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1. 发明申请

WO2010138929A1 MEMS VARACTORS 审中-公开
标题翻译： MEMS变阻器
公开(公告)号：WO2010138929A1
公开(公告)日：2010-12-02
申请号：PCT/US2010/036746
申请日：2010-05-28
申请人： QUALCOMM INCORPORATED , LAN, Je-Hsiung , GOUSEV, Evgeni P. , ZHANG, Wenyue , KOTHARI, Manish , PARK, Sang-June
发明人： LAN, Je-Hsiung , GOUSEV, Evgeni P. , ZHANG, Wenyue , KOTHARI, Manish , PARK, Sang-June
IPC分类号： H01P1/12
CPC分类号： H01G7/00 , H01G5/16 , H01P1/127 , Y10T29/435
摘要： MEMS varactors capable of handling large signals and/or achieving a high capacitance tuning range are described. In an exemplary design, a MEMS varactor includes (i) a first bottom plate electrically coupled to a first terminal receiving an input signal, (ii) a second bottom plate electrically coupled to a second terminal receiving a DC voltage, and (iii) a top plate formed over the first and second bottom plates and electrically coupled to a third terminal. The DC voltage causes the top plate to mechanically move and vary the capacitance observed by the input signal. In another exemplary design, a MEMS varactor includes first, second and third plates formed on over one another and electrically coupled to first, second and third terminals, respectively. First and second DC voltages may be applied to the first and third terminals, respectively. An input signal may be passed between the first and second terminals.
摘要翻译：描述能够处理大信号和/或实现高电容调谐范围的MEMS变容二极管。在示例性设计中，MEMS变容二极管包括（i）电耦合到接收输入信号的第一端子的第一底板，（ii）电耦合到接收DC电压的第二端子的第二底板，以及（iii）顶板形成在第一和第二底板上并电耦合到第三端子。直流电压使顶板机械地移动并改变由输入信号观察到的电容。在另一示例性设计中，MEMS变容二极管包括彼此形成并分别电耦合到第一，第二和第三端子的第一，第二和第三板。第一和第二直流电压可以分别施加到第一和第三端子。输入信号可以在第一和第二端子之间通过。

2. 发明申请

WO2012106720A1 HIGH DENSITY METAL-INSULATOR-METAL TRENCH CAPACITOR WITH CONCAVE SURFACES 审中-公开
标题翻译：高密度金属绝缘体 - 金属电镀电容器
公开(公告)号：WO2012106720A1
公开(公告)日：2012-08-09
申请号：PCT/US2012/023999
申请日：2012-02-06
申请人： QUALCOMM INCORPORATED , LAN, Je-Hsiung , NOWAK, Matthew, Michael , GOUSEV, Evgeni, P. , KIM, Jonghae , CHUI, Clarence
发明人： LAN, Je-Hsiung , NOWAK, Matthew, Michael , GOUSEV, Evgeni, P. , KIM, Jonghae , CHUI, Clarence
IPC分类号： H01L21/02 , H01L29/94 , H01G4/012 , H01L23/522 , H01L23/64
CPC分类号： H01L28/82 , H01G4/012 , H01G4/10 , H01L23/5223 , H01L23/642 , H01L28/87 , H01L29/945 , H01L2224/16225 , H01L2924/15174 , H01L2924/15192 , H01L2924/15311
摘要： Higher capacitance density is achieved by increasing a surface area of a capacitor. A larger surface area may be obtained by forming isotropic ball shapes (a concave surface) in the trenches on the semiconductor die. The concave surfaces are fabricated by depositing bilayers of amorphous-silicon and silicon oxide. Openings are patterned in the silicon oxide hard mask for trenches. The openings are transferred to the amorphous-silicon layers through isotropic etching to form concave surfaces. Conducting, insulating, and conducting layers are deposited on the concave surfaces of the trenches by atomic layer deposition.
摘要翻译：通过增加电容器的表面积来实现更高的电容密度。可以通过在半导体管芯上的沟槽中形成各向同性球形（凹面）来获得更大的表面积。通过沉积非晶硅和氧化硅的双层来制造凹面。在用于沟槽的氧化硅硬掩模中图案化开口。通过各向同性蚀刻将开口转移到非晶硅层以形成凹面。导电，绝缘和导电层通过原子层沉积沉积在沟槽的凹面上。

