基本信息:
- 专利标题： MEMS TUNABLE RESONATOR IN A CAVITY
- 申请号：PCT/US2010/039374 申请日：2010-06-21
- 公开(公告)号：WO2010148405A3 公开(公告)日：2010-12-23
- 发明人： PARK, Sang-June
- 申请人： QUALCOMM Incorporated , PARK, Sang-June
- 申请人地址： ATTN: INTERNATIONAL IP ADMINISTRATION 5775 Morehouse Drive San Diego, California 92121 US
- 专利权人： QUALCOMM Incorporated,PARK, Sang-June
- 当前专利权人： QUALCOMM Incorporated,PARK, Sang-June
- 当前专利权人地址： ATTN: INTERNATIONAL IP ADMINISTRATION 5775 Morehouse Drive San Diego, California 92121 US
- 代理机构： MOBARHAN, Ramin
- 优先权： US12/488,404 20090619
- 主分类号： H03H9/46
- IPC分类号： H03H9/46 ; H03H9/02 ; H01P1/219 ; H03H7/01 ; H01P7/06
摘要：
Tunable MEMS resonators having adjustable resonance frequency and capable of handling large signals are described. In one exemplary design, a tunable MEMS resonator includes (i) a first part (160) having a cavity (180) and a post (170) and (ii) a second part (110) mated to the first part (160) and including a movable plate (140) located under the post (170). Each part may be covered with a metal layer (130, 190) on the surface facing the other part. The movable plate (140) may be mechanically moved by a DC voltage to vary the resonance frequency of the MEMS resonator. The cavity (180) may have a rectangular or circular shape and may be empty or filled with a dielectric material. The post (170) may be positioned in the middle of the cavity (180). The movable plate (140) may be attached to the second part (i) via an anchor (144) and operated as a cantilever or (ii) via two anchors (146, 148) and operated as a bridge.
IPC结构图谱:
| H | 电学 |
| --H03 | 基本电子电路 |
| ----H03H | 阻抗网络，例如谐振电路；谐振器 |
| ------H03H9/00 | 包括机电或电声元件的网络，如谐振电路 |
| --------H03H9/46 | .滤波器 |