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1. 发明申请

WO2006105119A3 6 KHz AND ABOVE GAS DISCHARGE LASER SYSTEM 审中-公开
标题翻译： 6 KHz和以上气体放电激光系统
公开(公告)号：WO2006105119A3
公开(公告)日：2008-10-16
申请号：PCT/US2006011339
申请日：2006-03-27
申请人： CYMER INC , UJAZDOWSKI RICHARD C , NESS RICHARD M , ALGOTS J MARTIN , FLEUROV VLADIMIR B , PALENSCHAT FREDERICK A , GILLESPIE WALTER D , MOOSMAN BRYAN G , STEIGER THOMAS D , SMITH BRETT D , MCKELVY THOMAS E
发明人： UJAZDOWSKI RICHARD C , NESS RICHARD M , ALGOTS J MARTIN , FLEUROV VLADIMIR B , PALENSCHAT FREDERICK A , GILLESPIE WALTER D , MOOSMAN BRYAN G , STEIGER THOMAS D , SMITH BRETT D , MCKELVY THOMAS E
IPC分类号： H01F27/08 , H01S3/03 , H01S3/08 , H01S3/22
CPC分类号： H01S3/036 , H01F3/10 , H01F27/22 , H01F27/266 , H01F38/10 , H01S3/0404 , H01S3/041 , H01S3/097 , H01S3/09702 , H01S3/225 , H01S3/2308
摘要： A high pulse repetition rate gas discharge laser system pulse power system magnetic reactor may comprise a housing comprising a core containing compartment between an inner wall of the housing, an outer wall and a bottom wall of the housing; a cooling mechanism operative to withdraw heat from the at least one of the inner wall, outer wall and bottom of the housing; at least one two magnetic cores contained within the core containing compartment; a cooling fin disposed between each of the at least two magnetic cores; and a thermal conductivity enhancement mechanism intermediate at least one of each respective cooling fin and each respective core and a respective one of the inner wall, the outer wall or the bottom wall, the thermal conductivity enhancement mechanism comprising a band comprising a plurality of torsion spring or leaf spring elements.
摘要翻译：高脉冲重复率气体放电激光系统脉冲功率系统磁反应器可以包括壳体，该壳体包括在壳体的内壁，外壁和壳体的底壁之间的容纳核心的隔间; 冷却机构，用于从壳体的内壁，外壁和底部中的至少一个中提取热量; 至少一个两个磁芯包含在所述芯容纳室内; 设置在所述至少两个磁芯中的每一个之间的冷却翅片; 以及在每个相应的冷却翅片和每个相应的芯部以及内壁，外壁或底壁中的相应的一个中的至少一个的热导率增强机构，所述热导率增强机构包括包括多个扭转弹簧或板簧元件。

