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1. 发明申请

WO2005104311A3 DUV LIGHT SOURCE OPTICAL ELEMENT IMPROVEMENTS 审中-公开
标题翻译： DUV光源光学元件的改进
公开(公告)号：WO2005104311A3
公开(公告)日：2007-03-22
申请号：PCT/US2005006932
申请日：2005-03-04
申请人： CYMER INC , SANDSTROM RICHARD L , ALGOTS J MARTIN , BROWN JOSHUA C , CYBULSKY RAYMOND F , DUNLOP JOHN , HOWEY JAMES K , MORTON RICHARD G , PAN XIAOJIANG J , PARTLO WILLIAM N , PUTRIS FIRAS F , WATSON TOM A , YAGER THOMAS A
发明人： SANDSTROM RICHARD L , ALGOTS J MARTIN , BROWN JOSHUA C , CYBULSKY RAYMOND F , DUNLOP JOHN , HOWEY JAMES K , MORTON RICHARD G , PAN XIAOJIANG J , PARTLO WILLIAM N , PUTRIS FIRAS F , WATSON TOM A , YAGER THOMAS A
IPC分类号： H01S3/22 , G01B9/02 , G01J1/42 , G01J9/02 , G03F7/20 , H01S3/00 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/08 , H01S3/081 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/10 , H01S3/102 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/11 , H01S3/13 , H01S3/134 , H01S3/139 , H01S3/223 , H01S3/225 , H01S3/23
CPC分类号： H01S3/02 , G01J1/429 , G01J9/02 , G03F7/70025 , G03F7/70575 , G03F7/70933 , H01S3/0057 , H01S3/0071 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0401 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/0812 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： A high power narrow band, high repetition rate laser light source optical improvement apparatus and methods are disclosed with a fast angularly positionable mirror having a mirror mounting frame, a reflective optic with a coefficient different from that of the mounting frame, at least one flexure mount framed in the mounting frame that is flexible having flexure arm attached the flexture to the mounting frame. The apparatus may include a flexure force mechanism having an elongated rod. The force mechanism may prestress the flexure. The mirror maybe a grating which includes a substrate with metallic layer formed on the substrate, and a protective coating made of silica formed on the reflective metallic layer. The grating maybe actively tuned using an electro- or magneto- sensitive element. Oxides of the metal in the reflective layer may be removed by a hydrogen purge system exposed to deep ultraviolet radiation.
摘要翻译：公开了一种高功率窄带，高重复率激光光源光学改进装置和方法，其具有快速可角度定位的反射镜，其具有镜安装框架，具有与安装框架系数不同的系数的反射光学元件，至少一个弯曲安装座框架在柔性的安装框架中，挠性臂将挠性件连接到安装框架。该装置可以包括具有细长杆的挠曲力机构。力机构可以预应力挠曲。镜子可以是包括在基板上形成有金属层的基板的光栅，以及形成在反射金属层上的由二氧化硅形成的保护涂层。光栅可能会使用电磁感应元件或磁敏元件进行主动调谐。可以通过暴露于深紫外线辐射的氢气清除系统来去除反射层中金属的氧化物。

2. 发明申请

WO2005013441A3 CATHODES FOR FLUORINE GAS DISCHARGE LASERS 审中-公开
标题翻译：氟气排放激光灯
公开(公告)号：WO2005013441A3
公开(公告)日：2005-10-20
申请号：PCT/US2004023663
申请日：2004-07-21
申请人： CYMER INC , STEIGER THOMAS D , BROWN JOSHUA C , DUFFEY THOMAS P , GILLESPIE WALTER D , MORTON RICHARD G , DYER TIMOTHY S
发明人： STEIGER THOMAS D , BROWN JOSHUA C , DUFFEY THOMAS P , GILLESPIE WALTER D , MORTON RICHARD G , DYER TIMOTHY S
IPC分类号： H01R43/00 , H01S20060101 , H01S3/00 , H01S3/036 , H01S3/038 , H01S3/097 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/038 , H01S3/036 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0388 , H01S3/097 , H01S3/09702 , H01S3/0971 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258
摘要： A fluorine gas discharge laser electrode (70) for a gas discharge laser having a laser gas containing fluorine is disclosed which may comprise a copper and copper alloy cathode body having an upper curved region containing the discharge footprint (74) for the cathode comprising copper and a lower portion comprising a copper alloy.
摘要翻译：公开了一种用于具有含氟激光气体的气体放电激光器的氟气放电激光电极（70），该氟气气体放电激光电极（70）包括铜和铜合金阴极体，该铜和铜合金阴极体具有上部弯曲区域，该上部弯曲区域包含用于阴极的放电足迹（74）包括铜合金的下部。

