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1. 发明申请

WO2012165293A1 電子顕微鏡及び電子線を用いた撮像方法审中-公开
标题翻译：使用电子束的电子显微镜和图像捕获方法
公开(公告)号：WO2012165293A1
公开(公告)日：2012-12-06
申请号：PCT/JP2012/063320
申请日：2012-05-24
申请人：株式会社日立ハイテクノロジーズ , 津野夏規 , 数見秀之 , 望月譲 , 三羽貴文 , 木村嘉伸 , 横須賀俊之
发明人：津野　夏規 , 数見　秀之 , 望月　譲 , 三羽　貴文 , 木村　嘉伸 , 横須賀　俊之
IPC分类号： H01J37/22 , H01J37/20 , H01J37/28
CPC分类号： H01J37/265 , G01B15/04 , H01J37/28 , H01J2237/24585 , H01J2237/2803
摘要：　本発明は、試料に電子ビームを断続的に照射して二次電子信号を検出する電子顕微鏡において、照射電子ビームのパルス幅（Ｔｐ）より短い任意の検出時間（Ｔ２）を選択して、前記検出時間に取得された二次電子信号を用いて二次電子像を形成することを特徴とする。これにより、試料の内部構造や積層界面などの必要な試料情報を画像のコントラストに反映させ、不要な情報が前記画像に重畳することを防ぐことができるので、試料情報の選択性と画質とが向上した二次電子像を得ることが可能となった。
摘要翻译：本发明的特征在于电子显微镜，其间断地向样品施加电子束并检测二次电子信号，其中选择比所施加的电子束的脉冲宽度（Tp）短的任意定义的检测时间（T2）并且使用在检测时间期间获取的二次电子信号形成二次电子图像。因此，可以在图像的对比度中反映包括样本的内部结构和层叠界面的必要样本信息，并且防止不必要的信息被叠加在图像上，从而可以获得具有改进的样本的二次电子图像信息选择性和图像质量。

2. 发明申请

WO2009154953A4 SAMPLE INSPECTION METHODS, SYSTEMS AND COMPONENTS 审中-公开
标题翻译：样品检测方法，系统和组件
公开(公告)号：WO2009154953A4
公开(公告)日：2010-08-05
申请号：PCT/US2009045131
申请日：2009-05-26
申请人： CARL ZEISS SMT INC , SIJBRANDIJ SYBREN , NOTTE IV JOHN A , THOMPSON WILLIAM B
发明人： SIJBRANDIJ SYBREN , NOTTE IV JOHN A , THOMPSON WILLIAM B
IPC分类号： G01N23/22 , G01N23/225 , G01T1/24 , G01T1/29 , H01J37/00 , H01L21/66
CPC分类号： G01N23/2251 , G01N23/2208 , G01N23/2258 , H01J37/244 , H01J37/28 , H01J2237/0807 , H01J2237/2441 , H01J2237/2444 , H01J2237/2445 , H01J2237/24475 , H01J2237/24485 , H01J2237/2449 , H01J2237/24585 , H01J2237/24592 , H01J2237/2803 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： The disclosure relates to sample inspection using an ion-beam microscope. In some embodiments, the disclosure involves the use of multiple detectors, each of which provides different information about a sample.
摘要翻译：本公开涉及使用离子束显微镜的样品检查。在一些实施例中，本公开涉及使用多个检测器，每个检测器提供关于样本的不同信息。

3. 发明申请

WO2014021019A1 荷電粒子線装置审中-公开
标题翻译：充电颗粒光束装置
公开(公告)号：WO2014021019A1
公开(公告)日：2014-02-06
申请号：PCT/JP2013/067022
申请日：2013-06-21
申请人：株式会社日立ハイテクノロジーズ
发明人：坂　直磨 , 小原　健二 , 平井　大博
IPC分类号： H01J37/22 , H01J37/28 , H01L21/66
CPC分类号： H01J37/222 , H01J37/04 , H01J37/261 , H01J2237/049 , H01J2237/063 , H01J2237/221 , H01J2237/2448 , H01J2237/24585 , H01J2237/24592 , H01J2237/2602 , H01J2237/2803 , H01J2237/2817 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要：本発明は、走査型電子顕微鏡像における半導体の銅配線のグレインとボイドのコントラストが電子線照射加速電圧によって変化することに着目した欠陥検査装置である。本発明の荷電粒子線装置は、試料の同じ箇所に対して電子線を複数の加速電圧で照射し、前記複数の加速電圧のそれぞれに対応して取得された複数の画像（６１，６２）における同じ箇所のコントラスト変化量に基づいて、グレイン（６５，６６）とボイド（６７）とを区別する。これにより、試料を破壊することなく、自動で高速にグレインとボイドを区別して検出することができる。
摘要翻译：本发明是利用扫描电子显微镜中的半导体的铜线的晶粒和空隙的对比度根据电子束照射的加速电压而变化的事实的缺陷检查装置。该带电粒子束装置将多个加速电压的电子束照射到试样的同一位置，根据相同位置的对比度，对晶粒（65,66）和空隙（67）进行微分，分别与多个加速电压相关的多个图像（61,62）。因此，谷物和空隙可以被高效地自动区分和检测，而不破坏样品。

