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1. 发明申请

WO2012158889A1 PIEZOELECTRIC RESONATORS WITH CONFIGURATIONS HAVING NO GROUND CONNECTIONS TO ENHANCE ELECTROMECHANICAL COUPLING 审中-公开
标题翻译：具有无接地连接的配置的压电谐振器，以增强机电耦合
公开(公告)号：WO2012158889A1
公开(公告)日：2012-11-22
申请号：PCT/US2012/038308
申请日：2012-05-17
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , YUN, Changhan , PARK, Sang-June , LO, Chi Shun , KIM, Jonghae , LAN, Je-Hsiung , JOO, Sanghoon
发明人： YUN, Changhan , PARK, Sang-June , LO, Chi Shun , KIM, Jonghae , LAN, Je-Hsiung , JOO, Sanghoon
IPC分类号： H03H9/17 , H03H9/02
CPC分类号： H03H9/173 , H03H9/02228
摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, resonator apparatus includes a first conductive layer including a first electrode and a second electrode. The first electrode is coupled to receive a first input signal, and the second electrode is coupled to provide a first output signal. A piezoelectric layer includes a piezoelectric material. The piezoelectric layer has a first side and a second side opposite the first side. The first side is proximate the first conductive layer, and the second side is electrically isolated from ground. In some examples, the second side of the piezoelectric layer can be exposed and/or electrically de-coupled from one or more components.
摘要翻译：本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。在一个方面，谐振器装置包括包括第一电极和第二电极的第一导电层。第一电极被耦合以接收第一输入信号，并且第二电极被耦合以提供第一输出信号。压电层包括压电材料。压电层具有与第一侧相对的第一侧和第二侧。第一侧靠近第一导电层，第二侧与地电隔离。在一些示例中，压电层的第二面可以暴露和/或从一个或多个部件电脱耦合。

2. 发明申请

WO2012030727A1 ELECTROMECHANICAL SYSTEMS PIEZOELECTRIC CONTOUR MODE DIFFERENTIAL AND SINGLE -ENDED RESONATORS AND FILTERS 审中-公开
标题翻译：电动系统压电轮廓模式差分和单向谐振器和滤波器
公开(公告)号：WO2012030727A1
公开(公告)日：2012-03-08
申请号：PCT/US2011/049568
申请日：2011-08-29
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , LO, Chi Shun , KIM, Jonghae , PARK, Sang-June , JOO, Sanghoon , ZUO, Chengjie , YUN, Changhan
发明人： LO, Chi Shun , KIM, Jonghae , PARK, Sang-June , JOO, Sanghoon , ZUO, Chengjie , YUN, Changhan
IPC分类号： H03H9/00 , H03H9/24 , H03H9/56
CPC分类号： H03H9/0095 , G09G3/3493 , G09G2310/0267 , G09G2310/027 , H01P1/2135 , H03H9/0014 , H03H9/02228 , H03H9/2431 , H03H9/2436 , H03H9/2463 , H03H9/564 , H03H2003/027 , H03H2009/02496 , H03H2009/02527 , H03H2009/241
摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a contour mode resonator device includes a first conductive layer with a plurality of first layer electrodes including a first electrode (2124) at which a first input signal can be provided and a second electrode (2144) at which a first output signal can be provided. A second conductive layer includes a plurality of second layer electrodes including a first electrode (2134) proximate the first electrode of the first conductive layer and a second electrode (2154) proximate the second electrode of the first conductive layer. A second signal can be provided at the first electrode or the second electrode of the second conductive layer to cooperate with the first input signal or the first output signal to define a differential signal. A piezoelectric layer (2108) is disposed between the first conductive layer and the second conductive layer. The piezoelectric layer includes a piezoelectric material. The piezoelectric layer is substantially oriented in a plane and capable of movement in the plane responsive to an electric field between the first electrodes or the second electrodes. The device can be used in the transmission (TX) or receiver (RX) path of a duplexer or as balun.
摘要翻译：本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。在一个方面，轮廓模式谐振器装置包括具有多个第一层电极的第一导电层，所述第一导电层包括能够提供第一输入信号的第一电极（2124）和第二电极（2144），第二电极可以提供。第二导电层包括多个第二层电极，其包括靠近第一导电层的第一电极的第一电极（2134）和靠近第一导电层的第二电极的第二电极（2154）。可以在第二导电层的第一电极或第二电极处提供第二信号，以与第一输入信号或第一输出信号配合以限定差分信号。压电层（2108）设置在第一导电层和第二导电层之间。压电层包括压电材料。压电层基本上定向在平面中并且能够响应于第一电极或第二电极之间的电场在平面中移动。该设备可用于双工器的传输（TX）或接收机（RX）路径或平衡 - 不平衡变换器。

