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1. 发明申请

US20050262931A1 System for sensing a sample 审中-公开
标题翻译：用于感测样品的系统
公开(公告)号：US20050262931A1
公开(公告)日：2005-12-01
申请号：US11192808
申请日：2005-07-28
申请人： Thomas McWaid , Peter Panagas , Steven Eaton , Amin Samsavar , William Wheeler
发明人： Thomas McWaid , Peter Panagas , Steven Eaton , Amin Samsavar , William Wheeler
IPC分类号： G01Q70/08 , G01B3/00 , G01B5/28 , G01B7/34 , G01B21/20 , G01B21/30 , G01Q10/00 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q60/38 , G01Q70/00 , G01Q70/06 , G01Q70/12 , G01Q90/00 , G01N13/10
CPC分类号： G01B3/008 , G01B7/34 , G01Q10/06 , G01Q60/34 , Y10S977/851
摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.
摘要翻译：扫描仪或扫描探针显微镜可以跨样品表面进行扫描，其间的距离被控制以允许感测尖端间歇地接触表面，以便找到并测量感兴趣的特征。控制距离使得当感测尖端升高或降低以接触样品表面时，尖端和样品之间没有横向相对运动。这可以防止尖端损坏。可以提供或测量样品表面的高度分布的先前知识并且用于最初定位感测尖端或者用于控制分离以避免尖端和样品之间的横向接触。该过程也可以分两部分执行：快速查找模式以查找特征，以及随后的测量模式来测量特征。还可以通过选择横向相对运动的步骤来小于100纳米，以减少尖端损伤的可能性来执行快速步进模式。在该模式中，在每个垂直步骤之后，增加尖端和样品之间的间隔，检测尖端和样品是否接触。如果它们在垂直步骤之后仍然接触，则采取一个或多个垂直步骤来增加分离，并且不采取垂直步骤来减小分离，并且不会引起横向相对运动，直到确定尖端和样品不再联系。

2. 发明申请

US20070089857A1 Systems for discretized processing of regions of a substrate 失效
标题翻译：用于基板区域的离散化处理的系统
公开(公告)号：US20070089857A1
公开(公告)日：2007-04-26
申请号：US11351978
申请日：2006-02-10
申请人： Tony Chiang , David Lazovsky , Thomas Boussie , Thomas McWaid , Alexander Gorer
发明人： Tony Chiang , David Lazovsky , Thomas Boussie , Thomas McWaid , Alexander Gorer
IPC分类号： F28F7/00 , C23C16/00
CPC分类号： B01J19/0046 , B01J2219/00286 , B01J2219/00317 , B01J2219/00328 , B01J2219/00333 , B01J2219/00351 , B01J2219/00364 , B01J2219/00369 , B01J2219/00495 , B01J2219/00527 , B01J2219/00603 , B01J2219/00659 , B01J2219/00691 , H01L21/76849
摘要： The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.
摘要翻译：本发明提供了用于基板区域的离散化，组合处理的方法和系统，例如用于集成电路制造中使用的新材料，工艺和工艺顺序集成方案的发现，实现，优化和鉴定。通过将材料输送到衬底或修改衬底的区域来处理其上具有差分处理区域阵列的衬底。

3. 发明授权

US5852232A Acoustic sensor as proximity detector 失效
标题翻译：声学传感器作为接近检测器
公开(公告)号：US5852232A
公开(公告)日：1998-12-22
申请号：US775617
申请日：1997-01-02
申请人： Amin Samsavar , Thomas McWaid , Sergey Yudin
发明人： Amin Samsavar , Thomas McWaid , Sergey Yudin
IPC分类号： G01B21/00 , G01B17/00 , G01B21/30 , G01N29/06 , G01Q10/02 , G01Q10/04 , G01Q20/02 , G01Q30/02 , G01Q60/24 , G01B5/28
CPC分类号： G01B17/00 , G01N29/06 , G01Q20/00 , G01N2291/02854 , Y10S977/872
摘要： An acoustic sensor used with a first sensor (such as a profilometer, scanning probe microscope or the like) allows for the positioning of the first sensor with respect to the sample. The acoustic sensor has a greater range than a profilometer or a scanning probe microscope, and a relatively quick response time, which allows it to be an effective proximity detector. Additionally, the acoustic sensor is not affected by the material of the sample's surface layer.
摘要翻译：与第一传感器（例如轮廓仪，扫描探针显微镜等）一起使用的声学传感器允许第一传感器相对于样品的定位。声学传感器具有比轮廓仪或扫描探针显微镜更大的范围，并且响应时间相对较快，这允许其成为有效的接近检测器。此外，声传感器不受样品表面层材料的影响。

