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1. 发明申请

WO2008112713A1 NANOLITHOGRAPHY WITH USE OF VIEWPORTS 审中-公开
标题翻译：使用视图的纳米图
公开(公告)号：WO2008112713A1
公开(公告)日：2008-09-18
申请号：PCT/US2008/056555
申请日：2008-03-11
申请人： NANOINK, INC. , HAAHEIM, Jason , FRAGALA, Joseph, S. , SHILE, Raymond, R.
发明人： HAAHEIM, Jason , FRAGALA, Joseph, S. , SHILE, Raymond, R.
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , G01Q70/06 , G01Q80/00
摘要： Two dimensional arrays of cantilevers for use in transferring inks from the cantilever tip to substrates are improved with use of viewports to view the cantilevers from a far side. This improves the leveling behavior when large numbers of cantilevers are present. It also provides for better laser access. Bioarrays and combinatorial applications are particularly important. Massively parallel direct write printing with more than 55,000 cantilever tips can be achieved.
摘要翻译：通过使用视口来从远侧观察悬臂，改进了用于将墨水从悬臂尖端转移到基板的二维悬臂阵列。当存在大量的悬臂时，这改善了流平行为。它还提供更好的激光接入。生物芯片和组合应用尤为重要。可以实现具有超过55,000个悬臂尖端的大规模并行直写写入。

2. 发明申请

WO2007126689A1 ARTICLE FOR PARALLEL LITHOGRAPHY WITH TWO-DIMENSIONAL PEN ARRAYS 审中-公开
标题翻译：具有两维笔阵列的平行平移的文章
公开(公告)号：WO2007126689A1
公开(公告)日：2007-11-08
申请号：PCT/US2007/007186
申请日：2007-03-23
申请人： NORTHWESTERN UNIVERSITY , NANOINK, INC. , MIRKIN, Chad, A. , SALAITA, Khalid , WANG, Yuhuang , FRAGALA, Joseph, S. , SHILE, Raymond, R.
发明人： MIRKIN, Chad, A. , SALAITA, Khalid , WANG, Yuhuang , FRAGALA, Joseph, S. , SHILE, Raymond, R.
IPC分类号： G03F7/00 , G03F7/20
CPC分类号： G03F7/0002
摘要： Massive parallel printing of structures and nanostructures at high speed with high resolution and high quality using two dimensional arrays comprising cantilevers and tip-based transfer of material to a surface. The array is designed so only tips touch the surface. This can be accomplished by long tips and bent cantilevers and alignment. An article comprising: a two-dimensional array of a plurality of cantilevers, wherein the array comprises a plurality of base rows, each base row comprising a plurality of cantilevers, wherein each of the cantilevers comprise tips at the cantilever end away from the base, wherein the number of cantilevers is greater than 250, and wherein the tips have an apex height relative to the cantilever of at least four microns, and a support for the array. Combinatorial arrays and bioarrays can be prepared. The arrays can be manufactured by micromachining methods.
摘要翻译：以高分辨率和高质量高结构和纳米结构的大规模平行印刷，使用二维阵列，其包括悬臂和基于尖端的材料转移到表面。该阵列设计为只有尖端触摸表面。这可以通过长尖端和弯曲的悬臂和对准来实现。一种制品，包括：多个悬臂的二维阵列，其中所述阵列包括多个基列，每个基列包括多个悬臂，其中每个所述悬臂包括远离所述基座的所述悬臂端处的尖端，其中所述悬臂的数量大于250，并且其中所述尖端具有相对于至少四微米的所述悬臂的顶点高度，以及所述阵列的支撑。可以制备组合阵列和生物阵列。阵列可以通过微加工方法制造。