3. 发明申请

WO2012148712A1 PIEZOELECTRIC RESONATORS AND FABRICATION PROCESSES 审中-公开
标题翻译：压电谐振器和制造工艺
公开(公告)号：WO2012148712A1
公开(公告)日：2012-11-01
申请号：PCT/US2012/033609
申请日：2012-04-13
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , LAN, Je-Hsiung , PARK, Sang-June , KIM, Jonghae , GOUSEV, Evgeni , NOWAK, Matthew , STEPHANOU, Philip J. , BLACK, Justin , PETERSEN, Kurt , GANAPATHI, Srinivasan
发明人： LAN, Je-Hsiung , PARK, Sang-June , KIM, Jonghae , GOUSEV, Evgeni , NOWAK, Matthew , STEPHANOU, Philip J. , BLACK, Justin , PETERSEN, Kurt , GANAPATHI, Srinivasan
IPC分类号： H03H3/007 , H03H9/24
CPC分类号： H03H3/0072 , H03H9/2447 , Y10T29/42
摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a sacrificial layer is deposited on an insulating substrate. A lower electrode layer is formed proximate the sacrificial layer. A piezoelectric layer is deposited on the lower electrode layer. An upper electrode layer is formed on the piezoelectric layer. At least a portion of the sacrificial layer is removed to define a cavity such that at least a portion of the lower electrode layer is spaced apart from the insulating substrate.
摘要翻译：本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。在一个方面，牺牲层沉积在绝缘衬底上。在牺牲层附近形成下电极层。压电层沉积在下电极层上。在压电层上形成上电极层。去除牺牲层的至少一部分以限定空腔，使得下电极层的至少一部分与绝缘基板间隔开。

4. 发明申请

WO2010138929A1 MEMS VARACTORS 审中-公开
标题翻译： MEMS变阻器
公开(公告)号：WO2010138929A1
公开(公告)日：2010-12-02
申请号：PCT/US2010/036746
申请日：2010-05-28
申请人： QUALCOMM INCORPORATED , LAN, Je-Hsiung , GOUSEV, Evgeni P. , ZHANG, Wenyue , KOTHARI, Manish , PARK, Sang-June
发明人： LAN, Je-Hsiung , GOUSEV, Evgeni P. , ZHANG, Wenyue , KOTHARI, Manish , PARK, Sang-June
IPC分类号： H01P1/12
CPC分类号： H01G7/00 , H01G5/16 , H01P1/127 , Y10T29/435
摘要： MEMS varactors capable of handling large signals and/or achieving a high capacitance tuning range are described. In an exemplary design, a MEMS varactor includes (i) a first bottom plate electrically coupled to a first terminal receiving an input signal, (ii) a second bottom plate electrically coupled to a second terminal receiving a DC voltage, and (iii) a top plate formed over the first and second bottom plates and electrically coupled to a third terminal. The DC voltage causes the top plate to mechanically move and vary the capacitance observed by the input signal. In another exemplary design, a MEMS varactor includes first, second and third plates formed on over one another and electrically coupled to first, second and third terminals, respectively. First and second DC voltages may be applied to the first and third terminals, respectively. An input signal may be passed between the first and second terminals.
摘要翻译：描述能够处理大信号和/或实现高电容调谐范围的MEMS变容二极管。在示例性设计中，MEMS变容二极管包括（i）电耦合到接收输入信号的第一端子的第一底板，（ii）电耦合到接收DC电压的第二端子的第二底板，以及（iii）顶板形成在第一和第二底板上并电耦合到第三端子。直流电压使顶板机械地移动并改变由输入信号观察到的电容。在另一示例性设计中，MEMS变容二极管包括彼此形成并分别电耦合到第一，第二和第三端子的第一，第二和第三板。第一和第二直流电压可以分别施加到第一和第三端子。输入信号可以在第一和第二端子之间通过。

