： YAGER THOMAS A , PARTLO WILLIAM N , SANDSTROM RICHARD L , PAN XIAOJIANG , MELCHIOR JOHN T , ALGOTS JOHN M , BALL MATTHEW , ERSHOV ALEXANDER I , FLEUROV VLADIMIR , GILLESPIE WALTER D , GLATZEL HOLGER K , LUBLIN LEONARD , MARSH ELIZABETH , MORTON RICHARD G , UJAZDOWKI RICHARD C , WARKENTIN DAVID J , WEBB R KYLE
IPC分类号： H01S3/034 , G03F7/20 , H01S3/00 , H01S3/225 , H01S3/22
CPC分类号： G03F7/7055 , H01S3/005 , H01S3/225
摘要： The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems (Fig. 1B) producing a high repetition rate high power output beam (38). The invention includes solutions to a surface damage problem discovered by Applicants on CaF2 optics (4260) (422)(424)(426) located in high pulse intensity sections (10)(26) of the output beam (14C) of prototype laser systems. Embodiments include an enclosed (4) and purged beam path (14C) with beam pointing control (40A) (40B)(6) for beam delivery of billions of output laser pulses (38). Optical components and modules described herein are capable of controlling ultraviolet laser output pulses (14A) with wavelength less than 200nm with average output pulse intensities greater than 1.75x10 Watts/cm and with peak intensity or greater 3.5x10 Watts/cm for many billions of pulses (14A) as compared to prior art components and modules which failed after only a few minutes in these pulse intensities.
摘要翻译：本发明提供了用于产生高重复率高功率输出光束（38）的模块化高重复率紫外线气体放电激光系统（图1B）的长寿命光学器件。本发明包括由原始激光系统的输出光束（14C）的高脉冲强度部分（10）（26）中的CaF2光学器件（4260）（422）（424）（426）发现的由申请人发现的表面损伤问题的解决方案。实施例包括具有用于束输送数十亿个输出激光脉冲（38）的光束指向控制（40A）（40B）（6））的封闭（4）和净化光束路径（14C）。本文所述的光学部件和模块能够控制波长小于200nm的紫外激光输出脉冲（14A），平均输出脉冲强度大于1.75×10 6瓦/ cm 2，峰值强度或更大的3.5×10 6 与现有技术的元件和模块相比，在这些脉冲强度仅在几分钟之后就失败了，数十亿脉冲（14A）的功率>瓦特/平方厘米（2）。

7. 发明申请

WO0245475A3 PROTECTIVE OVERCOAT FOR REPLICATED DIFFRACTION GRATINGS 审中-公开
标题翻译：用于复制衍射光栅的保护膜
公开(公告)号：WO0245475A3
公开(公告)日：2002-10-10
申请号：PCT/US0146667
申请日：2001-11-07
申请人： CYMER INC , PAN XIAOJIANG J , MORTON RICHARD G , ERSHOV ALEXANDER I
发明人： PAN XIAOJIANG J , MORTON RICHARD G , ERSHOV ALEXANDER I
IPC分类号： G02B5/26 , C03C17/38 , C23C14/06 , C23C14/16 , C23C14/22 , C23C14/24 , C23C14/58 , G02B1/10 , G02B5/18 , G02B5/28 , G03F7/20 , H01S3/08
CPC分类号： C23C14/225 , C23C14/0694 , C23C14/16 , C23C14/24 , G02B1/105 , G02B1/14 , G02B5/1847 , G02B5/1852 , G03F7/70025 , G03F7/70041 , G03F7/70483 , G03F7/70558 , G03F7/70575
摘要： An overcoat protected diffraction grating. A replica grating having a thin aluminum reflective grating surface is produced by replication of a master grating or a submaster grating. The thin aluminum reflective surface may be cracked or have relatively thick grain boundaries containing oxides and hydroxides of aluminum and typically is also naturally coated with an aluminum oxide film. The grating is subsequently overcoated in a vacuum chamber with one or two thin, pure, dense aluminum overcoat layers and then also in the vacuum the aluminum overcoat layer or layers are coated with one or more thin protective layers of a material transparent to ultraviolet radiation. In preferred embodiments this protective layer is a single layer of MgF2, S1O2 or Al2O3. In other preferred embodiments the layer is a layer of MgF2 or S1O2 covered with a layer of Al2O3 and in a third preferred embodiment the protective layer is made up of four alternating layers of MgF2 and Al2O3 or four alternating layers of S1O2 and Al2O3. Preferably, the thickness of the transparent protective layers are chosen to produce a phase shift at the proposed operating wavelengths of an integral number of 2 pi .
摘要翻译：外涂保护衍射光栅。具有薄铝反射光栅表面的复制光栅通过主光栅或子光栅的复制产生。薄的铝反射表面可能是破裂的或具有含有氧化物和铝的氢氧化物的相对较厚的晶界，并且通常也被氧化铝膜自然地涂覆。随后，在具有一个或两个薄的，纯的，致密的铝外涂层的真空室中涂覆光栅，然后在真空中涂覆一层或多层对紫外线辐射透明的材料的薄保护层。在优选的实施方案中，该保护层是单层MgF 2，SiO 2或Al 2 O 3。在其它优选实施方案中，该层是被Al 2 O 3层覆盖的MgF 2或SiO 2层，在第三优选实施方案中，保护层由四个交替层的MgF 2和Al 2 O 3或四个交替层的SiO 2和Al 2 O 3构成。优选地，选择透明保护层的厚度以在所提出的整数2 pi的工作波长下产生相移。