3. 发明申请

WO2011009094A2 LEVELING DEVICES AND METHODS 审中-公开
标题翻译：水平设备和方法
公开(公告)号：WO2011009094A2
公开(公告)日：2011-01-20
申请号：PCT/US2010/042352
申请日：2010-07-16
申请人： NANOINK, INC. , BUSSAN, John, Edward , ROZHOK, Sergey, V. , VAL-KHVALABOV, Vadim , FRAGALA, Joseph, S. , HAAHEIM, Jason, R. , NELSON, Michael, R. , SOLHEIM, Edward, R. , VAKIL, Javad, M.
发明人： BUSSAN, John, Edward , ROZHOK, Sergey, V. , VAL-KHVALABOV, Vadim , FRAGALA, Joseph, S. , HAAHEIM, Jason, R. , NELSON, Michael, R. , SOLHEIM, Edward, R. , VAKIL, Javad, M.
IPC分类号： G03F7/00 , G03F9/00 , B82B3/00
CPC分类号： G03F7/0002 , G01Q80/00 , G03F9/7034 , G03F9/7053
摘要： Devices for leveling an object for patterning a substrate surface, including an array of scanning probe tips, are provided. A device may include a support structure adapted to mount an object, the object having a plurality of protrusions adapted to form a pattern on a surface of a substrate upon contact of the object to the surface; and at least one flexible joint assembly mounted to the support structure and adapted to allow the object to achieve a parallel orientation with respect to the surface upon contact of the object to the surface. Also provided are apparatuses and kits incorporating the devices and methods of making and using the devices and apparatuses.
摘要翻译：提供了用于调整用于图案化衬底表面的对象的设备，包括扫描探针尖端的阵列。装置可以包括适于安装物体的支撑结构，所述物体具有适于在物体与表面接触时在基底的表面上形成图案的多个突起; 以及至少一个柔性接头组件，其安装到所述支撑结构并且适于允许所述物体在所述物体与所述表面接触时相对于所述表面实现平行取向。还提供了结合设备的装置和套件以及制造和使用设备和装置的方法。

4. 发明申请

WO2009140439A1 NANOMANUFACTURING DEVICES AND METHODS 审中-公开
标题翻译：纳米制备装置和方法
公开(公告)号：WO2009140439A1
公开(公告)日：2009-11-19
申请号：PCT/US2009/043862
申请日：2009-05-13
申请人： NANOINK, INC. , BUSSAN, John, Edward , NELSON, Michael, R. , FRAGALA, Joseph, S. , HENNING, Albert, K. , RENDLEN, Jeffrey, R.
发明人： BUSSAN, John, Edward , NELSON, Michael, R. , FRAGALA, Joseph, S. , HENNING, Albert, K. , RENDLEN, Jeffrey, R.
IPC分类号： G01N13/10 , G03F7/00 , G12B21/22
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： Devices for performing nanofabrication are provided which provide small volume reaction space and high reaction versatility. A device may include a reaction chamber adapted for nanoscale modification of a substrate and vacuum conditions; a scanning probe tip assembly enclosed within the reaction chamber; a first port coupled to the reaction chamber for delivering a gas; a second port coupled to the reaction chamber for applying a vacuum; and a substrate assembly insertedly mounted to the reaction chamber. The reaction chamber may include a body having one or more flexible walls and one or more supports to prevent the reaction chamber from collapsing under a vacuum. The device may further include an electrical conduit for coupling the tips of the scanning probe tip assembly to electrical components outside the reaction chamber. Also provided are apparatuses incorporating the devices and methods of using the devices and apparatuses.
摘要翻译：提供用于进行纳米制造的装置，其提供小体积的反应空间和高反应多功能性。装置可以包括适于对基底进行纳米尺寸改性的反应室和真空条件; 包围在反应室内的扫描探针头组件; 耦合到所述反应室的用于输送气体的第一端口; 耦合到所述反应室的第二端口，用于施加真空; 以及插入安装到反应室的基板组件。反应室可以包括具有一个或多个柔性壁和一个或多个支撑物的主体，以防止反应室在真空下塌缩。该装置还可以包括用于将扫描探针头组件的尖端耦合到反应室外部的电气部件的电导管。还提供了结合装置的装置和使用装置和装置的方法。

5. 发明申请

WO2009140440A1 DUAL-TIP CANTILEVER 审中-公开
标题翻译：双线CANTILEVER
公开(公告)号：WO2009140440A1
公开(公告)日：2009-11-19
申请号：PCT/US2009/043863
申请日：2009-05-13
申请人： NANOINK, INC. , HENNING, Albert, K. , FRAGALA, Joseph, S. , SHILE, Raymond, Roger
发明人： HENNING, Albert, K. , FRAGALA, Joseph, S. , SHILE, Raymond, Roger
IPC分类号： G03F7/00 , G12B21/02 , G12B21/08
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least two tips is described, where the tips have substantially the same tip heights. Methods for making and using such a device are also provided. The height of one tip off of the surface can be more easily determined when the two tips have equal height.
摘要翻译：描述了包括至少一个包括至少两个尖端的悬臂的装置，其中尖端具有基本上相同的尖端高度。还提供了制造和使用这种装置的方法。当两个尖端具有相等的高度时，可以更容易地确定一个尖端离开表面的高度。