5. 发明申请

WO2012006049A1 THREE DIMENSIONAL WIRE BOND INDUCTOR AND TRANSFORMER 审中-公开
标题翻译：三维线束电感和变压器
公开(公告)号：WO2012006049A1
公开(公告)日：2012-01-12
申请号：PCT/US2011/042094
申请日：2011-06-28
申请人： QUALCOMM INCORPORATED , PARK, Sang-June , KIM, Jonghae , NOWAK, Matthew, M. , CICCARELLI, Steve, C
发明人： PARK, Sang-June , KIM, Jonghae , NOWAK, Matthew, M. , CICCARELLI, Steve, C
IPC分类号： H01F17/00 , H01F27/28 , H01L23/64
CPC分类号： H01F27/2804 , H01F17/0006 , H01F2027/2814 , H01L23/5225 , H01L23/5227 , H01L23/645 , H01L2224/48091 , H01L2224/4813 , H01L2224/73265 , H01L2924/1461 , H01L2924/30107 , H01L2924/3025 , H01L2924/00014 , H01L2924/00
摘要： A three-dimensional inductor or transformer for an electronic packaging system that includes a plurality of conductive traces and a plurality of conductive wire bonds. The traces are located in a single layer, and each have a first and second pad. Each of the wire bonds couples the second pad of one trace to the first pad of another trace. The trace and wire bonds create a continuous conductive path from the first pad of a first trace to the second pad of a last trace. Passing a current from the first trace to the last trace creates an electromagnetic field between the single layer and the wire bonds. The transformer includes two independent and electromagnetically coupled inductors that can be interleaved. The continuous conductive path can be solenoid-shaped. A shielding layer can also be included that blocks the substrate from the electromagnetic field of the inductor or transformer.
摘要翻译：一种用于电子封装系统的三维电感器或变压器，其包括多个导电迹线和多个导电引线键合。迹线位于单个层中，并且每个具有第一和第二焊盘。每个线接合将一个迹线的第二个焊盘耦合到另一个迹线的第一个焊盘。迹线和引线键形成从第一迹线的第一焊盘到最后迹线的第二焊盘的连续传导路径。将电流从第一个轨迹传递到最后一个轨迹会在单层和引线键之间产生电磁场。该变压器包括可以交错的两个独立的和电磁耦合的电感器。连续导电路径可以是螺线管形的。还可以包括阻挡基板与电感器或变压器的电磁场的屏蔽层。

6. 发明申请

WO2012166556A1 TUNABLE MULTI-BAND RECEIVER 审中-公开
标题翻译： TUNABLE多带接收器
公开(公告)号：WO2012166556A1
公开(公告)日：2012-12-06
申请号：PCT/US2012/039455
申请日：2012-05-24
申请人： QUALCOMM Incorporated , SAHOTA, Gurkanwal Singh , CICCARELLI, Steven C. , PARK, Sang-June , PERSICO, Charles J.
发明人： SAHOTA, Gurkanwal Singh , CICCARELLI, Steven C. , PARK, Sang-June , PERSICO, Charles J.
IPC分类号： H04B1/52 , H04B1/10 , H04B1/00
CPC分类号： H04B1/525 , H03H2007/013 , H04B1/006 , H04B1/1036
摘要： A tunable multi-band receiver supporting operation on a plurality of frequency bands is disclosed. In an exemplary design, the tunable multi-band receiver includes an antenna tuning network, a tunable notch filter, and at least one low noise amplifier (LNA). The antenna tuning network tunes an antenna (e.g., a diversity antenna) to a receive band in a plurality of receive bands. The tunable notch filter is tunable to a transmit band in a plurality of transmit bands and attenuates signal components in the transmit band. One LNA among the at least one LNA amplifies an output signal from the tunable notch filter. The tunable multi-band receiver may further include one or more additional tunable notch filters to further attenuate the signal components in the transmit band.
摘要翻译：公开了一种在多个频带上支持操作的可调谐多频带接收机。在示例性设计中，可调谐多频带接收机包括天线调谐网络，可调谐陷波滤波器和至少一个低噪声放大器（LNA）。天线调谐网络将天线（例如，分集天线）调谐到多个接收频带中的接收频带。可调陷波滤波器可调谐到多个发射频带中的发射频带，并衰减发射频带中的信号分量。至少一个LNA中的一个LNA放大来自可调陷波滤波器的输出信号。可调谐多频带接收机还可以包括一个或多个附加可调陷波滤波器，以进一步衰减发射频带中的信号分量。

