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1. 发明公开

EP3226278A1 QUANTITATIVE ANALYSIS DEVICE FOR TRACE CARBON AND QUANTITATIVE ANALYSIS METHOD FOR TRACE CARBON 有权
标题翻译：痕量碳的定量分析装置及痕量碳的定量分析方法
公开(公告)号：EP3226278A1
公开(公告)日：2017-10-04
申请号：EP15862942.8
申请日：2015-03-23
申请人： JFE Steel Corporation
发明人： TANAKA Yuji , YAMASHITA Takako , NAGOSHI Masayasu
IPC分类号： H01J37/20 , G01N23/207 , G01N23/225 , H01J37/18 , H01J37/252 , H01J37/28
CPC分类号： G01N23/2252 , G01N23/207 , H01J37/18 , H01J37/256 , H01J37/28 , H01J2237/022 , H01J2237/2067 , H01J2237/2807 , H01J2237/2813
摘要： The present invention makes it possible to analyze trace carbon in a sample without the effects of contamination. In an electron probe microanalyzer, a liquid nitrogen trap (6) and a plasma or oxygen radical generator are jointly used as a means for suppressing contamination, and two or more carbon detection units (9, 10) for detecting characteristic x-rays (8) of carbon in the sample (7) are provided.
摘要翻译：本发明使得能够分析样品中的痕量碳而没有污染的影响。在电子探针显微分析仪中，共同使用液氮阱（6）和等离子体或氧自由基发生器作为抑制污染的手段，以及两个或更多个用于检测特征X射线（8）的碳检测单元（9,10））的样品（7）中的碳。

2. 发明公开

EP2722867A3 Configurable charged-particle beam apparatus 有权转让
标题翻译：可配置的粒子束
公开(公告)号：EP2722867A3
公开(公告)日：2016-03-30
申请号：EP13189274.7
申请日：2013-10-18
申请人： FEI COMPANY
发明人： Tuma, Lubomír , Josef, Sesták
IPC分类号： H01J37/141 , H01J37/20 , H01J37/26
CPC分类号： G21K5/08 , H01J37/1413 , H01J37/20 , H01J37/265 , H01J2237/1035 , H01J2237/1415 , H01J2237/2802 , H01J2237/2813
摘要： Configurable charged-particle apparatus ( 100 ) equipped with:
• a charged particle column ( 102 ) comprising
o a charged particle source (104) for producing a beam of charged particles along an optical axis (106); and
o a magnetic immersion lens (107) for focusing the beam of charged particles on a sample position, the magnetic immersion lens comprising a first lens pole (108), said first lens pole forming the part of the magnetic immersion lens furthest removed from the charged particle source;
• an excitation coil (110) surrounding the first lens pole;
• at least a first stage (112) on which a sample (114) can be mounted, the first stage movable with respect to the optical axis; and
• one or more detectors (116, 118) for detecting radiation emanating from the sample in response to the beam of charged particles stimulating the sample;
the immersion lens having a configurable magnetic circuit;
characterized in that
the apparatus has at least a first configuration (FIG. 1) and a second configuration (FIG. 2), the apparatus in the first configuration equipped to position the sample with respect to the optical axis while the sample is mounted on the first stage, the apparatus in the second configuration having a second lens pole (120) mounted on the first stage (112), the second lens pole intersecting the optical axis (106), and the apparatus in the second configuration equipped with a second stage (130) for mounting the sample (114) thereon, the second stage equipped to position the sample between the first lens pole (108) and the second lens pole (120), the second stage movable with respect to the optical axis,
as a result of which the optical properties of the magnetic immersion lens (107) differs in the first and the second configuration, and can in the second configuration be changed by positioning the second lens pole using the first stage, thus changing the magnetic circuit.

3. 发明公开

EP1842221A4 LASER ATOM PROBES 审中-公开
标题翻译： LASERATOMSONDEN
公开(公告)号：EP1842221A4
公开(公告)日：2010-11-24
申请号：EP05857198
申请日：2005-12-20
申请人： IMAGO SCIENT INSTR CORP
发明人： BUNTON JOSEPH HALE , KELLY THOMAS F , LENZ DANIEL R , WIENER SCOTT ALBERT
IPC分类号： H01J37/285 , H01S3/10
CPC分类号： H01J49/164 , B82Y35/00 , H01J37/285 , H01J49/0004 , H01J2237/2812 , H01J2237/2813

4. 发明公开

EP1842221A2 LASER ATOM PROBES 审中-公开
标题翻译： LASERATOMSONDEN
公开(公告)号：EP1842221A2
公开(公告)日：2007-10-10
申请号：EP05857198.5
申请日：2005-12-20
申请人： Imago Scientific Instruments Corporation
发明人： BUNTON, Joseph, Hale , KELLY, Thomas, F. , LENZ, Daniel, R. , WIENER, Scott, Albert
IPC分类号： H01J37/285 , H01S3/10
CPC分类号： H01J49/164 , B82Y35/00 , H01J37/285 , H01J49/0004 , H01J2237/2812 , H01J2237/2813
摘要： An atom probe includes a specimen mount that holds a specimen to be analyzed. A detector is spaced apart from the specimen mount. A local electrode with an aperture is located between the detector and the specimen mount. A laser is oriented to emit a laser beam toward the specimen mount at a nonzero angle with respect to the aperture plane, the aperture plane being oriented perpendicular to an ion travel path defined through the aperture between the specimen mount and the detector.