3. 发明申请

WO2012158889A1 PIEZOELECTRIC RESONATORS WITH CONFIGURATIONS HAVING NO GROUND CONNECTIONS TO ENHANCE ELECTROMECHANICAL COUPLING 审中-公开
标题翻译：具有无接地连接的配置的压电谐振器，以增强机电耦合
公开(公告)号：WO2012158889A1
公开(公告)日：2012-11-22
申请号：PCT/US2012/038308
申请日：2012-05-17
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , YUN, Changhan , PARK, Sang-June , LO, Chi Shun , KIM, Jonghae , LAN, Je-Hsiung , JOO, Sanghoon
发明人： YUN, Changhan , PARK, Sang-June , LO, Chi Shun , KIM, Jonghae , LAN, Je-Hsiung , JOO, Sanghoon
IPC分类号： H03H9/17 , H03H9/02
CPC分类号： H03H9/173 , H03H9/02228
摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, resonator apparatus includes a first conductive layer including a first electrode and a second electrode. The first electrode is coupled to receive a first input signal, and the second electrode is coupled to provide a first output signal. A piezoelectric layer includes a piezoelectric material. The piezoelectric layer has a first side and a second side opposite the first side. The first side is proximate the first conductive layer, and the second side is electrically isolated from ground. In some examples, the second side of the piezoelectric layer can be exposed and/or electrically de-coupled from one or more components.
摘要翻译：本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。在一个方面，谐振器装置包括包括第一电极和第二电极的第一导电层。第一电极被耦合以接收第一输入信号，并且第二电极被耦合以提供第一输出信号。压电层包括压电材料。压电层具有与第一侧相对的第一侧和第二侧。第一侧靠近第一导电层，第二侧与地电隔离。在一些示例中，压电层的第二面可以暴露和/或从一个或多个部件电脱耦合。

4. 发明申请

WO2012148712A1 PIEZOELECTRIC RESONATORS AND FABRICATION PROCESSES 审中-公开
标题翻译：压电谐振器和制造工艺
公开(公告)号：WO2012148712A1
公开(公告)日：2012-11-01
申请号：PCT/US2012/033609
申请日：2012-04-13
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , LAN, Je-Hsiung , PARK, Sang-June , KIM, Jonghae , GOUSEV, Evgeni , NOWAK, Matthew , STEPHANOU, Philip J. , BLACK, Justin , PETERSEN, Kurt , GANAPATHI, Srinivasan
发明人： LAN, Je-Hsiung , PARK, Sang-June , KIM, Jonghae , GOUSEV, Evgeni , NOWAK, Matthew , STEPHANOU, Philip J. , BLACK, Justin , PETERSEN, Kurt , GANAPATHI, Srinivasan
IPC分类号： H03H3/007 , H03H9/24
CPC分类号： H03H3/0072 , H03H9/2447 , Y10T29/42
摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a sacrificial layer is deposited on an insulating substrate. A lower electrode layer is formed proximate the sacrificial layer. A piezoelectric layer is deposited on the lower electrode layer. An upper electrode layer is formed on the piezoelectric layer. At least a portion of the sacrificial layer is removed to define a cavity such that at least a portion of the lower electrode layer is spaced apart from the insulating substrate.
摘要翻译：本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。在一个方面，牺牲层沉积在绝缘衬底上。在牺牲层附近形成下电极层。压电层沉积在下电极层上。在压电层上形成上电极层。去除牺牲层的至少一部分以限定空腔，使得下电极层的至少一部分与绝缘基板间隔开。

5. 发明申请

WO2011119947A1 THREE DIMENSIONAL INDUCTOR AND TRANSFORMER DESIGN METHODOLOGY OF GLASS TECHNOLOGY 审中-公开
标题翻译：玻璃技术的三维电感器和变压器设计方法
公开(公告)号：WO2011119947A1
公开(公告)日：2011-09-29
申请号：PCT/US2011/029978
申请日：2011-03-25
申请人： QUALCOMM Incorporated , KIM, Jonghae , SHAH, Milind P. , LO, Chi Shun , LAN, Je-Hsiung , LI, Xia , NOWAK, Matthew Michael
发明人： KIM, Jonghae , SHAH, Milind P. , LO, Chi Shun , LAN, Je-Hsiung , LI, Xia , NOWAK, Matthew Michael
IPC分类号： H01L21/02 , H01L23/64 , H01L27/08 , H01L27/12 , H01L21/84 , H01F17/00 , H01F5/00 , H01L21/68
CPC分类号： H01L28/10 , H01F2017/004 , H01L21/84 , H01L23/645 , H01L27/12 , H01L2924/0002 , H01L2924/00
摘要： Disclosed is an inductor or transformer for use in integrated circuit devices that includes a high - resistivity substrate. The inductor (1100) includes a plurality of conductive traces (1110, 1112, 1114) around the substrate forming a continuous conductive path from a first to a second port. The conductive path can be solenoid- shaped. Some of the conductive traces can be formed during back- end- of - line processing or backside plating of an integrated circuit die. The transformer includes a first inductor with input and output ports, and a first continuous conductive path therebetween; and a second inductor with input and output ports, and a second continuous conductive path therebetween. The second inductor is independent of and electromagnetically coupled to the first inductor. The first and second conductive paths can be solenoid- shaped. The first conductive path can be interleaved with the second conductive path.
摘要翻译：公开了一种用于集成电路器件的电感器或变压器，其包括高电阻率衬底。电感器（1100）包括围绕衬底的多个导电迹线（1110,1112,1114），其形成从第一端口到第二端口的连续导电路径。导电路径可以是螺线管形的。一些导电迹线可以在集成电路管芯的后端处理或背面电镀中形成。变压器包括具有输入和输出端口的第一电感器和它们之间的第一连续导电路径; 以及具有输入和输出端口的第二电感器以及它们之间的第二连续导电路径。第二电感器与第一电感器无关并与其电磁耦合。第一和第二导电路径可以是螺线管形的。第一导电路径可以与第二导电路径交错。

