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    • 2. 发明申请
    • MEMS TUNABLE RESONATOR IN A CAVITY
    • 微腔中的MEMS可调共振器
    • WO2010148405A9
    • 2011-11-03
    • PCT/US2010039374
    • 2010-06-21
    • QUALCOMM INCPARK SANG-JUNE
    • PARK SANG-JUNE
    • H03H9/46H01P1/219H01P7/06H03H7/01H03H9/02
    • H03H9/02244E05Y2900/402H01P1/127H01P1/2084H03H9/462
    • Tunable MEMS resonators having adjustable resonance frequency and capable of handling large signals are described. In one exemplary design, a tunable MEMS resonator includes (i) a first part (160) having a cavity (180) and a post (170) and (ii) a second part (110) mated to the first part (160) and including a movable plate (140) located under the post (170). Each part may be covered with a metal layer (130, 190) on the surface facing the other part. The movable plate (140) may be mechanically moved by a DC voltage to vary the resonance frequency of the MEMS resonator. The cavity (180) may have a rectangular or circular shape and may be empty or filled with a dielectric material. The post (170) may be positioned in the middle of the cavity (180). The movable plate (140) may be attached to the second part (i) via an anchor (144) and operated as a cantilever or (ii) via two anchors (146, 148) and operated as a bridge.
    • 描述了具有可调共振频率和能够处理大信号的可调MEMS谐振器。 在一个示例性设计中,可调MEMS谐振器包括(i)具有与第一部分(160)配合的空腔(180)和柱(170)和(ii)第二部分(110)的第一部分(160)和 包括位于柱(170)下方的可移动板(140)。 每个部件可以在面向另一部件的表面上覆盖有金属层(130,190)。 可移动板(140)可以通过DC电压机械移动以改变MEMS谐振器的谐振频率。 腔体(180)可以具有矩形或圆形形状并且可以是空的或者填充有介电材料。 柱(170)可以定位在空腔(180)的中间。 可移动板(140)可以经由锚(144)附接到第二部分(i)并且作为悬臂运行或者(ii)经由两个锚(146,148)并且作为桥运行。
    • 7. 发明申请
    • TUNABLE MEMS RESONATORS
    • TUNABLE MEMS谐振器
    • WO2010148405A2
    • 2010-12-23
    • PCT/US2010039374
    • 2010-06-21
    • QUALCOMM INCPARK SANG-JUNE
    • PARK SANG-JUNE
    • H03H9/46H01P1/219H01P7/06H03H9/02
    • H03H9/02244E05Y2900/402H01P1/127H01P1/2084H03H9/462
    • Tunable MEMS resonators having adjustable resonance frequency and capable of handling large signals are described. In one exemplary design, a tunable MEMS resonator includes (i) a first part having a cavity and a post and (ii) a second part mated to the first part and including a movable plate located under the post. Each part may be covered with a metal layer on the surface facing the other part. The movable plate may be mechanically moved by a DC voltage to vary the resonance frequency of the MEMS resonator. The cavity may have a rectangular or circular shape and may be empty or filled with a dielectric material. The post may be positioned in the middle of the cavity. The movable plate may be attached to the second part (i) via an anchor and operated as a cantilever or (ii) via two anchors and operated as a bridge.
    • 描述了具有可调谐共振频率并且能够处理大信号的可调谐MEMS谐振器。 在一个示例性设计中,可调MEMS MEMS谐振器包括(i)具有空腔和柱的第一部分和(ii)与第一部分配合的第二部分,并且包括位于柱下方的可动板。 每个部分可以在面向另一部分的表面上被金属层覆盖。 可移动板可通过DC电压机械地移动以改变MEMS谐振器的谐振频率。 空腔可以具有矩形或圆形形状,并且可以是空的或者用电介质材料填充。 柱可以位于腔的中间。 可移动板可以经由锚固件附接到第二部件(i)并作为悬臂操作,或者(ii)经由两个锚定件并作为桥梁操作。
    • 9. 发明申请
    • MEMS VARACTORS
    • MEMS变阻器
    • WO2010138929A1
    • 2010-12-02
    • PCT/US2010/036746
    • 2010-05-28
    • QUALCOMM INCORPORATEDLAN, Je-HsiungGOUSEV, Evgeni P.ZHANG, WenyueKOTHARI, ManishPARK, Sang-June
    • LAN, Je-HsiungGOUSEV, Evgeni P.ZHANG, WenyueKOTHARI, ManishPARK, Sang-June
    • H01P1/12
    • H01G7/00H01G5/16H01P1/127Y10T29/435
    • MEMS varactors capable of handling large signals and/or achieving a high capacitance tuning range are described. In an exemplary design, a MEMS varactor includes (i) a first bottom plate electrically coupled to a first terminal receiving an input signal, (ii) a second bottom plate electrically coupled to a second terminal receiving a DC voltage, and (iii) a top plate formed over the first and second bottom plates and electrically coupled to a third terminal. The DC voltage causes the top plate to mechanically move and vary the capacitance observed by the input signal. In another exemplary design, a MEMS varactor includes first, second and third plates formed on over one another and electrically coupled to first, second and third terminals, respectively. First and second DC voltages may be applied to the first and third terminals, respectively. An input signal may be passed between the first and second terminals.
    • 描述能够处理大信号和/或实现高电容调谐范围的MEMS变容二极管。 在示例性设计中,MEMS变容二极管包括(i)电耦合到接收输入信号的第一端子的第一底板,(ii)电耦合到接收DC电压的第二端子的第二底板,以及(iii) 顶板形成在第一和第二底板上并电耦合到第三端子。 直流电压使顶板机械地移动并改变由输入信号观察到的电容。 在另一示例性设计中,MEMS变容二极管包括彼此形成并分别电耦合到第一,第二和第三端子的第一,第二和第三板。 第一和第二直流电压可以分别施加到第一和第三端子。 输入信号可以在第一和第二端子之间通过。