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1. 发明申请

US20190094267A1 METHOD OF CONTROLLING A PROBE 审中-公开
公开(公告)号：US20190094267A1
公开(公告)日：2019-03-28
申请号：US16141413
申请日：2018-09-25
申请人： Louis Pacheco
发明人： Louis Pacheco
IPC分类号： G01Q10/06 , G01Q20/04 , G01Q60/26 , G01Q60/28 , G01Q60/38
摘要： A method for commanding a tip of a probe is disclosed, wherein a command signal, representative of the force applied by said tip on the surface of a sample to be analyzed, includes at least one cycle successively defined by: a first step where the value of said command signal decreases from a maximum value (Smax) to a minimum value (Smin) so as to move said tip away from said surface at a predetermined distance called detachment height; a second step where the value of the command signal is maintained constant at said minimum value so as to maintain the tip at said detachment height; a third step where the value of the command signal increases from the minimum value up to said maximum value so as to bring the tip closer towards the surface to be analyzed until the tip comes into contact with the surface; and a fourth step where the value of the command signal is maintained constant at said maximum value to maintain the tip in contact with the surface to be analyzed under a constant force between the tip and the surface to be analyzed; the command signal being controlled between two successive steps to avoid any oscillation of the tip.

2. 发明授权

US5477732A Adhesion measuring method 失效
标题翻译：粘附测量方法
公开(公告)号：US5477732A
公开(公告)日：1995-12-26
申请号：US314962
申请日：1994-09-29
申请人： Takao Yasue , Tadashi Nishioka
发明人： Takao Yasue , Tadashi Nishioka
IPC分类号： G01N19/00 , G01B21/30 , G01L1/00 , G01N13/00 , G01N19/04 , G01Q20/02 , G01Q60/24 , G01Q60/28 , H01L21/30 , H01L21/66
CPC分类号： G01Q60/28 , B82Y35/00 , G01N13/00 , G01N19/04 , H01L22/20 , H01L22/12
摘要： An adhesion measuring apparatus includes a measuring device for measuring a Force-Curve at each of multiple measuring points on a sample surface using a cantilever provided at its distal end with a probe which is made of a material to be formed on the sample surface, and a distribution image forming device for calculating adhesion between a material making up the sample surface and the material to be formed on the sample surface from an output of the measuring device, and forming an image of adhesion distribution on the sample surface. An adhesion measuring method includes the steps of adjusting the spacing between a probe which is provided at the distal end of a cantilever and made of a material to be formed on a sample surface and the sample surface to measure a Force-Curve at each of multiple measuring points on the sample surface, calculating adhesion between a material making up the sample surface and the material to be formed on the sample surface at each of the measuring points from the result of measuring the Force-Curve, and forming an image of adhesion distribution on the sample surface from the adhesion calculated for each of the measuring points. With the present adhesion measuring apparatus and method, the condition of the sample surface can be accurately determined at an atomic level.
摘要翻译：附着测量装置包括：测量装置，用于在样品表面上的多个测量点的每个测量点上使用在其远端设置的悬臂，用由要在样品表面上形成的材料制成的探针来测量力曲线;以及分布图像形成装置，用于从测量装置的输出计算构成样品表面的材料与样品表面上形成的材料之间的粘合力，并在样品表面上形成粘合分布图像。附着测量方法包括以下步骤：调整设置在悬臂的远端并由要形成在样品表面上的材料制成的探针与样品表面之间的间隔，以在多个样品中的每一个处测量力曲线测量样品表面的测量点，从测量力曲线的结果计算构成样品表面的材料与待测样品表面上待形成的材料之间的粘附力，并形成粘附分布图在样品表面上从为每个测量点计算的粘附力。利用本粘合测量装置和方法，能够以原子级准确地确定样品表面的状态。

3. 发明授权

US10352964B2 Cantilever set for atomic force microscopes, substrate surface inspection apparatus including the same, method of analyzing surface of semiconductor substrate by using the same, and method of forming micropattern by using the same 有权
公开(公告)号：US10352964B2
公开(公告)日：2019-07-16
申请号：US15415034
申请日：2017-01-25
申请人： Samsung Electronics Co., Ltd.
发明人： Kyeong-mi Lee , Jeong-ju Park , Shi-yong Yi , Eun-sung Kim , Seung-chul Kwon , Sang-ouk Kim , Young-joo Choi
IPC分类号： G01Q70/14 , G01Q60/28 , H01L21/67 , G01Q60/42 , H01L27/108
摘要： A method of forming a micropattern, a substrate surface inspection apparatus, a cantilever set for an atomic force microscope, and a method of analyzing a surface of a semiconductor substrate, and a probe tip the method including forming pinning patterns on a semiconductor substrate; forming a neutral pattern layer in spaces between the pinning patterns; and inspecting a surface of a guide layer that includes the pinning patterns and the neutral pattern layer by using an atomic force microscope (AFM).

