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1. 发明授权

US5883437A Method and apparatus for inspection and correction of wiring of electronic circuit and for manufacture thereof 失效
标题翻译：电子电路接线检查和校正方法及装置及其制造方法
公开(公告)号：US5883437A
公开(公告)日：1999-03-16
申请号：US580531
申请日：1995-12-28
申请人： Shigenobu Maruyama , Mikio Hongo , Satoru Todoroki , Masaaki Okunaka , Hideo Matsuzaki , Takanori Ninomiya , Kazushi Yoshimura , Fumikazu Ito
发明人： Shigenobu Maruyama , Mikio Hongo , Satoru Todoroki , Masaaki Okunaka , Hideo Matsuzaki , Takanori Ninomiya , Kazushi Yoshimura , Fumikazu Ito
IPC分类号： G02F1/1362 , H01L21/48 , H01L23/48 , H01L29/40 , H01L29/52
CPC分类号： G02F1/136286 , H01L21/485 , G02F2001/136254 , H01L2924/0002
摘要： A method and apparatus for inspecting wirings of an electronic circuit substrate to detect a defect in the wiring and for enabling correction thereof. The inspection method and apparatus include electrostatically coupling at least one electrode to a wiring pattern, applying a time varying voltage between the electrode and wiring pattern at different locations so as to detect a current flow and determine a defect by a variation in the detected current flow at the different locations and a portion of the defect. A defect in the form of a disconnected or half-disconnected point of the wiring may be corrected by supplying a solution of a metal complex to the disconnected or half-disconnected point, heating the solution and end point areas of the disconnected or half-disconnected point by laser light and precipitating a metal thin film establishing a connection of the wiring.
摘要翻译：一种用于检查电子电路基板的布线以检测布线中的缺陷并使其能够进行校正的方法和装置。检查方法和装置包括将至少一个电极静电耦合到布线图案，在不同位置在电极和布线图案之间施加时变电压，以便检测电流，并通过检测电流的变化来确定缺陷在不同的位置和缺陷的一部分。可以通过将金属复合物的溶液提供给断开或半断开的点来加热接头的断开或半断开点的形式的缺陷，加热解决方案和终点区域的断开或半断开通过激光点并沉淀建立连线的金属薄膜。

2. 发明授权

US4772125A Apparatus and method for inspecting soldered portions 失效
标题翻译：用于检查焊接部分的装置和方法
公开(公告)号：US4772125A
公开(公告)日：1988-09-20
申请号：US875974
申请日：1986-06-19
申请人： Kazushi Yoshimura , Takashi Hiroi , Takanori Ninomiya , Toshimitsu Hamada , Yasuo Nakagawa , Kohichi Karasaki
发明人： Kazushi Yoshimura , Takashi Hiroi , Takanori Ninomiya , Toshimitsu Hamada , Yasuo Nakagawa , Kohichi Karasaki
IPC分类号： G01B11/24 , G01N21/64 , G01N21/88 , G01N21/956 , G06T7/00
CPC分类号： G06T7/0006 , G01N21/95684 , G01N2021/95646 , G01N21/64 , G06T2207/10064 , G06T2207/30152
摘要： An apparatus for inspecting an appearance of soldered portions connected between the pads formed on a printed circuit board and leads of an electronic body part. A slit light beam is directed to portions to be inspected and scanned thereon with a light fluorescent image generated from the substrate portion of the printed circuit board and a dark fluorescent image generated from the leads, pads and soldered portions being detected with an image signal being generated in accordance therewith. The image signal is binarized and different functions are extracted from the binarized signal which functions are utilized in connection with other functions and previously obtained data to determine whether an abnormal portion is present or not in a predetermined position on the circuit board.
摘要翻译：一种用于检查连接在形成在印刷电路板上的焊盘和电子主体部分的引线之间的焊接部分的外观的装置。利用从印刷电路板的基板部分产生的荧光图像将狭缝光束引导到要检查和扫描的部分，并且从引线，焊盘和焊接部分产生的暗荧光图像被图像信号检测到根据其产生。图像信号被二值化，并且从二值化信号中提取不同的功能，该功能与其他功能相关联使用，并且先前获得的数据用于确定在电路板上的预定位置是否存在异常部分。

