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    • 5. 发明公开
    • Lateral bipolar transistor with edge-strapped base contact and method of fabricating same
    • 横向双极晶体管电容器
    • EP0489262A1
    • 1992-06-10
    • EP91118800.1
    • 1991-11-05
    • International Business Machines Corporation
    • Shadihi, Ghavam G.Tang, Denny D.Taur, Yuan
    • H01L29/73H01L21/84H01L21/331
    • H01L29/6625H01L21/84H01L29/1008H01L29/7317H01L29/735
    • A bipolar transistor is formed on a silicon-on-insulator structure comprises a substrate (102) having a layer of oxide (104) formed thereon and a layer of silicon (106) formed on said oxide layer, said layer of silicon having a substantially planar surface (108). A collector region (110) of a first conductivity type is extending from said surface (108) of said silicon layer (106), an emitter region (112) of said first conductivity type is extending from said surface of said silicon layer, and an intrinsic base region (114) of a second conductivity type is extending from said surface of said silicon layer, said intrinsic base region (114) being contiguous to said emitter region (112) and intermediate said emitter and collector regions (112, 110). A layer of insulator (116) is formed on said silicon layer (106). A polysilicon extrinsic base region (118) of said second conductivity type is formed on said insulator layer (116), and a silicon edge contact region (120) of said second conductivity type is connected to a sidewall of said extrinsic base region (118) and said surface of said intrinsic base region (114).
    • 在绝缘体上硅结构上形成双极晶体管,其包括其上形成有氧化物层(104)的衬底(102)和形成在所述氧化物层上的硅层(106),所述硅层具有基本上 平面(108)。 第一导电类型的集电极区域(110)从所述硅层(106)的所述表面(108)延伸,所述第一导电类型的发射极区域(112)从所述硅层的所述表面延伸,并且 第二导电类型的本征基极区域(114)从所述硅层的所述表面延伸,所述本征基极区域(114)与所述发射极区域(112)邻接并且位于所述发射极和集电极区域(112,110)的中间。 在所述硅层(106)上形成绝缘体层(116)。 所述第二导电类型的多晶硅非本征基极区(118)形成在所述绝缘体层(116)上,并且所述第二导电类型的硅边缘接触区域(120)连接到所述外部基极区域(118)的侧壁, 和所述本征基区(114)的所述表面。
    • 7. 发明公开
    • Lateraltransistor
    • Lateraltransistor。
    • EP0247386A2
    • 1987-12-02
    • EP87106346.7
    • 1987-05-02
    • TELEFUNKEN electronic GmbH
    • Arndt, Jürgen, Dr.
    • H01L29/72H01L27/06H01L21/82H01L29/10
    • H01L29/402H01L21/2652H01L21/74H01L21/8249H01L29/1008H01L29/735Y10S148/009Y10S148/01
    • Die Erfindung betrifft einen PNP-Lateraltransistor aus zwei in die Oberfläche eines Halbleiterbereichs (12) vom n-Leitungstyp eingelassenen, Emitter (19d) und Kollektor (19c) bil­denden Zonen vom p-Leitungstyp, wobei der zwischen die­sen beiden Zonen liegende Teil des Halbleiterbereichs vom n-Leitungstyp die aktive Basiszone (26) bildet. Die Er­findung besteht darin, daß die aktive Basiszone (26) unter­halb der Halbleiteroberfläche und angrenzend an die Emitter- und die Kollektorzone eine vergrabene Halblei­terzone (25) enthält, die gegenüber dem übrigen umgebenden Bereich der aktiven Basiszone (26) zusätzliche kontradotie­rende Störstellen enthält, so daß ein Stromführungska­nal für die Minoritätsladungsträger in der Basiszone entsteht. Hierdurch wird der Einfluß störender Oberflä­chenrekombinationen und des Substrattransistors erheb­lich vermindert und eine sehr hohe Gleichstromverstär­kung des Lateraltransistors erzielt.
