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    • 2. 发明申请
    • MULTIPLE MATCHING REFERENCE SPECTRA FOR IN-SITU OPTICAL MONITORING
    • 用于原位光学监测的多重匹配参考光谱
    • WO2012054263A3
    • 2012-06-28
    • PCT/US2011055814
    • 2011-10-11
    • APPLIED MATERIALS INCZHANG JIMINWANG ZHIHONGLEE HARRY QTU WEN-CHIANG
    • ZHANG JIMINWANG ZHIHONGLEE HARRY QTU WEN-CHIANG
    • H01L21/304H01L21/66
    • B24B37/013B24B49/12
    • A method of controlling polishing includes storing a plurality libraries, each library including a plurality of reference spectra, polishing a substrate, measuring a sequence of spectra of light from the substrate during polishing, and for each measured spectrum of the sequence of spectra, finding a best matching first reference spectrum from a first library from the plurality of libraries and finding a best matching second reference spectrum from a different second library from the plurality of libraries, determining a first value associated with the best matching first reference spectrum and determining a second value from the best matching second reference spectrum, and calculating a third value from the first value and the second value to generate a sequence of calculated third values. At least one of a polishing endpoint or an adjustment for a polishing rate can be determined based on the sequence of calculated third values.
    • 控制抛光的方法包括存储多个库,每个库包括多个参考光谱,抛光衬底,在抛光期间测量来自衬底的光的光谱序列,并且对于光谱序列的每个测量光谱,找到 最佳匹配来自所述多个库中的第一库的第一参考谱,并且从所述多个库中的不同第二库找到最佳匹配的第二参考谱,确定与所述最佳匹配的第一参考谱相关联的第一值,以及确定第二值 从最佳匹配的第二参考频谱中计算第三值,并且从第一值和第二值计算第三值以生成计算的第三值的序列。 基于所计算的第三值的顺序,可以确定抛光终点或抛光速率的调整中的至少一个。