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1. 发明授权

US06880386B1 Method and device for simultaneously determining the adhesion, friction, and other material properties of a sample surface 有权
标题翻译：用于同时测定样品表面的粘合性，摩擦性和其它材料性质的方法和装置
公开(公告)号：US06880386B1
公开(公告)日：2005-04-19
申请号：US09869789
申请日：2000-01-04
申请人： Hans-Ulrich Krotil , Thomas Stifter , Othmar Marti
发明人： Hans-Ulrich Krotil , Thomas Stifter , Othmar Marti
IPC分类号： G01N13/00 , G01N19/02 , G01N19/04 , G01Q20/02 , G01Q60/26 , G01Q60/28 , G01N13/16 , G01B11/30 , G01B21/30
CPC分类号： G01Q60/26 , G01N19/02 , G01N19/04 , G01Q20/02 , G01Q60/28
摘要： A process for the location-resolved simultaneous detection of the adhesion and friction as well as possibly of other material properties of a sample surface to be examined by means of a raster probe microscope comprising a raster probe. The raster probe and/or the sample with sample surface are moved until at a point of the sample surface to be examined the raster probe interacts in a determined manner with this surface. The raster probe and/or the sample are subjected to a vertical oscillation, and a first measuring signal characterized by the deformation of the raster probe is recorded. A second measuring signal characterizing the deformation of the raster probe is recorded, wherein the raster probe and/or the sample are subjected to a horizontal and/or vertical oscillation. From these two measuring signals the desired material properties are determined. For the detection of the entire surface area to be examined the raster probe and or the sample are again moved and for the repetition of the measuring process described brought into contact with the sample surface in the above described manner.
摘要翻译：用于通过包括光栅探针的光栅探针显微镜同时检测粘合和摩擦以及可能通过待检查的样品表面的其它材料性质的位置分辨的方法。光栅探针和/或具有样品表面的样品被移动直到待检测的样品表面的点处，光栅探针以确定的方式与该表面相互作用。光栅探针和/或样品经受垂直振荡，并且记录由光栅探针的变形表征的第一测量信号。记录表征光栅探针的变形的第二测量信号，其中光栅探针和/或样品经受水平和/或垂直振荡。从这两个测量信号中，确定所需的材料性质。为了检测待检查的整个表面区域，再次移动光栅探针和/或样品，并且以上述方式重复与描述的样品表面接触的测量过程。

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