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1. 发明申请

US20130160552A1 INTERNAL DEFECT INSPECTION METHOD AND APPARATUS FOR THE SAME 有权
标题翻译：内部缺陷检查方法及其设备
公开(公告)号：US20130160552A1
公开(公告)日：2013-06-27
申请号：US13819355
申请日：2011-06-01
申请人： Toshihiko Nakata , Tetsuya Matsui , Takehiro Tachizaki , Kazushi Yoshimura , Masahiro Watanabe
发明人： Toshihiko Nakata , Tetsuya Matsui , Takehiro Tachizaki , Kazushi Yoshimura , Masahiro Watanabe
IPC分类号： G01N29/22 , G01N29/04
CPC分类号： G01N29/221 , G01N29/04 , G01N29/043 , G01N29/0654 , G01N29/2418
摘要： It is intended to provide an internal defect inspection method and an apparatus for implementing the method by which an ultrasonic wave is excited in a sample without contact with the sample and accordingly without damaging the sample, and an ultrasonic wave from any internal defect of the sample is detected without being affected by the sample surface, in a non-contact state and with high sensitivity.By the internal defect inspection method, an ultrasonic wave is emitted from an ultrasonic wave transmitter toward a sample, an ultrasonic wave reflected by the sample is detected as an interference signal with an imaging type common-path interferometer, an ultrasonic wave signal is obtained from the interference signal, and any defect within the sample is detected from the ultrasonic wave signal.
摘要翻译：旨在提供一种内部缺陷检查方法和实现这样一种方法的装置，其中超声波在样品中被激发而不与样品接触，因此不损伤样品，并且来自样品的任何内部缺陷的超声波被检测而不受样品表面的影响，处于非接触状态并具有高灵敏度。通过内部缺陷检查方法，从超声波发射器向样品发射超声波，将由样本反射的超声波作为干涉信号与成像式共轨干涉仪进行检测，从超声波信号从超声波信号中检测出干扰信号和样本内的任何缺陷。

2. 发明授权

US09134279B2 Internal defect inspection method and apparatus for the same 有权
标题翻译：内部缺陷检查方法和装置相同
公开(公告)号：US09134279B2
公开(公告)日：2015-09-15
申请号：US13819355
申请日：2011-06-01
申请人： Toshihiko Nakata , Tetsuya Matsui , Takehiro Tachizaki , Kazushi Yoshimura , Masahiro Watanabe
发明人： Toshihiko Nakata , Tetsuya Matsui , Takehiro Tachizaki , Kazushi Yoshimura , Masahiro Watanabe
IPC分类号： G01N29/04 , G01N29/22 , G01N29/24 , G01N29/06
CPC分类号： G01N29/221 , G01N29/04 , G01N29/043 , G01N29/0654 , G01N29/2418
摘要： An internal defect inspection method where an ultrasonic wave is emitted from an ultrasonic wave transmitter toward a sample, the ultrasonic wave reflected by the sample is detected by an imaging type common-path interferometer as an interference signal, an ultrasonic wave signal is obtained from the interference signal, and any defect within the sample is detected from the ultrasonic wave signal. An internal defect inspection apparatus including an ultrasonic wave transmitter, an imaging type common-path interferometer and an ultrasonic wave signal detecting device is also provided.
摘要翻译：从超声波发射器向样品发射超声波的内部缺陷检查方法，由成像型共通干涉仪作为干扰信号检测由样品反射的超声波，从超声波信号获得超声波信号干扰信号，并从超声波信号中检测出样本内的任何缺陷。还提供了包括超声波发射器，成像型共轨干涉仪和超声波信号检测装置的内部缺陷检查装置。

