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1. 发明申请

WO2005050795A3 LASER OUTPUT LIGHT PULSE STRETCHER 审中-公开
标题翻译：激光输出光脉冲拉伸器
公开(公告)号：WO2005050795A3
公开(公告)日：2006-04-13
申请号：PCT/US2004036371
申请日：2004-11-01
申请人： CYMER INC , SMITH SCOT T , ERSHOV ALEXANDER I , LUKASHEV ALEXEI
发明人： SMITH SCOT T , ERSHOV ALEXANDER I , LUKASHEV ALEXEI
IPC分类号： H01S3/00 , H01S3/225 , H01S3/223
CPC分类号： G03F7/7055 , H01S3/0057 , H01S3/225
摘要： An apparatus and method for providing a high peak power short pulse duration gas discharge laser comprising a pulse stretcher which may comprise a laser output pulse optical delay initiating optic diverting a portion of the output laser pulse into an optical delay having an optical delay path and comprising; a plurality of confocal resonators in series aligned to deliver an output of the optical delay to the laser output pulse optical delay initiating optic. The plurality of confocal resonators comprises four confocal resonators may comprise a first spherical having a radius of curvature a second concave spherical mirror having the same radius of curvature and separated from the first concave spherical mirror by the radius of curvature and receiving the first reflected beam at a first point on a face of the second concave spherical mirror and generating a second reflected beam incident on a second point on the face of the first concave spherical mirror, the second reflected beam being reflected by the first concave spherical mirror from the second point on the first mirror to form an output beam from the first confocal resonator cell; and, a second confocal resonator cell receiving the output beam of the first confocal resonator cell as an input beam of the second confocal resonator cell. The apparatus and method may comprise a plurality, e.g., two pulse stretchers in series and may include spatial coherency metrology.
摘要翻译：一种用于提供高峰值功率短脉冲持续时间气体放电激光器的装置和方法，包括脉冲展宽器，其可以包括激光输出脉冲光学延迟启动光学，将输出激光脉冲的一部分转移到具有光学延迟路径的光学延迟中，并且包括 ; 串联的多个共焦共振器对准以将光延迟的输出传递到激光输出脉冲光延迟启动光学元件。多个共焦共振器包括四个共聚焦共振器可以包括具有曲率半径的第一球形，第二凹球面镜具有相同的曲率半径，并且通过曲率半径与第一凹球面镜分离，并将第一反射光束在第二凹球面镜的表面上的第一点并且产生入射在第一凹球面的表面上的第二点上的第二反射光束，第二反射光束被第一凹球面镜从第二点反射所述第一反射镜从所述第一共焦共振腔形成输出光束; 以及接收第一共焦共振器单元的输出光束作为第二共焦共振器单元的输入光束的第二共焦共振器单元。该装置和方法可以包括多个例如串联的两个脉冲担架，并且可以包括空间相干度度量。

2. 发明申请

WO2013033145A1 SKIN TREATMENT SYSTEM WITH TIME MODULATED LASER PULSES 审中-公开
标题翻译：具有时间调制激光脉冲的皮肤治疗系统
公开(公告)号：WO2013033145A1
公开(公告)日：2013-03-07
申请号：PCT/US2012/052768
申请日：2012-08-29
申请人： TANKOVICH, Nikolai , LUKASHEV, Alexei
发明人： TANKOVICH, Nikolai , LUKASHEV, Alexei
IPC分类号： A61B18/22
CPC分类号： A61B18/203 , A61B18/20 , A61B18/22 , A61B2018/00029 , A61B2018/00452 , A61B2018/00458 , A61B2018/2035 , A61B2018/208 , H01S3/0675 , H01S3/113 , H01S3/1608
摘要： A laser skin treatment process and system. The system includes features for producing a first laser beam of long pulse duration and a second laser beam of short pulse duration and a skin cooler for cooling the surface of a region of skin. The system is designed to utilize the first laser beam for heating a volume of skin tissue below the cooled surface region to a temperature to produce skin tissue modification but below skin tissue damage threshold. This volume of skin tissue is called a "thermal cavity". The second laser beam is divided into a plurality of separate laser beams that are directed through separate optical fibers and via separate paths through skin tissue to a single tiny volume of skin tissue within the thermal cavity to produce in that tiny volume mechanical damage. This tiny volume is called an energy droplet.
摘要翻译：激光皮肤治疗过程和系统。该系统包括用于产生长脉冲持续时间的第一激光束和短脉冲持续时间的第二激光束以及用于冷却皮肤区域的表面的皮肤冷却器的特征。该系统被设计为利用第一激光束将一定体积的冷却表面区域下方的皮肤组织加热至产生皮肤组织修饰但低于皮肤组织损伤阈值的温度。这个体积的皮肤组织被称为“热腔”。第二激光束被分成多个单独的激光束，其被引导通过分开的光纤并且经由穿过皮肤组织的单独路径到达热腔内的单个微小体积的皮肤组织以产生微小体积的机械损伤。这个微小的体积被称为能量液滴。