2. 发明申请

WO2005104313A3 GAS DISCHARGE LASER CHAMBER IMPROVEMENTS 审中-公开
标题翻译：气体放电激光室改进
公开(公告)号：WO2005104313A3
公开(公告)日：2007-02-01
申请号：PCT/US2005007168
申请日：2005-03-03
申请人： CYMER INC , PARTLO WILLIAM N , AMADA YOSHIHO , CARMICHAEL JAMES A , DYER TIMOTHY S , GILLESPIE WALTER D , MOOSMAN BRYAN G , RETTIG CURTIS L , STRATE BRIAN D , STEIGER THOMAS D , TRINTCHOUK FEDOR B , UJAZDOWSKI RICHARD C
发明人： PARTLO WILLIAM N , AMADA YOSHIHO , CARMICHAEL JAMES A , DYER TIMOTHY S , GILLESPIE WALTER D , MOOSMAN BRYAN G , RETTIG CURTIS L , STRATE BRIAN D , STEIGER THOMAS D , TRINTCHOUK FEDOR B , UJAZDOWSKI RICHARD C
IPC分类号： H01S3/22 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/041 , H01S3/097 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/036 , H01S3/0384 , H01S3/041 , H01S3/0971 , H01S3/225
摘要： A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other. The dust trap may comprise a pressure trap positioned between a portion of a main insulator and an interior wall of the chamber. The chamber may comprise a gas circulating fan comprising a cross-flow fan with a fan cutoff that may comprise a vortex control pocket. The chamber may comprise a preionization mechanism comprising a preionization tub containing a ground rod within an elongated opening in the preionization tube that may comprise a compliant member, an automatic preionization shut-off mechanism, a preionization onset control mechanism and/or a focusing element. The chamber may comprise an elongated baffle plate that may comprise a plurality of pyramidal structures including varying numbers of generally pyramidal elements and oriented in groups of varying numbers of generally pyramidal elements and oriented along and transverse to the longitudinal axis. Acoustic resonances within the chamber may also be reduced by introducing an artificial fitter into the timing of the laser discharges varying the inter-pulse period randomly or in a repeating pattern from pulse to pulse within a burst.
摘要翻译：如果公开的方法和装置，其可以包括高功率高重复率气体放电激光UV光源，其可以包括：气体放电室，其包括包括垂直壁和相邻底壁的内壁; 气体循环风扇，其产生邻近内部垂直壁和相邻底壁的气体流动路径; 室内除尘器定位了低气流区域，其可以沿着内壁并且可以包括至少一个网状筛网，例如多个网状筛网，其可以包括至少两个不同的规格网状筛网。除尘器可以沿着室的底部内壁和/或内壁的垂直部分延伸。除尘器可以包括具有第一量规的第一网状筛网; 第二网状筛，其具有小于第一量规的第二规格; 并且第二网状屏幕在第一网状筛网和内壁之间。腔室可以包括在腔室的垂直内壁和底壁中的至少一个中的多个集尘凹部，其可以从包括一部分凹部和多部分凹部的组中选择，该组包括两个凹部相对于彼此成角度的部分。除尘器可以包括定位在主绝缘体的一部分和室的内壁之间的压力阱。该腔室可包括气体循环风扇，其包括具有风扇切断装置的横流风扇，其可包括涡流控制口袋。所述腔室可以包括预除垢机构，其包括在所述预分离管内的细长开口内包含接地棒的预除菌槽，所述前置离子槽可以包括柔顺构件，自动预除电切断机构，预电离起始控制机构和/或聚焦元件。腔室可以包括细长的挡板，该挡板可以包括多个金字塔形结构，包括不同数量的通常为锥体的元件，并且以不同数量的大致金字塔形元件组成并且沿纵向轴线并且横向于纵向轴线定向。腔内的声共振也可以通过将人造钳工器引入激光放电的定时中，从而在脉冲串内从脉冲到脉冲随机地或以重复模式改变脉冲间周期。

