专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US4791586A Method of and apparatus for checking geometry of multi-layer patterns for IC structures 失效
标题翻译：用于检查IC结构的多层图案几何的方法和装置
公开(公告)号：US4791586A
公开(公告)日：1988-12-13
申请号：US812928
申请日：1985-12-23
申请人： Shunji Maeda , Hitoshi Kubota , Satoru Fushimi , Hiroshi Makihira , Takanori Ninomiya , Yasuo Nakagawa
发明人： Shunji Maeda , Hitoshi Kubota , Satoru Fushimi , Hiroshi Makihira , Takanori Ninomiya , Yasuo Nakagawa
IPC分类号： H01L21/66 , G06T7/00 , G06K9/00
CPC分类号： G06T7/001 , G06T2207/10056 , G06T2207/30148
摘要： Method of and apparatus for checking the geometry of multi-layer patterns for IC structures having identical functions, each of the multi-layer patterns including layer patterns arranged in different level layers, wherein electrical image signals corresponding to any two of the multi-layer patterns and having more than two levels are registered with each other and then compared to determine unmatched and matched portions. The comparison of the registered electric image signals may be performed with respect to their amplitude or their gradients. The registration and comparison of two electric image signals may be repeated for all of the layer patterns with the matched portions being no longer subjected to the registration and comparison. A defect detection signal is produced from finally unmatched portions, if any, of the electric image signals having undergone the said registration and comparison.
摘要翻译：用于检查具有相同功能的IC结构的多层图案的几何形状的方法和装置，每个多层图案包括布置在不同层级中的层图案，其中对应于多层图案中的任何两个的电图像信号并且具有两个以上的级别彼此登记，然后进行比较以确定不匹配和匹配的部分。登记的电图像信号的比较可以相对于它们的振幅或梯度进行。对于所有的层图案，可以对匹配的部分不再进行注册和比较来重复两个电图像信号的配准和比较。如果有的话，经过所述登记和比较的电子图像信号的最终不匹配的部分产生缺陷检测信号。

2. 发明授权

US4343553A Shape testing apparatus 失效
标题翻译：形状检测仪
公开(公告)号：US4343553A
公开(公告)日：1982-08-10
申请号：US181768
申请日：1980-08-27
申请人： Yasuo Nakagawa , Hiroshi Makihira , Yoshitada Oshida , Nobuyuki Akiyama
发明人： Yasuo Nakagawa , Hiroshi Makihira , Yoshitada Oshida , Nobuyuki Akiyama
IPC分类号： G01B11/25 , G01B11/00
CPC分类号： G01B11/2545
摘要： A shape detecting apparatus comprises a slit projecting means for projecting a slit image on a three-dimensional object such as a soldered area, a positioning means for positioning the three-dimensional object relative to the slit projecting means, an image pickup means for two-dimensionally scanning the slit image projected by the slit projecting means to pickup the image, a light segment extracting circuit including a center position extracting means for extracting a mean position (Z.sub.1 +Z.sub.2)/2 of two position signals Z.sub.1 and Z.sub.2 at which a video signal derived by transversely scanning the slit image by the image pickup means corresponds, to a first higher reference V.sub.1 when the video signal exceeds the first higher reference V.sub.1, a maximum value position extracting circuit for extracting a position Z corresponding to a maximum value of the video signal when the maximum value of the video signal is no higher than the first higher reference V.sub.1 and exceeds a second lower reference V.sub.2 and an erasing means for erasing the position signal when the maximum value of the video signal is no higher than the second lower reference V.sub.2, and a detecting means for detecting undersoldered condition and oversoldered condition by analyzing and evaluating the three-dimensional object based on the light segment position information derived from the light segment extracting circuit.
摘要翻译：一种形状检测装置，包括：狭缝突出装置，用于将缝合图像投射在诸如焊接区域的三维物体上;定位装置，用于相对于狭缝突出装置定位三维物体;图像拾取装置，对由狭缝投影装置投影的狭缝图像进行二维扫描以拾取图像;光段提取电路，包括中心位置提取装置，用于提取两个位置信号Z1和Z2的平均位置（Z1 + Z2）/ 2，通过图像拾取装置横向扫描狭缝图像导出的信号对应于当视频信号超过第一较高参考值V1时的第一较高参考V1，最大值位置提取电路，用于提取对应于最大值的位置Z 当视频信号的最大值不高于第一较高参考V1并且超过第二较低参考值V2和呃时，视频信号当视频信号的最大值不高于第二较低参考值V2时，用于擦除位置信号的灰度装置;以及检测装置，用于通过基于光段对三维物体进行分析和评估来检测底部状态和过弯状态从光段提取电路得到的位置信息。

