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    • 3. 发明申请
    • THROUGH-SILICON VIA FABRICATION WITH ETCH STOP FILM
    • 通过硅胶制成的薄膜
    • WO2011116326A1
    • 2011-09-22
    • PCT/US2011/029058
    • 2011-03-18
    • QUALCOMM IncorporatedGU, ShiqunLI, YimingRAY, Urmi
    • GU, ShiqunLI, YimingRAY, Urmi
    • H01L21/768
    • H01L21/76898
    • For a semiconductor wafer substrate (102) having an inter layer dielectric (110), a through - silicon via may be formed in the substrate by first depositing an etch stop film (202) on top of the inter layer dielectric, followed by etching an opening (204) through the etch stop film, the interlayer dielectric, and into the substrate. A dielectric liner (206) is then deposited over the etch stop film and into the opening. For some embodiments, the dielectric liner may be etched away except for those portions adhering to the sidewall of the opening. Then a conductive material (208) may be deposited into the opening and on the etch stop film. The excess conductive material may then be removed, and for some embodiments the etch stop film may also be removed.
    • 对于具有层间电介质(110)的半导体晶片基板(102),可以通过首先在层间电介质的顶部上沉积蚀刻停止膜(202),然后蚀刻 通过蚀刻停止膜,层间电介质,并进入衬底的开口(204)。 然后将电介质衬垫(206)沉积在蚀刻停止膜上并进入开口中。 对于一些实施例,除了粘附到开口的侧壁上的那些部分之外,电介质衬垫可被蚀刻掉。 然后可以将导电材料(208)沉积到开口中和蚀刻停止膜上。 然后可以除去过量的导电材料,并且对于一些实施例,也可以去除蚀刻停止膜。
    • 7. 发明申请
    • CAPACITIVE MEMS-BASED DISPLAY WITH TOUCH POSITION SENSING
    • 具有触摸位置感测功能的基于MEMS的电容显示器
    • WO2010021981A1
    • 2010-02-25
    • PCT/US2009/054031
    • 2009-08-17
    • QUALCOMM INCORPORATEDGU, ShiqunNOWAK, Matthew
    • GU, ShiqunNOWAK, Matthew
    • G06F3/041
    • G06F3/0412G06F3/044
    • A micro-electro-mechanical systems (MEMS) pixel for display and touch position sensing includes a substrate and a capacitive element. The capacitive element includes one or more pixels having a first conductive platelet above the substrate, and a second conductive platelet above and spaced apart from the first conductive platelet, the two platelets forming the capacitive element. A connection to each platelet provides for applying a voltage, wherein the platelet separation changes according to the applied voltage. A transparent dielectric plate, spaced apart from and positioned opposite the substrate, covers the at least one pixel. A capacitance sensing circuit attached to the connection to each platelet of the pixel senses changes in capacitance not resulting from the applied voltage.
    • 用于显示和触摸位置感测的微电子机械系统(MEMS)像素包括基板和电容元件。 电容元件包括一个或多个像素,其具有在衬底上方的第一导电片,以及在第一导电片上方并与第一导电片形成间隔开的第二导电片,所述两片片形成电容元件。 与每个血小板的连接提供施加电压,其中血小板分离根据所施加的电压而改变。 与衬底间隔开并与衬底相对设置的透明电介质板覆盖至少一个像素。 连接到与像素的每个血小板的连接的电容感测电路感测不是由施加电压引起的电容变化。
    • 8. 发明申请
    • MANUFACTURING METHOD OF A MAGNETIC TUNNEL JUNCTION ELEMENT USING TWO MASKS
    • 使用两个掩模的磁性隧道结构元件的制造方法
    • WO2009129283A1
    • 2009-10-22
    • PCT/US2009/040612
    • 2009-04-15
    • QUALCOMM INCORPORATEDKANG, Seung, H.LI, XiaGU, ShiqunNOWAK, Matthew, M.
    • KANG, Seung, H.LI, XiaGU, ShiqunNOWAK, Matthew, M.
    • H01L43/08H01L43/12
    • H01L43/08G11C11/161H01L43/12
    • A method for forming a magnetic tunnel junction (MTJ) for magnetic random access memory (MRAM) using two masks includes depositing over an interlevel dielectric layer (36) containing an exposed first interconnect metallization, (37) a first electrode, (30) a fixed magnetization layer, (32) a tunneling barrier layer, (12) a free magnetization layer (11) and a second electrode (6). An MTJ structure including the tunnel barrier layer, free layer and second electrode is defined above the first interconnect metallization by a first mask. A first passivation layer (40) encapsulates the MTJ structure, leaving the second electrode exposed. A third electrode (15) is deposited in contact with the second electrode. A second mask is used to pattern a larger structure including the third electrode, the first passivation layer, the fixed magnetization layer and the first electrode. A second dielectric passivation layer (8) covers the etched plurality of layers, the first interlevel dielectric layer and the first interconnect metallization.
    • 用于使用两个掩模形成用于磁性随机存取存储器(MRAM)的磁性隧道结(MTJ)的方法包括在包含暴露的第一互连金属化的层间介质层(36)上沉积(37)第一电极,(30) 固定磁化层,(32)隧道势垒层,(12)自由磁化层(11)和第二电极(6)。 包括隧道势垒层,自由层和第二电极的MTJ结构通过第一掩模限定在第一互连金属化之上。 第一钝化层(40)封装MTJ结构,留下第二电极。 沉积与第二电极接触的第三电极(15)。 使用第二掩模来图案化包括第三电极,第一钝化层,固定磁化层和第一电极的较大结构。 第二介电钝化层(8)覆盖被蚀刻的多个层,第一层间介质层和第一互连金属化层。