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1. 发明申请

US20170285067A1 SCANNING PROBE MICROSCOPE AND PROBE CONTACT DETECTION METHOD 审中-公开
公开(公告)号：US20170285067A1
公开(公告)日：2017-10-05
申请号：US15468668
申请日：2017-03-24
申请人： HITACHI HIGH-TECH SCIENCE CORPORATION
发明人： Masatsugu Shigeno , Kazutoshi Watanabe , Masafumi Watanabe , Hiroyoshi Yamamoto , Kazuo Chinone
IPC分类号： G01Q10/02
CPC分类号： G01Q10/02 , G01Q10/065
摘要： According to this invention, a scanning probe microscope for scanning a surface of a sample with a probe by bringing the probe into contact with the surface of the sample, comprises a cantilever having the probe at its tip; a displacement detection unit to detect both a bending amount and a torsion amount of the cantilever; and a contact determination unit to determine a primary contact of the probe with the surface of the sample, based on the bending amount and the torsion amount detected by the displacement detection unit in all directions from an undeformed condition of the cantilever.

2. 发明申请

US20170131322A1 AM/FM Measurements Using Multiple Frequency of Atomic Force Microscopy 审中-公开
公开(公告)号：US20170131322A1
公开(公告)日：2017-05-11
申请号：US15275770
申请日：2016-09-26
申请人： Oxford Instruments Asylum Research, Inc.
发明人： Roger Proksch , Jason Bemis , Aleksander Labuda
IPC分类号： G01Q10/02 , G01Q60/32 , G01Q10/04
CPC分类号： G01Q10/02 , G01Q10/04 , G01Q40/00 , G01Q60/32
摘要： Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation.

3. 发明申请

US20170016933A1 SCANNING ION CONDUCTANCE MICROSCOPY 审中-公开
标题翻译：扫描离子导管显微镜
公开(公告)号：US20170016933A1
公开(公告)日：2017-01-19
申请号：US15124908
申请日：2015-03-10
申请人： OPENIOLABS LTD
发明人： Andrew James Richardson
IPC分类号： G01Q60/44 , G01Q10/02 , G01Q60/02 , G01Q10/06 , G01Q60/60
CPC分类号： G01Q60/44 , G01Q10/02 , G01Q10/06 , G01Q60/02 , G01Q60/60
摘要： A method for interrogating a surface of a sample bathed in electrolyte solution using SICM, comprising: controlling the potential between first and second electrodes bathed in the electrolyte solution to induce an ion current in the electrolyte solution, a submerged portion of the first electrode being contained within a micropipette and the second electrode being external to the micropipette; recording the ion current whilst controlling the micropipette to move with respect to a stage supporting the sample; and determining, from the ion current and calibration data, the surface height profile of the sample. Said potential can be controlled according to a spread spectrum modulated signal. Said micropipette motion can be according to an AC mode pattern having a modulation frequency greater than a resonant frequency of an assembly of the micropipette, first electrode and a first piezoelectric actuator configured to control z-axis motion of said micropipette.
摘要翻译：一种用于询问使用SICM浸在电解质溶液中的样品的表面的方法，包括：控制浸在电解质溶液中的第一和第二电极之间的电位，以引起电解质溶液中的离子电流，第一电极的浸没部分被包含并且所述第二电极位于所述微量移液管外部; 记录离子电流同时控制微量移液器相对于支撑样品的载物台移动; 以及从离子电流和校准数据确定样品的表面高度分布。可以根据扩频调制信号来控制所述电位。所述微量移液管运动可以根据具有大于微量移液管组件的调谐频率的调制频率的AC模式图案，第一电极和被配置为控制所述微量移液管的z轴运动的第一压电致动器。

