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1. 发明申请

WO2007103896A2 WAFER CENTER FINDING 审中-公开
标题翻译： WAFER CENTER发现
公开(公告)号：WO2007103896A2
公开(公告)日：2007-09-13
申请号：PCT/US2007/063345
申请日：2007-03-05
申请人： BLUESHIFT TECHNOLOGIES, INC. , KILEY, Chris , VAN DER MEULEN, Peter , PANNESE, Patrick, D. , BUZAN, Forest , FOGEL, Paul, E. , PANNESE, Patrick, D.
发明人： KILEY, Chris , VAN DER MEULEN, Peter , PANNESE, Patrick, D. , BUZAN, Forest , FOGEL, Paul, E. , PANNESE, Patrick, D.
IPC分类号： G06F19/00
CPC分类号： H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67253 , H01L21/67748 , H01L21/67751 , H01L21/68764 , H01L21/68771
摘要： A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.
摘要翻译：本文公开了一些改进在半导体制造中使用的现有技术的晶片中心发现方法和系统。

2. 发明申请

WO2007103887A2 SEMICONDUCTOR MANUFACTURING PROCESS MODULES 审中-公开
标题翻译：半导体制造工艺模块
公开(公告)号：WO2007103887A2
公开(公告)日：2007-09-13
申请号：PCT/US2007/063333
申请日：2007-03-05
申请人： BLUESHIFT TECHNOLOGIES, INC. , VAN DER MEULEN, Peter , KILEY, Chris , PANNESE, Patrick, D.
发明人： VAN DER MEULEN, Peter , KILEY, Chris , PANNESE, Patrick, D.
IPC分类号： A61N5/00
CPC分类号： H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67253 , H01L21/67748 , H01L21/67751 , H01L21/68764 , H01L21/68771
摘要： A variety of process modules are described for use in semiconductor manufacturing processes.
摘要翻译：描述了用于半导体制造工艺的各种工艺模块。

3. 发明申请

WO2008030637A2 METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS 审中-公开
标题翻译：用于控制半导体制造工艺的方法和系统
公开(公告)号：WO2008030637A2
公开(公告)日：2008-03-13
申请号：PCT/US2007/067965
申请日：2007-05-01
申请人： BLUESHIFT TECHNOLOGIES, INC. , PANNESE, Patrick, D. , KAVATHEKAR, Vinaya , VAN DER MEULEN, Peter
发明人： PANNESE, Patrick, D. , KAVATHEKAR, Vinaya , VAN DER MEULEN, Peter
IPC分类号： B65G65/00
CPC分类号： G05B19/41865 , G05B19/4188 , Y02P90/18 , Y02P90/20 , Y02P90/24 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
摘要翻译：用于控制异构半导体制造环境中的过程的软件可以包括以晶片为中心的数据库，使用神经网络的实时调度器以及显示系统的模拟操作的图形用户界面。这些特征可以单独使用或组合使用，以提供用于实时控制和监控半导体制造过程的改进的可用性和计算效率。更一般地说，这些技术可以有用地用于各种实时控制系统，特别是需要复杂调度决策的系统或由来自众多独立供应商的硬件构成的异构系统。

4. 发明申请

WO2009026372A1 WAFER PRESENCE DETECTION 审中-公开
标题翻译：波形存在检测
公开(公告)号：WO2009026372A1
公开(公告)日：2009-02-26
申请号：PCT/US2008/073726
申请日：2008-08-20
申请人： BLUESHIFT TECHNOLOGIES, INC. , VAN DER MEULEN, Peter , FOGEL, Paul, E.
发明人： VAN DER MEULEN, Peter , FOGEL, Paul, E.
IPC分类号： H01L21/66 , H01L21/68
CPC分类号： H01L21/67265
摘要： The presence of a workpiece on an end effector of a vacuum robotic handler is detecting using any of a number of non-contact techniques in which some or all of the detection hardware is positioned outside a vacuum chamber that encloses the vacuum robotic handler. Various deployments include laser beam breaking, analysis of radar reflection signals, or analysis of radio frequency identification tag signatures. By providing non-physical couplings between hardware inside and outside of a vacuum environment, integrity of the vacuum is improved. These non-contact techniques are further adapted as described herein to multi-wafer and multi-end effector environments so that independent detection of multiple wafers (e.g., for each end effector) can be performed.
摘要翻译：在真空机器人处理器的末端执行器上存在工件是使用许多非接触技术中的任何一种来检测的，其中一些或全部检测硬件位于包围真空机器人处理器的真空室外部。各种部署包括激光束破碎，雷达反射信号分析或射频识别标签签名分析。通过在真空环境内部和外部的硬件之间提供非物理耦合，提高了真空的完整性。这些非接触技术如本文所述进一步适应于多晶片和多端效应器环境，使得可以执行多个晶片（例如，对于每个末端执行器）的独立检测。

