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1. 发明授权

US06945100B2 Scanning probe microscope with improved probe tip mount 有权
标题翻译：扫描探针显微镜，带有改进的探针尖端安装
公开(公告)号：US06945100B2
公开(公告)日：2005-09-20
申请号：US10748827
申请日：2003-12-29
申请人： Joonhyung Kwon , Young Seok Kim , Sang-il Park
发明人： Joonhyung Kwon , Young Seok Kim , Sang-il Park
IPC分类号： G01B21/30 , G01Q10/02 , G01Q10/04 , G01Q20/02 , G01Q30/00 , G01Q60/32 , G01Q60/38 , G01Q70/02 , G01Q70/10 , H01J37/26 , G01N13/16 , G01B5/28
CPC分类号： G01Q20/02 , G01Q10/02 , G01Q10/04 , G01Q70/02 , Y10S977/732 , Y10S977/849 , Y10S977/869 , Y10S977/87 , Y10S977/873 , Y10S977/881
摘要： A mounting mechanism for the probe tip of a Scanning Probe Microscope (SPM) includes a scanner supported by a stationary frame, and a kinematic mechanism supported by the scanner. The kinematic mechanism includes at least three protrusions and at least one magnet. The mounting mechanism for the probe tip also includes a chip mount having a hole, a slot and a flat surface. The chip mount, on being held by the magnet, provides an easy way to mount the probe tip without requiring any tools.
摘要翻译：用于扫描探针显微镜（SPM）的探针尖端的安装机构包括由固定框架支撑的扫描仪和由扫描仪支撑的运动机构。运动机构包括至少三个突起和至少一个磁体。用于探针尖端的安装机构还包括具有孔，槽和平坦表面的芯片安装件。由磁体保持的芯片安装座提供了一种简单的方法来安装探针尖端，而不需要任何工具。

2. 发明授权

US06851301B2 Cantilever for scanning probe microscope 失效
标题翻译：悬臂扫描探针显微镜
公开(公告)号：US06851301B2
公开(公告)日：2005-02-08
申请号：US10151102
申请日：2002-05-21
申请人： Young Sik Kim , Hyo Jin Nam
发明人： Young Sik Kim , Hyo Jin Nam
IPC分类号： G01B7/34 , G01Q20/04 , G01Q60/00 , G01Q60/24 , G01Q70/16 , G01B5/28 , G01N13/16
CPC分类号： G01Q20/04 , G01Q10/045 , G01Q60/38 , Y10S977/87 , Y10S977/873
摘要： Cantilever for a scanning probe microscope (SPM) including a substrate having a tip, a piezoactuator on the substrate movable in response to an external electric signal, and a sensor formed around the piezoactuator so as not to overlap with the piezoactuator, thereby minimizing inner couplings.
摘要翻译：用于扫描探针显微镜（SPM）的悬臂，包括具有尖端的基底，基板上的压电致动器可响应于外部电信号而移动，以及形成在压电致动器周围的传感器，以便不与压电致动器重叠，从而最小化内部联接。

3. 发明申请

US20040140424A1 Scanning probe microscope with improved probe tip mount 有权
标题翻译：扫描探针显微镜，带有改进的探针尖端安装
公开(公告)号：US20040140424A1
公开(公告)日：2004-07-22
申请号：US10748827
申请日：2003-12-29
申请人： PSIA Corporation
发明人： Joonhyung Kwon , Young Seok Kim , Sang-il Park
IPC分类号： H01J003/14
CPC分类号： G01Q20/02 , G01Q10/02 , G01Q10/04 , G01Q70/02 , Y10S977/732 , Y10S977/849 , Y10S977/869 , Y10S977/87 , Y10S977/873 , Y10S977/881
摘要： A scanning probe microscope uses two different scanners (also called nullscanning stagesnull) that are completely detached each from the other, and are physically separated by a stationary frame. One scanner (called nullx-y scannernull) scans a sample in a plane (also called nullx-y planenull), while the other scanner (called nullz scannernull) scans a probe tip (which is supported at a free end of a cantilever) in a direction (also called nullz directionnull) perpendicular to the plane. Detachment of the two scanners from one another eliminates crosstalk.
摘要翻译：扫描探针显微镜使用两个不同的扫描仪（也称为“扫描阶段”），其彼此完全分离，并且由固定框架物理地分开。一个扫描仪（称为“xy扫描仪”）扫描平面中的样品（也称为“xy平面”），而另一个扫描仪（称为“z扫描仪”）扫描探针尖端（其在悬臂的自由端支撑））在垂直于该平面的方向（也称为“z方向”）上。两个扫描仪之间的分离可以消除串扰。

