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1. 发明申请

WO2019084473A1 NOISE ESTIMATION USING COHERENCE 审中-公开
公开(公告)号：WO2019084473A1
公开(公告)日：2019-05-02
申请号：PCT/US2018/057818
申请日：2018-10-26
申请人： BOSE CORPORATION , WARKENTIN, David J.
发明人： WARKENTIN, David J. , CHEUNG, Shiufun , SONG, Zukui
IPC分类号： G10L21/034 , H03G3/32 , H03G9/00 , G03G9/00
摘要： The technology described herein can be embodied in a method for estimating a power spectral density of noise, the method including receiving an input signal representing audio captured using a microphone. The input signal includes a first portion that represents acoustic outputs from two or more audio sources, and a second portion that represents a noise component. The method also includes iteratively modifying a frequency domain representation of the input signal, such that the modified frequency domain representation represents a portion of the input signal in which effects due to the first portion are substantially reduced. The method further includes determining, from the modified frequency domain representation, an estimate of a power spectral density of the noise, and generating a control signal configured to adjust one or more gains of an acoustic transducer. The control signal is generated based on the estimate of the power spectral density of the noise.

2. 发明申请

WO03096497A8 HIGH POWER DEEP ULTRAVIOLET LASER WITH LONG LIFE OPTICS 审中-公开
标题翻译：高功率深紫外线激光与长寿命光学
公开(公告)号：WO03096497A8
公开(公告)日：2004-12-29
申请号：PCT/US0312819
申请日：2003-04-23
申请人： CYMER INC , YAGER THOMAS A , PARTLO WILLIAM N , SANDSTROM RICHARD L , PAN XIAOJIANG , MELCHIOR JOHN T , ALGOTS JOHN M , BALL MATTHEW , ERSHOV ALEXANDER I , FLEUROV VLADIMIR , GILLESPIE WALTER D , GLATZEL HOLGER K , LUBLIN LEONARD , MARSH ELIZABETH , MORTON RICHARD G , UJAZDOWKI RICHARD C , WARKENTIN DAVID J , WEBB R KYLE
发明人： YAGER THOMAS A , PARTLO WILLIAM N , SANDSTROM RICHARD L , PAN XIAOJIANG , MELCHIOR JOHN T , ALGOTS JOHN M , BALL MATTHEW , ERSHOV ALEXANDER I , FLEUROV VLADIMIR , GILLESPIE WALTER D , GLATZEL HOLGER K , LUBLIN LEONARD , MARSH ELIZABETH , MORTON RICHARD G , UJAZDOWKI RICHARD C , WARKENTIN DAVID J , WEBB R KYLE
IPC分类号： H01S3/034 , G03F7/20 , H01S3/00 , H01S3/225 , H01S3/22
CPC分类号： G03F7/7055 , H01S3/005 , H01S3/225
摘要： The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems (Fig. 1B) producing a high repetition rate high power output beam (38). The invention includes solutions to a surface damage problem discovered by Applicants on CaF2 optics (4260) (422)(424)(426) located in high pulse intensity sections (10)(26) of the output beam (14C) of prototype laser systems. Embodiments include an enclosed (4) and purged beam path (14C) with beam pointing control (40A) (40B)(6) for beam delivery of billions of output laser pulses (38). Optical components and modules described herein are capable of controlling ultraviolet laser output pulses (14A) with wavelength less than 200nm with average output pulse intensities greater than 1.75x10 Watts/cm and with peak intensity or greater 3.5x10 Watts/cm for many billions of pulses (14A) as compared to prior art components and modules which failed after only a few minutes in these pulse intensities.
摘要翻译：本发明提供了用于产生高重复率高功率输出光束（38）的模块化高重复率紫外线气体放电激光系统（图1B）的长寿命光学器件。本发明包括由原始激光系统的输出光束（14C）的高脉冲强度部分（10）（26）中的CaF2光学器件（4260）（422）（424）（426）发现的由申请人发现的表面损伤问题的解决方案。实施例包括具有用于束输送数十亿个输出激光脉冲（38）的光束指向控制（40A）（40B）（6））的封闭（4）和净化光束路径（14C）。本文所述的光学部件和模块能够控制波长小于200nm的紫外激光输出脉冲（14A），平均输出脉冲强度大于1.75×10 6瓦/ cm 2，峰值强度或更大的3.5×10 6 与现有技术的元件和模块相比，在这些脉冲强度仅在几分钟之后就失败了，数十亿脉冲（14A）的功率>瓦特/平方厘米（2）。

