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1. 发明申请

WO2005048313A2 METHODS AND SYSTEMS FOR HANDLING WORKPIECES IN A VACUUM-BASED SEMICONDUCTOR HANDLING SYSTEM 审中-公开
标题翻译：在基于真空的半导体处理系统中处理工件的方法和系统
公开(公告)号：WO2005048313A2
公开(公告)日：2005-05-26
申请号：PCT/US2004/037672
申请日：2004-11-10
申请人： BLUESHIFT TECHNOLOGIES, INC. , VAN DER MEULEN, Peter
发明人： VAN DER MEULEN, Peter
IPC分类号： H01L
CPC分类号： H01L21/67167 , B25J9/042 , H01L21/67126 , H01L21/67161 , H01L21/67173 , H01L21/67178 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67253 , H01L21/67259 , H01L21/67706 , H01L21/67727 , H01L21/67733 , H01L21/67736 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/67754 , H01L21/67757 , H01L21/67781 , H01L21/68 , H01L21/68707 , H01L21/68735 , Y10S414/135 , Y10S414/137 , Y10S414/139 , Y10T74/20305
摘要： Methods and systems are provided for handling materials in a vacuum-based semiconductor handling system, including methods and systems for handling materials from arm to arm in order to traverse a linear handling system.
摘要翻译：提供了用于在基于真空的半导体处理系统中处理材料的方法和系统，包括用于处理从臂到臂的材料以便横穿线性处理系统的方法和系统。

2. 发明申请

WO2007101228A3 SEMICONDUCTOR WAFER HANDLING AND TRANSPORT 审中-公开
标题翻译：半导体波浪处理和运输
公开(公告)号：WO2007101228A3
公开(公告)日：2009-03-26
申请号：PCT/US2007062921
申请日：2007-02-27
申请人： BLUESHIFT TECHNOLOGIES INC , VAN DER MEULEN PETER , KILEY CHRISTOPHER C , PANNESE PATRICK D , RITTER RAYMOND S , SCHAEFER THOMAS A
发明人： VAN DER MEULEN PETER , KILEY CHRISTOPHER C , PANNESE PATRICK D , RITTER RAYMOND S , SCHAEFER THOMAS A
IPC分类号： H01L21/677
CPC分类号： H01L21/67207 , H01L21/67161 , H01L21/67184 , H01L21/67196 , H01L21/67201 , H01L21/67727 , H01L21/67742 , H01L21/67745
摘要： Modular wafer transport and handling facilities (6100) are combined in a variety o ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems (6150) to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.
摘要翻译：模块化晶圆输送和处理设备（6100）以多种方式组合，可在真空半导体处理系统中提供更高水平的灵活性，效用，效率和功能。各种处理和其他模块可以与隧道和车辆运输系统（6150）相互连接，以延长真空环境的距离和通用性。引入诸如旁路热调节器，缓冲对准器，批处理，多功能模块，低粒子通风口，集束处理单元等的其它改进以扩展功能并提高处理效率。

3. 发明申请

WO2008030637A3 METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS 审中-公开
标题翻译：用于控制半导体制造工艺的方法和系统
公开(公告)号：WO2008030637A3
公开(公告)日：2008-12-18
申请号：PCT/US2007067965
申请日：2007-05-01
申请人： BLUESHIFT TECHNOLOGIES INC , PANNESE PATRICK D , KAVATHEKAR VINAYA , VAN DER MEULEN PETER
发明人： PANNESE PATRICK D , KAVATHEKAR VINAYA , VAN DER MEULEN PETER
IPC分类号： G05B11/01 , G06F19/00
CPC分类号： G05B19/41865 , G05B19/4188 , Y02P90/18 , Y02P90/20 , Y02P90/24 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
摘要翻译：用于控制异构半导体制造环境中的处理的软件可以包括以晶圆为中心的数据库，使用神经网络的实时调度器和显示系统的模拟操作的图形用户界面。这些特征可以单独使用或组合使用以提供用于半导体制造过程的实时控制和监视的改进的可用性和计算效率。更一般来说，这些技术可以有用地用于各种实时控制系统中，特别是需要复杂调度决策的系统或由许多独立供应商的硬件构成的异构系统。