4. 发明授权

US6057546A Kinematically mounted probe holder for scanning probe microscope 有权
标题翻译：用于扫描探针显微镜的运动学安装的探头支架
公开(公告)号：US6057546A
公开(公告)日：2000-05-02
申请号：US129066
申请日：1998-08-04
申请人： David Braunstein , Michael Kirk , Ouoc Ly , Thai Nguyen
发明人： David Braunstein , Michael Kirk , Ouoc Ly , Thai Nguyen
IPC分类号： G01Q30/02 , G01B7/34 , G01N21/01 , G01N27/00 , G01Q10/02 , G01Q10/04 , G01Q30/14 , G01Q30/20 , G01Q60/02 , G01Q70/02 , G02B21/18 , H01J37/20 , H01J37/26
CPC分类号： G01Q10/04 , B82Y35/00 , G01Q30/025 , Y10S977/849 , Y10S977/86 , Y10S977/868 , Y10S977/869 , Y10S977/87 , Y10S977/872 , Y10S977/873
摘要： Scanning probe microscopes and scanning probe heads are provided having improved optical visualization and sample manipulation capabilities. The SPMs and SPM heads include at least one flexure stage for scanning in the x, y and/or z directions. In a preferred embodiment, the SPMs or SPM heads include flexure stages for scanning in the x, y and z directions. The z scanning stage is preferably positioned outside the lateral footprint of the x-y flexure stage so that a probe extending from the z scanning stage is outside the lateral footprint of the instrument. The SPMs and SPM heads are configured to provide top down and bottom up optical views of the sample and/or the probe and enable simultaneous scanning probe microscopy and optical imaging of a sample to be performed. The SPMs and SPM heads are designed to be readily combinable with existing upright and inverted optical microscopes currently available from various major manufacturers.
摘要翻译：提供扫描探针显微镜和扫描探头，具有改进的光学可视化和样品操作能力。 SPM和SPM头包括用于在x，y和/或z方向扫描的至少一个弯曲台。在优选实施例中，SPM或SPM头包括用于在x，y和z方向扫描的挠曲台。 z扫描台优选地定位在x-y弯曲台的横向覆盖区的外侧，使得从z扫描台延伸的探针位于仪器的横向覆盖区之外。 SPM和SPM头被配置为提供样品和/或探针的自顶向下和从底部的光学视图，并且能够执行样品的同时扫描探针显微镜和光学成像。 SPM和SPM头设计为可以与现有的各种主要制造商现有的直立和倒置光学显微镜组合。

5. 发明授权

US5982009A Integrated device of cantilever and light source 失效
标题翻译：悬臂和光源的集成装置
公开(公告)号：US5982009A
公开(公告)日：1999-11-09
申请号：US1386
申请日：1997-12-31
申请人： Songcheol Hong , Sookun Jeon
发明人： Songcheol Hong , Sookun Jeon
IPC分类号： G01Q70/00 , G01B5/28 , G01Q20/02 , G01Q20/04
CPC分类号： G01Q20/02 , B82Y35/00 , G01Q20/04 , Y10S977/87
摘要： An integrated device having a configuration, in which a cantilever and a light source are integrated on a single substrate, and applicable to a variety of fields, for example, ultra-fine quantity sensors, and a method for fabricating such a device. The light source such as LED, LD or SEL and the cantilever are integrated together on a single substrate in such a manner that they are arranged in proximity because the distance between the light source to the cantilever has no influence on the amplification rate. Accordingly, the device of the present invention requires no additional alignment for its constituting elements. In accordance with this configuration, it is possible to greatly reduce the space occupied by the constituting elements. It is also possible to reduce the limitation on the focusing of light. Since the integrated device of the present invention can accurately measure a micro displacement of the cantilever, it can be applied to micro physical quantity sensors. The device can also be used to measure displacement of a SPM tip. In addition, the device of the present invention may be used to achieve an alignment required in optical devices and LD's.
摘要翻译：具有其中悬臂和光源集成在单个基板上并可应用于各种领域的结构的集成装置，例如超微量传感器，以及用于制造这种装置的方法。诸如LED，LD或SEL和悬臂的光源以单个衬底集成在一起，使得它们被布置成接近，因为光源与悬臂之间的距离对放大率没有影响。因此，本发明的装置对其构成元件不需要额外的对准。根据该结构，能够大幅减少构成要素所占据的空间。也可以减少对光的聚焦的限制。由于本发明的集成装置可以精确地测量悬臂的微位移，所以可以应用于微物理量传感器。该装置还可用于测量SPM尖端的位移。此外，本发明的装置可以用于实现光学装置和LD所需的对准。