6. 发明申请

WO2010011398A2 SCANNING PROBE EPITAXY 审中-公开
标题翻译：扫描探针外延
公开(公告)号：WO2010011398A2
公开(公告)日：2010-01-28
申请号：PCT/US2009/043866
申请日：2009-05-13
申请人： NORTHWESTERN UNIVERSITY , NANOINK, INC. , MIRKIN, Chad, A. , LIU, Chang , WANG, Yuhuang , BRAUNSCHWEIG, Adam, B. , LIAO, Xing , GIAM, Louise, R. , LEE, Byung, Yang , FRAGALA, Joseph, S. , HENNING, Albert, K.
发明人： MIRKIN, Chad, A. , LIU, Chang , WANG, Yuhuang , BRAUNSCHWEIG, Adam, B. , LIAO, Xing , GIAM, Louise, R. , LEE, Byung, Yang , FRAGALA, Joseph, S. , HENNING, Albert, K.
IPC分类号： G01Q60/00
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A dual tip probe for scanning probe epitaxy is disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The dual tip probe further includes a rib disposed on the cantilever arm between the first and second tips. The dual tip probe can also include a strain gauge disposed along the length of the cantilever arm.
摘要翻译：公开了一种用于扫描探针外延的双端探针。双头探针包括设置在悬臂上的第一和第二尖端。第一和第二尖端可以分别是阅读器尖端和合成尖端。双头探针还包括设置在第一和第二尖端之间的悬臂上的肋。双头探针还可以包括沿悬臂长度设置的应变计。

7. 发明申请

WO2009140441A2 HEIGHT SENSING CANTILEVER 审中-公开
标题翻译：高度传感器
公开(公告)号：WO2009140441A2
公开(公告)日：2009-11-19
申请号：PCT/US2009/043865
申请日：2009-05-13
申请人： NANOINK, INC. , FRAGALA, Joseph, S. , HENNING, Albert, K. , SHILE, Raymond, Roger
发明人： FRAGALA, Joseph, S. , HENNING, Albert, K. , SHILE, Raymond, Roger
IPC分类号： G12B21/08 , G01N13/16
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
摘要翻译：描述了包括至少一个包括至少一个压敏电阻的悬臂的装置，其中悬臂包括氮化硅或碳化硅，并且压电电阻包括掺杂的硅。还提供了制造和使用这种装置的方法。

8. 发明申请

WO2011130446A1 IMPROVED CANTILEVERS FOR DEPOSITION 审中-公开
标题翻译：改进的沉淀物
公开(公告)号：WO2011130446A1
公开(公告)日：2011-10-20
申请号：PCT/US2011/032369
申请日：2011-04-13
申请人： NANOINK, INC. , FRAGALA, Joseph, S. , SHILE, R., Roger , ROZHOK, Sergey, V.
发明人： FRAGALA, Joseph, S. , SHILE, R., Roger , ROZHOK, Sergey, V.
IPC分类号： G03F7/00 , B82B3/00
CPC分类号： G03F7/0002 , B81B2203/0118 , B81C1/00031 , B81C99/0025 , B82B3/00 , B82Y10/00 , B82Y40/00 , G03F7/2049
摘要： Cantilever design for patterning from a cantilever tip can be improved with, for example, a recessed area surrounding the cantilever tip. A device for printing nanoscopic and microscopic patterns includes at least one cantilever having a front surface, a first side edge, a second side edge, and a first end which is a free end and a second end which is a non-free end. The front surface includes at least one first sidewall disposed at the first cantilever side edge and at least one second sidewall disposed at the second cantilever side edge opposing the first cantilever side edge, at least one channel, adapted to hold a fluid, disposed between the first and second sidewalls, wherein the channel, the first sidewall, and the second sidewall extend toward the cantilever free end but do not reach the free end, and a base region having a boundary defined by the first edge, the second edge, and the cantilever free end and also the first sidewall, second sidewall, and the channel, wherein the base region comprises a tip extending away from the cantilever front surface. Improved deposition can result. Fluidic inks comprising biomolecules can be patterned successfully.
摘要翻译：例如可以通过围绕悬臂尖端的凹陷区域来改善从悬臂尖端进行图案化的悬臂设计。用于印刷纳米尺度和微观图案的装置包括至少一个具有前表面，第一侧边缘，第二侧边缘以及作为自由端的第一端和作为非自由端的第二端的悬臂。前表面包括设置在第一悬臂侧边缘处的至少一个第一侧壁和设置在与第一悬臂侧边缘相对的第二悬臂侧边缘处的至少一个第二侧壁，至少一个适于保持流体的通道，第一和第二侧壁，其中，所述通道，所述第一侧壁和所述第二侧壁朝向所述悬臂自由端延伸，但是不到达所述自由端，并且具有由所述第一边缘，所述第二边缘和所述第二边缘限定的边界的基底区域悬臂自由端以及第一侧壁，第二侧壁和通道，其中基部区域包括远离悬臂前表面延伸的尖端。可以改善沉积。可以成功地构图包含生物分子的流体油墨。