4. 发明申请

US20150301078A1 SYSTEM AND METHOD FOR NON-CONTACT MICROSCOPY FOR THREE-DIMENSIONAL PRE-CHARACTERIZATION OF A SAMPLE FOR FAST AND NON-DESTRUCTIVE ON SAMPLE NAVIGATION DURING NANOPROBING 有权
标题翻译：非接触式显微镜的系统和方法，用于三维预处理，用于在纳米制备过程中快速和非破坏性样品导航的样品
公开(公告)号：US20150301078A1
公开(公告)日：2015-10-22
申请号：US14552399
申请日：2014-11-24
申请人： DCG Systems, Inc.
发明人： Vladimir A. Ukraintsev , Richard Stallcup , Sergiy Pryadkin , Mike Berkmyre , John Sanders
IPC分类号： G01Q10/02 , G01Q30/02
CPC分类号： G01Q10/02 , G01Q10/00 , G01Q30/025 , G01Q60/00 , G01Q60/38 , G01Q60/48
摘要： A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates.
摘要翻译：用于执行抽样探测的系统。该系统包括构造成基于至少三个基准标记接收样本的三维坐标的地形显微镜; 接收安装在支架上的样品; 并基于至少三个基准标记和三维坐标导航到样本上的至少一个位置。

5. 发明授权

US08353060B2 Scanning probe microscope and a measuring method using the same 有权
标题翻译：扫描探针显微镜及其测量方法
公开(公告)号：US08353060B2
公开(公告)日：2013-01-08
申请号：US12828590
申请日：2010-07-01
申请人： Masahiro Watanabe , Shuichi Baba , Toshihiko Nakata
发明人： Masahiro Watanabe , Shuichi Baba , Toshihiko Nakata
IPC分类号： G01L9/00 , G01L9/08
CPC分类号： G01Q10/02 , G01Q10/04
摘要： It is difficult for a scanning probe microscope according to the conventional technology to operate a probe for scanning and positioning in a wide range and for high-precision scanning in a narrow range. A scanning probe microscope according to the invention uses probe driving actuators for coarse adjustment and fine adjustment. For scanning and positioning in a wide range, the coarse adjustment actuator is switched to fast responsiveness. For scanning in a narrow range, the coarse adjustment actuator is switched to slow responsiveness. Instead, positional noise is reduced and the fine adjustment actuator is mainly used for scanning in a narrow range. The probe is capable of not only scanning and positioning in a wide range but also high-precision scanning in a narrow range.
摘要翻译：根据传统技术的扫描探针显微镜难以在宽范围内操作用于扫描和定位的探针并且在窄范围内进行高精度扫描。根据本发明的扫描探针显微镜使用探头驱动致动器进行粗调和微调。对于广泛的扫描和定位，粗调执行器切换到快速响应。为了在窄范围内进行扫描，粗调调节执行器被切换为响应速度慢。相反，位置噪声减小，微调致动器主要用于窄范围的扫描。该探头不仅可以在很宽的范围内进行扫描和定位，还可以在窄范围内进行高精度扫描。

6. 发明申请

US20100117486A1 POSITIONING APPARATUS AND METHOD 有权
标题翻译：定位装置和方法
公开(公告)号：US20100117486A1
公开(公告)日：2010-05-13
申请号：US11919291
申请日：2006-04-27
申请人： Andrii Volkov
发明人： Andrii Volkov
IPC分类号： H02N2/12
CPC分类号： G01Q10/02 , G01Q10/04 , G11B9/1436 , H02N2/0095 , H02N2/028 , H02N2/08 , H02N2/108 , H02N2/163
摘要： Positioning apparatus comprises: a first surface; a tubular body having a longitudinal axis and a first end surface at a first end of the tubular body, the first end surface being arranged in contact with the first surface; and surface wave generation means arranged to generate a first travelling surface wave on the first end surface, the first travelling surface wave travelling along a first portion of the first end surface in a first direction around the first end surface, and, while the first travelling surface wave is travelling along the first portion of the first end surface, to generate a second travelling surface wave on the first end surface, the second travelling surface wave travelling along a second portion of the first end surface in a second direction around the first end surface, the second direction being opposite to the first direction. Interaction between the first surface and the first and second travelling surface waves effects relative movement between the first surface and the tubular body. In certain embodiments the tubular body comprises piezoelectric material, and the surface waves are generated by applying voltages to electrodes.
摘要翻译：定位装置包括：第一表面; 管状体，其具有纵向轴线和在所述管状体的第一端处的第一端表面，所述第一端表面布置成与所述第一表面接触; 以及表面波生成单元，被配置为在所述第一端面上产生第一行进面波，所述第一行进面波围绕所述第一端面沿着第一方向沿所述第一端面的第一部分行进，并且在所述第一行进面表面波沿着第一端面的第一部分行进，以在第一端面上产生第二行进表面波，第二行进表面波围绕第一端沿第二方向沿第一端面的第二部分行进第二方向与第一方向相反。第一表面与第一和第二行进表面波之间的相互作用影响第一表面和管状体之间的相对运动。在某些实施例中，管体包括压电材料，并且通过向电极施加电压来产生表面波。

