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    • 5. 发明申请
    • Method of making nanopatterns and nanostructures and nanopatterned functional oxide materials
    • 制备纳米图案和纳米结构和纳米图案化功能氧化物材料的方法
    • US20080070010A1
    • 2008-03-20
    • US11805546
    • 2007-05-23
    • Vinayak DravidSuresh DonthuZixiao Pan
    • Vinayak DravidSuresh DonthuZixiao Pan
    • G03C5/00B44C1/17
    • G03F7/405H01L21/0272H01L21/0277H01L21/31144
    • Method for nanopatterning of inorganic materials, such as ceramic (e.g. metal oxide) materials, and organic materials, such as polymer materials, on a variety of substrates to form nanopatterns and/or nanostructures with control of dimensions and location, all without the need for etching the materials and without the need for re-alignment between multiple patterning steps in forming nanostructures, such as heterostructures comprising multiple materials. The method involves patterning a resist-coated substrate using electron beam lithography, removing a portion of the resist to provide a patterned resist-coated substrate, and spin coating the patterned resist-coated substrate with a liquid precursor, such as a sol precursor, of the inorganic or organic material. The remaining resist is removed and the spin coated substrate is heated at an elevated temperature to crystallize the deposited precursor material.
    • 无机材料如陶瓷(例如金属氧化物)材料和有机材料(例如聚合物材料)在各种基底上的纳米图案化方法,以形成具有尺寸和位置控制的纳米图案和/或纳米结构,所有这些都不需要 蚀刻材料并且不需要在形成纳米结构的多个图案化步骤之间进行重新对准,例如包括多种材料的异质结构。 该方法包括使用电子束平版印刷图案化抗蚀剂涂覆的基底,去除抗蚀剂的一部分以提供图案化的抗蚀剂涂覆的基底,并用液体前体如溶胶前体旋涂涂敷图案化的抗蚀剂涂覆的基底, 无机或有机材料。 除去剩余的抗蚀剂,并将旋转涂覆的基材在升高的温度下加热以使沉积的前体材料结晶。