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91. 发明授权

US07036357B2 Dynamic activation for an atomic force microscope and method of use thereof 有权
公开(公告)号：US07036357B2
公开(公告)日：2006-05-02
申请号：US10752235
申请日：2004-01-06
申请人： Dennis M. Adderton , Stephen C. Minne
发明人： Dennis M. Adderton , Stephen C. Minne
IPC分类号： G01B5/28 , G01N13/16
CPC分类号： G01Q10/065 , G01Q60/34 , Y10S977/85 , Y10S977/86 , Y10S977/863 , Y10S977/881
摘要： A scanning probe microscope method and apparatus that modifies imaging dynamics using an active drive technique to optimize the bandwidth of amplitude detection. The deflection is preferably measured by an optical detection system including a laser and a photodetector, which measures cantilever deflection by an optical beam bounce technique or another conventional technique. The detected deflection of the cantilever is subsequently demodulated to give a signal proportional to the amplitude of oscillation of the cantilever, which is thereafter used to drive the cantilever.

92. 发明申请

US20060037401A1 Scanning near field ultrasound holography 有权
标题翻译：扫描近场超声全息术
公开(公告)号：US20060037401A1
公开(公告)日：2006-02-23
申请号：US11244747
申请日：2005-10-06
申请人： Gajendra Shekhawat , Vinayak Dravid
发明人： Gajendra Shekhawat , Vinayak Dravid
IPC分类号： G01N29/04 , G01N13/16
CPC分类号： G01N29/265 , G01N29/0663 , G01N29/0681 , G01N29/069 , G01N2291/0232 , G01N2291/02827 , G01N2291/0427 , G01Q60/32 , G03H3/00
摘要： A high spatial resolution phase-sensitive technique employs a scanning near field ultrasound holography (SNFUH) methodology for imaging elastic as well as viscoelastic variations across a sample surface. SNFUH uses a near-field approach to measure time-resolved variations in ultrasonic oscillations at a sample surface. As such, it overcomes the spatial resolution limitations of conventional phase-resolved acoustic microscopy (i.e. holography) by eliminating the need for far-field acoustic lenses.
摘要翻译：高空间分辨率相敏技术采用扫描近场超声全息（SNFUH）方法，用于在样品表面上成像弹性以及粘弹性变化。 SNFUH使用近场方法测量样品表面超声波振荡的时间分辨变化。因此，它通过消除对远场声透镜的需要来克服常规相分离声学显微镜（即全息术）的空间分辨率限制。

93. 发明授权

US06945100B2 Scanning probe microscope with improved probe tip mount 有权
标题翻译：扫描探针显微镜，带有改进的探针尖端安装
公开(公告)号：US06945100B2
公开(公告)日：2005-09-20
申请号：US10748827
申请日：2003-12-29
申请人： Joonhyung Kwon , Young Seok Kim , Sang-il Park
发明人： Joonhyung Kwon , Young Seok Kim , Sang-il Park
IPC分类号： G01B21/30 , G01Q10/02 , G01Q10/04 , G01Q20/02 , G01Q30/00 , G01Q60/32 , G01Q60/38 , G01Q70/02 , G01Q70/10 , H01J37/26 , G01N13/16 , G01B5/28
CPC分类号： G01Q20/02 , G01Q10/02 , G01Q10/04 , G01Q70/02 , Y10S977/732 , Y10S977/849 , Y10S977/869 , Y10S977/87 , Y10S977/873 , Y10S977/881
摘要： A mounting mechanism for the probe tip of a Scanning Probe Microscope (SPM) includes a scanner supported by a stationary frame, and a kinematic mechanism supported by the scanner. The kinematic mechanism includes at least three protrusions and at least one magnet. The mounting mechanism for the probe tip also includes a chip mount having a hole, a slot and a flat surface. The chip mount, on being held by the magnet, provides an easy way to mount the probe tip without requiring any tools.
摘要翻译：用于扫描探针显微镜（SPM）的探针尖端的安装机构包括由固定框架支撑的扫描仪和由扫描仪支撑的运动机构。运动机构包括至少三个突起和至少一个磁体。用于探针尖端的安装机构还包括具有孔，槽和平坦表面的芯片安装件。由磁体保持的芯片安装座提供了一种简单的方法来安装探针尖端，而不需要任何工具。