7. 发明申请

US20080121028A1 Scanning Probe Microscopy Inspection and Modification System 失效
标题翻译：扫描探针显微镜检查和修改系统
公开(公告)号：US20080121028A1
公开(公告)日：2008-05-29
申请号：US11841698
申请日：2007-08-20
申请人： Victor B. Kley
发明人： Victor B. Kley
IPC分类号： G01B5/28 , G06T15/00
CPC分类号： G01Q60/58 , G01B7/31 , G01N23/225 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q20/00 , G01Q20/02 , G01Q30/04 , G01Q40/00 , G01Q60/04 , G01Q60/16 , G01Q60/22 , G01Q60/38 , G01Q70/02 , G01Q70/06 , G01Q80/00 , G02B21/002 , G03F1/72 , G03F1/84 , G03F7/2049 , G03F7/704 , G03F7/70616 , G11B5/232 , G11B5/3116 , G11B5/3163 , G11B5/3166 , G11B9/14 , G11B9/1409 , G11B9/1418 , G11B9/1427 , G11B9/1436 , G11B9/1445 , G11B9/1454 , G11B9/149 , G11B11/12 , G11B11/16 , G11B2005/0002 , G11B2005/0021 , H02N1/006 , Y10S977/855 , Y10S977/871
摘要： A scanning probe microscopy (SPM) inspection and/or modification system which uses SPM technology and techniques. The system includes various types of microstructured SPM probes for inspection and/or modification of the object. The components of the SPM system include microstructured calibration structures. A probe may be defective because of wear or because of fabrication errors. Various types of reference measurements of the calibration structure are made with the probe or vice versa to calibrate it. The components of the SPM system further include one or more tip machining structures. At these structures, material of the tips of the SPM probes may be machined by abrasively lapping and chemically lapping the material of the tip with the tip machining structures.
摘要翻译：使用SPM技术和技术的扫描探针显微镜（SPM）检查和/或修改系统。该系统包括用于检查和/或修改物体的各种类型的微结构化SPM探针。 SPM系统的组件包括微结构校准结构。由于磨损或由于制造错误，探头可能有缺陷。校准结构的各种参考测量用探针进行，反之亦然，以校准它。 SPM系统的部件还包括一个或多个尖端加工结构。在这些结构中，SPM探针的尖端的材料可以通过用尖端加工结构进行研磨研磨和化学研磨尖端的材料来加工。