9. 发明申请

WO2008141048A1 COMPACT NANOFABRICATION APPARATUS 审中-公开
标题翻译：紧凑的纳米装置
公开(公告)号：WO2008141048A1
公开(公告)日：2008-11-20
申请号：PCT/US2008/062959
申请日：2008-05-07
申请人： NANOINK, INC. , ROZHOK, Sergey, V. , NELSON, Michael , AMRO, Nabil, A. , FRAGALA, Joseph, S. , SHILE, Raymond, Roger , VANMERKESTYN, Dirk, N. , BUSSAN, John, Edward
发明人： ROZHOK, Sergey, V. , NELSON, Michael , AMRO, Nabil, A. , FRAGALA, Joseph, S. , SHILE, Raymond, Roger , VANMERKESTYN, Dirk, N. , BUSSAN, John, Edward
IPC分类号： G03F7/00 , G03F7/20
CPC分类号： G03F7/0002 , G01Q80/00 , G03F7/70383 , G03F9/00
摘要： An apparatus for use in fabricating structures and depositing materials from tips to surfaces for patterning in direct-write mode, providing ability to travel macroscopic distances and yet provide for nanoscale patterning. Useful in small scale fabrication and nanolithography. The instrument can be compact and used on a laboratory bench or desktop. An apparatus comprising: at least one multi-axis assembly comprising a plurality of nanopositioning stages, at least one pen assembly, wherein the pen assembly and the multi-axis assembly are adapted for delivery of material from the pen assembly to a substrate which is positioned by the multi-axis assembly, at least one viewing assembly, at least one controller. Nanopositioning by piezoelectric methods and devices and motors is particularly useful. The apparatus can include integrated environmental chambers and housings, as well as ink reservoirs for materials to be delivered. The viewing assembly can be a microscope with a long working distance. Particularly useful for fabrication of bioarrays or microarrays. The multi-axis assembly can be a five-axis assembly. Software can facilitate efficient usage.
摘要翻译：一种用于制造结构并从尖端到表面沉积材料的装置，用于以直写式模式进行图案化，提供行进宏观距离并提供纳米尺度图案化的能力。适用于小规模制造和纳米光刻。该仪器可以紧凑，并在实验台或台式机上使用。一种装置，包括：至少一个多轴组件，其包括多个纳米定位阶段，至少一个笔组件，其中所述笔组件和所述多轴组件适于将材料从所述笔组件传送到定位的衬底通过多轴组件，至少一个观察组件，至少一个控制器。通过压电方法和装置和电动机的定位是特别有用的。该设备可以包括集成的环境室和壳体，以及用于要输送的材料的油墨储存器。观察组件可以是具有长工作距离的显微镜。特别适用于制造生物芯片或微阵列。多轴组件可以是五轴组件。软件可以促进有效的使用。

10. 发明申请

WO2009140442A2 HEATED CANTILEVER 审中-公开
标题翻译：加热CANTILEVER
公开(公告)号：WO2009140442A2
公开(公告)日：2009-11-19
申请号：PCT/US2009/043867
申请日：2009-05-13
申请人： HANOINK, INC. , FRAGALA, Joseph, S. , HENNING, Albert, K. , SHILE, Raymond, Roger
发明人： FRAGALA, Joseph, S. , HENNING, Albert, K. , SHILE, Raymond, Roger
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device is provided comprising at least one cantilever comprising at least one tip and at least one heating element. Methods for making and using such a device are also provided.
摘要翻译：提供了一种装置，其包括至少一个包括至少一个尖端和至少一个加热元件的悬臂。还提供了制造和使用这种装置的方法。

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