5. 发明申请

WO2005048313A2 METHODS AND SYSTEMS FOR HANDLING WORKPIECES IN A VACUUM-BASED SEMICONDUCTOR HANDLING SYSTEM 审中-公开
标题翻译：在基于真空的半导体处理系统中处理工件的方法和系统
公开(公告)号：WO2005048313A2
公开(公告)日：2005-05-26
申请号：PCT/US2004/037672
申请日：2004-11-10
申请人： BLUESHIFT TECHNOLOGIES, INC. , VAN DER MEULEN, Peter
发明人： VAN DER MEULEN, Peter
IPC分类号： H01L
CPC分类号： H01L21/67167 , B25J9/042 , H01L21/67126 , H01L21/67161 , H01L21/67173 , H01L21/67178 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67253 , H01L21/67259 , H01L21/67706 , H01L21/67727 , H01L21/67733 , H01L21/67736 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/67754 , H01L21/67757 , H01L21/67781 , H01L21/68 , H01L21/68707 , H01L21/68735 , Y10S414/135 , Y10S414/137 , Y10S414/139 , Y10T74/20305
摘要： Methods and systems are provided for handling materials in a vacuum-based semiconductor handling system, including methods and systems for handling materials from arm to arm in order to traverse a linear handling system.
摘要翻译：提供了用于在基于真空的半导体处理系统中处理材料的方法和系统，包括用于处理从臂到臂的材料以便横穿线性处理系统的方法和系统。

6. 发明申请

WO2008151095A3 VACUUM SUBSTRATE STORAGE 审中-公开
公开(公告)号：WO2008151095A3
公开(公告)日：2008-12-11
申请号：PCT/US2008/065442
申请日：2008-05-30
申请人： BLUESHIFT TECHNOLOGIES, INC. , VAN DER MEULEN, Peter
发明人： VAN DER MEULEN, Peter
IPC分类号： H01L21/683
摘要： A two piece shell is employed for intermediate and long term storage of substrates. The shell is formed of two halves that can be juxtaposed in vacuum and externally vented, with the internal vacuum retaining the halves in vacuum-sealed engagement. One of the halves also provides a vacuum-sealing perimeter for selectively sealing to a process chamber during loading and/or unloading of the shell with a substrate. A vacuum monitor or the like may be employed to monitor pressure during storage and provide alerts if the vacuum within the sealed shell is compromised.

7. 发明申请

WO2009135144A2 SUBSTRATE CONTAINER SEALING VIA MOVABLE MAGNETS 审中-公开
标题翻译：基座容器通过可移动磁铁密封
公开(公告)号：WO2009135144A2
公开(公告)日：2009-11-05
申请号：PCT/US2009/042549
申请日：2009-05-01
申请人： BLUESHIFT TECHNOLOGIES, INC. , VAN DER MEULEN, Peter
发明人： VAN DER MEULEN, Peter
IPC分类号： H01L21/673 , B65D85/86 , B65D85/38
CPC分类号： H01L21/67373 , H01L21/67376
摘要： A system of moving magnets for sealing a container may include a plurality of moveable magnets disposed near a perimeter of a container door and a rotatable linkage hub positioned within the perimeter of the container door. In addition, the system may include a plurality of control linkages connecting each of the plurality of moveable magnets to the linkage hub so that rotating the linkage hub causes the control linkages to move the moveable magnets between a sealed position and an open position. Alternatively, the moveable magnets may be connected to each other by a magnet positioning mechanism to physically move the magnets along a path near the perimeter. A plurality of static magnets may be disposed near an opening sized to receive the container door and positioned to form a magnetic seal with the moveable magnets when the moveable magnets are positioned at the sealed position.
摘要翻译：用于密封容器的移动磁体的系统可以包括设置在容器门的周边附近的多个可移动磁体和位于容器门的周边内的可旋转连接毂。另外，该系统可以包括将多个可移动磁体中的每一个连接到连接轮毂的多个控制连杆，使得旋转连接轮毂使得控制连杆将可移动磁体移动到密封位置和打开位置之间。或者，可移动磁体可以通过磁体定位机构彼此连接，以沿着靠近周边的路径物理地移动磁体。多个静磁体可以设置在开口大小附近，以便接收容器门并定位成当可移动磁体位于密封位置时与可移动磁体形成磁密封。