8. 发明授权

US07334460B2 Method and apparatus of manipulating a sample 失效
标题翻译：操纵样品的方法和装置
公开(公告)号：US07334460B2
公开(公告)日：2008-02-26
申请号：US11382438
申请日：2006-05-09
申请人： Ami Chand , Kevin J. Kjoller , Kenneth L. Babcock , Michael K. Harris
发明人： Ami Chand , Kevin J. Kjoller , Kenneth L. Babcock , Michael K. Harris
IPC分类号： G01B5/28 , G01N13/16 , G12B21/20
CPC分类号： G01Q70/16 , G01B5/28 , G01D5/26 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q70/02 , G01Q70/08 , G01Q80/00
摘要： A method and apparatus for manipulating the surface of a sample including a cantilever, a first tip mounted on the cantilever, and a second tip mounted on the cantilever, the first and the second tip being configured to combine to form an imaging probe and to separate to form a manipulation probe. The first and second tips are configured to form a first position characterized in that the tips combine to form an imaging tip and the first and the second tip are configured to form a second position characterized in that the tips separate to manipulate particles on a surface of a sample. The tips can be configured to form the first position when a voltage is applied across the tips, and preferable extend downwardly from the cantilever substantially perpendicular thereto.
摘要翻译：一种用于操纵样品表面的方法和装置，包括悬臂，安装在悬臂上的第一尖端和安装在悬臂上的第二尖端，第一和第二尖端构造成组合以形成成像探针并分离以形成操纵探针。第一和第二尖端被配置成形成第一位置，其特征在于，所述尖端组合以形成成像尖端，并且所述第一和第二末端被配置成形成第二位置，其特征在于，所述尖端分离以操纵颗粒在一个样品。当跨越尖端施加电压时，尖端可被配置成形成第一位置，并且优选地从基本垂直于其的悬臂向下延伸。

9. 发明授权

US07100430B2 Dual stage instrument for scanning a specimen 有权
公开(公告)号：US07100430B2
公开(公告)日：2006-09-05
申请号：US10867922
申请日：2004-06-14
申请人： Amin Samsavar , William R. Wheeler , Steven G. Eaton , Jian-Ping Zhuang
发明人： Amin Samsavar , William R. Wheeler , Steven G. Eaton , Jian-Ping Zhuang
IPC分类号： G01B5/28 , G01N13/16
CPC分类号： G01Q10/04 , G01B3/008 , G01B7/34 , G01Q10/02 , G01Q30/02 , G01Q70/06 , Y10S977/834 , Y10S977/849 , Y10S977/852 , Y10S977/867 , Y10S977/868 , Y10S977/872 , Y10S977/874
摘要： A dual stage scanning instrument includes a sensor for sensing a parameter of a sample and coarse and fine stages for causing relative motion between the sensor and the sample. The coarse stage has a resolution of about 1 micrometer and the fine stage has a resolution of 1 nanometer or better. The sensor is used to sense the parameter when both stages cause relative motion between the sensor assembly and the sample. The sensor may be used to sense height variations of the sample surface as well as thermal variations, electrostatic, magnetic, light reflectivity or light transmission parameters at the same time when height variation is sensed. By performing along scan at a coarser resolution and short scans a high resolution using the same probe tip or two probe tips at fixed relative positions, data obtained from the long and short scans can be correlated accurately.

10. 发明授权

US07040147B2 Method and apparatus for manipulating a sample 失效
公开(公告)号：US07040147B2
公开(公告)日：2006-05-09
申请号：US11075019
申请日：2005-03-08
申请人： Ami Chand , Kevin J. Kjoller , Kenneth L. Babcock , Michael K. Harris
发明人： Ami Chand , Kevin J. Kjoller , Kenneth L. Babcock , Michael K. Harris
IPC分类号： G12B21/20 , G01N13/10
CPC分类号： G01Q70/16 , G01B5/28 , G01D5/26 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q70/02 , G01Q70/08 , G01Q80/00
摘要： A method and apparatus for manipulating the surface of a sample including a cantilever, a first tip mounted on the cantilever, and a second tip mounted on the cantilever, the first and the second tip being configured to combine to form an imaging probe and to separate to form a manipulation probe. The first and second tips are configured to form a first position characterized in that the tips combine to form an imaging tip and the first and the second tip are configured to form a second position characterized in that the tips separate to manipulate particles on a surface of a sample. The tips can be configured to form the first position when a voltage is applied across the tips, and preferable extend downwardly from the cantilever substantially perpendicular thereto.

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