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1. 发明授权

US06941823B1 Apparatus and method to compensate for stress in a microcantilever 失效
标题翻译：用于补偿微悬臂梁中应力的装置和方法
公开(公告)号：US06941823B1
公开(公告)日：2005-09-13
申请号：US10045438
申请日：2001-11-07
申请人： Jonathan W. Lai , Hector B. Cavazos , Stephen C. Minne , Dennis M. Adderton
发明人： Jonathan W. Lai , Hector B. Cavazos , Stephen C. Minne , Dennis M. Adderton
IPC分类号： G01L1/04
CPC分类号： G01Q60/38 , G01Q70/04
摘要： A method to compensate for stress deflection in a compound microprobe that includes a substrate, a microcantilever extending outwardly from the substrate, and a film formed on the microcantilever. The method preferably comprises the steps of determining an amount of stress-induced deflection of the microcantilever, and then mounting the microprobe so as to compensate for the stress-induced deflection. The mounting step preferably includes selecting a compensation piece based upon the amount of stress-induced deflection, where the compensation piece is a wedge generally aligning the microcantilever with a deflection detection apparatus. In general, the step of selecting the compensation piece includes correcting an angle between a longitudinal axis of the microcantilever and the substrate so as to insure that light reflected from the microcantilever during operation contacts a detector of a deflection detection apparatus. The preferred embodiment is also directed to a microprobe assembly having a microcantilever and a substrate coupled to a support that includes a compensation piece disposed intermediate the support and the substrate. Again, the compensation piece is configured to compensate for an amount of static deflection of the microcantilever.
摘要翻译：一种用于补偿复合微探针中的应力偏转的方法，其包括基底，从基底向外延伸的微悬臂梁以及形成在微悬臂梁上的膜。该方法优选地包括以下步骤：确定微悬臂梁的应力引起的偏转量，然后安装微探针以便补偿应力引起的偏转。安装步骤优选地包括基于应力引起的偏转量来选择补偿件，其中补偿件是通常将微型悬臂与偏转检测装置对准的楔形件。通常，选择补偿件的步骤包括校正微悬臂梁的纵向轴线和基板之间的角度，以确保在操作期间从微型悬臂梁反射的光接触偏转检测装置的检测器。优选实施例还涉及一种微探针组件，该微探针组件具有微型悬臂梁和联接到支撑件的基板，该支撑件包括设置在支撑件和基板之间的补偿件。再次，补偿件被配置为补偿微悬臂梁的静态挠曲量。

2. 发明授权

US06912893B2 Apparatus and method for improving tuning of a probe-based instrument 失效
标题翻译：用于改善基于探针的仪器调谐的装置和方法
公开(公告)号：US06912893B2
公开(公告)日：2005-07-05
申请号：US10417506
申请日：2003-04-17
申请人： Stephen C. Minne , Hector B. Cavazos
发明人： Stephen C. Minne , Hector B. Cavazos
IPC分类号： G01Q70/02 , G01Q70/04 , G01N13/16 , G01B5/28
CPC分类号： G01Q70/04 , Y10S977/873
摘要： A method of operating a probe-based instrument includes providing a probe assembly and a probe holder and oscillating a probe of the probe assembly with an actuator that generates oscillation energy. The method also includes mounting the probe assembly on the probe holder so as to lessen interference with the oscillation energy coupled to the tip of the probe. A corresponding probe assembly includes a base having two substantially opposed surfaces and a cantilever extending from the base and supporting a tip. The probe assembly is mounted in a probe holder such that a probe holder surface contacts one of the opposed surfaces. The one opposed surface preferably includes at least one opening such that the surface area of the one opposed surface is substantially less than the surface area of the probe holder surface.
摘要翻译：操作基于探针的仪器的方法包括提供探针组件和探针保持器，并且用产生振荡能量的致动器振荡探针组件的探针。该方法还包括将探针组件安装在探针支架上，以便减少与耦合到探针尖端的振荡能量的干扰。相应的探针组件包括具有两个基本上相对的表面的基部和从基部延伸并支撑尖端的悬臂。探针组件安装在探针保持器中，使得探针保持器表面接触相对表面之一。一个相对表面优选地包括至少一个开口，使得一个相对表面的表面积基本上小于探针保持器表面的表面积。

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