4. 发明申请

WO2008151095A2 VACUUM SUBSTRATE STORAGE 审中-公开
标题翻译：真空基板存储
公开(公告)号：WO2008151095A2
公开(公告)日：2008-12-11
申请号：PCT/US2008065442
申请日：2008-05-30
申请人： BLUESHIFT TECHNOLOGIES INC , VAN DER MEULEN PETER
发明人： VAN DER MEULEN PETER
IPC分类号： H01L21/683
CPC分类号： H01L21/67751 , H01L21/67126 , H01L21/67353 , H01L21/67376
摘要： A two piece shell is employed for intermediate and long term storage of substrates. The shell is formed of two halves that can be juxtaposed in vacuum and externally vented, with the internal vacuum retaining the halves in vacuum-sealed engagement. One of the halves also provides a vacuum-sealing perimeter for selectively sealing to a process chamber during loading and/or unloading of the shell with a substrate. A vacuum monitor or the like may be employed to monitor pressure during storage and provide alerts if the vacuum within the sealed shell is compromised.
摘要翻译：采用两片外壳用于中间和长期储存基材。外壳由两个半部形成，可以在真空中并排并外部排放，内部真空将半部保持在真空密封接合状态。其中一半还提供真空密封周边，用于在用基底装载和/或卸载壳体期间选择性地密封到处理室。可以使用真空监测器等来监测储存期间的压力，并且如果密封壳体内的真空受损，则可提供警报。

5. 发明申请

WO2007103896A3 WAFER CENTER FINDING 审中-公开
标题翻译： WAFER中心查找
公开(公告)号：WO2007103896A3
公开(公告)日：2008-07-10
申请号：PCT/US2007063345
申请日：2007-03-05
申请人： BLUESHIFT TECHNOLOGIES INC , KILEY CHRIS , VAN DER MEULEN PETER , PANNESE PATRICK D , BUZAN FOREST , FOGEL PAUL E
发明人： KILEY CHRIS , VAN DER MEULEN PETER , PANNESE PATRICK D , BUZAN FOREST , FOGEL PAUL E
IPC分类号： G01B11/14 , H01L21/67
CPC分类号： H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67253 , H01L21/67748 , H01L21/67751 , H01L21/68764 , H01L21/68771
摘要： A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.
摘要翻译：本文公开了一些改进了半导体制造中使用的现有技术的晶片中心发现方法和系统。

6. 发明申请

WO2009135144A2 SUBSTRATE CONTAINER SEALING VIA MOVABLE MAGNETS 审中-公开
标题翻译：基座容器通过可移动磁铁密封
公开(公告)号：WO2009135144A2
公开(公告)日：2009-11-05
申请号：PCT/US2009/042549
申请日：2009-05-01
申请人： BLUESHIFT TECHNOLOGIES, INC. , VAN DER MEULEN, Peter
发明人： VAN DER MEULEN, Peter
IPC分类号： H01L21/673 , B65D85/86 , B65D85/38
CPC分类号： H01L21/67373 , H01L21/67376
摘要： A system of moving magnets for sealing a container may include a plurality of moveable magnets disposed near a perimeter of a container door and a rotatable linkage hub positioned within the perimeter of the container door. In addition, the system may include a plurality of control linkages connecting each of the plurality of moveable magnets to the linkage hub so that rotating the linkage hub causes the control linkages to move the moveable magnets between a sealed position and an open position. Alternatively, the moveable magnets may be connected to each other by a magnet positioning mechanism to physically move the magnets along a path near the perimeter. A plurality of static magnets may be disposed near an opening sized to receive the container door and positioned to form a magnetic seal with the moveable magnets when the moveable magnets are positioned at the sealed position.
摘要翻译：用于密封容器的移动磁体的系统可以包括设置在容器门的周边附近的多个可移动磁体和位于容器门的周边内的可旋转连接毂。另外，该系统可以包括将多个可移动磁体中的每一个连接到连接轮毂的多个控制连杆，使得旋转连接轮毂使得控制连杆将可移动磁体移动到密封位置和打开位置之间。或者，可移动磁体可以通过磁体定位机构彼此连接，以沿着靠近周边的路径物理地移动磁体。多个静磁体可以设置在开口大小附近，以便接收容器门并定位成当可移动磁体位于密封位置时与可移动磁体形成磁密封。

7. 发明申请

WO2008039844A3 APPARATUS AND METHODS FOR PROVIDING DIRECTIONAL COMMANDS FOR A MOBILE COMPUTING DEVICE 审中-公开
标题翻译：用于提供移动计算设备的方向命令的装置和方法
公开(公告)号：WO2008039844A3
公开(公告)日：2008-07-03
申请号：PCT/US2007079542
申请日：2007-09-26
申请人： PALM INC , VAN DER MEULEN PETER S
发明人： VAN DER MEULEN PETER S
IPC分类号： G06F3/041
CPC分类号： H04M1/72544 , H04M1/7258
摘要： Various embodiments for providing directional commands for a mobile computing device are described. In one or more embodiments, a mobile computing device may comprise a keypad arranged to operate in multiple modes including a standard mode and a directional mode such as a gaming mode, for example. The standard mode may support all of the preset and programmable commands and functions typically provided for normal operation of the mobile computing device. The directional mode may associate certain directional commands with multiple keys and/or buttons of the keypad so that most keystrokes and keystroke combinations input by a user will be interpreted as a particular directional command. The directional mode may be used when running applications which respond primarily to directional commands such as gaming applications. Other embodiments are described and claimed.
摘要翻译：描述了用于为移动计算设备提供定向命令的各种实施例。在一个或多个实施例中，移动计算设备可以包括布置成在包括诸如游戏模式的标准模式和定向模式的多种模式中操作的小键盘。标准模式可以支持通常为移动计算设备的正常操作提供的所有预设和可编程命令和功能。方向模式可以将某些方向命令与键盘的多个键和/或按钮相关联，使得由用户输入的大多数击键和击键组合将被解释为特定的定向命令。当运行主要响应诸如游戏应用的定向命令的应用时，可以使用定向模式。描述和要求保护其他实施例。