4. 发明申请

WO2008027543A3 CONFOCAL SECONDARY ELECTRON IMAGING 审中-公开
标题翻译：协同二次电子成像
公开(公告)号：WO2008027543A3
公开(公告)日：2008-06-26
申请号：PCT/US2007019188
申请日：2007-08-29
申请人： KLA TENCOR TECH CORP , ADLER DAVID L
发明人： ADLER DAVID L
IPC分类号： A61N5/00 , G21G5/00
CPC分类号： G01N23/225 , H01J37/256 , H01J37/28 , H01J2237/2803
摘要： One embodiment relates to an apparatus using electrons for inspection or metrology of a semiconductor substrate. The apparatus includes an electron source (301), electron lenses (302), scan deflectors (304), an objective electron lens (305), a collection electron lens (310), a pin-hole filter (312), de-scan deflectors (311), and a detector (313). The collection electron lens (310) is configured to focus the secondary electrons so as to form a secondary electron beam (309) which is focused at a conjugate focal plane, and the pin-hole filter (312) is positioned at the conjugate focal plane. The de-scan deflectors (311) are configured to controllably deflect the secondary electrons so as to counteract an influence of the scan deflectors (304) such that a center portion of the secondary electron beam passes through the filter and a remainder portion of the secondary electron beam is filtered out by the filter. Other embodiments and features are also disclosed.
摘要翻译：一个实施例涉及一种使用电子进行半导体衬底的检查或计量的装置。该装置包括电子源（301），电子透镜（302），扫描偏转器（304），物镜电子透镜（305），收集电子透镜（310），针孔滤光器（312），去扫描偏转器（311）和检测器（313）。收集电子透镜（310）被配置为聚焦二次电子以形成聚焦在共轭焦平面上的二次电子束（309），并且针孔滤光器（312）位于共轭焦平面。去扫描偏转器（311）被配置为可控地偏转二次电子，以便抵消扫描偏转器（304）的影响，使得二次电子束的中心部分通过过滤器，并且次级电子束的剩余部分电子束被过滤器滤出。还公开了其它实施例和特征。

5. 发明申请

WO2005098895A2 METHOD AND SYSTEM FOR ULTRAFAST PHOTOELECTRON MICROSCOPE 审中-公开
标题翻译：超导光电显微镜的方法与系统
公开(公告)号：WO2005098895A2
公开(公告)日：2005-10-20
申请号：PCT/US2005/011018
申请日：2005-04-01
申请人： CALIFORNIA INSTITUTE OF TECHNOLOGY , ZEWAIL, Ahmed , LOBASTOV, Vladimir
发明人： ZEWAIL, Ahmed , LOBASTOV, Vladimir
IPC分类号： H01J37/26
CPC分类号： H01J37/26 , H01J37/065 , H01J37/073 , H01J37/24 , H01J37/243 , H01J37/265 , H01J2237/0432 , H01J2237/06333 , H01J2237/06341 , H01J2237/206 , H01J2237/2065 , H01J2237/24585 , H01J2237/2482 , H01J2237/2803 , H01J2237/2809 , H01J2237/2813 , H01J2237/2855
摘要： An ultrafast system (and methods) for characterizing one or more samples. The system includes a stage assembly, which has a sample to be characterized. The system has a laser source that is capable of emitting an optical pulse of less than 1 ps in duration. The system has a cathode coupled to the laser source. In a specific embodiment, the cathode is capable of emitting an electron pulse less than 1 ps in duration. The system has an electron lens assembly adapted to focus the electron pulse onto the sample disposed on the stage. The system has a detector adapted to capture one or more electrons passing through the sample. The one or more electrons passing through the sample is representative of the structure of the sample. The detector provides a signal (e.g., data signal) associated with the one or more electrons passing through the sample that represents the structure of the sample. The system has a processor coupled to the detector. The processor is adapted to process the data signal associated with the one or more electrons passing through the sample to output information associated with the structure of the sample. The system has an output device coupled to the processor. The output device is adapted to output the information associated with the structure of the sample.
摘要翻译：用于表征一个或多个样品的超快速系统（和方法）。该系统包括具有要表征的样品的载物台组件。该系统具有能够发射持续时间小于1ps的光脉冲的激光源。该系统具有耦合到激光源的阴极。在具体实施例中，阴极能够发射持续时间小于1ps的电子脉冲。该系统具有适于将电子脉冲聚焦到设置在载物台上的样品上的电子透镜组件。该系统具有适于捕获穿过样品的一个或多个电子的检测器。通过样品的一个或多个电子代表样品的结构。检测器提供与通过样品的一个或多个电子相关联的信号（例如，数据信号），其表示样品的结构。该系统具有耦合到检测器的处理器。处理器适于处理与通过样本的一个或多个电子相关联的数据信号，以输出与样本的结构相关联的信息。该系统具有耦合到处理器的输出设备。输出设备适于输出与样本结构相关联的信息。

