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    • 9. 发明申请
    • GAS DISTRIBUTION SYSTEM HAVING FAST GAS SWITCHING CAPABILITIES
    • 具有快速气体切换能力的气体分配系统
    • WO2005112093A2
    • 2005-11-24
    • PCT/US2005/013582
    • 2005-04-22
    • LAM RESEARCH CORPORATIONHUANG, ZhisongSAM, Jose, TongLENZ, EricDHINDSA, RajinderSADJADI, Reza
    • HUANG, ZhisongSAM, Jose, TongLENZ, EricDHINDSA, RajinderSADJADI, Reza
    • H01L21/306
    • C23C16/45561C23C16/45565H01J37/3244H01J37/32449
    • A gas distribution system for supplying different gas compositions to a chamber, such as a plasma processing chamber of a plasma processing apparatus is provided. The gas distribution system can include a gas supply section, a flow control section and a switching section. The gas supply section provides first and second gases, typically gas mixtures, to the flow control section, which controls the flows of the first and second gases to the chamber. The chamber can include multiple zones, and the flow control section can supply the first and second gases to the multiple zones at desired flow ratios of the gases. The gas distribution system can continuously supply the first and second gases to the switching section and the switching section is operable to switch the flows of the first and second gases, such that one of the first and second process gases is supplied to the chamber while the other of the first and second gases is supplied to a by-pass line, and then to switch the gas flows. The switching section preferably includes fast switching valves operable to quickly open and close to allow fast switching of the first and second gases, preferably without the occurrence of undesirable pressure surges or flow instabilities in the flow of either gas.
    • 提供了一种用于将诸如等离子体处理装置的等离子体处理室之类的不同气体成分供应到腔室的气体分配系统。 气体分配系统可以包括气体供应部分,流量控制部分和切换部分。 气体供应部分将第一和第二气体(通常为气体混合物)提供给流量控制部分,该控制部分控制第一和第二气体流到室的流动。 腔室可以包括多个区域,并且流量控制部分可以以期望的气体流量比将第一和第二气体供应到多个区域。 气体分配系统可以将第一和第二气体连续地供应到切换部分,并且切换部分可操作地切换第一和第二气体的流动,使得第一和第二处理气体中的一个被供应到腔室,而 第一和第二气体中的另一个被供应到旁路管线,然后切换气体流。 切换部分优选地包括快速切换阀,其可操作以快速打开和关闭,以允许第一和第二气体的快速切换,优选地,在任一气体的流动中不发生不期望的压力波动或流动不稳定性。