3. 发明申请

WO2005050794A3 HALOGEN GAS DISCHARGE LASER ELECTRODES 审中-公开
标题翻译：卤化物放电激光电极
公开(公告)号：WO2005050794A3
公开(公告)日：2006-01-05
申请号：PCT/US2004024062
申请日：2004-07-27
申请人： CYMER INC , STEIGER THOMAS D , UJAZDOWSKI RICHARD C , DYER TIMOTHY S , DUFFEY THOMAS P , GILLESPIE WALTER D , MOOSMAN BRYAN G , MORTON RICHARD G , STRATE BRIAN D
发明人： STEIGER THOMAS D , UJAZDOWSKI RICHARD C , DYER TIMOTHY S , DUFFEY THOMAS P , GILLESPIE WALTER D , MOOSMAN BRYAN G , MORTON RICHARD G , STRATE BRIAN D
IPC分类号： H01S20060101 , H01S3/038 , H01S3/097 , H01S3/0971 , H01S3/22 , H01S3/225 , H01S3/97
CPC分类号： H01S3/225 , H01S3/0381 , H01S3/0385 , H01S3/0388 , H01S3/0971 , H01S3/09713
摘要： A method and apparatus for operating a gas discharge laser is disclosed which may comprise a laser chamber containing a laser gas, the laser gas comprising a halogen, two elongated electrode elements defining a cathode and an anode, each of the cathode and anode having an elongated discharge receiving region having a discharge receiving region width defining a width of an electric discharge between the electrode elements in the laser gas, the discharge receiving region defining two longitudinal edges, and the anode comprising: a first elongated anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region of the anode, a pair of second elongated anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an elongated electrode center base portion integral with the first elongated anode portion; and wherein each of the respective pair of second elongated anode portions is mechanically bonded to the center base portion. The electrode element may comprise a cathode. The first and second materials may be different materials such as different brass alloys with different erosion rates in the halogen gas. The first elongated cathode portion may comprising a first cathode material, located entirely within the discharge receiving region comprising a first portion of an ellipse intersecting elongated side walls, with a bottom wall opposite the portion of the ellipse; and a pair of second elongated cathode side portions comprising a second cathode material with the intersection of each respective second cathode portion and the portion of the ellipse forming the discharge receiving region of the first cathode portion, forming respective ellipsoidal extensions of the first portion. The members may be mechanically bonded to the center base portion. Some may be diffusion bonded to the center base portion and/or each other. The electrode assembly may have a hooded discharge receiving region extension at respective ends of the electrode and the electrode portion may be formed with or bonded to the center base portion and may have slanted side walls.
摘要翻译：公开了一种用于操作气体放电激光器的方法和装置，其可以包括包含激光气体的激光室，激光气体包括卤素，限定阴极和阳极的两个细长电极元件，阴极和阳极中的每一个具有细长的放电接收区域具有限定激光气体中的电极元件之间的放电宽度的放电接收区域宽度，放电接收区域限定两个纵向边缘，阳极包括：第一细长阳极部分，包括限定第一阳极材料侵蚀速率，完全位于阳极的放电接收区域内;一对第二细长阳极部分，包括限定第二阳极材料侵蚀速率的第二阳极材料，第二阳极材料分别位于第一阳极部分的每一侧，最少部分地在放电接收区域内; 与所述第一细长阳极部分成一体的细长电极中心基部; 并且其中相应的一对第二细长阳极部分中的每一个机械地结合到中心基部。电极元件可以包括阴极。第一和第二材料可以是不同的材料，例如在卤素气体中具有不同侵蚀速率的不同的黄铜合金。第一细长阴极部分可以包括第一阴极材料，其全部位于放电接收区域内，包括与细长侧壁相交的椭圆的第一部分，其中与壁的部分相对的底壁; 以及一对第二细长阴极侧部分，其包括第二阴极材料，每个相应的第二阴极部分和形成第一阴极部分的放电接收区域的椭圆形部分的交点形成第一部分的相应的椭圆形延伸部分。构件可以机械地结合到中心基部。一些可以扩散结合到中心基部和/或彼此。电极组件可以在电极的相应端部处具有连接的放电接收区域延伸部，并且电极部分可以形成有或结合到中心基部并且可以具有倾斜的侧壁。

4. 发明申请

WO03023910A3 HIGH REP-RATE LASER WITH IMPROVED ELECTRODES 审中-公开
标题翻译：具有改进电极的高倍率激光
公开(公告)号：WO03023910A3
公开(公告)日：2003-05-30
申请号：PCT/US0228463
申请日：2002-09-06
申请人： CYMER INC , MORTON RICHARD G , DYER TIMOTHY S , STEIGER THOMAS D , UJAZDOWSKI RICHARD C , WATSON TOM A , MOOSMAN BRYAN , IVASCHENKO ALEX P , GILLESPIE WALTER D , RETTIG CURTIS L
发明人： MORTON RICHARD G , DYER TIMOTHY S , STEIGER THOMAS D , UJAZDOWSKI RICHARD C , WATSON TOM A , MOOSMAN BRYAN , IVASCHENKO ALEX P , GILLESPIE WALTER D , RETTIG CURTIS L
IPC分类号： C22C9/04 , H01S3/036 , H01S3/038 , H01S3/225 , H01S3/22 , H01S3/223
CPC分类号： H01S3/038 , H01S3/036 , H01S3/0381 , H01S3/0388 , H01S3/09702 , H01S3/225
摘要： The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the elctrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material (42) is positioned at a desired anode discharge region of the electrode. The second anode material (40) is located adjacent to the first anode material (42) along at least two long sides of the first material (42). During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material (40) assures that any tendency of the discharge to spread onto the second material (40) will quickly erode away the second material (40) enough to stop the spread of the discharge. In a preferred embodiment the anode is as described above and the cathode is also a two-material electrode with the first material at the discharge region being C26000 brass and the second material being C36000 brass. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
摘要翻译：本发明提供了一种气体放电激光器，其具有至少一个长寿命的细长电极，用于在含氟激光气体中产生至少120亿个高压放电。在优选实施方案中，至少一个电极由具有相对低的阳极侵蚀速率的第一材料和具有相对较高的阳极侵蚀速率的第二阳极材料构成。第一阳极材料（42）位于电极的期望的阳极放电区域。第二阳极材料（40）沿着第一材料（42）的至少两个长边位于第一阳极材料（42）附近。在两种材料的激光冲蚀操作过程中，第二材料（40）的侵蚀速率都较高，确保放电扩散到第二材料（40）上的任何趋势都将迅速地将第二材料（40）剥离成足够的停止放电的传播。在优选实施例中，阳极如上所述，阴极也是双材料电极，其中第一材料在放电区域为C26000黄铜，第二材料为C36000黄铜。脉冲功率系统以至少1KHz的速率提供电脉冲。鼓风机以至少5m / s的速度在电极之间循环激光气体，并且提供热交换器以去除由鼓风机和排出物产生的热量。