6. 发明申请

WO2017027922A1 WIDE FIELD ATMOSPHERIC SCANNING ELECTRON MICROSCOPE 审中-公开
标题翻译：宽场大气扫描电子显微镜
公开(公告)号：WO2017027922A1
公开(公告)日：2017-02-23
申请号：PCT/AU2016/050757
申请日：2016-08-16
申请人： DANILATOS, Gerasimos Daniel
发明人： DANILATOS, Gerasimos Daniel
IPC分类号： H01J37/26
CPC分类号： H01J37/28 , H01J37/1474 , H01J37/20 , H01J2237/188 , H01J2237/2003 , H01J2237/2605 , H01J2237/2608 , H01J2237/2803 , H01J2237/2807 , H01J2237/2808 , H01J2237/2811
摘要： Atmospheric scanning electron microscope achieves a wide field of view at low magnifications in a broad range of gaseous pressure, acceleration voltage and image resolution. This is based on the use of a reduced size pressure limiting aperture together with a scanning beam pivot point located at the small aperture at the end of electron optics column. A second aperture is located at the principal plane of the objective lens. Double deflection elements scan and rock the beam at a pivot point first at or near the principal plane of the lens while post-lens deflection means scan and rock the beam at a second pivot point at or near aperture at the end of the optics column. The aperture at the first pivot may act also as beam limiting aperture. In the alternative, with no beam limiting aperture at the principal plane, maximum amount of beam rays passes through the lens and with no post-lens deflection means, the beam is formed (limited) by a very small aperture at or near-and-below the final lens while the aperture skims a shifting portion of the wide beam, which is physically rocked with a pivot on the principal plane but with an apparent pivot point close and above the aperture, all of which result in a wide field of view on the examined specimen.
摘要翻译：大气扫描电子显微镜在气体压力，加速电压和图像分辨率的宽范围内以低放大倍率实现了宽视场。这是基于使用减小尺寸的压力限制孔以及位于电子光学柱端部的小孔处的扫描光束枢转点。第二孔位于物镜的主平面上。双偏转元件在首先在透镜的主平面处或附近的枢轴点处扫描并摇动光束，而后透镜偏转装置在光学柱的端部处的孔处或其附近的第二枢转点处扫描并摇动光束。第一枢轴处的孔径也可以作为光束限制孔径。另一方面，在主平面上没有光束限制孔径，最大量的束射线穿过透镜，并且没有后透镜偏转装置，该光束在非常小的孔径处形成（限制）在最后一个透镜下方，而孔眼瞥见宽光束的移动部分，其在主平面上用枢轴物理摇动，但是具有靠近和高于孔径的明显枢转点，所有这些导致宽视场检查样本。