94. 发明授权

US06931917B2 System for sensing a sample 失效
公开(公告)号：US06931917B2
公开(公告)日：2005-08-23
申请号：US10729609
申请日：2003-12-05
申请人： Thomas McWaid , Peter Panagas , Steven G. Eaton , Amin Samsavar , William R. Wheeler
发明人： Thomas McWaid , Peter Panagas , Steven G. Eaton , Amin Samsavar , William R. Wheeler
IPC分类号： G01Q70/08 , G01B3/00 , G01B5/28 , G01B7/34 , G01B21/20 , G01B21/30 , G01Q10/00 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q60/38 , G01Q70/00 , G01Q70/06 , G01Q70/12 , G01Q90/00 , G01N13/16
CPC分类号： G01B3/008 , G01B7/34 , G01Q10/06 , G01Q60/34 , Y10S977/851
摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.

95. 发明授权

US06912893B2 Apparatus and method for improving tuning of a probe-based instrument 失效
标题翻译：用于改善基于探针的仪器调谐的装置和方法
公开(公告)号：US06912893B2
公开(公告)日：2005-07-05
申请号：US10417506
申请日：2003-04-17
申请人： Stephen C. Minne , Hector B. Cavazos
发明人： Stephen C. Minne , Hector B. Cavazos
IPC分类号： G01Q70/02 , G01Q70/04 , G01N13/16 , G01B5/28
CPC分类号： G01Q70/04 , Y10S977/873
摘要： A method of operating a probe-based instrument includes providing a probe assembly and a probe holder and oscillating a probe of the probe assembly with an actuator that generates oscillation energy. The method also includes mounting the probe assembly on the probe holder so as to lessen interference with the oscillation energy coupled to the tip of the probe. A corresponding probe assembly includes a base having two substantially opposed surfaces and a cantilever extending from the base and supporting a tip. The probe assembly is mounted in a probe holder such that a probe holder surface contacts one of the opposed surfaces. The one opposed surface preferably includes at least one opening such that the surface area of the one opposed surface is substantially less than the surface area of the probe holder surface.
摘要翻译：操作基于探针的仪器的方法包括提供探针组件和探针保持器，并且用产生振荡能量的致动器振荡探针组件的探针。该方法还包括将探针组件安装在探针支架上，以便减少与耦合到探针尖端的振荡能量的干扰。相应的探针组件包括具有两个基本上相对的表面的基部和从基部延伸并支撑尖端的悬臂。探针组件安装在探针保持器中，使得探针保持器表面接触相对表面之一。一个相对表面优选地包括至少一个开口，使得一个相对表面的表面积基本上小于探针保持器表面的表面积。

96. 发明申请

US20050081608A1 System and method for the analysis of atomic force microscopy data 有权
标题翻译：用于分析原子力显微镜数据的系统和方法
公开(公告)号：US20050081608A1
公开(公告)日：2005-04-21
申请号：US10686738
申请日：2003-10-17
申请人： Brett Shoelson
发明人： Brett Shoelson
IPC分类号： G01N3/00 , G01N3/02 , G01Q10/00 , G01Q30/04 , G01Q60/24 , G01N13/16
CPC分类号： G01Q30/04 , G01N2203/0078 , G01N2203/0286 , G01Q60/366 , Y10S977/85
摘要： A system and method for the analysis of AFM data is provided. The system and method can be used in conjunction with an atomic force microscopy (AFM) system including a cantilever with a tip used to analyze a sample, the AFM outputting an AFM data file. An exemplary embodiment of the invention includes a computer readable medium storing computer readable program code for causing a computer to receive user input regarding an analysis to be performed and analysis parameters; parse the AFM data file based on the user input to obtain a deflection of the cantilever; determine an indentation depth of the tip into the sample based at least in part on the deflection; select a model of contact mechanics based on the user input; solve the selected model of contact mechanics based on the input analysis using the determined indentation depth; and determine a residual error.
摘要翻译：提供了一种分析AFM数据的系统和方法。该系统和方法可与原子力显微镜（AFM）系统一起使用，该系统包括具有用于分析样品的尖端的悬臂，AFM输出AFM数据文件。本发明的示例性实施例包括存储计算机可读程序代码的计算机可读介质，用于使计算机接收关于待执行的分析和分析参数的用户输入; 基于用户输入解析AFM数据文件以获得悬臂的偏转; 至少部分地基于偏转来确定尖端到样品中的压痕深度; 根据用户输入选择接触力学模型; 基于输入分析，使用确定的压痕深度解决所选择的接触力学模型; 并确定残差。