3. 发明授权

US06674890B2 Defect inspection method and apparatus therefor 有权
标题翻译：缺陷检查方法及其设备
公开(公告)号：US06674890B2
公开(公告)日：2004-01-06
申请号：US09733092
申请日：2000-12-11
申请人： Shunji Maeda , Kenji Oka , Hiroshi Makihira , Yasuhiko Nakayama , Minoru Yoshida , Yukihiro Shibata , Chie Shishido
发明人： Shunji Maeda , Kenji Oka , Hiroshi Makihira , Yasuhiko Nakayama , Minoru Yoshida , Yukihiro Shibata , Chie Shishido
IPC分类号： G06K900
CPC分类号： G06T7/001 , G01R31/308 , G01R31/311 , G03F7/7065 , G06T7/0004 , G06T2207/10061 , G06T2207/30121 , G06T2207/30148
摘要： A pattern inspection method and apparatus in which an image of a first pattern formed on a sample and an image of a second pattern formed on the sample is detected. At least one of the first pattern image and the second pattern image is converted to a gray level so as to be substantially the same with each other by linear combination including a gain and offset. A defect of the sample is detected by using the first pattern image and the second pattern image at least one of which has been converted to the gray level and a result of the detection is outputted to an external storage or processor by a communication arrangement.
摘要翻译：检测形成在样本上的第一图案的图像和形成在样本上的第二图案的图像的图案检查方法和装置。第一图案图像和第二图案图像中的至少一个被转换为灰度级，以便通过包括增益和偏移的线性组合彼此基本相同。通过使用第一图案图像和其中至少一个已经被转换为灰度级的第二图案图像和通过通信装置将检测结果输出到外部存储器或处理器来检测样本的缺陷。

4. 发明授权

US4226539A Cylindrical body appearance inspection apparatus 失效
标题翻译：圆柱体外观检查装置
公开(公告)号：US4226539A
公开(公告)日：1980-10-07
申请号：US863345
申请日：1977-12-22
申请人： Yasuo Nakagawa , Hiroshi Makihira , Toshimitsu Hamada
发明人： Yasuo Nakagawa , Hiroshi Makihira , Toshimitsu Hamada
IPC分类号： G01N21/952 , G06G7/186 , G06G7/48 , G01N21/48
CPC分类号： G01N21/952 , G06G7/1865 , G06G7/48
摘要： An automatic cylindrical body appearance inspection apparatus comprises a cylindrical body appearance detecting device including rotating means for rotating the cylindrical body around its axis at a constant speed and detecting means for optically picking up an image of a cylindrical surface of the cylindrical body rotated by the rotating means and one-dimensionally scanning the image on a plane of real image thereof in a predetermined direction to extract a base line of the cylindrical surface of the cylindrical body as an image signal, an end surface appearance detecting device including a pair of detecting means each for optically picking up an image of each of opposite end surfaces of the cylindrical body and one-dimensionally scanning the image on a plane of real image thereof in a direction transverse to the predetermined direction to extract an image signal, transporting means for transporting the cylindrical body while it is positioned, from the cylindrical surface appearance detecting means to the end surface appearance detecting means and determining means for determining pass or fail or grade of a defect pattern on the surfaces of the cylindrical body based on the image signals derived from the cylindrical surface appearance detecting device and the end surface appearance detecting device, whereby the appearance of the cylindrical surface and the end surfaces of the cylindrical body under test is automatically inspected.
摘要翻译：一种自动圆柱体外观检查装置，包括：圆筒体外观检测装置，包括用于以恒定速度旋转圆筒体绕其轴线的旋转装置;以及检测装置，用于光学地拾取由旋转的旋转体旋转的圆筒体的圆柱形表面的图像在预定方向上对其图像的平面进行一维扫描，提取圆筒体的圆筒形表面的基线作为图像信号;端面外观检测装置，其包括一对检测装置用于光学拾取圆柱体的每个相对端面的图像，并在垂直于预定方向的方向上在其实像平面上一维扫描图像以提取图像信号;传送装置，用于传送圆柱形身体定位时，从圆柱形表面外观d 基于来自圆筒形外观检测装置和端面外观检测装置的图像信号，确定装置，用于确定圆筒体的表面上的缺陷图形的通过或失败或等级由此自动检查圆柱形表面和待测筒状体的端面的外观。