5. 发明申请

WO2005104312A3 VERY HIGH REPETITION RATE NARROW BAND GAS DISCHARGE LASER SYSTEM 审中-公开
标题翻译：非常高的重复率纳滤带排气激光系统
公开(公告)号：WO2005104312A3
公开(公告)日：2007-03-29
申请号：PCT/US2005007064
申请日：2005-03-03
申请人： CYMER INC , STEIGER THOMAS D , HOLTAWAY EDWARD P , MOOSMAN BRYAN G , RAO RAJASEKHAR M
发明人： STEIGER THOMAS D , HOLTAWAY EDWARD P , MOOSMAN BRYAN G , RAO RAJASEKHAR M
IPC分类号： H01S3/13 , H01S3/00 , H01S3/038 , H01S3/097 , H01S3/104 , H01S3/22 , H01S3/23
CPC分类号： H01S3/038 , H01S3/0057 , H01S3/07 , H01S3/097 , H01S3/09702 , H01S3/104 , H01S3/1305 , H01S3/2333
摘要： A method and apparatus for producing a very high repetition rate gas discharge laser system in a MOPA configuration is disclosed which may comprise a master oscillator gas discharge layer system producing a beam of oscillator laser output light pulses at a very light pulse repetition rate; at least two power amplification gas discharge laser systems receiving laser output light pulses from (he master oscillator gas d ischarge laser system and each of the at least two power amplification gas discharge laser systems amplifying some of the received laser output light pulses at a pulse repetition that is a fraction of the very high pulse repetition rate equal to one over the number of the at least two power amplification gas discharge laser systems to form an amplified output laser light pulse beam at the very high pulse repetition rate, which may be positioned in series with respect to the oscillator laser output light pulse beam. The apparatus and method may further comprise a beam delivery unit connected to the laser light output of the power amplification laser system The apparatus and method may be a very high repetition rate gas discharge laser system in a MOPO configuration.
摘要翻译：公开了一种用于产生MOPA结构中非常高的重复率气体放电激光系统的方法和装置，其可以包括以非常轻的脉冲重复率产生振荡器激光输出光脉冲束的主振荡器气体放电层系统; 至少两个功率放大气体放电激光器系统从（主振荡器气体d为充电激光系统）接收激光输出光脉冲，并且至少两个功率放大气体放电激光系统中的每一个以脉冲重复放大接收的激光输出光脉冲中的一些这是非常高的脉冲重复率的一部分等于至少两个功率放大气体放电激光系统的数量的一个，以形成非常高的脉冲重复频率的放大的输出激光束脉冲束，其可以位于该装置和方法还可以包括连接到功率放大激光系统的激光输出的光束传送单元。该装置和方法可以是非常高的重复率气体放电激光系统在MOPO配置中。