6. 发明授权

US5908981A Interdigital deflection sensor for microcantilevers 失效
标题翻译：用于微型悬臂的交叉偏转传感器
公开(公告)号：US5908981A
公开(公告)日：1999-06-01
申请号：US708446
申请日：1996-09-05
申请人： Abdullah Atalar , Scott R. Manalis , Stephen C. Minne , Calvin F. Quate
发明人： Abdullah Atalar , Scott R. Manalis , Stephen C. Minne , Calvin F. Quate
IPC分类号： G01B9/02 , G01B9/04 , G01B11/30 , G01B21/30
CPC分类号： G01Q20/02 , B82Y35/00 , Y10S977/87 , Y10S977/873
摘要： A deflection sensor for a microcantilever includes two sets of interdigitated fingers, one (reference) set being attached to the substrate from which the microcantilever extends and the other (movable) set being attached to the tip of the microcantilever. Together the interdigitated fingers form an optical phase grating. The deflection of the microcantilever is measured by directing a light beam against the optical phase grating and detecting the intensity of the reflected light in the first (or other) component of the resulting diffraction pattern. As the microcantilever deflects, the reference and movable fingers move relative to one another creating large variations in the intensity of the zeroth and first order components of the diffraction pattern. To eliminate "1/f" noise the deflection of the microcantilever can be measured using an AC signal.
摘要翻译：用于微悬臂梁的偏转传感器包括两组交叉指状物，一个（参考）组附接到基体上，微型悬臂从该基底延伸，另一组（可移动）组附接到微悬臂梁的尖端。交叉指状物一起形成光学相位光栅。通过将光束引导到光学相位光栅并检测所得衍射图案的第一（或其它）分量中的反射光的强度来测量微悬臂梁的偏转。当微悬臂梁偏转时，参考和可动指状物相对于彼此移动，从而产生衍射图案的第零级和第一级分量的强度的大变化。为了消除“1 / f”噪声，可以使用AC信号测量微悬臂梁的偏转。

7. 发明授权

US5852233A Acoustic microscope with a control and data capturing device 失效
标题翻译：具有控制和数据采集装置的声学显微镜
公开(公告)号：US5852233A
公开(公告)日：1998-12-22
申请号：US886929
申请日：1997-07-02
申请人： Walter Arnold , Ute Rabe
发明人： Walter Arnold , Ute Rabe
IPC分类号： G01N29/00 , B81B3/00 , G01H3/12 , G01H9/00 , G01N29/06 , G01N29/24 , G01N29/46 , G01B9/04 , G01B11/30
CPC分类号： G01H3/125 , G01H9/00 , G01N29/06 , G01N29/2418 , G01N29/46 , G01Q60/32 , G01N2291/011 , G01N2291/02827 , G01N2291/0421 , Y10S977/86 , Y10S977/87
摘要： An acoustic microscope allowing both the topography and the elasticity of a sample to be measured at the same time. To this end the displacement of a cantilever with a tip is measured by the deflection of a laser beam. In order to measure the topography, the average deviation of the tip is held constant by a regulation circuit. The regulation circuit consists of a split-photodiode which supplies a neutral signal to the output of a normalizing amplifier which delivers a neutral value. Deviations from this neutral signal are compensated by a z-electrode of a piezocrystal. The elastic properties of the sample are measured by coupling ultrasound into the sample by means of a transducer and the high-frequency displacements of the cantilever with the tip are detected by a second detection device that consists of knife-edge detector and a fast photodiode. The detection device may also consist of a heterodyne time-of-flight interferometer or a capacitive detection scheme.
摘要翻译：同时测量样品的形貌和弹性的声学显微镜。为此，通过激光束的偏转测量悬臂与尖端的位移。为了测量地形，尖端的平均偏差由调节电路保持恒定。调节电路包括一个分离光电二极管，它将中性信号提供给一个传递中性值的归一化放大器的输出端。与该中性信号的偏差由压电晶体的z电极补偿。通过借助于换能器将超声波耦合到样品中来测量样品的弹性，通过由刀刃检测器和快速光电二极管组成的第二检测装置检测悬臂与尖端的高频位移。检测装置还可以由外差时间干涉仪或电容检测方案组成。