5. 发明授权

US06507417B1 Method and apparatus for picking up 2D image of an object to be sensed 失效
标题翻译：拾取被感测物体的2D图像的方法和装置
公开(公告)号：US06507417B1
公开(公告)日：2003-01-14
申请号：US09105222
申请日：1998-06-26
申请人： Hiroshi Makihira , Shunji Maeda , Kenji Oka , Minoru Yoshida , Yasuhiko Nakayama
发明人： Hiroshi Makihira , Shunji Maeda , Kenji Oka , Minoru Yoshida , Yasuhiko Nakayama
IPC分类号： H04N104
CPC分类号： G06T7/0004 , G06T2207/30148
摘要： An image pickup device for sensing a two-dimensional (2D) image while causing a projected image of an object to be sensed being projected onto a linear image sensor to relatively move with respect to the linear image sensor in a direction (V scanning) perpendicular to the internal scan (H scan) direction of the linear image sensor. This device includes a position detector circuit that detects the position of the object to be sensed, and a pixel size modifier circuit for changing or modifying the setup configuration of a pixel size in the V scan direction of the linear image sensor on the basis of a position detection signal indicative of the position of the to-be-sensed object as detected by the position detector circuit. The pixel size modifier circuit is operable based on the object position detection signal to periodically change the interval of H-scanning start pulses of the linear image sensor.
摘要翻译：用于感测二维（2D）图像同时使待检测对象的投影图像投影到线性图像传感器上的图像拾取装置相对于线性图像传感器在垂直方向（V扫描）上相对移动到线性图像传感器的内部扫描（H扫描）方向。该装置包括检测待感测物体的位置的位置检测器电路和用于基于线性图像传感器的V扫描方向改变或修改像素尺寸的设置配置的像素尺寸修正器电路位置检测信号，其指示由位置检测器电路检测到的待感测对象的位置。像素尺寸修正器电路可以基于物体位置检测信号进行操作，以周期性地改变线性图像传感器的H扫描开始脉冲的间隔。

6. 发明授权

US5649022A Pattern checking method and checking apparatus 失效
标题翻译：模式检查方法和检查装置
公开(公告)号：US5649022A
公开(公告)日：1997-07-15
申请号：US888494
申请日：1992-05-27
申请人： Shunji Maeda , Hitoshi Kubota , Hiroshi Makihira , Takashi Hiroi
发明人： Shunji Maeda , Hitoshi Kubota , Hiroshi Makihira , Takashi Hiroi
IPC分类号： G06T7/00 , G06K9/00
CPC分类号： G06T7/0044 , G06T7/001 , G06T2207/30148
摘要： A pattern checking method wherein an image of a certain position of one pattern is detected; the detected image is positioned with respect to an image of a position corresponding to the certain position, in a reference pattern image; and the positioned images are compared with each other, whereby a discrepant place among these positioned images is judged as a defect the positioning operations of the images of the detected patterns are controlled based upon either pattern information such as density of the images of the detected patterns, or information obtained from the positioning operations for images of other positions in the patterns. An image sensor unit for detecting images of patterns is constructed which has such a structure that a plurality of one-dimensional image sensors functioning as a pattern detector are arranged in a two-dimensional form, and an output of a certain one-dimensional image sensor for imaging a certain position of one pattern is delayed for a predetermined time period, and also both of an output of an one-dimensional image sensor adjoining the first-mentioned one-dimensional image sensor, which images the same position of the same pattern, and the delayed output of the certain one-dimensional image sensor are sequentially added to derive a summation output. The image sensor unit is inclined at a predetermined angle with respect to a plane perpendicular to the reflection light from the patterns, and the reflection light from the patterns is focused via a confocal focusing optical system onto this image sensor unit.
摘要翻译：一种图案检查方法，其中检测到一个图案的某个位置的图像; 检测图像相对于与特定位置对应的位置的图像在参考图案图像中定位; 并且定位的图像彼此进行比较，由此将这些定位的图像中的不一致的位置判断为检测图案的图像的定位操作的缺陷，基于诸如检测图案的图像的密度的图案信息或者从图案中的其他位置的图像的定位操作获得的信息。用于检测图案的图像的图像传感器单元被构造成具有以二维形式配置作为图案检测器的多个一维图像传感器的结构，以及某一个一维图像传感器的输出对于一个图案的某个位置的成像被延迟预定的时间段，并且与相同图案的相同位置成像的第一个提到的一维图像传感器邻接的一维图像传感器的输出，并且依次添加特定一维图像传感器的延迟输出以导出求和输出。图像传感器单元相对于与图案的反射光垂直的平面以预定角度倾斜，并且来自图案的反射光经由共聚焦聚焦光学系统聚焦到该图像传感器单元上。