8. 发明申请

WO2005104311A3 DUV LIGHT SOURCE OPTICAL ELEMENT IMPROVEMENTS 审中-公开
标题翻译： DUV光源光学元件的改进
公开(公告)号：WO2005104311A3
公开(公告)日：2007-03-22
申请号：PCT/US2005006932
申请日：2005-03-04
申请人： CYMER INC , SANDSTROM RICHARD L , ALGOTS J MARTIN , BROWN JOSHUA C , CYBULSKY RAYMOND F , DUNLOP JOHN , HOWEY JAMES K , MORTON RICHARD G , PAN XIAOJIANG J , PARTLO WILLIAM N , PUTRIS FIRAS F , WATSON TOM A , YAGER THOMAS A
发明人： SANDSTROM RICHARD L , ALGOTS J MARTIN , BROWN JOSHUA C , CYBULSKY RAYMOND F , DUNLOP JOHN , HOWEY JAMES K , MORTON RICHARD G , PAN XIAOJIANG J , PARTLO WILLIAM N , PUTRIS FIRAS F , WATSON TOM A , YAGER THOMAS A
IPC分类号： H01S3/22 , G01B9/02 , G01J1/42 , G01J9/02 , G03F7/20 , H01S3/00 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/08 , H01S3/081 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/10 , H01S3/102 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/11 , H01S3/13 , H01S3/134 , H01S3/139 , H01S3/223 , H01S3/225 , H01S3/23
CPC分类号： H01S3/02 , G01J1/429 , G01J9/02 , G03F7/70025 , G03F7/70575 , G03F7/70933 , H01S3/0057 , H01S3/0071 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0401 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/0812 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： A high power narrow band, high repetition rate laser light source optical improvement apparatus and methods are disclosed with a fast angularly positionable mirror having a mirror mounting frame, a reflective optic with a coefficient different from that of the mounting frame, at least one flexure mount framed in the mounting frame that is flexible having flexure arm attached the flexture to the mounting frame. The apparatus may include a flexure force mechanism having an elongated rod. The force mechanism may prestress the flexure. The mirror maybe a grating which includes a substrate with metallic layer formed on the substrate, and a protective coating made of silica formed on the reflective metallic layer. The grating maybe actively tuned using an electro- or magneto- sensitive element. Oxides of the metal in the reflective layer may be removed by a hydrogen purge system exposed to deep ultraviolet radiation.
摘要翻译：公开了一种高功率窄带，高重复率激光光源光学改进装置和方法，其具有快速可角度定位的反射镜，其具有镜安装框架，具有与安装框架系数不同的系数的反射光学元件，至少一个弯曲安装座框架在柔性的安装框架中，挠性臂将挠性件连接到安装框架。该装置可以包括具有细长杆的挠曲力机构。力机构可以预应力挠曲。镜子可以是包括在基板上形成有金属层的基板的光栅，以及形成在反射金属层上的由二氧化硅形成的保护涂层。光栅可能会使用电磁感应元件或磁敏元件进行主动调谐。可以通过暴露于深紫外线辐射的氢气清除系统来去除反射层中金属的氧化物。

