专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO03023910A3 HIGH REP-RATE LASER WITH IMPROVED ELECTRODES 审中-公开
标题翻译：具有改进电极的高倍率激光
公开(公告)号：WO03023910A3
公开(公告)日：2003-05-30
申请号：PCT/US0228463
申请日：2002-09-06
申请人： CYMER INC , MORTON RICHARD G , DYER TIMOTHY S , STEIGER THOMAS D , UJAZDOWSKI RICHARD C , WATSON TOM A , MOOSMAN BRYAN , IVASCHENKO ALEX P , GILLESPIE WALTER D , RETTIG CURTIS L
发明人： MORTON RICHARD G , DYER TIMOTHY S , STEIGER THOMAS D , UJAZDOWSKI RICHARD C , WATSON TOM A , MOOSMAN BRYAN , IVASCHENKO ALEX P , GILLESPIE WALTER D , RETTIG CURTIS L
IPC分类号： C22C9/04 , H01S3/036 , H01S3/038 , H01S3/225 , H01S3/22 , H01S3/223
CPC分类号： H01S3/038 , H01S3/036 , H01S3/0381 , H01S3/0388 , H01S3/09702 , H01S3/225
摘要： The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the elctrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material (42) is positioned at a desired anode discharge region of the electrode. The second anode material (40) is located adjacent to the first anode material (42) along at least two long sides of the first material (42). During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material (40) assures that any tendency of the discharge to spread onto the second material (40) will quickly erode away the second material (40) enough to stop the spread of the discharge. In a preferred embodiment the anode is as described above and the cathode is also a two-material electrode with the first material at the discharge region being C26000 brass and the second material being C36000 brass. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
摘要翻译：本发明提供了一种气体放电激光器，其具有至少一个长寿命的细长电极，用于在含氟激光气体中产生至少120亿个高压放电。在优选实施方案中，至少一个电极由具有相对低的阳极侵蚀速率的第一材料和具有相对较高的阳极侵蚀速率的第二阳极材料构成。第一阳极材料（42）位于电极的期望的阳极放电区域。第二阳极材料（40）沿着第一材料（42）的至少两个长边位于第一阳极材料（42）附近。在两种材料的激光冲蚀操作过程中，第二材料（40）的侵蚀速率都较高，确保放电扩散到第二材料（40）上的任何趋势都将迅速地将第二材料（40）剥离成足够的停止放电的传播。在优选实施例中，阳极如上所述，阴极也是双材料电极，其中第一材料在放电区域为C26000黄铜，第二材料为C36000黄铜。脉冲功率系统以至少1KHz的速率提供电脉冲。鼓风机以至少5m / s的速度在电极之间循环激光气体，并且提供热交换器以去除由鼓风机和排出物产生的热量。

2. 发明申请

WO2005013440A2 ELECTRODES FOR FLUORINE GAS DISCHARGE LASERS 审中-公开
标题翻译：氟化物放电激光电极
公开(公告)号：WO2005013440A2
公开(公告)日：2005-02-10
申请号：PCT/US2004022809
申请日：2004-07-16
申请人： CYMER INC , MORTON RICHARD G , MOOSMAN BRYAN , DYER TIMOTHY , CARMICHAEL JAMES A , ZHANG JIPING
发明人： MORTON RICHARD G , MOOSMAN BRYAN , DYER TIMOTHY , CARMICHAEL JAMES A , ZHANG JIPING
IPC分类号： H01S20060101 , H01S3/036 , H01S3/038 , H01S3/097 , H01S3/0971 , H01S3/225 , H01S
CPC分类号： H01S3/0385 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0382 , H01S3/0384 , H01S3/0388 , H01S3/097 , H01S3/09702 , H01S3/0971 , H01S3/225 , H01S3/2251
摘要： Fluorine gas discharge laser electrodes and electrode systems are disclosed that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition disclosed are electrodes that may comprise a first discharge shaping magnet mounted in a first elongated gas discharge electrode and a second discharge shaping magnet mounted in a second elongated gas discharge electrode. This may also comprise at least one of the first and second gas discharge electrodes has imbedded therein a first and a second auxiliary field creating magnet. Also disclosed is an electrode that may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode and a pair of elongated high erosion regions on either side of the crown comprising a second material with a relatively higher erosion rate during gas discharge than that of the first material. Also disclosed are electrodes that may comprise a first insert in the electrode body comprising an electrically conductive material having a different coefficient of thermal conductivity than the electrode body. Also disclosed are electrodes that may have a thin film of semi-conductive material coating at least the discharge footprint of the gas discharge electrode, or at least a portion of the discharge region covered with a pre-formed reef having generally uniform pore size and distribution, and methods of making such coatings or reef. Also disclosed is a method of forming an electrode by diffusion bonding a first piece of a first material to a second piece of a second material utilizing a diffusion bonding catalyst between the first piece of material and the second piece of material during the diffusion bonding step and machining the bonded pieces to form an electrode.
摘要翻译：公开了氟气放电激光电极和电极系统，其可以包括延伸小于第二细长气体放电电极的相应长度的多个电流返回脚。另外公开了可以包括安装在第一细长气体放电电极中的第一放电成形磁体和安装在第二细长气体放电电极中的第二放电成形磁体的电极。这也可以包括第一和第二气体放电电极中的至少一个嵌入其中的第一和第二辅助场产生磁体。还公开了一种电极，其可以包括跨越一对侧壁和一对端壁之间的中心线轴线的冠，包括形成电极的放电区域的至少一部分的第一材料和一对细长的高度在冠的任一侧的侵蚀区域包括在气体放电期间具有比第一材料的侵蚀速率相对较高的第二材料。还公开了可以包括电极体中的第一插入物的电极，其包括具有与电极体不同的导热系数的导电材料。还公开了电极，其可以具有至少涂覆气体放电电极的放电足迹的半导电材料薄膜，或至少一部分用预先形成的具有大致均匀的孔径和分布的预定形式的礁，以及制造这种涂层或珊瑚礁的方法。还公开了一种通过在扩散接合步骤期间利用第一片材料和第二片材料之间的扩散接合催化剂将第一片材料扩散接合到第二片材的第二片材来形成电极的方法，以及加工粘合片以形成电极。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式