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    • 3. 发明申请
    • BUILDING A LIBRARY OF SPECTRA FOR OPTICAL MONITORING
    • 建立光学监测光谱图书馆
    • WO2012051121A3
    • 2012-06-21
    • PCT/US2011055642
    • 2011-10-10
    • APPLIED MATERIALS INCDAVID JEFFREY DRUEBENVEGNU DOMINIC JHU XIAOYUAN
    • DAVID JEFFREY DRUEBENVEGNU DOMINIC JHU XIAOYUAN
    • H01L21/304H01L21/66
    • H01L22/26B24B37/013B24B49/12H01L21/3212H01L22/12
    • A method of controlling polishing includes storing a library having a plurality of reference spectra, polishing a substrate, measuring a sequence of spectra of light from the substrate during polishing, for each measured spectrum of the sequence of spectra, finding a best matching reference spectrum using a matching technique other than sum of squared differences to generate a sequence of best matching reference spectra, and determining at least one of a polishing endpoint or an adjustment for a polishing rate based on the sequence of best matching reference spectra. Finding a best matching reference spectrum may include performing a cross-correlation of the measured spectrum with each of two or more of the plurality of reference spectra from the library and selecting a reference spectrum with the greatest correlation to the measured spectrum as a best matching reference spectrum.
    • 控制抛光的方法包括:存储具有多个参考光谱的库,抛光衬底,在抛光期间测量来自衬底的光的光谱序列,对于光谱序列的每个测量光谱,使用 除了平方差的和以产生最佳匹配参考光谱的序列之外的匹配技术,以及基于最佳匹配参考光谱的序列来确定抛光终点或抛光速率的调整中的至少一个。 找到最佳匹配的参考光谱可以包括执行所测量的光谱与来自文库的多个参考光谱中的两个或更多个的互相关,并且选择与所测量的光谱具有最大相关性的参考光谱作为最佳匹配参考 光谱。