97. 发明授权

US06880386B1 Method and device for simultaneously determining the adhesion, friction, and other material properties of a sample surface 有权
标题翻译：用于同时测定样品表面的粘合性，摩擦性和其它材料性质的方法和装置
公开(公告)号：US06880386B1
公开(公告)日：2005-04-19
申请号：US09869789
申请日：2000-01-04
申请人： Hans-Ulrich Krotil , Thomas Stifter , Othmar Marti
发明人： Hans-Ulrich Krotil , Thomas Stifter , Othmar Marti
IPC分类号： G01N13/00 , G01N19/02 , G01N19/04 , G01Q20/02 , G01Q60/26 , G01Q60/28 , G01N13/16 , G01B11/30 , G01B21/30
CPC分类号： G01Q60/26 , G01N19/02 , G01N19/04 , G01Q20/02 , G01Q60/28
摘要： A process for the location-resolved simultaneous detection of the adhesion and friction as well as possibly of other material properties of a sample surface to be examined by means of a raster probe microscope comprising a raster probe. The raster probe and/or the sample with sample surface are moved until at a point of the sample surface to be examined the raster probe interacts in a determined manner with this surface. The raster probe and/or the sample are subjected to a vertical oscillation, and a first measuring signal characterized by the deformation of the raster probe is recorded. A second measuring signal characterizing the deformation of the raster probe is recorded, wherein the raster probe and/or the sample are subjected to a horizontal and/or vertical oscillation. From these two measuring signals the desired material properties are determined. For the detection of the entire surface area to be examined the raster probe and or the sample are again moved and for the repetition of the measuring process described brought into contact with the sample surface in the above described manner.
摘要翻译：用于通过包括光栅探针的光栅探针显微镜同时检测粘合和摩擦以及可能通过待检查的样品表面的其它材料性质的位置分辨的方法。光栅探针和/或具有样品表面的样品被移动直到待检测的样品表面的点处，光栅探针以确定的方式与该表面相互作用。光栅探针和/或样品经受垂直振荡，并且记录由光栅探针的变形表征的第一测量信号。记录表征光栅探针的变形的第二测量信号，其中光栅探针和/或样品经受水平和/或垂直振荡。从这两个测量信号中，确定所需的材料性质。为了检测待检查的整个表面区域，再次移动光栅探针和/或样品，并且以上述方式重复与描述的样品表面接触的测量过程。

