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1. 发明公开

EP3226278A1 QUANTITATIVE ANALYSIS DEVICE FOR TRACE CARBON AND QUANTITATIVE ANALYSIS METHOD FOR TRACE CARBON 有权
标题翻译：痕量碳的定量分析装置及痕量碳的定量分析方法
公开(公告)号：EP3226278A1
公开(公告)日：2017-10-04
申请号：EP15862942.8
申请日：2015-03-23
申请人： JFE Steel Corporation
发明人： TANAKA Yuji , YAMASHITA Takako , NAGOSHI Masayasu
IPC分类号： H01J37/20 , G01N23/207 , G01N23/225 , H01J37/18 , H01J37/252 , H01J37/28
CPC分类号： G01N23/2252 , G01N23/207 , H01J37/18 , H01J37/256 , H01J37/28 , H01J2237/022 , H01J2237/2067 , H01J2237/2807 , H01J2237/2813
摘要： The present invention makes it possible to analyze trace carbon in a sample without the effects of contamination. In an electron probe microanalyzer, a liquid nitrogen trap (6) and a plasma or oxygen radical generator are jointly used as a means for suppressing contamination, and two or more carbon detection units (9, 10) for detecting characteristic x-rays (8) of carbon in the sample (7) are provided.
摘要翻译：本发明使得能够分析样品中的痕量碳而没有污染的影响。在电子探针显微分析仪中，共同使用液氮阱（6）和等离子体或氧自由基发生器作为抑制污染的手段，以及两个或更多个用于检测特征X射线（8）的碳检测单元（9,10））的样品（7）中的碳。

2. 发明公开

EP2722867A3 Configurable charged-particle beam apparatus 有权转让
标题翻译：可配置的粒子束
公开(公告)号：EP2722867A3
公开(公告)日：2016-03-30
申请号：EP13189274.7
申请日：2013-10-18
申请人： FEI COMPANY
发明人： Tuma, Lubomír , Josef, Sesták
IPC分类号： H01J37/141 , H01J37/20 , H01J37/26
CPC分类号： G21K5/08 , H01J37/1413 , H01J37/20 , H01J37/265 , H01J2237/1035 , H01J2237/1415 , H01J2237/2802 , H01J2237/2813
摘要： Configurable charged-particle apparatus ( 100 ) equipped with:
• a charged particle column ( 102 ) comprising
o a charged particle source (104) for producing a beam of charged particles along an optical axis (106); and
o a magnetic immersion lens (107) for focusing the beam of charged particles on a sample position, the magnetic immersion lens comprising a first lens pole (108), said first lens pole forming the part of the magnetic immersion lens furthest removed from the charged particle source;
• an excitation coil (110) surrounding the first lens pole;
• at least a first stage (112) on which a sample (114) can be mounted, the first stage movable with respect to the optical axis; and
• one or more detectors (116, 118) for detecting radiation emanating from the sample in response to the beam of charged particles stimulating the sample;
the immersion lens having a configurable magnetic circuit;
characterized in that
the apparatus has at least a first configuration (FIG. 1) and a second configuration (FIG. 2), the apparatus in the first configuration equipped to position the sample with respect to the optical axis while the sample is mounted on the first stage, the apparatus in the second configuration having a second lens pole (120) mounted on the first stage (112), the second lens pole intersecting the optical axis (106), and the apparatus in the second configuration equipped with a second stage (130) for mounting the sample (114) thereon, the second stage equipped to position the sample between the first lens pole (108) and the second lens pole (120), the second stage movable with respect to the optical axis,
as a result of which the optical properties of the magnetic immersion lens (107) differs in the first and the second configuration, and can in the second configuration be changed by positioning the second lens pole using the first stage, thus changing the magnetic circuit.

3. 发明公开

EP1842221A4 LASER ATOM PROBES 审中-公开
标题翻译： LASERATOMSONDEN
公开(公告)号：EP1842221A4
公开(公告)日：2010-11-24
申请号：EP05857198
申请日：2005-12-20
申请人： IMAGO SCIENT INSTR CORP
发明人： BUNTON JOSEPH HALE , KELLY THOMAS F , LENZ DANIEL R , WIENER SCOTT ALBERT
IPC分类号： H01J37/285 , H01S3/10
CPC分类号： H01J49/164 , B82Y35/00 , H01J37/285 , H01J49/0004 , H01J2237/2812 , H01J2237/2813