7. 发明申请

WO2010148405A3 MEMS TUNABLE RESONATOR IN A CAVITY 审中-公开
公开(公告)号：WO2010148405A3
公开(公告)日：2010-12-23
申请号：PCT/US2010/039374
申请日：2010-06-21
申请人： QUALCOMM Incorporated , PARK, Sang-June
发明人： PARK, Sang-June
IPC分类号： H03H9/46 , H03H9/02 , H01P1/219 , H03H7/01 , H01P7/06
摘要： Tunable MEMS resonators having adjustable resonance frequency and capable of handling large signals are described. In one exemplary design, a tunable MEMS resonator includes (i) a first part (160) having a cavity (180) and a post (170) and (ii) a second part (110) mated to the first part (160) and including a movable plate (140) located under the post (170). Each part may be covered with a metal layer (130, 190) on the surface facing the other part. The movable plate (140) may be mechanically moved by a DC voltage to vary the resonance frequency of the MEMS resonator. The cavity (180) may have a rectangular or circular shape and may be empty or filled with a dielectric material. The post (170) may be positioned in the middle of the cavity (180). The movable plate (140) may be attached to the second part (i) via an anchor (144) and operated as a cantilever or (ii) via two anchors (146, 148) and operated as a bridge.

8. 发明申请

WO2013159010A1 TWO- AND THREE-SUBSTRATE LEVEL PROCESSES FOR PRODUCING EVANESCENT-MODE ELECTROMAGNETIC-WAVE CAVITY RESONATORS 审中-公开
标题翻译：用于生产EVANESCENT-MODE电磁波腔谐振器的两个和三个底层级
公开(公告)号：WO2013159010A1
公开(公告)日：2013-10-24
申请号：PCT/US2013/037396
申请日：2013-04-19
申请人： QUALCOMM MEMS TECHNOLOGIES, INC.
发明人： STEPHANOU, Philip Jason , PARK, Sang-June , SHENOY, Ravindra V.
IPC分类号： H01P7/06 , H01P1/208 , H03H9/24
CPC分类号： H01P1/2088 , H01P7/065 , Y10T29/42 , Y10T29/4902
摘要： This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a method includes providing a first substrate and a second substrate. In some implementations, the first substrate includes a cavity ceiling, an array of dielectric spacers, and an assembly platform arranged adjacent the array of dielectric spacers opposite the cavity ceiling surface. The assembly platform includes a plurality of post tops. In some implementations, the second substrate has an array of cavities and an array of resonator posts. In some implementations, the method includes mating the first substrate with the second substrate, connecting the post tops with the posts to form an array that includes a plurality of evanescent-mode electromagnetic wave cavity resonators, wherein at least a statically-defined magnitude of a gap distance between the distal surface of each post top and the cavity ceiling is defined by the dielectric spacers.
摘要翻译：本公开提供了机电系统（EMS）谐振器结构，设备，装置，系统和相关过程的实现。一方面，一种方法包括提供第一基底和第二基底。在一些实施方案中，第一衬底包括空腔顶板，电介质间隔件的阵列以及与腔体顶表面相对的电介质间隔件排列的组合平台。组装平台包括多个柱顶。在一些实施方案中，第二衬底具有空腔阵列和谐振器柱阵列。在一些实施方式中，该方法包括将第一衬底与第二衬底配合，将柱顶与柱连接以形成包括多个渐逝模式电磁波谐振腔谐振器的阵列，其中至少一个静态限定的量级每个柱顶的远端表面和腔顶之间的间隙距离由电介质间隔物限定。

