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    • 7. 发明申请
    • MICROELECTRONIC BOND PADS HAVING INTEGRATED SPRING STRUCTURES
    • 具有集成弹簧结构的微电子粘结垫
    • WO2017189119A1
    • 2017-11-02
    • PCT/US2017/023114
    • 2017-03-19
    • INTEL CORPORATION
    • EID, FerasSANKMAN, Robert L.SANE, Sandeep B.
    • H01L23/488H01L23/00
    • H01L23/562H01L21/485H01L21/4853H01L23/49811H01L23/49816H01L23/49838H01L2224/16225H01L2924/15311H01L2924/3511
    • A microelectronic package may be fabricated with at least one compliant external bond pad having at least one integrated spring structure for mitigating the effects of warpage of the microelectronic package during attachment to an external substrate. An embodiment for the microelectronic package may include a microelectronic package substrate having a first surface and an opposing second surface, wherein the microelectronic package substrate includes a void defined therein that extends into the microelectronic package substrate from the second surface thereof, and a compliant bond pad suspended over the void, wherein the compliant bond pad includes a land portion and at least one spring portion, and wherein the at least one spring portion extends from the compliant bond pad land portion to an anchor structure on the microelectronic package substrate second surface.
    • 可以制造微电子封装,其具有至少一个柔性外部接合焊盘,该至少一个柔性外部接合焊盘具有至少一个集成弹簧结构,用于减轻附连到外部基板期间微电子封装的翘曲的影响。 用于微电子封装的实施例可以包括具有第一表面和相对的第二表面的微电子封装衬底,其中微电子封装衬底包括限定在其中的空隙,其从第二表面延伸到微电子封装衬底中,并且柔性接合焊盘 其中所述柔性接合垫包括接地部分和至少一个弹簧部分,并且其中所述至少一个弹簧部分从所述柔性接合垫接合区部分延伸到所述微电子封装基板第二表面上的锚定结构。 / p>