7. 发明授权

US5430548A Method and apparatus for pattern detection 失效
标题翻译：模式检测方法和装置
公开(公告)号：US5430548A
公开(公告)日：1995-07-04
申请号：US12468
申请日：1993-02-02
申请人： Takashi Hiroi , Hitoshi Kubota , Shunji Maeda , Hiroshi Makihira , Mitsunobu Isobe
发明人： Takashi Hiroi , Hitoshi Kubota , Shunji Maeda , Hiroshi Makihira , Mitsunobu Isobe
IPC分类号： G01B11/24 , G01B11/245 , G01N21/88 , G01N21/956 , G03F1/84 , G06K9/64 , G06T1/00 , H01L21/027 , H01L21/30 , G01N21/01 , G01N21/15
CPC分类号： G01N21/95607
摘要： The inventive pattern detection method and apparatus produce, from an optical image of a pattern in attention and an optical image of a pattern which should be identical to the pattern in attention, an optical image by merging the images, with a relative phase shift being imposed, and pattern information is detected or observed in the merged optical image or a signal produced from the optical image through the conversion with an opto-electric transducer means.
摘要翻译：本发明的图案检测方法和装置从注意图案的光学图像和应注意的图案的图案的光学图像产生通过合并图像的光学图像，并施加相对相移，并且通过使用光电换能器装置的转换，在合并的光学图像中检测或观察图案信息或从光学图像产生的信号。

8. 发明授权

US5153444A Method and apparatus for detecting patterns 失效
标题翻译：用于检测图案的方法和装置
公开(公告)号：US5153444A
公开(公告)日：1992-10-06
申请号：US641001
申请日：1991-01-14
申请人： Shunji Maeda , Takashi Hiroi , Hitoshi Kubota , Hiroshi Makihira , Fumiaki Endo
发明人： Shunji Maeda , Takashi Hiroi , Hitoshi Kubota , Hiroshi Makihira , Fumiaki Endo
IPC分类号： G01N21/956 , G06T7/00
CPC分类号： G06T7/001 , G01N21/95607 , G01N2021/8896 , G01N2021/95615 , G06T2207/30148
摘要： A method and apparatus for detecting a defect in a circuit pattern by detecting a gray image signal from each of a plurality of circuit patterns as objects of inspection, which circuit patterns have been fabricated so as to be identical with one another, and detecting a defect as a difference of edge position between two circuit patterns by comparing the detected gray image signal of one circuit pattern with the detected gray image signal of another circuit pattern.
摘要翻译：通过检测作为检查对象的多个电路图案中的每一个的灰度图像信号来检测电路图案中的缺陷的方法和装置，其中已经制造出彼此相同的电路图案，并且检测缺陷作为两个电路图案之间的边缘位置的差异，通过将检测到的一个电路图案的灰度图像信号与另一个电路图案的检测到的灰度图像信号进行比较。