3. 发明申请

WO2005060055A3 GAS DISCHARGE LASER LIGHT SOURCE BEAM DELIVERY UNIT 审中-公开
标题翻译：气体放电激光光源光束输送单元
公开(公告)号：WO2005060055A3
公开(公告)日：2006-03-02
申请号：PCT/US2004042472
申请日：2004-12-15
申请人： CYMER INC , DAS PALASH P , AHMED KURSHID , FRANCIS GREGORY , GLATZEL HOLGER , LUKASHEV ALEXEI , TYLER JEREOMY D , WEBB R KYLE
发明人： DAS PALASH P , AHMED KURSHID , FRANCIS GREGORY , GLATZEL HOLGER , LUKASHEV ALEXEI , TYLER JEREOMY D , WEBB R KYLE
IPC分类号： G03F7/20 , H01S20060101 , H01S3/00 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/08 , H01S3/0943 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/102 , H01S3/104 , H01S3/105 , H01S3/11 , H01S3/13 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/223 , H01S3/225 , H01S3/23 , H01S3/09
CPC分类号： B23K26/12 , B23K26/128 , B23K26/705 , G01J1/04 , G01J1/0418 , G01J1/4257 , G01J2001/0285 , G03F7/70025 , G03F7/70041 , G03F7/7055 , G03F7/70575 , G03F7/70933 , H01S3/005 , H01S3/0057 , H01S3/0071 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/0943 , H01S3/097 , H01S3/09705 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： A beam delivery unit and method of delivering a laser beam from a gas discharge laser systems comprise: a beam delivery enclosure; a purge mechanism operatively connected to the beam delivery enclosure; an in-situ beam parameter monitor and adjustment mechanism within the enclosure, comprising a retractable beam redirecting optic; a beam analysis mechanism external to the enclosure; and, a retraction mechanism within the enclosure and operable from outside the enclosure and operative to move the retractable beam redirecting optic from a retracted position out of the beam path to an operative position in the beam path. A beam attenuator unit contained within the enclosure adjustably mounted within the enclosure for positioning within the beam delivery path. The BDU may have at least two enclosure isolation mechanisms comprising a first and second enclosure isolation mechanism on a first and second side of the enclosure from the at least one optic module; the BDU may have at least two enclosure isolation mechanism comprising a flapper valve having a metal to metal seating mechanism and a locking pin assembly. A precision offset ratchet driver operative to manipulate actuator mechanisms in difficult to reach locations may be provided. An external kinematic alignment tool may be provided. A method of contamination control for a BDU is disclosed comprising selection of allowable materials and fabrication processes.
摘要翻译：从气体放电激光系统输送激光束的光束传送单元和方法包括：光束传送罩; 可操作地连接到射束输送罩的清洗机构; 壳体内的原位光束参数监视和调节机构，包括可伸缩光束重定向光学元件; 外壳外部的光束分析机构; 以及在所述外壳内的收缩机构，并且可从所述外壳的外部操作，并且可操作地将所述可伸缩的束重定向光学器件从缩回位置移出所述光束路径到所述光束路径中的操作位置。包含在外壳内的光束衰减器单元可调节地安装在外壳内，用于定位在光束输送路径内。 BDU可以具有至少两个机壳隔离机构，其包括第一和第二机壳隔离机构，所述第一和第二机壳隔离机构在所述外壳的所述至少一个光学模块的第一和第二侧上; BDU可以具有至少两个外壳隔离机构，其包括具有金属对金属座位机构和锁定销组件的挡板阀。可以提供操作来操作难以到达位置的致动器机构的精密偏移棘轮驱动器。可以提供外部运动学对准工具。公开了一种用于BDU的污染控制方法，包括选择允许的材料和制造工艺。