8. 发明申请

WO2008087586A1 DETERMINATION OF SUSCEPTIBILITY-INDUCED MAGNETIC FIELD GRADIENTS BY MAGNETIC RESONANCE 审中-公开
标题翻译：通过磁共振测定可触发感应磁场梯度
公开(公告)号：WO2008087586A1
公开(公告)日：2008-07-24
申请号：PCT/IB2008/050126
申请日：2008-01-15
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH , DAHNKE, Hannes , SCHAEFFTER, Tobias , VAN DER MEULEN, Peter
发明人： DAHNKE, Hannes , SCHAEFFTER, Tobias , VAN DER MEULEN, Peter
IPC分类号： G01R33/28 , G01R33/48 , G01R33/3875
CPC分类号： G01R33/56536 , G01R33/243 , G01R33/281 , G01R33/286 , G01R33/3875 , G01R33/48 , G01R33/5601
摘要： The invention relates to a device for magnetic resonance imaging of a body (7). The device (1) comprises means (2) for establishing a substantially homogeneous main magnetic field in the examination volume, means (3, 4, 5) for generating switched magnetic field gradients superimposed upon the main magnetic field, means (6) for radiating RF pulses towards the body (7), control means (12) for controlling the generation of the magnetic field gradients and the RF pulses, means (10) for receiving and sampling magnetic resonance signals, and reconstruction means (14) for forming MR images from the signal samples. In accordance with the invention, the device is arranged to a) generate a series of MR echo signals (20) by subjecting at least a portion of the body (7) to an MR imaging sequence of RF pulses and switched magnetic field gradients, b) acquire the MR echo signals for reconstructing an MR image data set (21) therefrom, c) calculate a gradient map (22) by co mput ing echo shift parameters (SP x , SP y , SP z ) from subsets of the MR image data set, the echo shift parameters (SP x , SP y , SP z ) indicating magnetic field gradient induced shifts of the echo positions in k-space, wherein each subset comprises a number ( n ) of spatially adjacent pixel or voxel values of the MR image data set (21).
摘要翻译：本发明涉及一种用于身体（7）的磁共振成像的装置。装置（1）包括用于在检查体积中建立基本均匀的主磁场的装置（2），用于产生叠加在主磁场上的开关磁场梯度的装置（3,4,5），用于辐射的装置（6）朝向身体（7）的RF脉冲，用于控制磁场梯度和RF脉冲的产生的控制装置（12），用于接收和采样磁共振信号的装置（10），以及用于形成MR图像的重建装置（14）从信号样本。根据本发明，该装置被设置成：a）通过使身体（7）的至少一部分经受RF脉冲的MR成像序列和切换的磁场梯度来生成一系列MR回波信号（20），b ）获取用于重建MR图像数据集（21）的MR回波信号，c）通过输入回波移位参数（SP SP x S，SP SP）计算梯度图（22） MR图像数据组的子集，回波移位参数（SP ，SP＆gt; Z＆lt; / SUB＆gt; 指示磁场梯度引起k空间中的回波位置的移位，其中每个子集包括MR图像数据集（21）的空间相邻像素的数量（n）或体素值。

9. 发明申请

WO2012140536A1 MR IMAGING WITH B1MAPPING 审中-公开
标题翻译：拍摄与拍摄
公开(公告)号：WO2012140536A1
公开(公告)日：2012-10-18
申请号：PCT/IB2012/051590
申请日：2012-04-02
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH , VAN DER MEULEN, Peter , BOERNERT, Peter , NEHRKE, Kay
发明人： VAN DER MEULEN, Peter , BOERNERT, Peter , NEHRKE, Kay
IPC分类号： G01R33/24
CPC分类号： G01R33/288 , G01R33/246
摘要： The invention relates to a method of MR imaging, wherein a portion of a body is subjected to an imaging sequence of RF pulses and switched magnetic field gradients, which imaging sequence is a stimulated echo sequence including an off-resonant Bloch- Siegert RF pulse (BS) radiated during a preparation period (21) of the stimulated echo sequence. A B 1 map is derived from the acquired stimulated echo MR signals. Moreover, the invention relates to a method of MR imaging, wherein a portion of a body is subjected to a first imaging sequence, which comprises a first composite excitation RF pulse consisting of two RF pulse components having essentially equal flip angles and being out of phase by essentially 90°. Further, the portion of the body is subjected to a second imaging sequence, wherein a B 1 map is derived from signal data acquired by means of the first and second imaging sequences.
摘要翻译：本发明涉及一种MR成像方法，其中身体的一部分经受RF脉冲和切换磁场梯度的成像序列，该成像序列是受激回波序列，其包括非共振Bloch-Siegert RF脉冲（ BS）在刺激回波序列的准备阶段（21）期间辐射。从获得的受激回波MR信号导出B1图。此外，本发明涉及一种MR成像方法，其中身体的一部分经受第一成像序列，该第一成像序列包括第一复合激励RF脉冲，该第一复合激励RF脉冲由具有基本相等的翻转角并且相位不同的两个RF脉冲分量组成基本上为90°。此外，身体的部分经受第二成像序列，其中从通过第一和第二成像序列获取的信号数据导出B1图。

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