8. 发明授权

US5714756A Scanning probe microscope having a single viewing device for on-axis and oblique angle views 失效
标题翻译：具有单个观察装置的扫描探针显微镜，用于轴上和斜视角
公开(公告)号：US5714756A
公开(公告)日：1998-02-03
申请号：US710239
申请日：1996-09-13
申请人： Sang-Il Park , Frederick I. Linker , Ian R. Smith
发明人： Sang-Il Park , Frederick I. Linker , Ian R. Smith
IPC分类号： G01Q30/04 , G01N23/00 , G01Q10/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q30/20 , G01Q60/10 , G01Q70/02 , G01Q70/10 , G01R31/302 , G02B21/00 , G02B21/18 , G02B21/26 , G21K7/00 , H01J37/26
CPC分类号： G01Q20/02 , B82Y35/00 , G01Q30/025 , G01Q70/02 , G02B21/002 , G02B21/26 , Y10S977/851 , Y10S977/869 , Y10S977/87 , Y10S977/874
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
摘要翻译：用于扫描探针显微镜的光学系统通过两个光路提供样品的光学轴向视图和光学斜视图，每个光路通过自动变焦镜头向CCD照相机提供图像。快门交替阻止任一视图的图像到达自动变焦镜头。 CCD摄像机将光学图像提供给还显示扫描探针图像的视频显示器，从而不需要目镜，并且可以同时轻松查看光学和扫描探针图像。

9. 发明授权

US5714682A Scanning stylus atomic force microscope with cantilever tracking and optical access 失效
标题翻译：扫描触针原子力显微镜与悬臂跟踪和光学访问
公开(公告)号：US5714682A
公开(公告)日：1998-02-03
申请号：US679332
申请日：1996-07-11
申请人： Craig B. Prater , James Massie , David A. Grigg , Virgil B. Elings , Paul K. Hansma , Barney Drake
发明人： Craig B. Prater , James Massie , David A. Grigg , Virgil B. Elings , Paul K. Hansma , Barney Drake
IPC分类号： G01B21/30 , G01Q20/00 , G01Q20/02 , G01Q30/06 , G01Q30/12 , G01Q40/00 , G01Q60/24 , G01Q60/38 , G01B5/28
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q20/02 , Y10S977/87
摘要： A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical assembly which quides light emitted from the light source onto a point on a cantilever during scanning thereof. A moving light beam is thus created which will automatically track the movement of the cantilever during scanning. The invention also allows the light beam to be used to measure, calibrate or correct the motion of the scanning mechanism, and further allows viewing of the sample and cantilever using an optical microscope.
摘要翻译：采用光杆技术的扫描式触针原子力显微镜（AFM）及其操作方法。本发明的AFM包括光源和扫描的光学组件，其在从扫描过程中将从光源发射的光放置在悬臂上的点上。因此产生移动的光束，其将在扫描期间自动跟踪悬臂的移动。本发明还允许光束用于测量，校准或校正扫描机构的运动，并且还允许使用光学显微镜观察样品和悬臂。

10. 发明授权

US5675075A Acoustic microscope 失效
标题翻译：声学显微镜
公开(公告)号：US5675075A
公开(公告)日：1997-10-07
申请号：US545849
申请日：1995-11-13
申请人： Walter Arnold , Ute Rabe
发明人： Walter Arnold , Ute Rabe
IPC分类号： G01N29/00 , B81B3/00 , G01H3/12 , G01H9/00 , G01N29/06 , G01N29/24 , G01N29/46 , G01B5/28
CPC分类号： G01H3/125 , G01H9/00 , G01N29/06 , G01N29/2418 , G01N29/46 , G01Q60/32 , G01N2291/011 , G01N2291/02827 , G01N2291/0421 , Y10S977/86 , Y10S977/87
摘要： An acoustic microscope allowing both the topography and the elasticity of a sample to be measured at the same time. To this end the displacement of a cantilever with a tip is measured by the deflection of a laser beam. In order to measure the topography, the average deviation of the tip is held constant by a regulation circuit. The regulation circuit consists of a split-photodiode which supplies a neutral signal to the output of a normalizing amplifier which delivers a neutral value. Deviations from this neutral signal are compensated by a z-electrode of a piezocrystal. The elastic properties of the sample are measured by coupling ultrasound into the sample by means of a transducer and the high-frequency displacements of the cantilever with the tip are detected by a second detection device that consists of knife-edge detector and a fast photodiode. The detection device may also consist of a heterodyne time-of-flight interferometer or a capacitive detection scheme.
摘要翻译： PCT No.PCT / DE94 / 00765 Sec。 371日期：1995年11月13日 102（e）1995年11月13日，PCT PCT。1994年6月30日PCT公布。第WO95 / 03531号公报日期1995年2月2日声学显微镜同时测量样品的形貌和弹性。为此，通过激光束的偏转测量悬臂与尖端的位移。为了测量地形，尖端的平均偏差由调节电路保持恒定。调节电路包括一个分离光电二极管，它将中性信号提供给一个传递中性值的归一化放大器的输出端。与该中性信号的偏差由压电晶体的z电极补偿。通过借助于换能器将超声波耦合到样品中来测量样品的弹性，通过由刀刃检测器和快速光电二极管组成的第二检测装置检测悬臂与尖端的高频位移。检测装置还可以由外差时间干涉仪或电容检测方案组成。

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