6. 发明申请

WO2005089130A2 A HIGH REPETITION RATE LASER PRODUCED PLASMA EUV LIGHT SOURCE 审中-公开
标题翻译：高重复率激光器生产等离子体光源
公开(公告)号：WO2005089130A2
公开(公告)日：2005-09-29
申请号：PCT/US2005007056
申请日：2005-03-03
申请人： CYMER INC , AKINS ROBERT P , SANDSTROM RICHARD L , PARTLO WILLIAM N , FOMENKOV IGOR V , STEIGER THOMAS D , ALGOTS MARTIN J , BOWERING NORBERT R , JACQUES ROBERT N , PALENSCHAT FREDERICK A , SONG JUN
发明人： AKINS ROBERT P , SANDSTROM RICHARD L , PARTLO WILLIAM N , FOMENKOV IGOR V , STEIGER THOMAS D , ALGOTS MARTIN J , BOWERING NORBERT R , JACQUES ROBERT N , PALENSCHAT FREDERICK A , SONG JUN
IPC分类号： G01J1/00 , G03F7/20 , H01J65/04 , H05G2/00
CPC分类号： B82Y10/00 , G03F7/70033 , H05G2/003 , H05G2/008
摘要： An EUV light source apparatus and method are disclosed, which may comprise a pulsed laser providing laser pulses at a selected pulse repetition rate focused at a desired target ignition site; a target formation system providing discrete targets at a selected interval coordinated with the laser pulse repetition rate; a target steering system intermediate the target formation system and the desired target ignition site; and a target tracking system providing information about the movement of target between the target formation system and the target steering system, enabling the target steering system to direct the target to the desired target ignition site. The target tracking system may provide information enabling the creation of a laser firing control signal, and may comprise a droplet detector comprising a collimated light source directed to intersect a point on a projected delivery path of the target, having a respective oppositely disposed light detector detecting the passage of the target through the respective point, or a detector comprising a linear array of a plurality of photo-sensitive elements aligned to a coordinate axis, the light from the light source intersecting a projected delivery path of the target, at least one of the which may comprise a plane-intercept detection device. The droplet detectors may comprise a plurality of droplet detectors each operating at a different light frequency, or a camera having a field of view and a two dimensional array of pixels imaging the field of view. The apparatus and method may comprise an electrostatic plasma containment apparatus providing an electric plasma confinement field at or near a target ignition site at the time of ignition, with the target tracking system providing a signal enabling control of the electrostatic plasma containment apparatus. The apparatus and method may comprise a vessel having and intermediate wall with a low pressure trap allowing passage of EUV light and maintaining a differential pressure across the low pressure trap. The apparatus and method may comprise a magnetic plasma confinement mechanism creating a magnetic field in the vicinity of the target ignition site to confine the plasma to the target ignition site, which may be pulsed and may be controlled using outputs from the target tracking system.
摘要翻译：公开了一种EUV光源装置和方法，其可以包括脉冲激光，其以所选择的脉冲重复频率提供激光脉冲，聚焦在期望的目标点火部位; 目标形成系统，以与激光脉冲重复率配合的选定间隔提供离散目标; 目标转向系统在目标地层系统和期望的目标点火站点之间; 以及目标跟踪系统，其提供关于目标形成系统和目标转向系统之间的目标移动的信息，使得目标转向系统能够将目标定向到期望的目标点火点。目标跟踪系统可以提供能够创建激光点火控制信号的信息，并且可以包括液滴检测器，该液滴检测器包括指向与靶的投影传送路径上的点相交的准直光源，具有相应的相对设置的光检测器检测目标通过相应点的通道，或包括与坐标轴对准的多个光敏元件的线性阵列的检测器，来自光源的光与目标的投影传送路径相交，至少一个其可以包括平面截距检测装置。液滴检测器可以包括以不同光频率操作的多个液滴检测器，或者具有视场的摄像机和成像视场的二维像素阵列。该装置和方法可以包括静电等离子体容纳装置，其在点火时在目标点火点处或附近提供等离子体限制场，目标跟踪系统提供能够控制静电等离子体容纳装置的信号。该装置和方法可以包括具有中间壁的容器和具有低压阱的容器，其允许EUV光通过并且保持横跨低压阱的压差。该装置和方法可以包括磁性等离子体限制机构，其在目标点火点附近产生磁场，以将等离子体限制在目标点火位置，该目标点火点可以是脉冲的并且可以使用来自目标跟踪系统的输出进行控制。

