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    • 2. 发明公开
    • BIPOLAR TRANSISTOR HAVING SINKER DIFFUSION UNDER A TRENCH
    • BIPOLARTRANSISTOR MIT SENKERDIFFUSION UNTER EINEM GRABEN
    • EP3017477A1
    • 2016-05-11
    • EP14819416.0
    • 2014-07-02
    • Texas Instruments Incorporated
    • EDWARDS, Henry, LitzmannSALMAN, Akram, A.
    • H01L29/72H01L21/331
    • H01L29/7322H01L27/0248H01L27/0259H01L29/0649H01L29/0821H01L29/732
    • In described examples, a bipolar transistor (100) includes: a substrate (105) having a semiconductor surface (106); and first and second trench enclosures (121, 122), both at least lined with a dielectric extending downward from a topside (106a) of the semiconductor surface (106) to a trench depth. The first trench enclosure (121) defines an inner enclosed area. A base (140) and an emitter (150) formed in the base (140) are within the inner enclosed area. A buried layer (126) is below the trench depth, including under the base (140). A sinker diffusion (115) includes a first portion (115a) between the first and second trench enclosures (121, 122), extending from the topside (106a) of the semiconductor surface (106) to the buried layer, and a second portion (115b) within the inner enclosed area. The second portion (115b) does not extend to the topside (106a) of the semiconductor surface (106).
    • 双极晶体管包括具有半导体表面的衬底,第一沟槽外壳和在第一沟槽外壳外部的第二沟槽外壳,其至少内衬有从半导体表面向下延伸到沟槽深度的电介质,其中第一沟槽外壳限定 内封闭区域。 形成在基座中的基座和发射体在内封闭区域内。 掩埋层位于底部下方的沟槽深度之下。 沉降片扩散包括从半导体表面的顶侧延伸到掩埋层的第一和第二沟槽外壳之间的第一部分和内部封闭区域内的第二部分,其中第二部分不延伸到半导体表面的顶侧 。