3. 发明授权

US5781294A Method and apparatus for detecting photoacoustic signal to detect surface and subsurface information of the specimen 失效
标题翻译：用于检测光声信号以检测样品的表面和地下信息的方法和装置
公开(公告)号：US5781294A
公开(公告)日：1998-07-14
申请号：US548015
申请日：1995-10-25
申请人： Toshihiko Nakata , Takanori Ninomiya , Hilario Haruomi Kobayashi , Kazushi Yoshimura
发明人： Toshihiko Nakata , Takanori Ninomiya , Hilario Haruomi Kobayashi , Kazushi Yoshimura
IPC分类号： G01N21/17 , G01N29/06 , G01N29/24 , G01N29/34 , G01B9/02
CPC分类号： G01N29/346 , G01N21/1702 , G01N29/0609 , G01N29/2418 , G01N2291/012
摘要： A method and an apparatus for detecting a photoacoustic signal are provided which irradiate an excitation light beam, modulated by a desired frequency, simultaneously to a plurality of points being measured on a surface of a sample, irradiate the excitation light and a probe light simultaneously to the plurality of the points being measured, detect an interference light of a reflected light beam of the probe light and a specified reference light with a detector made up of a plurality of photoelectric converting elements corresponding to the respective points being measured, the detector being in conjugate relation with the surface of the sample, detect a thermal distortion of the frequency component equal to the intensity-modulated frequency at the plurality of the points being measured from the interference light intensity signal detected by the detector, and detect information relative to the surface and the subsurface of the measuring points on the sample from the thermal distortion of the frequency component. A plurality of measuring points on a specimen are excited simultaneously with an intensity-modulated flat light beam and the thermal expansion displacements of the measuring points are detected simultaneously by interference between a flat probe light beam and a flat reference light beam to detect photothermal displacement signals representing the photothermal displacements of the plurality of measuring points simultaneously.
摘要翻译：提供了一种用于检测光声信号的方法和装置，其将在期望频率下调制的激发光束同时照射到在样品表面上测量的多个点，同时将激发光和探针光照射到测量的多个点，利用由与被测量的各个点相对应的多个光电转换元件组成的检测器检测探测光的反射光束和指定参考光的干涉光，检测器处于与样品表面的共轭关系，根据由检测器检测到的干涉光强度信号测量的多个点处，检测与等于强度调制频率的频率成分的热失真，并检测相对于表面的信息和样品上的测量点的地表从热失真的频率分量。试样上的多个测量点与强度调制的平坦光束同时激发，并且通过平坦探测光束和平坦参考光束之间的干涉同时检测测量点的热膨胀位移，以检测光热位移信号同时表示多个测量点的光热位移。

4. 发明申请

US20080282694A1 Stirling Engine 失效
标题翻译：斯特林发动机
公开(公告)号：US20080282694A1
公开(公告)日：2008-11-20
申请号：US11794839
申请日：2006-01-17
申请人： Yoshiyuki Kitamura , Kazushi Yoshimura , Kenji Takai , Shinji Yamagami , Jin Sakamoto
发明人： Yoshiyuki Kitamura , Kazushi Yoshimura , Kenji Takai , Shinji Yamagami , Jin Sakamoto
IPC分类号： F02G1/043
CPC分类号： F02G1/0435 , F02G2270/40 , F02G2270/55 , F02G2280/10 , F25B2309/001
摘要： A Stirling engine, wherein the inner yoke of a linear motor is installed on the outer peripheral surface of a cylinder. To keep a proper pressure balance between a compression space on one end side of a displacer and a back pressure space on the outer peripheral side of the cylinder, a first flow passage is formed in the piston starting at the compression space side end face toward the outer peripheral surface and a second flow passage allowing the first flow passage to communicate with the back pressure space is formed in the cylinder. The second flow passage is composed of a through hole that penetrates the wall of the cylinder in a radial direction and a communication passage formed between the outer peripheral surface of the cylinder and the inner peripheral surface of the inner yoke to allow the through hole to communicate with the back pressure space.
摘要翻译：一种斯特林发动机，其中线性电动机的内轭安装在气缸的外周表面上。为了在置换器的一端侧的压缩空间与气缸的外周侧的背压空间之间保持适当的压力平衡，在活塞的起始于压缩空间侧的端面朝向在圆筒中形成外周面和允许第一流路与背压空间连通的第二流路。第二流路由径向贯通圆筒壁的通孔和形成在圆筒的外周面与内轭的内周面之间的连通通道构成，以允许通孔连通与背压空间。