7. 发明申请

WO2014185074A1 LEED FOR SEM 审中-公开
公开(公告)号：WO2014185074A1
公开(公告)日：2014-11-20
申请号：PCT/JP2014/002556
申请日：2014-05-14
申请人： OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
发明人： SHINTAKE, Tsumoru
IPC分类号： H01J37/244 , G01N23/20 , H01J37/295
CPC分类号： H01J37/244 , G01N23/20 , H01J37/2955 , H01J2237/2449 , H01J2237/24578 , H01J2237/2544 , H01J2237/2803
摘要： A low energy electron diffraction (LEED) detection module (100) includes: a first vacuum chamber for receiving diffracted electrons from a specimen (109); a larger second vacuum chamber connected to the first vacuum chamber to receive the diffracted electrons that have been transported through the first vacuum chamber; a two-dimensional electron detector disposed in the second vacuum chamber to detect the diffracted electrons; a potential shield (106) disposed generally along an inner surface of the first vacuum chamber and an inner surface of the second vacuum chamber; a magnetic lens (105) to expand a beam of the diffracted electrons that have been transported through the first vacuum chamber towards the two-dimensional electron detector; and a generally plane-shaped energy filter (103) to repel electrons having an energy lower than the probe beam (203) of electrons that impinges on the specimen (109).
摘要翻译：低能电子衍射（LEED）检测模块（100）包括：用于从样品（109）接收衍射电子的第一真空室; 连接到第一真空室的较大的第二真空室，以接收已经传送通过第一真空室的衍射电子; 设置在第二真空室中以检测衍射电子的二维电子检测器; 大致沿第一真空室的内表面设置的电位屏蔽件（106）和第二真空室的内表面; 用于将已经通过第一真空室传送的衍射电子束朝向二维电子检测器扩大的磁性透镜（105）; 和大致平面状的能量过滤器（103），以排斥能量低于碰撞在试样（109）上的电子的探针光束（203）的能量的电子。

8. 发明申请

WO2012133961A1 전기화학 및 라만 분광학적 모니터링, 스캐닝 및 피드백 자극이 가능한 겸용 탐침 审中-公开
标题翻译：电化学和拉曼光谱监测，扫描和反馈刺激的组合探针
公开(公告)号：WO2012133961A1
公开(公告)日：2012-10-04
申请号：PCT/KR2011/002130
申请日：2011-03-29
申请人： 서울대학교 산학협력단 , 정택동 , 김범진
发明人： 정택동 , 김범진
IPC分类号： G01Q70/16 , H01J37/26 , G01N21/62
CPC分类号： G01Q70/16 , B82Y15/00 , B82Y35/00 , G01N21/658 , G01Q30/02 , G01Q60/60 , H01J2237/2803
摘要： 본 발명에서는 전도도를 가진 라만 활성 골드 마이크로 쉘을 전도성 물질이 내벽에 코팅된 유리 마이크로 마이크로 모세관의 끝에 무전해 도금 방법을 이용하 여 붙여 전기화학 및 라만분광학이 가능한 탐침을 제작하였고 전기화학 및 라만분 광학적인 성능을 각각 그리고 동시에 확인하였다. 또한 본 발명은 탐침을 이동가능 하게 하는 시스템에 결합시킴으로써 다양한 촉매물질의 활성을 빠르게 탐색할 수 있을 뿐 아니라 표면에서 이동 및 흡착한 중간 생성물의 정보까지 제공할 수 있다.
摘要翻译：本发明涉及一种能够通过使用化学镀方法将具有导电性的拉曼活性金微小壳附着在其内导电材料的玻璃微毛细管上的电化学和拉曼光谱法制造的探针。另外，本发明可以分别确定电化学和拉曼光谱性质。此外，由于本发明将探针耦合到能够移动探针的系统，因此可以快速检测各种催化剂材料的活性，并且可以提供从催化剂表面移动和吸附的中间产物的信息。