3. 发明申请

WO2003069733A1 VIBRATION CONTROL UTILIZING SIGNAL DETRENDING 审中-公开
标题翻译：振动控制利用信号限制
公开(公告)号：WO2003069733A1
公开(公告)日：2003-08-21
申请号：PCT/US2003/001332
申请日：2003-01-15
申请人： CYMER, INC. , JACQUES, Robert, N. , WARKENTIN, David, J.
发明人： JACQUES, Robert, N. , WARKENTIN, David, J.
IPC分类号： H01R3/00
CPC分类号： G03F7/709 , F16F15/005 , F16F15/02 , F16F15/0275 , F16F2230/08 , G03F7/70725 , G03F7/70833 , G05D19/02 , Y10T29/5313 , Y10T29/53174
摘要： A vibration reducing system includes a position control dive (65) and a vibration control drive (45). At least one position sensor (60) is used to provide feedback signals which are in turn unses to provide control signals fore both the position control drive (65) and the vibration control drive (45).
摘要翻译：减振系统包括位置控制潜水（65）和振动控制驱动装置（45）。至少一个位置传感器（60）用于提供反馈信号，反馈信号又不提供位置控制驱动器（65）和振动控制驱动器（45）两者之前的控制信号。

4. 发明申请

WO2003096497A1 HIGH POWER DEEP ULTRAVIOLET LASER WITH LONG LIFE OPTICS 审中-公开
标题翻译：高功率深紫外线激光与长寿命光学
公开(公告)号：WO2003096497A1
公开(公告)日：2003-11-20
申请号：PCT/US2003/012819
申请日：2003-04-23
申请人： CYMER, INC. , YAGER, Thomas, A. , PARTLO, William, N. , SANDSTROM, Richard, L. , PAN, Xiaojiang , MELCHIOR, John, T. , ALGOTS, John, M. , BALL, Matthew , ERSHOV, Alexander, I. , FLEUROV, Vladimir , GILLESPIE, Walter, D. , GLATZEL, Holger, K. , LUBLIN, Leonard , MARSH, Elizabeth , MORTON, Richard, D. , UJAZDOWKI, Richard, C. , WARKENTIN, David, J. , WEBB, R., Kyle
发明人： YAGER, Thomas, A. , PARTLO, William, N. , SANDSTROM, Richard, L. , PAN, Xiaojiang , MELCHIOR, John, T. , ALGOTS, John, M. , BALL, Matthew , ERSHOV, Alexander, I. , FLEUROV, Vladimir , GILLESPIE, Walter, D. , GLATZEL, Holger, K. , LUBLIN, Leonard , MARSH, Elizabeth , MORTON, Richard, D. , UJAZDOWKI, Richard, C. , WARKENTIN, David, J. , WEBB, R., Kyle
IPC分类号： H01S3/22
CPC分类号： G03F7/7055 , H01S3/005 , H01S3/225
摘要： The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems (Fig. 1B) producing a high repetition rate high power output beam (38). The invention includes solutions to a surface damage problem discovered by Applicants on CaF 2 optics (4260) (422)(424)(426) located in high pulse intensity sections (10)(26) of the output beam (14C) of prototype laser systems. Embodiments include an enclosed (4) and purged beam path (14C) with beam pointing control (40A) (40B)(6) for beam delivery of billions of output laser pulses (38). Optical components and modules described herein are capable of controlling ultraviolet laser output pulses (14A) with wavelength less than 200nm with average output pulse intensities greater than 1.75×10 6 Watts/cm 2 and with peak intensity or greater 3.5×10 6 Watts/cm 2 for many billions of pulses (14A) as compared to prior art components and modules which failed after only a few minutes in these pulse intensities.
摘要翻译：本发明提供了用于产生高重复率高功率输出光束（38）的模块化高重复率紫外线气体放电激光系统（图1B）的长寿命光学器件。本发明包括由原始激光系统的输出光束（14C）的高脉冲强度部分（10）（26）中的CaF2光学器件（4260）（422）（424）（426）发现的由申请人发现的表面损伤问题的解决方案。实施例包括具有用于束输送数十亿个输出激光脉冲（38）的光束指向控制（40A）（40B）（6））的封闭（4）和净化光束路径（14C）。本文所述的光学部件和模块能够控制波长小于200nm的紫外激光输出脉冲（14A），平均输出脉冲强度大于1.75×10 6瓦/ cm 2，峰值强度或更大的3.5×10 6 与现有技术的元件和模块相比，在这些脉冲强度仅在几分钟之后就失败了，数十亿脉冲（14A）的功率>瓦特/平方厘米（2）。