5. 发明授权

US06779349B2 Sterling refrigerating system and cooling device 失效
标题翻译： Sterling冷冻系统和冷却装置
公开(公告)号：US06779349B2
公开(公告)日：2004-08-24
申请号：US10362187
申请日：2003-02-21
申请人： Kazushi Yoshimura
发明人： Kazushi Yoshimura
IPC分类号： F25B900
CPC分类号： F25B9/14 , F25B2309/001 , F25B2500/01 , F25D11/00
摘要： A ring-shaped jacket is fitted around the warm section of a Stirling refrigerating device, and a cylindrical heat-rejecting heat exchanger is disposed around the body of the Stirling refrigerating device with a gap secured in between. The jacket and the heat-rejecting heat exchanger are connected together with a pipe to form a closed circuit, and a refrigerant is circulated through the closed circuit. This allows the heat in the warm section to be transferred by the refrigerant, permitting efficient heat rejection from the heat-rejecting heat exchanger. Thus, the desired cold is obtained stably from the cold section of the Stirling refrigerating device.
摘要翻译：在斯特林制冷装置的温暖部分周围装有一个环形护套，圆柱形散热热交换器设置在斯特林制冷装置的主体周围，间隙固定在其间。夹套和排热热交换器与管连接在一起形成闭路，制冷剂循环通过闭路。这允许温暖部分中的热量被制冷剂转移，从而允许来自排热热交换器的高效散热。因此，从斯特林制冷装置的冷部稳定地获得所需的冷却。

6. 发明授权

US08035058B2 Apparatus for repairing circuit pattern and method for manufacturing display apparatus using the same 有权
标题翻译：用于修复电路图案的装置和使用该装置的显示装置的制造方法
公开(公告)号：US08035058B2
公开(公告)日：2011-10-11
申请号：US11143981
申请日：2005-06-03
申请人： Nobuaki Nakasu , Kaoru Yamada , Yuichiro Tanaka , Takeshi Arai , Hideyuki Honoki , Kazushi Yoshimura , Tetsuya Kawamura , Masanori Okawa
发明人： Nobuaki Nakasu , Kaoru Yamada , Yuichiro Tanaka , Takeshi Arai , Hideyuki Honoki , Kazushi Yoshimura , Tetsuya Kawamura , Masanori Okawa
IPC分类号： B23K26/36
CPC分类号： B23K26/34 , B23K26/32 , B23K2101/34 , B23K2101/36 , B23K2103/08 , B23K2103/50 , G02F1/1309 , H01L27/124 , H01L27/1259
摘要： A region surrounded by two gate wiring and two drain wiring includes pixels and when there is a defect of short-circuit in adjacent pixel electrodes, the short-circuited portion is removed by irradiating a laser via a mask having a transmission pattern, which corresponds to a pattern of the gate wiring, drain wiring and pixel electrodes in the short-circuited portion. The above short-circuited portion is identified and removed in comparison to a normal pattern, by use of information from an inspection apparatus, and the pattern defect formed on the substrate is automatically repaired. By applying the above method to a manufacturing process of display apparatus, in particular, to a resist pattern forming process, a display apparatus having a highly qualified display property may be achieved.
摘要翻译：由两个栅极布线和两个漏极布线包围的区域包括像素，并且当相邻像素电极中存在短路的缺陷时，通过经由具有透射图案的掩模照射激光来去除短路部分，该掩模对应于在短路部分中的栅极布线，漏极布线和像素电极的图案。通过使用来自检查装置的信息，与正常图案相比，识别和去除上述短路部分，并自动修复在基板上形成的图案缺陷。通过将上述方法应用于显示装置的制造工艺，特别是涉及抗蚀剂图案形成处理，可以实现具有高度合格的显示特性的显示装置。

7. 发明授权

US07952074B2 Method and apparatus for inspecting integrated circuit pattern 有权
标题翻译：检查集成电路图案的方法和装置
公开(公告)号：US07952074B2
公开(公告)日：2011-05-31
申请号：US12190388
申请日：2008-08-12
申请人： Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
发明人： Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
IPC分类号： G01N23/22
CPC分类号： G01R31/305 , G01R31/307 , H01J37/28 , H01J2237/2817
摘要： A circuit pattern inspection method and an apparatus therefore, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined changed state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.
摘要翻译：因此，电路图案检查方法和其中待检查的样品的待检查部分的整体被制成处于预定的改变状态的装置，被检查部分被成像高分辨率照射，在扫描电子束时，在从电子束照射的时刻起经过规定的时间后，在照射电子束的部分检测到二次带电粒子，根据这样检测的次级通过使用如此形成的图像来检查带电粒子信号，并检查待检查的部分。