6. 发明申请

WO2012087942A2 METHOD OF FABRICATION AND RESULTANT ENCAPSULATED ELECTROMECHANICAL DEVICE 审中-公开
标题翻译：制造方法和结果封装的电化学装置
公开(公告)号：WO2012087942A2
公开(公告)日：2012-06-28
申请号：PCT/US2011/065864
申请日：2011-12-19
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , HE, Rihui , YAN, Xiaoming , LAN, Je-Hsiung
发明人： HE, Rihui , YAN, Xiaoming , LAN, Je-Hsiung
IPC分类号： B81C1/00
CPC分类号： B81C1/00333 , B81C2203/0136 , B81C2203/0145
摘要： This disclosure provides systems, methods, and apparatus for encapsulated electromechanical systems. In one aspect, a release path includes a release hole through an encapsulation layer. The release path exposes a portion of a first sacrificial layer that extends beyond a second sacrificial layer in a horizontal direction. This allows the first sacrificial layer and the second sacrificial layer to later be etched through the release path. The corresponding electromechanical system device includes a shell layer encapsulating a mechanical layer. A conformal layer seals a release hole that extends through a shell layer. A portion of the conformal layer blocks the opening of the release passage within the release hole. The release passage has substantially the same vertical height as a gap that defines the spacing between the mechanical layer and a substrate.
摘要翻译：本公开提供了用于封装的机电系统的系统，方法和装置。一方面，释放路径包括通过封装层的释放孔。释放路径暴露在水平方向上延伸超过第二牺牲层的第一牺牲层的一部分。这允许第一牺牲层和第二牺牲层随后通过释放路径被蚀刻。相应的机电系统装置包括封装机械层的外壳层。保形层密封延伸穿过壳层的释放孔。共形层的一部分阻挡释放孔内的释放通道的开口。释放通道具有与限定机械层和基底之间的间隔的间隙大致相同的垂直高度。

7. 发明申请

WO2012158544A1 ELECTROMECHANICAL SYSTEMS OSCILLATOR WITH PIEZOELECTRIC CONTOUR MODE RESONATOR FOR MULTIPLE FREQUENCY GENERATION 审中-公开
标题翻译：电磁系统振荡器，具有用于多个频率发生的压电轮廓模式谐振器
公开(公告)号：WO2012158544A1
公开(公告)日：2012-11-22
申请号：PCT/US2012/037599
申请日：2012-05-11
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , KIM, Jonghae , LAN, Je-Hsiung , YUN, Changhan , LO, Chi Shun , NOWAK, Matthew
发明人： KIM, Jonghae , LAN, Je-Hsiung , YUN, Changhan , LO, Chi Shun , NOWAK, Matthew
IPC分类号： H03H9/24
CPC分类号： H03H9/2426 , H03H9/02228 , H03H9/2405 , H03H9/462 , H03H2009/241
摘要： Electromechanical systems resonator structures, devices, circuits, and systems are disclosed. In one aspect, an oscillator (1200) includes an active component (1204) and a passive component (1212) connected in a feedback configuration. The passive component (1212) includes one or more contour mode resonators (CMR). A CMR includes a piezoelectric layer (208) disposed between a first conductive layer (104a, 104b) and a second conductive layer (204a, 204b). The conductive layers include an input electrode and an output electrode. The passive component (1212) is configured to output a first resonant frequency and a second resonant frequency, which is an odd integer harmonic of the first resonant frequency. The active component (1204) is configured to output a signal including the first resonant frequency and the second resonant frequency. This output signal can be a substantially square wave signal, which can serve as a clock in various applications.
摘要翻译：公开了机电系统谐振器结构，器件，电路和系统。在一个方面，振荡器（1200）包括以反馈配置连接的有源部件（1204）和无源部件（1212）。无源部件（1212）包括一个或多个轮廓模式谐振器（CMR）。 CMR包括设置在第一导电层（104a，104b）和第二导电层（204a，204b）之间的压电层（208）。导电层包括输入电极和输出电极。无源部件（1212）被配置为输出第一谐振频率和第二谐振频率，其是第一谐振频率的奇整数谐波。有源部件（1204）被配置为输出包括第一谐振频率和第二谐振频率的信号。该输出信号可以是基本上为方波信号，其可以用作各种应用中的时钟。