4. 发明授权

US07278301B2 System for sensing a sample 失效
标题翻译：用于感测样品的系统
公开(公告)号：US07278301B2
公开(公告)日：2007-10-09
申请号：US11423098
申请日：2006-06-08
申请人： Thomas McWaid , Peter Panagas , Steven G. Eaton , Amin Samsavar , William R. Wheeler
发明人： Thomas McWaid , Peter Panagas , Steven G. Eaton , Amin Samsavar , William R. Wheeler
IPC分类号： G01B5/28 , G01N13/10 , G01N13/16
CPC分类号： G01B3/008 , G01B7/34 , G01Q10/06 , G01Q60/34 , Y10S977/851
摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.
摘要翻译：扫描仪或扫描探针显微镜可以跨样品表面进行扫描，其间的距离被控制以允许感测尖端间歇地接触表面，以便找到并测量感兴趣的特征。控制距离使得当感测尖端升高或降低以接触样品表面时，尖端和样品之间没有横向相对运动。这可以防止尖端损坏。可以提供或测量样品表面的高度分布的先前知识并且用于最初定位感测尖端或者用于控制分离以避免尖端和样品之间的横向接触。该过程也可以分两部分执行：快速查找模式以查找特征，以及随后的测量模式来测量特征。还可以通过选择横向相对运动的步骤来小于100纳米，以减少尖端损伤的可能性来执行快速步进模式。在该模式中，在每个垂直步骤之后，增加尖端和样品之间的间隔，检测尖端和样品是否接触。如果它们在垂直步骤之后仍然接触，则采取一个或多个垂直步骤来增加分离，并且不采取垂直步骤来减小分离，并且不会引起横向相对运动，直到确定尖端和样品不再联系。

5. 发明申请

US20060230819A1 System for Sensing a Sample 失效
标题翻译：感应样品系统
公开(公告)号：US20060230819A1
公开(公告)日：2006-10-19
申请号：US11423098
申请日：2006-06-08
申请人： Thomas McWaid , Peter Panagas , Steven Eaton , Amin Samsavar , William Wheeler
发明人： Thomas McWaid , Peter Panagas , Steven Eaton , Amin Samsavar , William Wheeler
IPC分类号： G01B5/28
CPC分类号： G01B3/008 , G01B7/34 , G01Q10/06 , G01Q60/34 , Y10S977/851
摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.
摘要翻译：扫描仪或扫描探针显微镜可以跨样品表面进行扫描，其间的距离被控制以允许感测尖端间歇地接触表面，以便找到并测量感兴趣的特征。控制距离使得当感测尖端升高或降低以接触样品表面时，尖端和样品之间没有横向相对运动。这可以防止尖端损坏。可以提供或测量样品表面的高度分布的先前知识并且用于最初定位感测尖端或者用于控制分离以避免尖端和样品之间的横向接触。该过程也可以分两部分执行：快速查找模式以查找特征，以及随后的测量模式来测量特征。还可以通过选择横向相对运动的步骤来小于100纳米，以减少尖端损伤的可能性来执行快速步进模式。在该模式中，在每个垂直步骤之后，增加尖端和样品之间的间隔，检测尖端和样品是否接触。如果它们在垂直步骤之后仍然接触，则采取一个或多个垂直步骤来增加分离，并且不采取垂直步骤来减小分离，并且不会引起横向相对运动，直到确定尖端和样品不再联系。

6. 发明授权

US06520005B2 System for sensing a sample 有权
公开(公告)号：US06520005B2
公开(公告)日：2003-02-18
申请号：US09313962
申请日：1999-05-18
申请人： Thomas McWaid , Peter Panagas , Steven G. Eaton , Amin Samsavar , William R. Wheeler
发明人： Thomas McWaid , Peter Panagas , Steven G. Eaton , Amin Samsavar , William R. Wheeler
IPC分类号： G01B528
CPC分类号： G01B3/008 , G01B7/34 , G01Q10/06 , G01Q60/34 , Y10S977/851
摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.

7. 发明申请

US20060207318A1 System for Sensing a Sample 审中-公开
公开(公告)号：US20060207318A1
公开(公告)日：2006-09-21
申请号：US11422319
申请日：2006-06-05
申请人： Thomas McWaid , Peter Panagas , Steven Eaton , Amin Samsavar , William Wheeler
发明人： Thomas McWaid , Peter Panagas , Steven Eaton , Amin Samsavar , William Wheeler
IPC分类号： G01B5/28
CPC分类号： G01B3/008 , G01B7/34 , G01Q10/06 , G01Q60/34 , Y10S977/851
摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.

