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    • 8. 发明申请
    • METHOD FOR PRODUCING A LAYERED ASSEMBLY AND A LAYERED ASSEMBLY
    • 一种用于生产层排列和层排列
    • WO03050868A3
    • 2003-09-04
    • PCT/DE0203998
    • 2002-10-23
    • INFINEON TECHNOLOGIES AGKREUPL FRANZHOENLEIN WOLFGANGSTEINHOEGL WERNER
    • KREUPL FRANZHOENLEIN WOLFGANGSTEINHOEGL WERNER
    • H01L21/768H01L51/30C01B31/02H01L23/522
    • H01L21/7682B82Y10/00H01L51/0048H01L2221/1047Y10S977/742
    • The invention relates to a method for producing a layered assembly and to a layered assembly (200). According to said method, two substantially parallel electrically conductive strip conductors (202, 203) are configured on a substrate and at least one auxiliary structure (205a, 205b, 205c) is configured on said substrate (201) between the two strip conductors (202, 203), running in a first direction (206), said first direction (206) forming an acute angle of at least 45 DEG or a right angle with a connecting axis of the strip conductors that runs at right angles to both strip conductors (202, 203). The invention is characterised in that the auxiliary structure or structures (205a, 205b, 205c) is or are produced from one material and said structure or structures can be selectively removed from the dielectric layer (204). In addition, a dielectric layer (204) is configured between the two strip conductors in such a way that the auxiliary structure or structures (205a, 205b, 205c) is or are at least partially covered by the dielectric layer (204).
    • 本发明涉及一种用于制造层结构的方法,和层布置。 在用于制造层结构(200),两个基本上相互平行的导电迹线(202,203)的方法形成在衬底上的衬底,至少一个辅助结构(205A,205B,205C)上(201) 且沿第一方向延伸的两个导体(202,203)之间(206)形成,该第一方向(206)与垂直于延伸的互连的连接轴线的锐角或直角两个互连(202,203)至少 包括45°的角度,其中,所述至少一个辅助结构(205A,205B,205C)由介电层(204)的至少一个辅助结构是可选择性去除的材料制成。 此外,在两个导体轨道之间形成的介电层(204),使得从电介质层(204)的所述至少一个辅助结构(205A,205B,205C)至少部分地被覆盖。