9. 发明申请

WO2012099635A2 ELECTRON BEAM PROCESSING WITH CONDENSED ICE 审中-公开
标题翻译：电子束加工冷凝冰
公开(公告)号：WO2012099635A2
公开(公告)日：2012-07-26
申请号：PCT/US2011/057805
申请日：2011-10-26
申请人： PRESIDENT AND FELLOWS OF HARVARD COLLEGE , BRANTON, Daniel , HAN, Anpan , GOLOVCHENKO, Jene, A.
发明人： BRANTON, Daniel , HAN, Anpan , GOLOVCHENKO, Jene, A.
IPC分类号： H01L21/027
CPC分类号： G03F7/2059 , B81C1/00531 , B81C2201/0143 , B81C2201/0159 , B82Y10/00 , B82Y40/00 , G01N23/2251 , H01J37/3174 , H01J2237/004 , H01J2237/022 , H01J2237/2002 , H01J2237/2803 , H01J2237/2809 , H01J2237/31796 , H01L21/0331 , H01L22/12 , H01L51/0014 , H01L51/0048
摘要： In a method for imaging a solid state substrate, a vapor is condensed to an amorphous solid water condensate layer on a surface of a solid state substrate. Then an image of at least a portion of the substrate surface is produced by scanning an electron beam along the substrate surface through the water condensate layer. The water condensate layer integrity is maintained during electron beam scanning to prevent electron-beam contamination from reaching the substrate during electron beam scanning. Then one or more regions of the layer can be locally removed by directing an electron beam at the regions. A material layer can be deposited on top of the water condensate layer and any substrate surface exposed at the one or more regions, and the water condensate layer and regions of the material layer on top of the layer can be removed, leaving a patterned material layer on the substrate.
摘要翻译：在固态基板成像方法中，将蒸气冷凝成固态基板表面的无定形固体水凝结物层。然后通过沿着衬底表面扫描电子束通过水凝结层产生衬底表面的至少一部分的图像。在电子束扫描期间维持水凝结层的完整性，以防止电子束扫描期间电子束污染到达衬底。然后可以通过在该区域处引导电子束来局部地去除该层的一个或多个区域。材料层可以沉积在水冷凝物层的顶部和在一个或多个区域暴露的任何基底表面，并且水凝结物层和该层顶部上的材料层的区域可以被去除，留下图案化的材料层在基板上。

10. 发明申请

WO2005098895A9 METHOD AND SYSTEM FOR ULTRAFAST PHOTOELECTRON MICROSCOPE 审中-公开
标题翻译：超导光电显微镜的方法与系统
公开(公告)号：WO2005098895A9
公开(公告)日：2006-03-16
申请号：PCT/US2005011018
申请日：2005-04-01
申请人： CALIFORNIA INST OF TECHN , ZEWAIL AHMED , LOBASTOV VLADIMIR
发明人： ZEWAIL AHMED , LOBASTOV VLADIMIR
IPC分类号： H01J37/073 , H01J37/26
CPC分类号： H01J37/26 , H01J37/065 , H01J37/073 , H01J37/24 , H01J37/243 , H01J37/265 , H01J2237/0432 , H01J2237/06333 , H01J2237/06341 , H01J2237/206 , H01J2237/2065 , H01J2237/24585 , H01J2237/2482 , H01J2237/2803 , H01J2237/2809 , H01J2237/2813 , H01J2237/2855
摘要： An ultrafast system (and methods) for characterizing one or more samples. The system includes a stage assembly, which has a sample to be characterized. The system has a laser source that is capable of emitting an optical pulse of less than 1 ps in duration. The system has a cathode coupled to the laser source. In a specific embodiment, the cathode is capable of emitting an electron pulse less than 1 ps in duration. The system has an electron lens assembly adapted to focus the electron pulse onto the sample disposed on the stage. The system has a detector adapted to capture one or more electrons passing through the sample. The one or more electrons passing through the sample is representative of the structure of the sample. The detector provides a signal (e.g., data signal) associated with the one or more electrons passing through the sample that represents the structure of the sample. The system has a processor coupled to the detector. The processor is adapted to process the data signal associated with the one or more electrons passing through the sample to output information associated with the structure of the sample. The system has an output device coupled to the processor. The output device is adapted to output the information associated with the structure of the sample.
摘要翻译：用于表征一个或多个样品的超快速系统（和方法）。该系统包括具有要表征的样品的载物台组件。该系统具有能够发射持续时间小于1ps的光脉冲的激光源。该系统具有耦合到激光源的阴极。在具体实施例中，阴极能够发射持续时间小于1ps的电子脉冲。该系统具有适于将电子脉冲聚焦到设置在载物台上的样品上的电子透镜组件。该系统具有适于捕获穿过样品的一个或多个电子的检测器。通过样品的一个或多个电子代表样品的结构。检测器提供与通过样品的一个或多个电子相关联的信号（例如，数据信号），其表示样品的结构。该系统具有耦合到检测器的处理器。处理器适于处理与通过样本的一个或多个电子相关联的数据信号，以输出与样本的结构相关联的信息。该系统具有耦合到处理器的输出设备。输出设备适于输出与样本结构相关联的信息。

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