9. 发明申请

WO9837601A3 AERODYNAMIC CHAMBER DESIGN FOR HIGH PULSE REPETITION RATE EXCIMER LASERS 审中-公开
标题翻译：高脉冲重复速率激光器的空气动力室设计
公开(公告)号：WO9837601A3
公开(公告)日：1998-11-19
申请号：PCT/US9802041
申请日：1998-02-04
申请人： CYMER INC , MORTON RICHARD G , FOMENKOV IGOR V , PARTLO WILLIAM N
发明人： MORTON RICHARD G , FOMENKOV IGOR V , PARTLO WILLIAM N
IPC分类号： H01S3/097 , H01S3/036 , H01S3/225 , H01S
CPC分类号： H01S3/036 , H01S3/225
摘要： An excimer laser (100) chamber capable of arc-free operation at repetitive pulse rates of 1 kHz or greater is provided. The chamber balances the electrode design criteria required to produce a well-defined discharge channel with the flow design criteria required to achieve high clearing rates at comparatively high blower efficiency. A ceramic insulator (118) located on either side of the cathode (108)/pre-ionizer (130) assembly enhances the flow of gas through the discharge region by reducing the turbulence in the electrode region. A series of specifically designed flow vanes further enhances the gas flow.

10. 发明申请

WO2004078028A3 FLASHING JEWELRY HEARTBEAT MONITOR WITH MULTIPLE LIGHTS 审中-公开
标题翻译：闪光珠宝耳机监视器与多个灯
公开(公告)号：WO2004078028A3
公开(公告)日：2005-06-09
申请号：PCT/US2004006014
申请日：2004-02-27
申请人： AVICOLA KEN , MORTON RICHARD G , ROSS JOHN R
发明人： AVICOLA KEN , MORTON RICHARD G , ROSS JOHN R
IPC分类号： A61B20060101 , A61B5/02 , A61B5/024 , A61B5/0245
CPC分类号： A61B5/02438 , A61B5/02455
摘要： Jewelry, such as finger rings and earrings, which flash in synchronism with the wearer's heartbeat. A pulsed IR signal is directed into the wearer's tissue and a reflected or transmitted signal is monitored to determine when the wearer's heart beats at which time one or more light emitting sources in the jewelry flashes. The monitored signal is utilized to determine the wearer's heart rate. At least two light emitting sources are provided one of which flashes with each heart beat and the other flashes when the heart rate reaches or exceeds a predetermined range or increases faster than a predetermined rate. Preferred embodiments include three visible LED's (red, green and blue) and a micro-processor which calculates pulse rate and causes the red LED to blink on each pulse, the green LED to blink on each pulse when the wearer's pulse rate is greater a first threshold and the blue LED to blink on each pulse when the wearer's pulse rate is greater than a second threshold corresponding to extreme excitement. These threshold values may correspond to increased heart rates of typical persons engaged in exercise and love-making. The monitor may also be self calibrating to adjust the thresholds based on measurements of the wearer's heart rate over extended periods which would include periods of rest as well as periods of exertion or excitement. Other preferred embodiments vary the brightness of the LED's depending on the estimated blood pressure that also increases by about the same degree as pulse rate.
摘要翻译：珠宝，如指环和耳环，与佩戴者的心跳同步闪烁。脉冲IR信号被引导到佩戴者的组织中，并且监测反射或传输的信号，以确定佩戴者的心跳何时在珠宝首饰中的一个或多个发光源闪烁。所监测的信号用于确定佩戴者的心率。提供至少两个发光源，其中一个发光源与每个心跳一起闪烁，另一个在心率达到或超过预定范围时闪烁，或者比预定速率快速增加。优选实施例包括三个可见LED（红色，绿色和蓝色）和微处理器，其计算脉率并使红色LED在每个脉冲上闪烁，当佩戴者的脉率更高时，绿色LED在每个脉冲上闪烁当佩戴者的脉搏率大于对应于极度兴奋的第二阈值时，每个脉冲上的蓝色LED闪烁。这些阈值可能对应于从事锻炼和爱抚的典型人群的心率增加。监视器还可以是自校准的，以根据对长时间佩戴者心率的测量来调整阈值，这包括休息时间以及运动时间或兴奋时间。其它优选实施例根据估计的血压来改变LED的亮度，所述估计血压也增加大约与脉率相同的程度。

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