4. 发明授权

US09506947B2 System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobing 有权
标题翻译：用于非接触式显微镜的系统和方法用于样品的三维预表征，用于在纳米孔径下进行样品导航的快速和非破坏性
公开(公告)号：US09506947B2
公开(公告)日：2016-11-29
申请号：US14552399
申请日：2014-11-24
申请人： DCG Systems, Inc.
发明人： Vladimir A. Ukraintsev , Richard Stallcup , Sergiy Pryadkin , Mike Berkmyre , John Sanders
IPC分类号： G02B27/32 , G01Q10/00 , G01Q60/28 , G01Q60/48 , G01Q10/02 , G01Q30/02 , G01Q60/00 , G01Q60/38
CPC分类号： G01Q10/02 , G01Q10/00 , G01Q30/025 , G01Q60/00 , G01Q60/38 , G01Q60/48
摘要： A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates.
摘要翻译：用于执行抽样探测的系统。该系统包括构造成基于至少三个基准标记接收样本的三维坐标的地形显微镜; 接收安装在支架上的样品; 并基于至少三个基准标记和三维坐标导航到样本上的至少一个位置。

5. 发明授权

US08923595B2 Method of identification of cancerous and normal cells 有权
标题翻译：鉴定癌细胞和正常细胞的方法
公开(公告)号：US08923595B2
公开(公告)日：2014-12-30
申请号：US13013209
申请日：2011-01-25
申请人： Igor Sokolov , Maxim Dokukin
发明人： Igor Sokolov , Maxim Dokukin
IPC分类号： G06K9/00 , G01Q60/24 , G01Q60/28 , G01Q60/34 , G01Q30/04 , B82Y35/00
CPC分类号： G06K9/00127 , B82Y35/00 , G01Q30/04
摘要： A method is described for distinguishing between cancerous and normal human cells. The method includes collecting cells; preparing cells for scanning; scanning of the prepared cells by means of atomic force microscopy; processing of the obtained images through specific algorithms; wherein the algorithms allowing one to identify whether the cell is cancerous or normal.
摘要翻译：描述了用于区分癌细胞和正常人细胞的方法。该方法包括收集细胞; 准备细胞进行扫描; 通过原子力显微镜扫描制备的细胞; 通过特定算法处理所获得的图像; 其中所述算法允许人们识别细胞是癌细胞还是正常细胞。

6. 发明授权

US06880386B1 Method and device for simultaneously determining the adhesion, friction, and other material properties of a sample surface 有权
标题翻译：用于同时测定样品表面的粘合性，摩擦性和其它材料性质的方法和装置
公开(公告)号：US06880386B1
公开(公告)日：2005-04-19
申请号：US09869789
申请日：2000-01-04
申请人： Hans-Ulrich Krotil , Thomas Stifter , Othmar Marti
发明人： Hans-Ulrich Krotil , Thomas Stifter , Othmar Marti
IPC分类号： G01N13/00 , G01N19/02 , G01N19/04 , G01Q20/02 , G01Q60/26 , G01Q60/28 , G01N13/16 , G01B11/30 , G01B21/30
CPC分类号： G01Q60/26 , G01N19/02 , G01N19/04 , G01Q20/02 , G01Q60/28
摘要： A process for the location-resolved simultaneous detection of the adhesion and friction as well as possibly of other material properties of a sample surface to be examined by means of a raster probe microscope comprising a raster probe. The raster probe and/or the sample with sample surface are moved until at a point of the sample surface to be examined the raster probe interacts in a determined manner with this surface. The raster probe and/or the sample are subjected to a vertical oscillation, and a first measuring signal characterized by the deformation of the raster probe is recorded. A second measuring signal characterizing the deformation of the raster probe is recorded, wherein the raster probe and/or the sample are subjected to a horizontal and/or vertical oscillation. From these two measuring signals the desired material properties are determined. For the detection of the entire surface area to be examined the raster probe and or the sample are again moved and for the repetition of the measuring process described brought into contact with the sample surface in the above described manner.
摘要翻译：用于通过包括光栅探针的光栅探针显微镜同时检测粘合和摩擦以及可能通过待检查的样品表面的其它材料性质的位置分辨的方法。光栅探针和/或具有样品表面的样品被移动直到待检测的样品表面的点处，光栅探针以确定的方式与该表面相互作用。光栅探针和/或样品经受垂直振荡，并且记录由光栅探针的变形表征的第一测量信号。记录表征光栅探针的变形的第二测量信号，其中光栅探针和/或样品经受水平和/或垂直振荡。从这两个测量信号中，确定所需的材料性质。为了检测待检查的整个表面区域，再次移动光栅探针和/或样品，并且以上述方式重复与描述的样品表面接触的测量过程。

