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    • 2. 发明申请
    • PITCH DIVISION USING DIRECTED SELF-ASSEMBLY
    • 使用直接自组装的PITCH部门
    • WO2017111822A1
    • 2017-06-29
    • PCT/US2015/000380
    • 2015-12-24
    • INTEL CORPORATION
    • BOJARSKI, Stephanie, A.CHANDHOK, ManishYOUNKIN, Todd, R.HAN, EungnakELINENI, KranthiGAIKWAD, Ashish, N.NYHUS, Paul, A.WALLACE, Charles, H.YOO, Hui, Jae
    • H01L21/027
    • H01L21/31144G03F7/0002H01L21/0337
    • A method including forming a target pattern of a target material on a surface of a substrate; depositing a block copolymer on the surface of the substrate, wherein one of two blocks of the block copolymer preferentially aligns to the target material and the two blocks self assemble after deposition into repeating lamellar bodies on the surface of the substrate; selectively retaining one of the two blocks of the block copolymer over the other as a polymer pattern; and patterning the substrate with the polymer pattern. An apparatus including an integrated circuit substrate including a plurality of contact points and a dielectric layer on the contact points; a target pattern formed in a surface of the dielectric layer; and a self-assembled layer of repeating alternating bodies of a block copolymer, wherein one of two blocks of the block copolymer is preferentially aligned to the target pattern.
    • 一种方法,包括:在基板的表面上形成目标材料的目标图案; 将嵌段共聚物沉积在基材的表面上,其中嵌段共聚物的两个嵌段之一优先与靶材料对齐,并且两个嵌段在沉积到基材表面上的重复的层状体之后自组装; 选择性地将嵌段共聚物的两个嵌段之一作为聚合物图案保留在另一个之上; 并用该聚合物图案图案化该衬底。 一种装置,包括集成电路衬底,所述集成电路衬底包括在所述接触点上的多个接触点和电介质层; 目标图案,形成在介电层的表面中; 和重复嵌段共聚物交替体的自组装层,其中嵌段共聚物的两个嵌段之一优先与目标图案对齐。
    • 5. 发明申请
    • ALLOY MELTING AND HOLDING FURNACE
    • 合金熔炼和保温炉
    • WO2015077527A2
    • 2015-05-28
    • PCT/US2014/066755
    • 2014-11-21
    • ALMEX USA, INC.
    • TILAK, Ravindra V.
    • F27B14/06
    • H05B6/42B22D11/003B22D11/0403B22D11/10B22D11/119B22D11/14B22D25/06C22B9/003C22C21/00C22C21/06C22C21/16F27B14/06F27B14/061F27B14/20F27D7/06H05B6/26H05B6/28H05B6/367Y02P10/253
    • An induction furnace comprising a furnace vessel; an induction coil positioned below the upper furnace vessel; and a melt-containing vessel positioned inside the induction coil and communicably connected to the furnace vessel, wherein the positioning of the melt-containing vessel inside the induction coil defines a gap between an outside surface of the melt-containing vessel and an inside surface of the induction coil. A system for direct-chill casting comprising at least one an induction furnace; at least one in-line filter operable to remove impurities in molten metal; at least one gas source coupled to a feed port associated with the gas; and at least one device for solidifying metal by casting. A method of cooling an induction furnace comprising introducing a gas into a gap between an induction coil and a melt-containing vessel positioned inside the induction coil; and circulating the gas through the gap.
    • 一种感应炉,包括炉容器; 位于上部炉容器下方的感应线圈; 以及位于感应线圈内部并且可连通地连接到炉容器的熔体容纳容器,其中将含熔融容器的位置定位在感应线圈内部,在熔融物容器的外表面和内侧表面之间形成间隙 感应线圈。 一种用于直接冷却铸造的系统,包括至少一个感应炉; 至少一个在线过滤器可操作以去除熔融金属中的杂质; 耦合到与气体相关联的进料口的至少一个气体源; 和用于通过铸造固化金属的至少一个装置。 一种感应炉的冷却方法,包括将气体引入位于感应线圈内部的感应线圈与含熔体容器之间的间隙中; 并使气体循环通过间隙。