98. 发明授权

US06871528B2 Method of producing a branched carbon nanotube for use with an atomic force microscope 失效
标题翻译：用原子力显微镜制造支链碳纳米管的方法
公开(公告)号：US06871528B2
公开(公告)日：2005-03-29
申请号：US10413598
申请日：2003-04-14
申请人： Rudiger Schlaf , Zhifeng F. Ren , Jianguo Wen , David L. Carnahan
发明人： Rudiger Schlaf , Zhifeng F. Ren , Jianguo Wen , David L. Carnahan
IPC分类号： B05D5/12 , C01B31/02 , C23C8/00 , C23C16/04 , C23C16/26 , C30B25/00 , G01Q60/24 , G01Q70/12 , H01L51/30 , G01B5/28 , G01N13/16
CPC分类号： H01L51/0048 , C01B32/162 , C23C16/04 , C23C16/26 , C30B25/00 , C30B29/02 , C30B29/605 , G01Q70/12 , H01L51/0545 , Y10S977/876
摘要： A method of producing a branched carbon nanotube (CNT) is disclosed. The branched CNT is used with an atomic force microscope having a cantilever and a tip and that is able to measure a surface of a substrate as well as an undercut feature of the substrate that protrudes from the surface. A catalytic material is deposited onto the tip of the microscope, and the catalytic material is subjected to chemical vapor deposition. This initiates growth of a primary branch of the branched carbon nanotube such that the primary branch extends from the tip. A secondary branch is then introduced to extend from the primary branch and produce the branched carbon nanotube. The primary branch interacts with the surface of the substrate and the secondary branch interacts with the undercut feature.
摘要翻译：公开了一种生产支链碳纳米管（CNT）的方法。分支CNT与具有悬臂和尖端的原子力显微镜一起使用，并且能够测量衬底的表面以及从表面突出的衬底的底切特征。将催化材料沉积在显微镜的尖端上，催化材料进行化学气相沉积。这引发支链碳纳米管的主要分支的生长，使得主分支从尖端延伸。然后引入次级分支以从主分支延伸并产生支化碳纳米管。主分支与基底的表面相互作用，次分支与底切特征相互作用。

99. 发明申请

US20050034529A1 Strain sensors based on nanowire piezoresistor wires and arrays 有权
标题翻译：基于纳米线压敏电阻电线和阵列的应变传感器
公开(公告)号：US20050034529A1
公开(公告)日：2005-02-17
申请号：US10826007
申请日：2004-04-16
申请人： Hongxing Tang , Michael Roukes
发明人： Hongxing Tang , Michael Roukes
IPC分类号： G01B5/28 , G01L1/00 , G01L1/18 , G01L1/20 , G01L19/04 , G01N13/16 , G12B21/08
CPC分类号： G01L1/18 , G01L1/20 , G01N33/54346 , G01N33/54373
摘要： A highly sensitive and ultra-high density array of electromechanical nanowires is fabricated. Nanowires are extremely sensitive to the strain induced by the attachment of biological and chemical species. Real-time detection is realized through piezoresistive transduction from the specially designed materials that form the nanowires. These specially designed materials include doped silicon or germanium, doped III-V semiconductors such as GaAs, GaN and InAs systems, and ultra-thin metal films.
摘要翻译：制造了高灵敏度和超高密度的机电纳米线阵列。纳米线对由生物和化学物质的附着引起的菌株非常敏感。通过形成纳米线的专门设计的材料的压阻传导实现实时检测。这些特殊设计的材料包括掺杂的硅或锗，掺杂的III-V半导体，例如GaAs，GaN和InAs系统，以及超薄金属膜。

100. 发明授权

US06851301B2 Cantilever for scanning probe microscope 失效
标题翻译：悬臂扫描探针显微镜
公开(公告)号：US06851301B2
公开(公告)日：2005-02-08
申请号：US10151102
申请日：2002-05-21
申请人： Young Sik Kim , Hyo Jin Nam
发明人： Young Sik Kim , Hyo Jin Nam
IPC分类号： G01B7/34 , G01Q20/04 , G01Q60/00 , G01Q60/24 , G01Q70/16 , G01B5/28 , G01N13/16
CPC分类号： G01Q20/04 , G01Q10/045 , G01Q60/38 , Y10S977/87 , Y10S977/873
摘要： Cantilever for a scanning probe microscope (SPM) including a substrate having a tip, a piezoactuator on the substrate movable in response to an external electric signal, and a sensor formed around the piezoactuator so as not to overlap with the piezoactuator, thereby minimizing inner couplings.
摘要翻译：用于扫描探针显微镜（SPM）的悬臂，包括具有尖端的基底，基板上的压电致动器可响应于外部电信号而移动，以及形成在压电致动器周围的传感器，以便不与压电致动器重叠，从而最小化内部联接。

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