7. 发明申请

WO2007038412A3 THERMAL-EXPANSION TOLERANT, PREIONIZER ELECTRODE FOR A GAS DISCHARGE LASER 审中-公开
标题翻译：用于气体放电激光器的热膨胀耐压前置电极
公开(公告)号：WO2007038412A3
公开(公告)日：2007-06-21
申请号：PCT/US2006037225
申请日：2006-09-25
申请人： CYMER INC A NEVADA CORP , STEIGER THOMAS D , UJAZDOWSKI RICHARD C
发明人： STEIGER THOMAS D , UJAZDOWSKI RICHARD C
IPC分类号： H01S3/097
CPC分类号： H01S3/09713 , H01S3/036 , H01S3/0384 , H01S3/0385 , H01S3/0388 , H01S3/225
摘要： A corona-discharge type, preionizer assembly for a gas discharge laser is disclosed. The assembly may include an electrode and a hollow, dielectric tube that defines a tube bore. In one aspect, the electrode may include a first elongated conductive member having a first end disposed in the bore of the tube. In addition, the electrode may include a second elongated conductive member having a first end disposed in the bore and spaced from the first end of the first conductive member. For the assembly, the first and second conductive members may be held at a same voltage potential.
摘要翻译：公开了一种用于气体放电激光器的电晕放电型预电离子组件。该组件可以包括电极和限定管孔的中空电介质管。在一个方面，电极可以包括具有设置在管的孔中的第一端的第一细长导电构件。另外，电极可以包括第二细长导电构件，该第二细长导电构件具有设置在孔中并且与第一导电构件的第一端间隔开的第一端。对于该组件，第一和第二导电构件可以保持在相同的电压电位。

8. 发明申请

WO2005013391A2 ANODES FOR FLUORINE GAS DISCHARGE LASERS 审中-公开
标题翻译：氟化物放射性激光阳极
公开(公告)号：WO2005013391A2
公开(公告)日：2005-02-10
申请号：PCT/US2004023012
申请日：2004-07-16
申请人： CYMER INC , DYER TIMOTHY S , MORTON RICHARD , GILLESPIE WALTER D , STEIGER THOMAS D
发明人： DYER TIMOTHY S , MORTON RICHARD , GILLESPIE WALTER D , STEIGER THOMAS D
IPC分类号： H01M20060101 , H01S3/036 , H01S3/038 , H01S3/097 , H01S3/0971 , H01S3/22 , H01S3/223 , H01S3/225 , H01M
CPC分类号： H01S3/038 , H01S3/036 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0388 , H01S3/097 , H01S3/09702 , H01S3/09713 , H01S3/225 , H01S3/2251 , H01S3/2256
摘要： Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in traverse cross section having the shape of the upper half of a canted ellipse rotated in the preionizer direction, such that a tangent to the short centerline axis of the ellipse forms an angle with the horizontal. Another embodiment may comprise an anode blade having a top portion and a first and second sidewall portion each intersecting the top portion; the anode blade being formed with the shape in cross section of the top portion being curvilinear and intersecting the generally straight portions of each of first and second sidewall portions along a radius of curvature and with the top portion beveled away from an asymmetric discharge side of the anode. Another embodiment may comprise an anode and an up-stream fairing each composed of electrically conductive material, at least the discharge receiving portion of which is coated with a thin dielectric layer, e.g. is anodized. Another embodiment may comprise at least a portion of the discharge region of a gas discharge electrode is covered with a preformed reef having generally uniform pore size and distribution. A method is disclosed for reef making which may comprise forming the reef of a vacuum infiltrated porous anodized material. Another disclosed method may comprise forming a first anodization layer on the surface of the electrode at least in the discharge region; removing the anodization layer; forming a second anodization layer on the surface of the electrode at least in the discharge region; which may be followed by widening the pores in the second anodization layer, thinning the second anodization layer; and filling the pores with a conductive material. A further method may comprise forming a reef template on at least the discharge region of the elongated gas discharge region; selectively growing a porous layer of insulating material as dictated by the reef template, and may further comprise a positive template or a negative template.
摘要翻译：公开了一种用于氟气体放电激光器的电极，其可以包括横跨所述一对侧壁和所述一对端壁之间的中心线轴线的冠，包括形成电极的放电区域的至少一部分的第一材料; 横截面中的冠部具有以预旋转方向旋转的倾斜椭圆的上半部的形状，使得与椭圆形的短中心线轴的切线与水平方向成一角度。另一个实施例可以包括具有顶部部分和分别与顶部部分相交的第一和第二侧壁部分的阳极刀片; 阳极叶片形成为顶部部分的横截面形状为曲线，并且沿着曲率半径与第一和第二侧壁部分的每一个的大体直线部分相交，并且顶部部分从远离第一和第二侧壁部分的不对称排放侧倾斜阳极。另一个实施例可以包括每个由导电材料构成的阳极和上游整流罩，至少其放电接收部分涂覆有薄介电层，例如电介质层。被阳极氧化。另一个实施例可以包括气体放电电极的放电区域的至少一部分被具有大致均匀的孔径和分布的预成型的礁石覆盖。公开了一种用于珊瑚制造的方法，其可以包括形成真空渗透的多孔阳极氧化材料的珊瑚礁。另一公开的方法可以包括至少在放电区域中在电极的表面上形成第一阳极氧化层; 去除阳极氧化层; 至少在所述放电区域中在所述电极的表面上形成第二阳极氧化层; 其可以随后扩大第二阳极氧化层中的孔，使第二阳极氧化层变薄; 并用导电材料填充孔。另外的方法可以包括在细长气体放电区域的至少放电区域上形成珊瑚礁模板; 根据珊瑚礁模板选择性地生长绝缘材料的多孔层，并且还可以包括正模板或负模板。

