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    • 10. 发明公开
    • METHOD FOR MANUFACTURING A WIDE BANDGAP JUNCTION BARRIER SCHOTTKY DIODE
    • 制造宽带结电阻肖特基二极管的方法
    • EP3231008A1
    • 2017-10-18
    • EP15794507.2
    • 2015-11-04
    • ABB Schweiz AG
    • MINAMISAWA, RenatoRAHIMO, Munaf
    • H01L21/329H01L29/872H01L21/28H01L29/06H01L29/40H01L29/45H01L29/47H01L29/24H01L29/20
    • H01L21/0485H01L21/048H01L21/0495H01L29/0619H01L29/1608H01L29/2003H01L29/401H01L29/45H01L29/47H01L29/6606H01L29/66212H01L29/872
    • A method for manufacturing a wide bandgap junction barrier Schottky diode having an anode side and a cathode side is provided, wherein an (n+) doped cathode layer is arranged on the cathode side, at least on p doped anode layer is arranged on the anode side, an (n−) doped drift layer is arranged between the cathode layer and the at least one anode layer, which drift layer extends to the anode side, wherein the following manufacturing steps are performed: a) providing an (n+) doped wide bandgap substrate, b) creating the drift layer on the cathode layer, c) creating the at least one anode layer on the drift layer, d) applying a first metal layer on the anode side on top of the drift layer for forming a Schottky contact, characterized in, that e) creating a second metal layer on top of at least one anode layer, wherein after having created the first and the second metal layer, a metal layer on top of the at least one anode layer has a second thickness and a metal layer on top of the drift layer has a first thickness, wherein the second thickness is smaller than the first thickness, f) then performing a first heating step at a first temperature, by which due the second thickness being smaller than the first thickness an ohmic contact is formed at the interface between the second metal layer and the at least one anode layer, wherein performing the first heating step such that a temperature below the first metal layer is kept below a temperature for forming an ohmic contact.
    • 提供了一种制造具有阳极侧(10)和阴极侧(15)的宽带隙结型势垒肖特基二极管(1)的方法,其中在阴极侧(15)上布置(n +)掺杂阴极层(2) ,在阳极侧(10)上布置至少一个p掺杂阳极层(3),在阴极层(2)和至少一个阳极层(3)之间布置(n-)掺杂漂移层(4) ),所述漂移层(4)延伸到阳极侧(10),其中执行以下制造步骤:a)提供(n +)掺杂的宽带隙衬底(100),b) (2),c)在漂移层(4)上形成至少一个阳极层(3),d)在漂移层 (4),用于形成肖特基接触(55),其特征在于,e)在至少一个阳极层(3)的顶部上形成第二金属层(6),其中在形成第一和第二金属层 5,6),一个见面 在所述至少一个阳极层(3)的顶部上具有第二厚度(64)并且在所述漂移层(4)的顶部上的金属层具有第一厚度(54),其中所述第二厚度(64)是 f)然后在第一温度下执行第一加热步骤(63),由此第二厚度(64)小于第一厚度(54),因此欧姆接触(65)是小于第一厚度 形成在所述第二金属层(6)和所述至少一个阳极层(3)之间的界面处,其中执行所述第一加热步骤(63),使得所述第一金属层(5)下方的温度保持低于 形成欧姆接触。