9. 发明申请

WO2014065939A1 COMPOSITE DILATION MODE RESONATORS 审中-公开
标题翻译：组合式模拟谐振器
公开(公告)号：WO2014065939A1
公开(公告)日：2014-05-01
申请号：PCT/US2013/056614
申请日：2013-08-26
申请人： QUALCOMM MEMS TECHNOLOGIES, INC.
发明人： ZUO, Chengjie , KIM, Jonghae , YUN, Changhan, Hobie , PARK, Sang-June , STEPHANOU, Philip, Jason , LO, Chi, Shun , MIKULKA, Robert, Paul , VELEZ, Mario, Francisco , SHENOY, Ravindra, V. , NOWAK, Matthew, Michael
IPC分类号： H03H9/24 , H03H9/205 , H03H9/02
CPC分类号： H03H9/02157 , H03H9/02574 , H03H9/205 , H03H9/2405 , H03H2009/02503 , H03H2009/02527 , H03H2009/241
摘要： This disclosure provides systems, methods and apparatus related to acoustic resonators that include composite transduction layers (116, 118) for enabling selective tuning of one or more acoustic or electromechanical properties. In one aspect, a resonator structure includes one or more first electrodes (142), one or more second electrodes (144), and a transduction layer (116, 118) arranged between the first and second electrodes. The transduction layer includes a plurality of constituent layers. In some implementations, the constituent layers include one or more first piezoelectric layers and one or more second piezoelectric layers. The transduction layer is configured to, responsive to signals provided to the first and second electrodes, provide at least a first mode of vibration of the transduction layer with a displacement component along the z axis and at least a second mode of vibration of the transduction layer with a displacement component _ along the plane of the x axis and the y axis.
摘要翻译：本公开提供了涉及声谐振器的系统，方法和装置，其包括用于使得能够选择性地调谐一个或多个声学或机电特性的复合转导层（116,118）。在一个方面，谐振器结构包括一个或多个第一电极（142），一个或多个第二电极（144）和布置在第一和第二电极之间的换能层（116,118）。换能层包括多个构成层。在一些实施方式中，构成层包括一个或多个第一压电层和一个或多个第二压电层。转导层被配置为响应于提供给第一和第二电极的信号，提供至少第一传感模式的振动，沿着z轴的位移分量和换能层的至少第二振动模式沿着x轴和y轴的平面具有位移分量。

10. 发明申请

WO2013158994A1 ISOTROPICALLY-ETCHED CAVITIES FOR EVANESCENT-MODE ELECTROMAGNETIC-WAVE CAVITY RESONATORS 审中-公开
标题翻译： EVEESCENT-MODE电磁波腔谐振器的等离子体蚀刻
公开(公告)号：WO2013158994A1
公开(公告)日：2013-10-24
申请号：PCT/US2013/037368
申请日：2013-04-19
申请人： QUALCOMM MEMS TECHNOLOGIES, INC.
发明人： STEPHANOU, Philip Jason , PARK, Sang-June , SHENOY, Ravindra V.
IPC分类号： H01P1/208 , H01P7/06 , H01P11/00
CPC分类号： H01P1/208 , H01P1/202 , H01P1/2084 , H01P7/04 , H01P7/06 , H01P11/007 , H01P11/008
摘要： This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator. In some implementations, the resonator includes an isotropically-etched cavity operable to support one or more evanescent electromagnetic wave modes. In some implementations, the resonator also includes a cavity ceiling arranged to form a volume in conjunction with the isotropically-etched cavity. In some implementations, the resonator also includes a capacitive tuning structure having a portion that is located at least partially within the volume so as to support the evanescent electromagnetic wave modes. In some implementations, a distal surface of the tuning structure is separated from the closest surface to it by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially on the gap distance.
摘要翻译：本公开提供了机电系统（EMS）谐振器结构，设备，装置，系统和相关过程的实现。在一个方面，一种器件包括ev逝模式电磁波谐振腔谐振器。在一些实施方案中，谐振器包括可操作以支持一个或多个ev逝电磁波模式的各向同性蚀刻的腔。在一些实施方案中，谐振器还包括空腔顶板，其被设置成与各向同性蚀刻的空腔结合形成体积。在一些实施方案中，谐振器还包括电容调谐结构，其具有至少部分地位于体积内的部分，以便支持渐逝电磁波模式。在一些实施方案中，调谐结构的远端表面与距离其最近的表面分开间隙距离，空腔谐振器的谐振电磁波模式至少部分地取决于间隙距离。

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