9. 发明申请

WO2005013441A3 CATHODES FOR FLUORINE GAS DISCHARGE LASERS 审中-公开
标题翻译：氟气排放激光灯
公开(公告)号：WO2005013441A3
公开(公告)日：2005-10-20
申请号：PCT/US2004023663
申请日：2004-07-21
申请人： CYMER INC , STEIGER THOMAS D , BROWN JOSHUA C , DUFFEY THOMAS P , GILLESPIE WALTER D , MORTON RICHARD G , DYER TIMOTHY S
发明人： STEIGER THOMAS D , BROWN JOSHUA C , DUFFEY THOMAS P , GILLESPIE WALTER D , MORTON RICHARD G , DYER TIMOTHY S
IPC分类号： H01R43/00 , H01S20060101 , H01S3/00 , H01S3/036 , H01S3/038 , H01S3/097 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/038 , H01S3/036 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0388 , H01S3/097 , H01S3/09702 , H01S3/0971 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258
摘要： A fluorine gas discharge laser electrode (70) for a gas discharge laser having a laser gas containing fluorine is disclosed which may comprise a copper and copper alloy cathode body having an upper curved region containing the discharge footprint (74) for the cathode comprising copper and a lower portion comprising a copper alloy.
摘要翻译：公开了一种用于具有含氟激光气体的气体放电激光器的氟气放电激光电极（70），该氟气气体放电激光电极（70）包括铜和铜合金阴极体，该铜和铜合金阴极体具有上部弯曲区域，该上部弯曲区域包含用于阴极的放电足迹（74）包括铜合金的下部。

10. 发明申请

WO2007145792A2 CHAMBER FOR A HIGH ENERGY EXCIMER LASER SOURCE 审中-公开
标题翻译：高能激光激光源室
公开(公告)号：WO2007145792A2
公开(公告)日：2007-12-21
申请号：PCT/US2007012393
申请日：2007-05-22
申请人： CYMER INC , STEIGER THOMAS D , PARTLO WILLIAM N
发明人： STEIGER THOMAS D , PARTLO WILLIAM N
IPC分类号： H01S3/03 , H01S3/22 , H01S3/223
CPC分类号： H01S3/225 , H01S3/03 , H01S3/036 , H01S3/038
摘要： A chamber for a gas discharge laser is disclosed and may include a chamber housing having a wall, the wall having an inside surface surrounding a chamber volume and an outside surface, the wall also being formed with an orifice. For the chamber, at least one electrical conductor may extend through the orifice to pass an electric current into the chamber volume. A member may be disposed between the conductor and the wall for preventing gas flow through the orifice to allow a chamber pressure to be maintained in the volume. The chamber may further comprise a pressurized compartment disposed adjacent to the orifice for maintaining a pressure on at least a portion of the outside surface of the wall to reduce bowing of the wall near the orifice due to chamber pressure.
摘要翻译：公开了一种用于气体放电激光器的腔室，并且可以包括具有壁的腔室壳体，壁具有围绕室容积的内表面和外表面，壁还形成有孔口。对于腔室，至少一个电导体可以延伸通过孔口以将电流传递到腔体积中。构件可以设置在导体和壁之间，用于防止气体流过孔口，以允许室压力保持在容积中。腔室可以进一步包括邻近孔口设置的加压隔室，用于在壁的外表面的至少一部分上保持压力，以减小由于腔室压力而在孔口附近的壁的弯曲。

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