8. 发明申请

US20060054543A1 System and method for rapid chromatography with fluid temperature and mobile phase composition control 有权
公开(公告)号：US20060054543A1
公开(公告)日：2006-03-16
申请号：US11219073
申请日：2005-09-02
申请人： Miroslav Petro , Gary Diamond , Thomas McWaid , Keith Hall , Li Song , Trevor Frank
发明人： Miroslav Petro , Gary Diamond , Thomas McWaid , Keith Hall , Li Song , Trevor Frank
IPC分类号： B01D15/08
CPC分类号： G01N30/30 , B01D15/161 , B01D15/166 , G01N30/20 , G01N30/28 , G01N30/32 , G01N30/34 , G01N30/80
摘要： The invention relates to liquid chromatography techniques for rapidly characterizing samples, such as polymer solutions, emulsions and dispersions, and to devices for implementing such techniques. The system includes a design that provides the ability to perform chromatographic separations by using mobile phase composition gradients and temperature gradients during separations. The invention accomplishes this by providing mixing zones for a plurality of fluids as well as heated and chilled feeds feeding the fluids to the mixing zones. Additionally, the system provides the ability to analyze separated components with a detector and/or collect separated fractions into vessels of a fraction collector for further separation and/or analysis.

9. 发明授权

US06931917B2 System for sensing a sample 失效
公开(公告)号：US06931917B2
公开(公告)日：2005-08-23
申请号：US10729609
申请日：2003-12-05
申请人： Thomas McWaid , Peter Panagas , Steven G. Eaton , Amin Samsavar , William R. Wheeler
发明人： Thomas McWaid , Peter Panagas , Steven G. Eaton , Amin Samsavar , William R. Wheeler
IPC分类号： G01Q70/08 , G01B3/00 , G01B5/28 , G01B7/34 , G01B21/20 , G01B21/30 , G01Q10/00 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q60/38 , G01Q70/00 , G01Q70/06 , G01Q70/12 , G01Q90/00 , G01N13/16
CPC分类号： G01B3/008 , G01B7/34 , G01Q10/06 , G01Q60/34 , Y10S977/851
摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.

10. 发明授权

US5955661A Optical profilometer combined with stylus probe measurement device 失效
标题翻译：光学轮廓仪结合触针探头测量装置
公开(公告)号：US5955661A
公开(公告)日：1999-09-21
申请号：US779087
申请日：1997-01-06
申请人： Amin Samsavar , Michael Weber , Thomas McWaid , William P. Kuhn , Robert E. Parks
发明人： Amin Samsavar , Michael Weber , Thomas McWaid , William P. Kuhn , Robert E. Parks
IPC分类号： G01B21/30 , G01B11/00 , G01B21/04 , G01Q30/02 , G01Q60/24 , G01B5/28
CPC分类号： G01B21/04 , B82Y35/00 , G01B11/005 , G01Q30/025 , Y10S977/869
摘要： An optical profilometer and a stylus probe measuring device used in the same instrument have the advantage that these two sensors can be quickly switched between each other. This can be an advantage when used to measure samples, since the optical profilometer can be used until a sample is found to be outside of the desired tolerances. Afterwards, the stylus probe measuring device can be used to accurately determine the profile data. This is an advantage because an optical profilometer is relatively quick, and the stylus probe measuring device is relatively accurate. Additionally, since the optical profilometer and stylus probe device are in the same instrument, the X and Y positions of these devices can be interrelated accurately. This allows images to be produced where the positions on the images can be easily correlated. For example, measurement cursors in sensor data displays can correlated by the positional offset information.
摘要翻译：在相同仪器中使用的光学轮廓仪和触针探头测量装置具有这两个传感器可以彼此快速切换的优点。当用于测量样品时，这可能是有利的，因为可以使用光学轮廓仪，直到发现样品超出所需的公差。之后，可以使用触控笔测量装置精确地确定轮廓数据。这是一个优点，因为光学轮廓仪相对较快，而探针测量装置相对准确。此外，由于光学轮廓仪和触针探针装置在相同的仪器中，这些装置的X和Y位置可以相互精确地相关。这允许在图像上的位置容易相关的地方产生图像。例如，传感器数据显示中的测量光标可以通过位置偏移信息相关联。

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