5. 发明公开

EP1365229A4 METHOD AND APPARATUS FOR MEASURING PHYSICAL PROPERTIES OF MICRO REGION 有权
标题翻译：方法和设备测量微小范围的物理特性
公开(公告)号：EP1365229A4
公开(公告)日：2007-04-11
申请号：EP01908124
申请日：2001-02-28
申请人： HITACHI LTD
发明人： TANIGUCHI YOSHIFUMI , ICHIHASHI MIKIO , KOUGUCHI MASANARI
IPC分类号： G01L1/24 , G01N23/20 , G01N23/225 , H01J37/28 , H01L21/66
CPC分类号： H01J37/28 , G01L1/241 , G01L5/0047 , G01N23/20 , G01N23/20058 , G01N23/2251 , H01J37/2955 , H01J2237/24585 , H01J2237/2544 , H01J2237/2813 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A method and apparatus for measuring physical properties of a micro region in which the two-dimensional distribution of stress or strain can be measured in real time with high resolution, high sensitivity and high alignment of measuring position. A sample is scanned with a finely focused electron beam (23, 26), and the positional difference between the diffraction spots (32, 33) is measured by means of a two-dimensional position sensitive electronic sensor (13). The positional difference is outputted as a voltage value and converted into a magnitude of stress or strain according to the principle of nanodiffraction method ,and the distribution of the stress or strain is displayed as an image in synchronism with a position signal on the sample.

6. 发明公开

EP1425729A1 GRAPHICAL AUTOMATED MACHINE CONTROL AND METROLOGY 有权
标题翻译： GRAPHIC自动化机器控制和测量
公开(公告)号：EP1425729A1
公开(公告)日：2004-06-09
申请号：EP02757340.1
申请日：2002-08-23
申请人： FEI Company
发明人： TASKER, David J. , LEZEC, Henri, J. , HEAD, David A.
IPC分类号： G09G5/00
CPC分类号： G05B19/40933 , G01N1/286 , G05B2219/36314 , G05B2219/36317 , G05B2219/36325 , H01J37/28 , H01J37/3023 , H01J37/3056 , H01J2237/2813 , H01J2237/30416 , H01J2237/30483 , H01J2237/31713 , H01J2237/31745 , H01J2237/31749 , Y02P90/265
摘要： A graphical programming system allows a user to place geometric shapes onto a scaled image, the shape having associated behavior that operates on the image or on the object of which the image is formed. In a preferred embodiment, the shapes are objects in the Visio program by Microsoft Corporation. The shapes are dragged from a stencil onto an image provided by ion beam or electron microscope image. The shape invokes software or hardware to locate and measure features on the image or to perform operations, such as ion beam milling, on the object that is imaged.

7. 发明授权

EP2722867B1 Configurable charged-particle beam apparatus 有权转让
公开(公告)号：EP2722867B1
公开(公告)日：2018-09-19
申请号：EP13189274.7
申请日：2013-10-18
申请人： FEI Company
发明人： Tuma, Lubomír , Josef, Sesták
IPC分类号： H01J37/141 , H01J37/20 , H01J37/26
CPC分类号： G21K5/08 , H01J37/1413 , H01J37/20 , H01J37/265 , H01J2237/1035 , H01J2237/1415 , H01J2237/2802 , H01J2237/2813
摘要： Configurable charged-particle apparatus ( 100 ) equipped with: €¢ a charged particle column ( 102 ) comprising o a charged particle source (104) for producing a beam of charged particles along an optical axis (106); and o a magnetic immersion lens (107) for focusing the beam of charged particles on a sample position, the magnetic immersion lens comprising a first lens pole (108), said first lens pole forming the part of the magnetic immersion lens furthest removed from the charged particle source; €¢ an excitation coil (110) surrounding the first lens pole; €¢ at least a first stage (112) on which a sample (114) can be mounted, the first stage movable with respect to the optical axis; and €¢ one or more detectors (116, 118) for detecting radiation emanating from the sample in response to the beam of charged particles stimulating the sample; the immersion lens having a configurable magnetic circuit; characterized in that the apparatus has at least a first configuration (FIG. 1) and a second configuration (FIG. 2), the apparatus in the first configuration equipped to position the sample with respect to the optical axis while the sample is mounted on the first stage, the apparatus in the second configuration having a second lens pole (120) mounted on the first stage (112), the second lens pole intersecting the optical axis (106), and the apparatus in the second configuration equipped with a second stage (130) for mounting the sample (114) thereon, the second stage equipped to position the sample between the first lens pole (108) and the second lens pole (120), the second stage movable with respect to the optical axis, as a result of which the optical properties of the magnetic immersion lens (107) differs in the first and the second configuration, and can in the second configuration be changed by positioning the second lens pole using the first stage, thus changing the magnetic circuit.