5. 发明申请

WO2002088687A1 BASE STABILIZATION SYSTEM 审中-公开
标题翻译：基础稳定系统
公开(公告)号：WO2002088687A1
公开(公告)日：2002-11-07
申请号：PCT/US2002/006249
申请日：2002-03-01
申请人： CYMER, INC. , LUBLIN, Leonard , WARKENTIN, David, J. , PLETNER, Baruch , RULE, John, A.
发明人： LUBLIN, Leonard , WARKENTIN, David, J. , PLETNER, Baruch , RULE, John, A.
IPC分类号： G01N21/86
CPC分类号： F16F15/02 , F16F15/005 , F16F15/0275 , F16F2230/08 , G03F7/70725 , G03F7/70825 , G03F7/70833 , G03F7/709
摘要： A system that provides a base stabilization system for controlling motion of a controlled structure. The system includes a ground structure such as the floor of a fabrication facility and the controlled structure includes a base (405) on which equipment is mounted. The system also includes at least three air mounts (480) and a plurality of actuators (430) all attached to the ground structure and to the base to isolate the base from the ground structure and to stabilize the base. The system includes a plurality of position and acceleration sensors (420) each of which are co-located with a corresponding actuator. The system also includes a multi-input, multi output feedback control system comprising a computer processor programmed with a feedback control algorithm for controlling each of the actuators based on feedback signals from each of the sensors. The co-location of the sensors with the actuators avoids serious problems resulting from higher order vibration modes.
摘要翻译：提供用于控制受控结构的运动的基本稳定系统的系统。该系统包括诸如制造设备的底板的接地结构，并且受控结构包括其上安装有设备的基座（405）。该系统还包括至少三个空气安装件（480）和多个致动器（430），所述致动器全部附接到地面结构和基座，以将基座与地面结构隔离并稳定底座。该系统包括多个位置和加速度传感器（420），每个位置和加速度传感器与对应的致动器共同定位。该系统还包括多输入多输出反馈控制系统，其包括用基于来自每个传感器的反馈信号控制每个致动器的反馈控制算法编程的计算机处理器。传感器与执行器的共同位置避免了由较高阶振动模式引起的严重问题。

6. 发明申请

WO2014004119A1 ACTIVE WHEEL DAMPING 审中-公开
标题翻译：主动轮阻尼
公开(公告)号：WO2014004119A1
公开(公告)日：2014-01-03
申请号：PCT/US2013/045826
申请日：2013-06-14
申请人： BOSE CORPORATION , BOSE, Amar G. , BENDER, Paul , GIOVANARDI, Marco , KNOX, Lawrence, D. , LACKRITZ, Neal, M. , SHORT, William R. , TORRES, Wade, P. , UMMETHALA, Upendra, V. , WARKENTIN, David, J.
发明人： BOSE, Amar G. , BENDER, Paul , GIOVANARDI, Marco , KNOX, Lawrence, D. , LACKRITZ, Neal, M. , SHORT, William R. , TORRES, Wade, P. , UMMETHALA, Upendra, V. , WARKENTIN, David, J.
IPC分类号： B60G17/0165
CPC分类号： B60G17/0165 , B60G2400/821 , B60G2400/91 , B60G2600/182 , B60G2800/162
摘要： An active wheel damper. An active suspension damps vertical displacement of an unsprung mass in a frequency range and reduces vertical displacement of a sprung mass in another frequency range.
摘要翻译：主动轮阻尼器。一个主动悬架可以抑制簧下质量在频率范围内的垂直位移，并减少弹簧质量在另一个频率范围内的垂直位移。

7. 发明申请

WO2014004118A1 ANTI-CAUSAL VEHICLE SUSPENSION 审中-公开
标题翻译：抗原车辆悬挂
公开(公告)号：WO2014004118A1
公开(公告)日：2014-01-03
申请号：PCT/US2013/045825
申请日：2013-06-14
申请人： BOSE CORPORATION , GIOVANARDI, Marco , WARKENTIN, David J.
发明人： GIOVANARDI, Marco , WARKENTIN, David J.
IPC分类号： B60G17/0165
CPC分类号： B60G17/0165 , B60G2400/821 , B60G2600/182 , B60G2800/164
摘要： A vehicle suspension and wheel damper using anti-causal filtering. Information from in front of a wheel or information about an operating condition of a vehicle is used to anti-causally determine a response of an active suspension associated with the wheel.
摘要翻译：一种使用反因果过滤的车辆悬架和车轮阻尼器。使用来自车轮前方的信息或关于车辆的操作状况的信息来反向地确定与车轮相关联的主动悬架的响应。

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