4. 发明申请

WO2005050795A2 LASER OUTPUT LIGHT PULSE STRETCHER 审中-公开
标题翻译：激光输出光脉冲拉伸器
公开(公告)号：WO2005050795A2
公开(公告)日：2005-06-02
申请号：PCT/US2004/036371
申请日：2004-11-01
申请人： CYMER, INC. , SMITH, Scot, T. , ERSHOV, Alexander, I. , LUKASHEV, Alexei
发明人： SMITH, Scot, T. , ERSHOV, Alexander, I. , LUKASHEV, Alexei
IPC分类号： H01S
CPC分类号： G03F7/7055 , H01S3/0057 , H01S3/225
摘要： An apparatus and method for providing a high peak power short pulse duration gas discharge laser output pulse is disclosed which may comprise a pulse stretcher which may comprise a laser output pulse optical delay initiating optic diverting a portion of the output laser pulse into an optical delay having an optical delay path and comprising; a plurality of confocal resonators in series aligned to deliver an output of the optical delay to the laser output pulse optical delay initiating optic. The plurality of confocal resonators comprises four confocal resonators comprising a twelve pass four mirror arrangement. Each of the plurality of confocal resonators may comprise a first concave spherical mirror having a radius of curvature and a second concave spherical mirror having the same radius of curvature and separated by the radius of curvature. The pulse stretcher may comprise a first confocal resonator cell which may comprise: a first concave spherical mirror having a radius of curvature receiving an input beam from the laser output pulse optical delay initiating optic comprising the portion of the output laser pulse at a first point on a face of the first concave spherical mirror and generating a first reflected beam; a second concave spherical mirror having the same radius of curvature and separated from the first concave spherical mirror by the radius of curvature and receiving the first reflected beam at a first point on a face of the second concave spherical mirror and generating a second reflected beam incident on a second point on the face of the first concave spherical mirror, the second reflected beam being reflected by the first concave spherical mirror from the second point on the first mirror to form an output beam from the first confocal resonator cell; and, a second confocal resonator cell receiving the output beam of the first confocal resonator cell as an input beam of the second confocal resonator cell. The apparatus and method may form part of a beam delivery unit and may be part of an integrated circuit lithography lights source or an integrated circuit lithography tool. The apparatus and method may comprise a plurality, e.g., two pulse stretchers in series and may include spatial coherency metrology.
摘要翻译：公开了一种用于提供高峰值功率短脉冲持续时间气体放电激光输出脉冲的装置和方法，其可以包括脉冲展宽器，其可以包括激光输出脉冲光学延迟启动光学，将输出激光脉冲的一部分转移到具有光学延迟路径，包括：串联的多个共焦共振器对准以将光延迟的输出传递到激光输出脉冲光延迟启动光学元件。多个共焦共振器包括四个共聚焦共振器，其包括十二通四反射镜装置。多个共焦共振器中的每一个可以包括具有曲率半径的第一凹球面镜和具有相同曲率半径并由曲率半径分开的第二凹球面镜。脉冲展开器可以包括第一共焦共振器单元，其可以包括：具有接收来自激光输出脉冲光延迟起始光学器件的输入光束的曲率半径的第一凹球面镜，其包括在第一点处的输出激光脉冲的部分第一凹球面镜的面，并产生第一反射光束; 第二凹球面镜，具有相同的曲率半径并且通过曲率半径与第一凹球面镜分离，并且在第二凹球面镜的表面上的第一点处接收第一反射光束并产生第二反射光束入射在第一凹球面镜的表面上的第二点上，第二反射光束由第一凹球面镜从第一镜上的第二点反射，以形成来自第一共焦共振腔的输出光束; 以及接收第一共焦共振器单元的输出光束作为第二共焦共振器单元的输入光束的第二共焦共振器单元。该装置和方法可以形成光束传递单元的一部分，并且可以是集成电路光刻光源或集成电路光刻工具的一部分。该装置和方法可以包括多个例如串联的两个脉冲担架，并且可以包括空间相干度度量。