3. 发明授权

US08483035B2 Thermally assisted magnetic recording head inspection method and apparatus 有权
标题翻译：热辅助磁记录头检查方法和装置
公开(公告)号：US08483035B2
公开(公告)日：2013-07-09
申请号：US13482065
申请日：2012-05-29
申请人： Kaifeng Zhang , Takenori Hirose , Masahiro Watanabe , Shinji Homma , Tsuneo Nakagomi , Teruaki Tokutomi , Toshihiko Nakata , Takehiro Tachizaki
发明人： Kaifeng Zhang , Takenori Hirose , Masahiro Watanabe , Shinji Homma , Tsuneo Nakagomi , Teruaki Tokutomi , Toshihiko Nakata , Takehiro Tachizaki
IPC分类号： G11B7/00 , G11B5/09
CPC分类号： G11B5/455 , G11B2005/0021
摘要： In a method and an apparatus for inspecting a thermally assisted magnetic recording head element, a specimen is mounted on a table movable in a plane of a scanning probe microscope device, evanescent light is generated from a portion of light emission of evanescent light of the specimen, scattered light of the evanescent light is detected by moving the table in the plane while a cantilever of the scanning probe microscope having a probe is vertically vibrated in the vicinity of a surface of the specimen, and an intensity distribution of the evanescent light emitted from the portion of light emission of evanescent light or a surface profile of the portion of light emission of evanescent light of the specimen is inspected using position information of generation of the evanescent light based on the detected scattered light.
摘要翻译：在用于检查热辅助磁记录头元件的方法和装置中，将样本安装在可在扫描探针显微镜装置的平面中移动的台上，从所述样本的渐逝光的发光部分产生ev逝光通过在平面中移动台来检测ev逝光的散射光，同时具有探针的扫描探针显微镜的悬臂在试样的表面附近垂直振动，并且从from射光发射的ev逝光的强度分布使用基于检测到的散射光的ev逝光的产生的位置信息来检查ev逝光的发光部分或试样的ev逝光的发光部分的表面轮廓。

4. 发明授权

US09063168B2 Scanning probe microscope and measurement method using same 有权
标题翻译：扫描探针显微镜及其测量方法
公开(公告)号：US09063168B2
公开(公告)日：2015-06-23
申请号：US14009729
申请日：2012-04-04
申请人： Takehiro Tachizaki , Toshihiko Nakata , Masahiro Watanabe
发明人： Takehiro Tachizaki , Toshihiko Nakata , Masahiro Watanabe
IPC分类号： G01Q60/06 , G01Q60/18 , B82Y20/00 , B82Y35/00 , G01N21/552 , B82Y15/00 , G01Q60/22 , G01Q70/12
CPC分类号： G01Q60/18 , B82Y15/00 , B82Y20/00 , B82Y35/00 , G01N21/554 , G01Q60/22 , G01Q70/12
摘要： Disclosed is a measurement method of a scanning probe microscope based upon a measurement method of a scanning probe microscope for observing a shape and an optical property of a sample by exciting near-field light, scanning relative positions of the near-field light and the sample and detecting scattered light by the sample of the near-field light and having a characteristic that the near-field light is modulated to periodically vary the relative positions of the near-field light and the sample and that a frequency of modulation applied to the near-field light and an interference signal generated at a frequency for varying the relative positions of the near-field light and the sample are selectively extracted.
摘要翻译：公开了基于扫描探针显微镜的测量方法的扫描探针显微镜的测量方法，用于通过激发近场光来观察样品的形状和光学性质，扫描近场光和样品的相对位置并且通过近场光的样本检测散射光，并具有调制近场光的周期性地改变近场光和样本的相对位置的特性，并且将调制频率应用于近场光选择性地提取场射光和以用于改变近场光和样本的相对位置的频率产生的干涉信号。

5. 发明申请

US20120307605A1 Thermally Assisted Magnetic Recording Head Inspection Method and Apparatus 有权
标题翻译：热辅助磁记录头检测方法和装置
公开(公告)号：US20120307605A1
公开(公告)日：2012-12-06
申请号：US13482065
申请日：2012-05-29
申请人： Kaifeng Zhang , Takenori Hirose , Masahiro Watanabe , Shinji Homma , Tsuneo Nakagomi , Teruaki Tokutomi , Toshihiko Nakata , Takehiro Tachizaki
发明人： Kaifeng Zhang , Takenori Hirose , Masahiro Watanabe , Shinji Homma , Tsuneo Nakagomi , Teruaki Tokutomi , Toshihiko Nakata , Takehiro Tachizaki
IPC分类号： G11B13/04
CPC分类号： G11B5/455 , G11B2005/0021
摘要： In a method and an apparatus for inspecting a thermally assisted magnetic recording head element, a specimen is mounted on a table movable in a plane of a scanning probe microscope device, evanescent light is generated from a portion of light emission of evanescent light of the specimen, scattered light of the evanescent light is detected by moving the table in the plane while a cantilever of the scanning probe microscope having a probe is vertically vibrated in the vicinity of a surface of the specimen, and an intensity distribution of the evanescent light emitted from the portion of light emission of evanescent light or a surface profile of the portion of light emission of evanescent light of the specimen is inspected using position information of generation of the evanescent light based on the detected scattered light.
摘要翻译：在用于检查热辅助磁记录头元件的方法和装置中，将样本安装在可在扫描探针显微镜装置的平面中移动的台上，从所述样本的渐逝光的发光部分产生ev逝光通过在平面中移动台来检测ev逝光的散射光，同时具有探针的扫描探针显微镜的悬臂在试样的表面附近垂直振动，并且从from射光发射的ev逝光的强度分布使用基于检测到的散射光的ev逝光的产生的位置信息来检查ev逝光的发光部分或试样的ev逝光的发光部分的表面轮廓。