    • 本发明涉及在从n型导电型,发射器(19D)和收集器(19C)凹陷的半导体区域(12)的表面的两个横向PNP晶体管形成的p型导电型,其特征在于,所述半导体区域的这两个区域部分之间的位于的区 n导电型构成的活性基区(26)。 本发明在于,半导体表面的下方的有源基区(26)和邻近所述发射极和集电极区域的掩埋半导体区(25),其(26)包含相对于围绕该有源基区的其余区域附加kontradotierende杂质, 对于在基极区域的少数载流子的流动导槽形成。 以这种方式,干扰在基板的表面重组的影响,并且该晶体管被显着减小,并且实现了横向的非常高的直流增益。
    • 9. 发明公开
    • Lateral bipolar transistor formed in a silicon on insulator (SOI) substrate
    • 双极,双极晶体管,在非晶硅隔离器(SOI)-Substrat中。
    • EP0137992A2
    • 1985-04-24
    • EP84110211.4
    • 1984-08-28
    • FUJITSU LIMITED
    • Nakano, Motoo
    • H01L29/72
    • H01L29/1008H01L29/7317
    • A lateral bipolar transistor formed on a silicon on insulator (SOI) substrate, having a base electrode of heat resistive polycrystalline silicon of first conductivity type, formed on a base region of first conductivity type, all the bottom plane of the transistor region is in contact with the insulating layer of the SOI substrate. The base electrode is extended laterally over a part of a collector region to provide a relatively large base electrode width, which allows a small width of the base region, enhancing the current amplification factor of the transistor. The base region has a vertical doping profile which has a minimum value between the base electrode and the insulator layer of the substrate, reducing the recombination of carriers in the base region. Fabricating methods utilizing self-alignment-diffusion process are provided.
    • 形成在绝缘体上硅(SOI)衬底上的横向双极晶体管,具有基极。 的第一导电类型的耐热多晶硅,形成在第一导电类型的基极区上,晶体管区域的所有底面均与SOI衬底的绝缘层接触。 基极在集电极区域的一部分上横向延伸以提供相对较大的基极宽度,这允许基极区域的较小宽度增强晶体管的电流放大系数。 基极区域具有垂直掺杂分布,其在基极和衬底的绝缘体层之间具有最小值,从而减少了基极区域中载流子的复合。 提供了利用自对准扩散过程的制造方法。
    • 10. 发明公开
    • Semiconductor devices including lateral-type transistors
    • Halbleiteranordnungen mit Laltaltransistoren。
    • EP0100677A2
    • 1984-02-15
    • EP83304446.4
    • 1983-08-01
    • FUJITSU LIMITED
    • Isogai, HideakiOno, Chikai
    • H01L29/06
    • H01L29/402H01L21/76H01L21/761H01L27/1025H01L29/1008H01L29/735
    • A semiconductor device comprises at least one lateral-type PNP transistor (31) having a collector region (31c), an emitter region (31e), a base region (31b), and partially extended emitter wiring (37) covering the base region, to protect against channel leakage. The collector and emitter regions directly contact an isolation region (41), but the base region contacts the isolation region via a projection (42), preferably formed integrally with the isolation region. The partially extended emitter wiring may also extend over the projection, which possibility can serve to accommodate manufacturing tolerances that would otherwise reduce the degree of integration that could be achieved reliably.
    • 半导体器件包括具有集电极区域(31c),发射极区域(31e),基极区域(31b)和覆盖基极区域的部分延伸的发射极配线(37)的至少一个横向型PNP晶体管(31) 以防止通道泄漏。 集电极和发射极区域直接接触隔离区域(41),但是基极区域经由突起(42)接触隔离区域,优选地与隔离区域形成一体。 部分延伸的发射极布线还可以在突起上延伸,这可能性可以用于适应制造公差,否则可以降低可以可靠地实现的集成度。