5. 发明申请

WO2005060055A2 GAS DISCHARGE LASER LIGHT SOURCE BEAM DELIVERY UNIT 审中-公开
标题翻译：气体放电激光光源光束输送单元
公开(公告)号：WO2005060055A2
公开(公告)日：2005-06-30
申请号：PCT/US2004/042472
申请日：2004-12-15
申请人： CYMER, INC. , DAS, Palash, P. , AHMED, Kurshid , FRANCIS, Gregory , GLATZEL, Holger , LUKASHEV, Alexei , TYLER, Jereomy, D. , WEBB, R., Kyle
发明人： DAS, Palash, P. , AHMED, Kurshid , FRANCIS, Gregory , GLATZEL, Holger , LUKASHEV, Alexei , TYLER, Jereomy, D. , WEBB, R., Kyle
IPC分类号： H01S
CPC分类号： B23K26/12 , B23K26/128 , B23K26/705 , G01J1/04 , G01J1/0418 , G01J1/4257 , G01J2001/0285 , G03F7/70025 , G03F7/70041 , G03F7/7055 , G03F7/70575 , G03F7/70933 , H01S3/005 , H01S3/0057 , H01S3/0071 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/0943 , H01S3/097 , H01S3/09705 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： A beam delivery unit and method of delivering a laser beam from a laser light source for excimer or molecular fluorine gas discharge laser systems in the DUV and smaller wavelengths is disclosed, which may comprise: a beam delivery enclosure defining an output laser light pulse beam delivery path from an output of a gas discharge laser to an input of a working apparatus employing the light contained in the output laser light pulse beam; a purge mechanism operatively connected to the beam delivery enclosure; an in-situ beam parameter monitor and adjustment mechanism within the enclosure, comprising a retractable beam redirecting optic; a beam analysis mechanism external to the enclosure; and, a retraction mechanism within the enclosure and operable from outside the enclosure and operative to move the retractable beam redirecting optic from a retracted position out of the beam path to an operative position in the beam path. The BDU may also include a beam attenuator unit contained within the enclosure adjustably mounted within the enclosure for positioning within the beam delivery path. The BDU may have at least two enclosure isolation mechanisms comprising a first enclosure isolation mechanism on a first side of the enclosure from the at least one optic module and a second enclosure isolation mechanism on a second side of the enclosure from the at least one optic module, each respective enclosure isolation mechanism comprising a flapper valve having a metal to metal seating mechanism and a locking pin assembly. A precision offset ratchet driver operative to manipulate actuator mechanisms in difficult to reach locations may be provided. An external kinematic alignment tool may be provided. A method of contamination control for a BDU is disclosed comprising selection of allowable materials and fabrication processes.
摘要翻译：公开了一种光束传递单元和从DUV和较小波长的准分子或分子氟气体放电激光系统的激光光源传送激光束的方法，其可以包括：限定输出激光束脉冲束传送从气体放电激光器的输出到使用包含在输出激光脉冲光束中的光的工作装置的输入的路径; 可操作地连接到射束输送罩的清洗机构; 壳体内的原位光束参数监视和调节机构，包括可伸缩光束重定向光学元件; 外壳外部的光束分析机构; 以及在所述外壳内的收缩机构，并且可从所述外壳的外部操作，并且可操作地将所述可伸缩的束重定向光学器件从缩回位置移出所述光束路径到所述光束路径中的操作位置。 BDU还可以包括容纳在可调节地安装在外壳内的外壳内的光束衰减器单元，用于定位在光束输送路径内。 BDU可以具有至少两个机壳隔离机构，该机构包括位于外壳的第一侧面上的至少一个光学模块的第一外壳隔离机构和位于外壳的第二侧的第二外壳隔离机构，所述第二外壳隔离机构与所述至少一个光学模块每个相应的外壳隔离机构包括具有金属对金属安置机构和锁销组件的挡板阀。可以提供操作来操作难以到达位置的致动器机构的精密偏移棘轮驱动器。可以提供外部运动学对准工具。公开了一种用于BDU的污染控制方法，包括选择允许的材料和制造工艺。

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