6. 发明申请

US20140165237A1 Scanning Probe Microscope and Measurement Method Using Same 有权
标题翻译：扫描探针显微镜和测量方法使用相同
公开(公告)号：US20140165237A1
公开(公告)日：2014-06-12
申请号：US14009729
申请日：2012-04-04
申请人： Takehiro Tachizaki , Toshihiko Nakata , Masahiro Watanabe
发明人： Takehiro Tachizaki , Toshihiko Nakata , Masahiro Watanabe
IPC分类号： G01Q60/18
CPC分类号： G01Q60/18 , B82Y15/00 , B82Y20/00 , B82Y35/00 , G01N21/554 , G01Q60/22 , G01Q70/12
摘要： Disclosed is a measurement method of a scanning probe microscope based upon a measurement method of a scanning probe microscope for observing a shape and an optical property of a sample by exciting near-field light, scanning relative positions of the near-field light and the sample and detecting scattered light by the sample of the near-field light and having a characteristic that the near-field light is modulated to periodically vary the relative positions of the near-field light and the sample and that a frequency of modulation applied to the near-field light and an interference signal generated at a frequency for varying the relative positions of the near-field light and the sample are selectively extracted.
摘要翻译：公开了基于扫描探针显微镜的测量方法的扫描探针显微镜的测量方法，用于通过激发近场光来观察样品的形状和光学性质，扫描近场光和样品的相对位置并且通过近场光的样本检测散射光，并具有调制近场光的周期性地改变近场光和样本的相对位置的特性，并且将调制频率应用于近场光选择性地提取场射光和以用于改变近场光和样本的相对位置的频率产生的干涉信号。

7. 发明授权

US08656509B2 Scanning probe microscope and surface shape measuring method using same 有权
标题翻译：扫描探针显微镜和使用其的表面形状测量方法
公开(公告)号：US08656509B2
公开(公告)日：2014-02-18
申请号：US13704051
申请日：2011-05-20
申请人： Masahiro Watanabe , Toshihiko Nakata , Takehiro Tachizaki
发明人： Masahiro Watanabe , Toshihiko Nakata , Takehiro Tachizaki
IPC分类号： G21K7/00
CPC分类号： G21K7/00 , G01Q10/04 , G01Q10/06
摘要： It has been difficult to highly accurately measure the profiles of samples using scanning probe microscopes at the time when scanning is performed due to scanning mechanism fluctuations in the non drive direction, i.e., vertical direction. The present invention is provided with, on the rear side of a sample stage, a high-accuracy displacement gauge for measuring fluctuation in the non drive direction, i.e., vertical direction, at the time when the sample stage is being scanned in the horizontal directions, and as a result, highly accurate planarity evaluation with accuracy of sample nm-order or less is made possible by correcting sample surface shape measurement results obtained using a probe.
摘要翻译：由于在非驱动方向（即垂直方向）上的扫描机构波动执行扫描时，使用扫描探针显微镜难以高精度地测量样品的轮廓。本发明在样品台的后侧设置有高精度位移计，用于在水平方向扫描样品台时测量非驱动方向即垂直方向的波动，结果，通过校正使用探针获得的样品表面形状测量结果，可以实现具有采样nm级或更小的精度的高精度平面度评估。

8. 发明申请

US20130212749A1 Scanning Probe Microscope and Surface Shape Measuring Method Using Same 有权
标题翻译：扫描探针显微镜和表面形状测量方法使用相同
公开(公告)号：US20130212749A1
公开(公告)日：2013-08-15
申请号：US13704051
申请日：2011-05-20
申请人： Masahiro Watanabe , Toshihiko Nakata , Takehiro Tachizaki
发明人： Masahiro Watanabe , Toshihiko Nakata , Takehiro Tachizaki
IPC分类号： G01Q10/06
CPC分类号： G21K7/00 , G01Q10/04 , G01Q10/06
摘要： It has been difficult to highly accurately measure the profiles of samples using scanning probe microscopes at the time when scanning is performed due to scanning mechanism fluctuations in the non drive direction, i.e., vertical direction. The present invention is provided with, on the rear side of a sample stage, a high-accuracy displacement gauge for measuring fluctuation in the non drive direction, i.e., vertical direction, at the time when the sample stage is being scanned in the horizontal directions, and as a result, highly accurate planarity evaluation with accuracy of sample nm-order or less is made possible by correcting sample surface shape measurement results obtained using a probe.
摘要翻译：由于在非驱动方向（即垂直方向）上的扫描机构波动执行扫描时，使用扫描探针显微镜难以高精度地测量样品的轮廓。本发明在样品台的后侧设置有高精度位移计，用于在水平方向扫描样品台时测量非驱动方向即垂直方向的波动，结果，通过校正使用探针获得的样品表面形状测量结果，可以实现具有采样nm级或更小的精度的高精度平面度评估。