8. 发明申请

WO2009120558A1 APPARATUS AND METHOD OF DUAL-MODE DISPLAY 审中-公开
标题翻译：双模显示装置及方法
公开(公告)号：WO2009120558A1
公开(公告)日：2009-10-01
申请号：PCT/US2009/037583
申请日：2009-03-18
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , LAN, Je-Hsiung
发明人： LAN, Je-Hsiung
IPC分类号： G02B26/00 , G09G3/34
CPC分类号： G02B26/001 , G09G3/3233 , G09G3/3466 , G09G2300/046 , G09G2300/0842 , G09G2300/0866 , G09G2360/144
摘要： One embodiment includes display comprising a light modulator configured to display a portion of an image such as a reflective light modulator, a light emitter configured to display the portion of the image and a circuit configured to selectively provide signals to at least one of the light modulator and the light emitter indicative of the portion of the image. In one such embodiment, an active matrix provides a simple, efficient drive for such devices. Other embodiments methods of making and driving such devices.
摘要翻译：一个实施例包括显示器，其包括被配置为显示诸如反射光调制器的图像的一部分的光调制器，被配置为显示图像的该部分的光发射器和被配置为选择性地向至少一个光调制器和指示图像部分的光发射器。在一个这样的实施例中，有源矩阵为这种设备提供简单，有效的驱动。其他实施例制造和驱动这些装置的方法。

9. 发明申请

WO2009020882A1 ESD PROTECTION FOR MEMS DISPLAY PANELS 审中-公开
标题翻译： MEMS显示面板的ESD保护
公开(公告)号：WO2009020882A1
公开(公告)日：2009-02-12
申请号：PCT/US2008/072011
申请日：2008-08-01
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , LAN, Je-Hsiung , ZHOU, Lixia
发明人： LAN, Je-Hsiung , ZHOU, Lixia
IPC分类号： G02B26/00 , H01L27/02 , H02H9/04 , G09G3/34
CPC分类号： G09G3/3466 , G02B26/001 , G09G2330/04 , H01L27/0248
摘要： A MEMS (Microelectromechanical system) device is described. The device includes an array of MEMS elements with addressing lines and MEMS switches configured to selectively connect the addressing lines to a ground or other potential in the event of an over- voltage, such as during an ESD event. The arrangement is particularly advantageous for protecting the array, because the MEMS switches can be formed using substantially the same processing steps which are used to form the array.
摘要翻译：描述了MEMS（微机电系统）装置。该器件包括具有寻址线和MEMS开关的MEMS元件的阵列，其被配置为在诸如ESD事件期间在过电压的情况下选择性地将寻址线连接到地或其它电位。该装置对于保护阵列特别有利，因为可以使用用于形成阵列的基本上相同的处理步骤来形成MEMS开关。

10. 发明申请

WO2011075366A1 TWO-TERMINAL VARIABLE CAPACITANCE MEMS DEVICE 审中-公开
标题翻译：双端可变电容MEMS器件
公开(公告)号：WO2011075366A1
公开(公告)日：2011-06-23
申请号：PCT/US2010/059512
申请日：2010-12-08
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , LAN, Je-Hsiung , GOUSEV, Evgeni , OZAKI, Ernest, Tadashi
发明人： LAN, Je-Hsiung , GOUSEV, Evgeni , OZAKI, Ernest, Tadashi
IPC分类号： H01G5/16 , G02B26/00 , G09G3/34
CPC分类号： H01G5/16 , G02B26/001
摘要： A two-terminal, variable capacitance device is described that is constructed by connecting multiple MEMS devices having different actuation or "pull in" voltages in parallel.
摘要翻译：描述了通过并联具有不同驱动或“拉入”电压的多个MEMS器件构成的两端可变电容器件。

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