8. 发明授权

US06831998B1 Inspection system for circuit patterns and a method thereof 失效
标题翻译：电路图案检查系统及其方法
公开(公告)号：US06831998B1
公开(公告)日：2004-12-14
申请号：US09598652
申请日：2000-06-22
申请人： Hiroya Koshishiba , Hideaki Doi , Mitsunobu Isobe , Kazushi Yoshimura , Haruomi Kobayashi , Chie Shishido
发明人： Hiroya Koshishiba , Hideaki Doi , Mitsunobu Isobe , Kazushi Yoshimura , Haruomi Kobayashi , Chie Shishido
IPC分类号： G06K900
CPC分类号： G06T7/0004 , G06K9/00973 , G06T2207/30141
摘要： In order to provide a high-speed, inexpensive inspection system that has a short development period, that is flexible, and that allow algorithms to be easily changed, a PC equipped with an image input feature is used to capture an image detected by a line image sensor, this detected image is transferred to a plurality of PCs connected by a LAN, and defects are detected using software processing on the plurality of PCs.
摘要翻译：为了提供具有较短开发周期，灵活性并且允许算法容易改变的高速，廉价的检查系统，配备有图像输入特征的PC用于捕获由线检测到的图像图像传感器将该检测图像传送到由LAN连接的多个PC，并且使用多个PC上的软件处理来检测缺陷。

9. 发明授权

US4556797A Method and apparatus for detecting edge of fine pattern on specimen 失效
标题翻译：用于检测样品上精细图案边缘的方法和装置
公开(公告)号：US4556797A
公开(公告)日：1985-12-03
申请号：US530044
申请日：1983-09-07
申请人： Asahiro Kuni , Toshimitsu Hamada , Hiroshi Makihira , Kazushi Yoshimura
发明人： Asahiro Kuni , Toshimitsu Hamada , Hiroshi Makihira , Kazushi Yoshimura
IPC分类号： H01L21/66 , G01B7/00 , G01B15/04 , H01J37/28 , H01L21/027 , H01J37/00
CPC分类号： G01B15/04 , H01J37/28
摘要： In a method and apparatus for detecting the edge of a fine pattern formed on a specimen such as a fine circuit pattern formed on a semiconductor element or the like, there is prepared a predetermined model waveform based on theoretical secondary electron emission from the edge portion. Secondary electrons emitted from successive scanning points across the pattern edge portion through the irradiation of a scanning electron beam thereonto are detected to produce an actual signal waveform reflecting the secondary electron emission from the pattern edge portion. The actual signal waveform is compared with the model waveform, and one of the scanning points at which the highest coincidence exists between both the actual and model waveforms, is determined as a position of the pattern edge.
摘要翻译：在形成在半导体元件等上形成的精细电路图案的试样上形成的精细图案的边缘的方法和装置中，根据来自边缘部分的理论二次电子发射，制备预定的模型波形。检测从连续的扫描点通过扫描电子束照射到图案边缘部分的二次电子，以产生反映来自图案边缘部分的二次电子发射的实际信号波形。将实际信号波形与模型波形进行比较，确定实际波形和模型波形之间存在最高一致性的扫描点之一，作为图形边缘的位置。

10. 发明授权

US09134279B2 Internal defect inspection method and apparatus for the same 有权
标题翻译：内部缺陷检查方法和装置相同
公开(公告)号：US09134279B2
公开(公告)日：2015-09-15
申请号：US13819355
申请日：2011-06-01
申请人： Toshihiko Nakata , Tetsuya Matsui , Takehiro Tachizaki , Kazushi Yoshimura , Masahiro Watanabe
发明人： Toshihiko Nakata , Tetsuya Matsui , Takehiro Tachizaki , Kazushi Yoshimura , Masahiro Watanabe
IPC分类号： G01N29/04 , G01N29/22 , G01N29/24 , G01N29/06
CPC分类号： G01N29/221 , G01N29/04 , G01N29/043 , G01N29/0654 , G01N29/2418
摘要： An internal defect inspection method where an ultrasonic wave is emitted from an ultrasonic wave transmitter toward a sample, the ultrasonic wave reflected by the sample is detected by an imaging type common-path interferometer as an interference signal, an ultrasonic wave signal is obtained from the interference signal, and any defect within the sample is detected from the ultrasonic wave signal. An internal defect inspection apparatus including an ultrasonic wave transmitter, an imaging type common-path interferometer and an ultrasonic wave signal detecting device is also provided.
摘要翻译：从超声波发射器向样品发射超声波的内部缺陷检查方法，由成像型共通干涉仪作为干扰信号检测由样品反射的超声波，从超声波信号获得超声波信号干扰信号，并从超声波信号中检测出样本内的任何缺陷。还提供了包括超声波发射器，成像型共轨干涉仪和超声波信号检测装置的内部缺陷检查装置。

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