9. 发明授权

US4725722A Automatic focusing method and apparatus utilizing contrasts of projected pattern 失效
标题翻译：自动聚焦方法和利用投影图案对比的装置
公开(公告)号：US4725722A
公开(公告)日：1988-02-16
申请号：US850682
申请日：1986-04-11
申请人： Shunji Maeda , Hiroshi Makihira , Hitoshi Kubota
发明人： Shunji Maeda , Hiroshi Makihira , Hitoshi Kubota
IPC分类号： G02B7/38 , G01B11/24 , G01N21/956 , G02B7/28 , G02B7/32 , G03F1/84 , H01L21/027 , H01L21/30 , G01J1/20 , G01J1/36
CPC分类号： G02B21/245 , G01N21/956 , G02B7/32
摘要： A method of auto-focusing suitable for fine patterns of LSIs and an apparatus therefor, particularly applied for checking the geometry of a circuit pattern of a semiconductor device formed on an LSI wafer. A stripe pattern is projected on a specified location on an object to be checked and contrast of an image of the stripe pattern is used for focusing. The specified location is imaged by an optical system and detected simultaneously by two detectors. A position at which contrast of an output signal of one detector coincides with that of the other detector is determined to be an in-focus position. Am image of a multi-layer pattern representative of the circuit pattern is focused on another detector disposed at the in-focus position and detected for checking. The output signal of the detector is divided by mean brightness of the stripe pattern image so as to be normalized. Since the two detectors produce their output signals simultaneously, the difference between the output signals is normalized to improve accuracies of computation.
摘要翻译：适用于LSI的精细图案的自动对焦的方法及其装置，特别适用于检查形成在LSI晶片上的半导体器件的电路图案的几何形状。将条纹图案投影在要检查的对象上的指定位置，并且将条纹图案的图像的对比度用于聚焦。指定位置由光学系统成像，并由两个检测器同时检测。一个检测器的输出信号的对比度与另一个检测器的输出信号的对比度的位置被确定为对焦位置。表示电路图案的多层图案的图像集中在设置在对焦位置的另一检测器，并被检测用于检查。检测器的输出信号除以条纹图案图像的平均亮度，以便被归一化。由于两个检测器同时产生其输出信号，所以输出信号之间的差异被归一化以提高计算精度。

10. 发明授权

US4614430A Method of detecting pattern defect and its apparatus 失效
标题翻译：检测图案缺陷及其设计的方法
公开(公告)号：US4614430A
公开(公告)日：1986-09-30
申请号：US604998
申请日：1984-04-27
申请人： Yasuhiko Hara , Yoshimasa Ohshima , Satoru Fushimi , Hiroshi Makihira
发明人： Yasuhiko Hara , Yoshimasa Ohshima , Satoru Fushimi , Hiroshi Makihira
IPC分类号： G01N21/956 , G06T7/00 , G01N21/88
CPC分类号： G06T7/001 , G01N21/95607 , G06T2207/10056 , G06T2207/30148
摘要： A pattern defect is detected in accordance with the difference between a pair of patterns. The patterns are scanned and imaged to obtain first and second binary signals. A positioning error between the patterns is two-dimensionally detected during the scanning with respective first and second binary signals delayed by a prescribed amount so that each of the picture elements in a prescribed area of a two-dimensional image, delayed and cut out two-dimensionally, corresponding to one pattern, is compared with a specified picture element in a predetermined area of an image delayed and cut out two-dimensionally corresponding to another pattern. The result of the comparison is statistically summed to derive a positioning error by detecting the position shown as an extreme value from the summed values. The positioning error is corrected by two-dimensionally shifting at least one of the delayed binary signals. The corrected binary signals are then two-dimensionally compared with each other.
摘要翻译：根据一对图案之间的差异来检测图案缺陷。扫描和成像图案以获得第一和第二二进制信号。在扫描期间，以相应的第一和第二二进制信号延迟规定量的二维检测图案之间的定位误差，使得二维图像的规定区域中的每个图像元素被延迟和切出二维图像，对应于一个图案的尺寸与在与另一图案对应地延迟和切出的图像的预定区域中的指定图像元素进行比较。比较的结果被统计学地相加以通过从求和值中检测显示为极值的位置来导出定位误差。通过二维移位延迟的二进制信号中的至少一个来校正定位误差。然后将校正后的二进制信号二维地进行比较。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式