4. 发明公开

EP1842221A2 LASER ATOM PROBES 审中-公开
标题翻译： LASERATOMSONDEN
公开(公告)号：EP1842221A2
公开(公告)日：2007-10-10
申请号：EP05857198.5
申请日：2005-12-20
申请人： Imago Scientific Instruments Corporation
发明人： BUNTON, Joseph, Hale , KELLY, Thomas, F. , LENZ, Daniel, R. , WIENER, Scott, Albert
IPC分类号： H01J37/285 , H01S3/10
CPC分类号： H01J49/164 , B82Y35/00 , H01J37/285 , H01J49/0004 , H01J2237/2812 , H01J2237/2813
摘要： An atom probe includes a specimen mount that holds a specimen to be analyzed. A detector is spaced apart from the specimen mount. A local electrode with an aperture is located between the detector and the specimen mount. A laser is oriented to emit a laser beam toward the specimen mount at a nonzero angle with respect to the aperture plane, the aperture plane being oriented perpendicular to an ion travel path defined through the aperture between the specimen mount and the detector.

5. 发明公开

EP1365229A4 METHOD AND APPARATUS FOR MEASURING PHYSICAL PROPERTIES OF MICRO REGION 有权
标题翻译：方法和设备测量微小范围的物理特性
公开(公告)号：EP1365229A4
公开(公告)日：2007-04-11
申请号：EP01908124
申请日：2001-02-28
申请人： HITACHI LTD
发明人： TANIGUCHI YOSHIFUMI , ICHIHASHI MIKIO , KOUGUCHI MASANARI
IPC分类号： G01L1/24 , G01N23/20 , G01N23/225 , H01J37/28 , H01L21/66
CPC分类号： H01J37/28 , G01L1/241 , G01L5/0047 , G01N23/20 , G01N23/20058 , G01N23/2251 , H01J37/2955 , H01J2237/24585 , H01J2237/2544 , H01J2237/2813 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A method and apparatus for measuring physical properties of a micro region in which the two-dimensional distribution of stress or strain can be measured in real time with high resolution, high sensitivity and high alignment of measuring position. A sample is scanned with a finely focused electron beam (23, 26), and the positional difference between the diffraction spots (32, 33) is measured by means of a two-dimensional position sensitive electronic sensor (13). The positional difference is outputted as a voltage value and converted into a magnitude of stress or strain according to the principle of nanodiffraction method ,and the distribution of the stress or strain is displayed as an image in synchronism with a position signal on the sample.

6. 发明公开

EP1425729A1 GRAPHICAL AUTOMATED MACHINE CONTROL AND METROLOGY 有权
标题翻译： GRAPHIC自动化机器控制和测量
公开(公告)号：EP1425729A1
公开(公告)日：2004-06-09
申请号：EP02757340.1
申请日：2002-08-23
申请人： FEI Company
发明人： TASKER, David J. , LEZEC, Henri, J. , HEAD, David A.
IPC分类号： G09G5/00
CPC分类号： G05B19/40933 , G01N1/286 , G05B2219/36314 , G05B2219/36317 , G05B2219/36325 , H01J37/28 , H01J37/3023 , H01J37/3056 , H01J2237/2813 , H01J2237/30416 , H01J2237/30483 , H01J2237/31713 , H01J2237/31745 , H01J2237/31749 , Y02P90/265
摘要： A graphical programming system allows a user to place geometric shapes onto a scaled image, the shape having associated behavior that operates on the image or on the object of which the image is formed. In a preferred embodiment, the shapes are objects in the Visio program by Microsoft Corporation. The shapes are dragged from a stencil onto an image provided by ion beam or electron microscope image. The shape invokes software or hardware to locate and measure features on the image or to perform operations, such as ion beam milling, on the object that is imaged.