8. 发明申请

WO2007103887A3 SEMICONDUCTOR MANUFACTURING PROCESS MODULES 审中-公开
标题翻译：半导体制造工艺模块
公开(公告)号：WO2007103887A3
公开(公告)日：2008-06-12
申请号：PCT/US2007063333
申请日：2007-03-05
申请人： BLUESHIFT TECHNOLOGIES INC , VAN DER MEULEN PETER , KILEY CHRIS , PANNESE PATRICK D
发明人： VAN DER MEULEN PETER , KILEY CHRIS , PANNESE PATRICK D
IPC分类号： B65G1/133
CPC分类号： H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67253 , H01L21/67748 , H01L21/67751 , H01L21/68764 , H01L21/68771
摘要： A variety of process modules are described for use in semiconductor manufacturing processes.
摘要翻译：描述了用于半导体制造工艺的各种工艺模块。

9. 发明申请

WO2008039844A2 APPARATUS AND METHODS FOR PROVIDING DIRECTIONAL COMMANDS FOR A MOBILE COMPUTING DEVICE 审中-公开
标题翻译：用于为移动计算设备提供定向命令的装置和方法
公开(公告)号：WO2008039844A2
公开(公告)日：2008-04-03
申请号：PCT/US2007/079542
申请日：2007-09-26
申请人： PALM, INC. , VAN DER MEULEN, Peter, S.
发明人： VAN DER MEULEN, Peter, S.
IPC分类号： H04M1/00
CPC分类号： H04M1/72544 , H04M1/7258
摘要： Various embodiments for providing directional commands for a mobile computing device are described. In one or more embodiments, a mobile computing device may comprise a keypad arranged to operate in multiple modes including a standard mode and a directional mode such as a gaming mode, for example. The standard mode may support all of the preset and programmable commands and functions typically provided for normal operation of the mobile computing device. The directional mode may associate certain directional commands with multiple keys and/or buttons of the keypad so that most keystrokes and keystroke combinations input by a user will be interpreted as a particular directional command. The directional mode may be used when running applications which respond primarily to directional commands such as gaming applications. Other embodiments are described and claimed.
摘要翻译：描述了用于为移动计算设备提供方向性命令的各种实施例。在一个或多个实施例中，例如，移动计算设备可以包括布置成以包括标准模式和定向模式（诸如游戏模式）的多种模式操作的小键盘。标准模式可以支持通常为移动计算设备的正常操作提供的所有预设和可编程命令和功能。定向模式可以将某些方向命令与小键盘的多个键和/或按钮相关联，使得用户输入的大多数击键和击键组合将被解释为特定的方向命令。当运行主要响应诸如游戏应用的方向命令的应用程序时，可以使用定向模式。描述并要求保护其他实施例。

10. 发明申请

WO2008030637A2 METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS 审中-公开
标题翻译：用于控制半导体制造工艺的方法和系统
公开(公告)号：WO2008030637A2
公开(公告)日：2008-03-13
申请号：PCT/US2007/067965
申请日：2007-05-01
申请人： BLUESHIFT TECHNOLOGIES, INC. , PANNESE, Patrick, D. , KAVATHEKAR, Vinaya , VAN DER MEULEN, Peter
发明人： PANNESE, Patrick, D. , KAVATHEKAR, Vinaya , VAN DER MEULEN, Peter
IPC分类号： B65G65/00
CPC分类号： G05B19/41865 , G05B19/4188 , Y02P90/18 , Y02P90/20 , Y02P90/24 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
摘要翻译：用于控制异构半导体制造环境中的过程的软件可以包括以晶片为中心的数据库，使用神经网络的实时调度器以及显示系统的模拟操作的图形用户界面。这些特征可以单独使用或组合使用，以提供用于实时控制和监控半导体制造过程的改进的可用性和计算效率。更一般地说，这些技术可以有用地用于各种实时控制系统，特别是需要复杂调度决策的系统或由来自众多独立供应商的硬件构成的异构系统。

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