3. 发明申请

WO2005013441A2 CATHODES FOR FLUORINE GAS DISCHARGE LASERS 审中-公开
标题翻译：氟气排放激光灯
公开(公告)号：WO2005013441A2
公开(公告)日：2005-02-10
申请号：PCT/US2004/023663
申请日：2004-07-21
申请人： CYMER, INC. , STEIGER, Thomas, D. , BROWN, Joshua, C. , DUFFEY, Thomas, P. , GILLESPIE, Walter, D. , MORTON, Richard, G. , DYER, Timothy, S.
发明人： STEIGER, Thomas, D. , BROWN, Joshua, C. , DUFFEY, Thomas, P. , GILLESPIE, Walter, D. , MORTON, Richard, G. , DYER, Timothy, S.
IPC分类号： H01S
CPC分类号： H01S3/038 , H01S3/036 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0388 , H01S3/097 , H01S3/09702 , H01S3/0971 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258
摘要： A fluorine gas discharge laser electrode for a gas discharge laser having a laser gas containing fluorine is disclosed which may comprise a copper and copper alloy cathode body having an upper curved region containing the discharge footprint for the cathode comprising copper and a lower portion comprising a copper alloy, with the facing portion of the electrode if formed in a arcuate shape extending into straight line portions on either side of the arcuate portion, the straight line portions terminating in vertical straight sides, with the boundary between the copper including at least the arcuate portion, the electrode may comprise a bonded element machined from two pieces of material the first made of copper and the second made of a copper alloy bonded together before machining. The electrode may also comprise a first and a second elongated lopsided Vshaped groove formed along substantially all of the elongated electrode body forming a discharge receiving ridge between the first and second lopsided V-shaped grooves, with a differentially faster eroding material filling the first and second lopsided V-shaped grooves. also disclosed is an electrode system in which the one electrode, e.g., the cathode bows during operation and may comprise at least one of a first and second elongated gas discharge electrode being machined to form a crown to receive the gas discharge that compensates for the bowing of at least one of the gas discharge electrodes during operation of the fluorine gas discharge laser.
摘要翻译：公开了一种用于具有含氟激光气体的气体放电激光器的氟气放电激光电极，其可包括铜和铜合金阴极体，该铜和铜合金阴极体具有包含用于包含铜的阴极的放电足迹的上部弯曲区域，以及包含铜合金，如果电极的对置部分形成为延伸到弓形部分两侧的直线部分的弓形形状，则直线部分终止于垂直的直边，铜线之间的边界至少包括弧形部分电极可以包括由铜制成的两片材料和由加工前结合在一起的铜合金制成的第二个材料加工的接合元件。电极还可以包括沿着基本上所有的细长电极体形成的第一和第二细长的V形凹槽，其在第一和第二偏斜V形槽之间形成放电接收脊，其中填充有第一和第二偏斜的V形槽。还公开了一种电极系统，其中一个电极例如阴极在操作期间弯曲并且可以包括被加工成形成冠部的第一和第二细长气体放电电极中的至少一个，以接收补偿弯曲的气体放电的至少一个气体放电电极在氟气放电激光器的操作期间。