7. 发明公开

EP3217420A1 METHOD, ANALYSIS SYSTEM AND COMPUTER PROGRAM PRODUCT FOR SEMI-AUTOMATED X-RAY ELEMENTAL ANALYSIS USING A PARTICLE MICROSCOPE 审中-公开
标题翻译：使用粒子显微镜对半自动X射线元素分析的方法，分析系统和计算机程序产品
公开(公告)号：EP3217420A1
公开(公告)日：2017-09-13
申请号：EP16000567.4
申请日：2016-03-09
申请人： Carl Zeiss Microscopy Ltd.
发明人： Hill, Edward
IPC分类号： H01J37/28 , G01N23/225
CPC分类号： H01J37/28 , G01N23/225 , H01J2237/22 , H01J2237/2807 , H01J2237/2808 , H01J2237/2813
摘要： The invention relates to a system including a data analysis system for interactively generating elemental local composition data of an object depending on photon radiation data acquired by using a charged particle microscope, and a method of operating said system. A plurality of local spectral data sets (72) are read, each being indicative of an energy spectrum of photon radiation emitted in response to irradiation by a charged particle beam. Each of the local spectral data sets represents a measurement performed in a respective measurement region of the object. Two or more of the plurality of local spectral data sets are combined to obtain combined spectral data (71). The combined spectral data are then evaluated to extract a list of candidates (80-84) for determing the elements which cause emission line peaks in the respective local spectral data set. Additionally or alternatively, energy values (76, 77, 78) or energy ranges (73,74,75) areselected based on the combined spectral data for efficient background subtraction for each of the local spectral data sets.
摘要翻译：本发明涉及一种包括数据分析系统的系统以及操作所述系统的方法，所述数据分析系统用于根据通过使用带电粒子显微镜获取的光子辐射数据来交互式地生成对象的元素局部组成数据。读取多个局部光谱数据组（72），每个局部光谱数据组表示响应于带电粒子束的照射而发射的光子辐射的能谱。每个局部频谱数据集表示在对象的相应测量区域中执行的测量。将多个局部光谱数据组中的两个或更多个组合以获得组合的光谱数据（71）。然后评估组合的光谱数据以提取用于确定在相应的本地光谱数据集中引起发射谱线峰值的元素的候选列表（80-84）。另外地或可选地，基于组合的光谱数据选择能量值（76,77,78）或能量范围（73,74,75）以用于每个局部光谱数据集的有效背景减除。

8. 发明公开

EP2313231A4 METHOD AND APPARATUS FOR LASER MACHINING 审中-公开
标题翻译： VERFAHREN UND VORRICHTUNGFÜRLASERBEARBEITUNG
公开(公告)号：EP2313231A4
公开(公告)日：2017-04-05
申请号：EP09795202
申请日：2009-07-09
申请人： FEI CO
发明人： STRAW MARCUS , SAMSAVAR AMIN , UTLAUT MARK , TOTH MILOS
IPC分类号： B23K26/14 , B23K26/03 , B23K26/0622 , B23K26/08 , H01J37/30
CPC分类号： B23K26/03 , B23K26/0622 , B23K26/0853 , B23K26/14 , B23K26/1423 , B23K26/1429 , H01J2237/2813

9. 发明公开

EP2903773A4 BULK DEPOSITION FOR TILTED MILL PROTECTION 有权
标题翻译：肖特隔离倾斜保护
公开(公告)号：EP2903773A4
公开(公告)日：2015-10-21
申请号：EP13843746
申请日：2013-10-07
申请人： FEI CO
发明人： STONE STACEY , LEE SANG HOON , BLACKWOOD JEFFREY , SCHMIDT MICHAEL
IPC分类号： G01N23/225 , H01J37/30
CPC分类号： H01J37/3005 , G01N1/32 , G01N23/2255 , G01N2223/104 , G01N2223/611 , H01J37/3007 , H01J37/3053 , H01J37/3056 , H01J37/31 , H01J2237/063 , H01J2237/08 , H01J2237/2813 , H01J2237/31732 , H01J2237/31745 , H01J2237/31749

10. 发明授权

EP1735811B1 METHOD AND SYSTEM FOR ULTRAFAST PHOTOELECTRON MICROSCOPE 有权
标题翻译：方法和系统便于高速光电子显微镜
公开(公告)号：EP1735811B1
公开(公告)日：2015-09-09
申请号：EP05743023.3
申请日：2005-04-01
申请人： CALIFORNIA INSTITUTE OF TECHNOLOGY
发明人： ZEWAIL, Ahmed , LOBASTOV, Vladimir
IPC分类号： H01J37/26 , H01J37/073 , H01J37/065 , H01J37/24 , G01N23/04
CPC分类号： H01J37/26 , H01J37/065 , H01J37/073 , H01J37/24 , H01J37/243 , H01J37/265 , H01J2237/0432 , H01J2237/06333 , H01J2237/06341 , H01J2237/206 , H01J2237/2065 , H01J2237/24585 , H01J2237/2482 , H01J2237/2803 , H01J2237/2809 , H01J2237/2813 , H01J2237/2855

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