9. 发明授权

US5781294A Method and apparatus for detecting photoacoustic signal to detect surface and subsurface information of the specimen 失效
标题翻译：用于检测光声信号以检测样品的表面和地下信息的方法和装置
公开(公告)号：US5781294A
公开(公告)日：1998-07-14
申请号：US548015
申请日：1995-10-25
申请人： Toshihiko Nakata , Takanori Ninomiya , Hilario Haruomi Kobayashi , Kazushi Yoshimura
发明人： Toshihiko Nakata , Takanori Ninomiya , Hilario Haruomi Kobayashi , Kazushi Yoshimura
IPC分类号： G01N21/17 , G01N29/06 , G01N29/24 , G01N29/34 , G01B9/02
CPC分类号： G01N29/346 , G01N21/1702 , G01N29/0609 , G01N29/2418 , G01N2291/012
摘要： A method and an apparatus for detecting a photoacoustic signal are provided which irradiate an excitation light beam, modulated by a desired frequency, simultaneously to a plurality of points being measured on a surface of a sample, irradiate the excitation light and a probe light simultaneously to the plurality of the points being measured, detect an interference light of a reflected light beam of the probe light and a specified reference light with a detector made up of a plurality of photoelectric converting elements corresponding to the respective points being measured, the detector being in conjugate relation with the surface of the sample, detect a thermal distortion of the frequency component equal to the intensity-modulated frequency at the plurality of the points being measured from the interference light intensity signal detected by the detector, and detect information relative to the surface and the subsurface of the measuring points on the sample from the thermal distortion of the frequency component. A plurality of measuring points on a specimen are excited simultaneously with an intensity-modulated flat light beam and the thermal expansion displacements of the measuring points are detected simultaneously by interference between a flat probe light beam and a flat reference light beam to detect photothermal displacement signals representing the photothermal displacements of the plurality of measuring points simultaneously.
摘要翻译：提供了一种用于检测光声信号的方法和装置，其将在期望频率下调制的激发光束同时照射到在样品表面上测量的多个点，同时将激发光和探针光照射到测量的多个点，利用由与被测量的各个点相对应的多个光电转换元件组成的检测器检测探测光的反射光束和指定参考光的干涉光，检测器处于与样品表面的共轭关系，根据由检测器检测到的干涉光强度信号测量的多个点处，检测与等于强度调制频率的频率成分的热失真，并检测相对于表面的信息和样品上的测量点的地表从热失真的频率分量。试样上的多个测量点与强度调制的平坦光束同时激发，并且通过平坦探测光束和平坦参考光束之间的干涉同时检测测量点的热膨胀位移，以检测光热位移信号同时表示多个测量点的光热位移。

10. 发明授权

US08695110B2 Scanning probe microscope and sample observing method using the same 有权
标题翻译：扫描探针显微镜及使用其的样品观察方法
公开(公告)号：US08695110B2
公开(公告)日：2014-04-08
申请号：US13586754
申请日：2012-08-15
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Motoyuki Hirooka
IPC分类号： G01Q70/00 , G01Q70/16 , G01N13/00
CPC分类号： G01Q60/18 , G01Q60/22
摘要： In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.
摘要翻译：在使用孔径探针的近场扫描显微镜中，实际上孔径形成的上限为至多几十nm。在使用散射探针的近场扫描显微镜中，由于外部照明光作为背景噪声，分辨能力被限制在至多几十nm。此外，通过探针的损伤或磨损，测量再现性被严重降低。可以以nm级分辨能力和高再现性测量样品表面的光学数据和不均匀性数据，同时通过制造具有nm级光学分辨率的等离子体增强近场探针而不损害探针和样品通过将nm级圆柱形结构与nm级微粒组合，并在样品上的各个测量点处以低接触力将探针重复地移动到样品并从中离开它们的能力。

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