7. 发明授权

US5469733A Cantilever for atomic force microscope and method of manufacturing the cantilever 失效
标题翻译：用于原子力显微镜的悬臂和制造悬臂的方法
公开(公告)号：US5469733A
公开(公告)日：1995-11-28
申请号：US194169
申请日：1994-02-09
申请人： Takao Yasue , Tadashi Nishioka
发明人： Takao Yasue , Tadashi Nishioka
IPC分类号： G01B21/30 , G01B5/28 , G01Q60/28 , G01Q60/38 , G01Q60/42 , H01J9/14 , H01J37/26 , H01J37/28
CPC分类号： G01Q60/38 , B82Y35/00 , Y10S977/879
摘要： A cantilever for an atomic force microscope includes a probe and a cantilever body supporting the probe, the probe deflecting in response to an atomic force between said probe and a sample, at least the surface of the probe including one of a resist film and a sputtered film. One method of manufacturing the cantilever includes selectively etching the surface of a silicon substrate to form an etch pit, forming a resist film in at least the etch pit, forming a nitride film on the resist film, forming a glass base plate on the nitride film in a predetermined area not including the etch pit, and removing the silicon substrate. An atomic force microscope is also provided in which the cantilever is used to measure an atomic force between a sample and the probe having a desired film on a surface. A sample surface evaluating method is further provided by which the adhesion between the desired film or substance and the sample surface can be evaluated quantitatively from the measured atomic force without damaging the sample surface.
摘要翻译：用于原子力显微镜的悬臂包括探针和支撑探针的悬臂体，所述探针响应于所述探针和样品之间的原子力而偏转，所述探针的至少所述表面包括抗蚀剂膜和溅射中的一种电影。制造悬臂的一种方法包括选择性地蚀刻硅衬底的表面以形成蚀刻坑，在至少蚀刻坑中形成抗蚀剂膜，在抗蚀剂膜上形成氮化物膜，在氮化物膜上形成玻璃基板在不包括蚀刻坑的预定区域中，以及去除硅衬底。还提供了一种原子力显微镜，其中悬臂用于测量样品和具有表面上所需膜的探针之间的原子力。还提供了一种样品表面评价方法，通过该样品表面评估方法，可以从所测量的原子力定量地评价所需的膜或物质与样品表面之间的粘附性而不损害样品表面。

8. 发明授权

US11243156B2 Determining interfacial tension for fluid-fluid-solid environments 有权
公开(公告)号：US11243156B2
公开(公告)日：2022-02-08
申请号：US16923180
申请日：2020-07-08
申请人： International Business Machines Corporation
发明人： Michael Engel , Filipe Viana Ferreira , Rodrigo Neumann Barros Ferreira , Ronaldo Giro , Mathias Steiner
IPC分类号： G01N13/02 , G01Q60/28
摘要： Aspects of the invention include determining, by a first AFM tip, a first snap-off force of a solid surface immersed in a first fluid, determining, by a second AFM tip, a second snap-off force, determining, by a third AFM tip, a third snap-off force, determining, by the first AFM tip, a fourth snap-off force of a droplet of the first fluid immersed in the second fluid on the solid surface, determining, by the second AFM tip, a fifth snap-off force, determining, by the third AFM tip, a sixth snap-off force, determining a first capillary force for first AFM tip and first droplet based on first snap-off force and fourth snap-off force, determining a second capillary force for second AFM tip and first droplet and a third capillary force for third AFM tip and first droplet, and determining interfacial tension between first fluid and second fluid based on the capillary forces.

9. 发明授权

US10895584B2 Method of controlling a probe using constant command signals 有权
公开(公告)号：US10895584B2
公开(公告)日：2021-01-19
申请号：US16141413
申请日：2018-09-25
申请人： Louis Pacheco
发明人： Louis Pacheco
IPC分类号： G01Q10/06 , G01Q60/28 , G01Q60/30 , G01Q20/04 , G01Q60/26 , G01Q60/38
摘要： A method for commanding a tip of a probe is disclosed, wherein a command signal, representative of the force applied by said tip on the surface of a sample to be analyzed, includes at least one cycle successively defined by: a first step where the value of said command signal decreases from a maximum value (Smax) to a minimum value (Smin) so as to move said tip away from said surface at a predetermined distance called detachment height; a second step where the value of the command signal is maintained constant at said minimum value so as to maintain the tip at said detachment height; a third step where the value of the command signal increases from the minimum value up to said maximum value so as to bring the tip closer towards the surface to be analyzed until the tip comes into contact with the surface; and a fourth step where the value of the command signal is maintained constant at said maximum value to maintain the tip in contact with the surface to be analyzed under a constant force between the tip and the surface to be analyzed; the command signal being controlled between two successive steps to avoid any oscillation of the tip.

10. 发明申请

US20200003801A1 Passive Semiconductor Device Assembly Technology 审中-公开
公开(公告)号：US20200003801A1
公开(公告)日：2020-01-02
申请号：US16486690
申请日：2018-02-15
申请人： Nu Nano Ltd
发明人： James Vicary
IPC分类号： G01Q60/38 , G01Q60/28 , H01L21/50 , H01L21/68 , H01L21/683
摘要： A method of assembling a group of devices, the method comprising the steps of: evacuating a space between each component of a first group of two or more components on a source device and a transfer device thereby to create a temporary bond between each component of the first group of two or more components and the transfer device; selectively removing the first group of two or more components from the source device whilst the transfer device is temporarily bonded to each component of the first group of two or more components on the source device; positioning the first group of two or more components on a host device; and decoupling the first group of two or more components from the transfer device, thereby to form a first group of assembled devices.

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