8. 发明公开

EP2665083A3 Scanning microscope having an adaptive scan 审中-公开
标题翻译：扫描显微镜具有自适应筛选
公开(公告)号：EP2665083A3
公开(公告)日：2016-04-06
申请号：EP13167952.4
申请日：2013-05-16
申请人： FEI COMPANY
发明人： Bugge, Cliff , Van Leer, Brandon
IPC分类号： H01J37/22 , H01J37/26 , H01J37/28
CPC分类号： G02B21/002 , C07K14/415 , C12N15/8247 , H01J37/222 , H01J37/265 , H01J37/28 , H01J2237/2813 , H04N7/18
摘要： A method of using a scanning microscope to rapidly form a digital image of an area. The method includes performing an initial set of scans to form a guide pixel set for the area and using the guide pixel set to identify regions representing structures of interest in the area. Then, performing additional scans of the regions representing structures of interest, to gather further data to further evaluate pixels in the regions, and not scanning elsewhere in the area.

9. 发明公开

EP2903773A1 BULK DEPOSITION FOR TILTED MILL PROTECTION 有权
标题翻译：肖特分离及KIPPMÜHLENSCHUTZ
公开(公告)号：EP2903773A1
公开(公告)日：2015-08-12
申请号：EP13843746.2
申请日：2013-10-07
申请人： FEI COMPANY
发明人： STONE, Stacey , LEE, Sang Hoon , BLACKWOOD, Jeffrey , SCHMIDT, Michael
IPC分类号： B23K15/08 , B23K15/00 , C23F4/04
CPC分类号： H01J37/3005 , G01N1/32 , G01N23/2255 , G01N2223/104 , G01N2223/611 , H01J37/3007 , H01J37/3053 , H01J37/3056 , H01J37/31 , H01J2237/063 , H01J2237/08 , H01J2237/2813 , H01J2237/31732 , H01J2237/31745 , H01J2237/31749
摘要： To reduce artifacts in a surface exposed by a focused ion beam for viewing, a trench is milled next to the region of interest, and the trench is filled to create a bulkhead. The ion beam is directed through the bulkhead to expose a portion of the region of interest for viewing. The trench is filled, for example, by charged particle beam-induced deposition. The trench is typically milled and filled from the top down, and then the ion beam is angled with respect to the sample surface to expose the region of interest.

10. 发明公开

EP2628146A2 NEW IMAGING MODALITY USING PENETRATING RADIATIONS 有权转让
标题翻译： NEUEBILDGEBUNGSMODALITÄTMITTELS PENETRIERENDER STRAHLUNG
公开(公告)号：EP2628146A2
公开(公告)日：2013-08-21
申请号：EP11757406.1
申请日：2011-06-29
申请人： Osvath, Szabolcs , Szigeti, Krisztián
发明人： Osvath, Szabolcs , Szigeti, Krisztián
IPC分类号： G06T11/00
CPC分类号： G01J1/02 , A61B6/486 , A61B6/5205 , A61B6/5282 , G06T11/006 , G06T2211/412 , G21K7/00 , H01J2237/2813
摘要： Systems and methods which use penetrating radiation to obtain novel type of information about objects of interest. This information may be represented as novel type of image. In the present embodiments, penetrating radiation is directed through the object of interest. The attenuated radiation emerging from the object of interest is detected by at least one detector. A plurality of measurements is collected. At least one statistical parameter describing variations of the measurements may be calculated and used for reconstructing an image representing fluctuations of the attenuation of the penetrating radiation in the object of study. At least one other statistical parameter representing the mean attenuation image, the error of the fluctuation image, or the error of the mean attenuation image may also be calculated and used to reconstruct images of the object of interest.
摘要翻译：使用穿透辐射获得关于感兴趣对象的新型信息的系统和方法。该信息可以被表示为新型图像。在本实施例中，穿透辐射被引导通过感兴趣的对象。从感兴趣对象中出现的衰减辐射由至少一个检测器检测。收集多个测量。可以计算描述测量的变化的至少一个统计参数，并用于重建表示研究对象中穿透辐射的衰减波动的图像。还可以计算表示平均衰减图像，波动图像的误差或平均衰减图像的误差的至少一个其它统计参数，并用于重建感兴趣对象的图像。

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