4. 发明申请

WO2005104311A2 DUV LIGHT SOURCE OPTICAL ELEMENT IMPROVEMENTS 审中-公开
标题翻译： DUV光源光学元件的改进
公开(公告)号：WO2005104311A2
公开(公告)日：2005-11-03
申请号：PCT/US2005/006932
申请日：2005-03-04
申请人： CYMER, INC. , SANDSTROM, Richard L. , ALGOTS, J. Martin , BROWN, Joshua C. , CYBULSKY, Raymond F. , DUNLOP, John , HOWEY, James K. , MORTON, Richard G. , PAN, Xiaojiang J. , PARTLO, William N. , PUTRIS, Firas F. , WATSON, Tom A. , YAGER, Thomas A.
发明人： SANDSTROM, Richard L. , ALGOTS, J. Martin , BROWN, Joshua C. , CYBULSKY, Raymond F. , DUNLOP, John , HOWEY, James K. , MORTON, Richard G. , PAN, Xiaojiang J. , PARTLO, William N. , PUTRIS, Firas F. , WATSON, Tom A. , YAGER, Thomas A.
IPC分类号： H01S3/22
CPC分类号： H01S3/02 , G01J1/429 , G01J9/02 , G03F7/70025 , G03F7/70575 , G03F7/70933 , H01S3/0057 , H01S3/0071 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0401 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/0812 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： A high power narrow band, high repetition rate laser light source optical improvement apparatus and methods are disclosed which may comprise a fast moving angularly positionable tuning mirror comprising: a mirror mounting frame comprising a first material and a relatively flat mounting surface area; a reflective optic comprising a second material having a coefficient of thermal expansion different from that of the first material of the mounting frame; at least two attachment points of attachment between the mounting frame and the reflective optic on the mounting frame surface; and, at least one flexure mount formed in the mounting frame that is flexible in a flexure axis corresponding to a longitudinal axis of thermal expansion of the mounting frame and the reflective optic, positioned at one of the at least two points of attachment. The flexure mount may comprise: a flexure body formed from the material of the mirror mounting frame and separated from the material of the mirror mounting frame to allow relative movement between the flexure and the mirror mounting frame; at least one flexure arm formed from the material of the mirror mounting frame and attached at one end to the mirror mounting frame and at the other end to the flexure. The apparatus and method may further comprise a flexure force mechanism made of the second material or a third material having a coefficient of thermal expansion that is essentially the same as that of the second material; the flexure force mechanism comprising an elongated rod; a flexure force mechanism slot generally aligned with the flexure axis and sized to snuggly fit the flexure force mechanism between a slot wall at one end of the flexure force mechanism slot and the flexure body at the other end of the flexure force mechanism slot. The force mechanism may pre-stress the flexure. The mirror may be a grating. The grating may have a metallic reflective surface and a protective coating over the reflective coating comprising a dense glassy material that is essentially non-porous to undesired contaminants exposure of which to the reflective coating is desired to be prevented, which may comprise an amorphous silica, a doped amorphous silica, which may be halide doped and the halide may be fluorine. The grating may be actively tuned using an electro- or magneto-sensitive element. Oxides of the metal in the reflective layer may be removed by a hydrogen purge.
摘要翻译：公开了一种高功率窄带，高重复率激光光源光学改进装置和方法，其可以包括快速移动的可角度定位的调谐镜，其包括：反射镜安装框架，其包括第一材料和相对平坦的安装表面区域; 反射光学元件，包括具有不同于所述安装框架的第一材料的热膨胀系数的第二材料; 在安装框架和安装框架表面上的反射光学器件之间的至少两个连接附接点; 以及形成在所述安装框架中的至少一个弯曲安装座，所述至少一个弯曲安装件在弯曲轴线上柔性，所述弯曲轴线对应于所述安装框架和所述反射式光学器件的热膨胀的纵向轴线，所述热膨胀轴线位于所述至少两个连接点中的一个上。挠曲安装件可以包括：由反射镜安装框架的材料形成并且与镜面安装框架的材料分离的弯曲体，以允许挠曲件和反射镜安装框架之间的相对移动; 至少一个弯曲臂由反射镜安装框架的材料形成并且在一端附接到反射镜安装框架，另一端连接到弯曲部。该装置和方法还可以包括由第二材料制成的挠曲力机构或具有与第二材料基本上相同的热膨胀系数的第三材料; 所述挠曲力机构包括细长杆; 弯曲力机构槽通常与弯曲轴线对准并且尺寸设计成使挠曲力机构紧贴在弯曲力机构槽的一端处的狭槽壁和弯曲力机构槽的另一端处的挠曲体之间。力机构可以预应力挠曲。镜子可能是光栅。光栅可以具有金属反射表面并且在反射涂层上方具有保护涂层，该保护涂层包含致密的玻璃质材料，其基本上是无孔的，以期望防止对反射涂层的不期望的污染物暴露，其可以包含无定形二氧化硅，掺杂的无定形二氧化硅，其可以是卤化物掺杂的，并且卤化物可以是氟。可以使用电磁感应元件或磁敏元件来主动调谐光栅。反射层中金属的氧化物可以通过氢气清除来除去。

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