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1. 发明申请

WO2009140442A2 HEATED CANTILEVER 审中-公开
标题翻译：加热CANTILEVER
公开(公告)号：WO2009140442A2
公开(公告)日：2009-11-19
申请号：PCT/US2009/043867
申请日：2009-05-13
申请人： HANOINK, INC. , FRAGALA, Joseph, S. , HENNING, Albert, K. , SHILE, Raymond, Roger
发明人： FRAGALA, Joseph, S. , HENNING, Albert, K. , SHILE, Raymond, Roger
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device is provided comprising at least one cantilever comprising at least one tip and at least one heating element. Methods for making and using such a device are also provided.
摘要翻译：提供了一种装置，其包括至少一个包括至少一个尖端和至少一个加热元件的悬臂。还提供了制造和使用这种装置的方法。

2. 发明申请

WO2010011398A3 SCANNING PROBE EPITAXY 审中-公开
标题翻译：扫描探头外观
公开(公告)号：WO2010011398A3
公开(公告)日：2010-06-03
申请号：PCT/US2009043866
申请日：2009-05-13
申请人： UNIV NORTHWESTERN , NANOINK INC , MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG , FRAGALA JOSEPH S , HENNING ALBERT K
发明人： MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG , FRAGALA JOSEPH S , HENNING ALBERT K
IPC分类号： G03F7/00 , G01Q70/10
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A dual tip probe for scanning probe epitaxy is disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The dual tip probe further includes a rib disposed on the cantilever arm between the first and second tips. The dual tip probe can also include a strain gauge disposed along the length of the cantilever arm.
摘要翻译：公开了一种用于扫描探针外延的双尖端探针。双尖头探针包括设置在悬臂上的第一和第二尖端。第一和第二提示可以分别是读取器尖端和合成尖端。双尖头探针还包括设置在第一和第二尖端之间的悬臂上的肋条。双尖头探针还可以包括沿着悬臂的长度设置的应变仪。

3. 发明申请

WO2009140439A1 NANOMANUFACTURING DEVICES AND METHODS 审中-公开
标题翻译：纳米制备装置和方法
公开(公告)号：WO2009140439A1
公开(公告)日：2009-11-19
申请号：PCT/US2009/043862
申请日：2009-05-13
申请人： NANOINK, INC. , BUSSAN, John, Edward , NELSON, Michael, R. , FRAGALA, Joseph, S. , HENNING, Albert, K. , RENDLEN, Jeffrey, R.
发明人： BUSSAN, John, Edward , NELSON, Michael, R. , FRAGALA, Joseph, S. , HENNING, Albert, K. , RENDLEN, Jeffrey, R.
IPC分类号： G01N13/10 , G03F7/00 , G12B21/22
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： Devices for performing nanofabrication are provided which provide small volume reaction space and high reaction versatility. A device may include a reaction chamber adapted for nanoscale modification of a substrate and vacuum conditions; a scanning probe tip assembly enclosed within the reaction chamber; a first port coupled to the reaction chamber for delivering a gas; a second port coupled to the reaction chamber for applying a vacuum; and a substrate assembly insertedly mounted to the reaction chamber. The reaction chamber may include a body having one or more flexible walls and one or more supports to prevent the reaction chamber from collapsing under a vacuum. The device may further include an electrical conduit for coupling the tips of the scanning probe tip assembly to electrical components outside the reaction chamber. Also provided are apparatuses incorporating the devices and methods of using the devices and apparatuses.
摘要翻译：提供用于进行纳米制造的装置，其提供小体积的反应空间和高反应多功能性。装置可以包括适于对基底进行纳米尺寸改性的反应室和真空条件; 包围在反应室内的扫描探针头组件; 耦合到所述反应室的用于输送气体的第一端口; 耦合到所述反应室的第二端口，用于施加真空; 以及插入安装到反应室的基板组件。反应室可以包括具有一个或多个柔性壁和一个或多个支撑物的主体，以防止反应室在真空下塌缩。该装置还可以包括用于将扫描探针头组件的尖端耦合到反应室外部的电气部件的电导管。还提供了结合装置的装置和使用装置和装置的方法。

4. 发明申请

WO2012158838A3 HIGH DENSITY, HARD TIP ARRAYS 审中-公开
公开(公告)号：WO2012158838A3
公开(公告)日：2012-11-22
申请号：PCT/US2012/038206
申请日：2012-05-16
申请人： NANOINK, INC. , HENNING, Albert K. , SHILE, Raymond Roger , FRAGALA, Joseph S. , AMRO, Nabil A. , HAAHEIM, Jason R.
发明人： HENNING, Albert K. , SHILE, Raymond Roger , FRAGALA, Joseph S. , AMRO, Nabil A. , HAAHEIM, Jason R.
IPC分类号： B81C99/00 , G03F7/00
摘要： Improved high density, hard tip arrays for use in patterning including an article comprises a handle chip; and a silicon nitride membrane bonded to at least a portion of the handle chip. The silicon nitride membrane comprises an array of a plurality of silicon nitride tips extending directly from a surface of the silicon nitride membrane. A method comprises preparing a silicon nitride membrane comprising an array of a plurality of silicon nitride tips extending directly from a surface of the silicon nitride membrane; preparing a handle wafer; and bonding the silicon nitride membrane to at least a portion of the handle wafer to form an bonded tip array. Another article comprises an elastomeric backing member; and an array of tips disposed on the elastomeric backing member. The tips of the array comprise a refractory material. Another method comprises providing at least one mold for a tip array comprising a plurality of mold regions for tips; filling or coating the mold regions for tips with a refractory material, to form an array of tips comprising a refractory material; and disposing a liquid elastomer precursor material in contact with the refractory material of the tips.

5. 发明申请

WO2012158838A2 HIGH DENSITY, HARD TIP ARRAYS 审中-公开
标题翻译：高密度，硬尖端阵列
公开(公告)号：WO2012158838A2
公开(公告)日：2012-11-22
申请号：PCT/US2012038206
申请日：2012-05-16
申请人： NANOINK INC , HENNING ALBERT K , SHILE RAYMOND ROGER , FRAGALA JOSEPH S , AMRO NABIL A , HAAHEIM JASON R
发明人： HENNING ALBERT K , SHILE RAYMOND ROGER , FRAGALA JOSEPH S , AMRO NABIL A , HAAHEIM JASON R
IPC分类号： B81C99/00
CPC分类号： B81C99/009 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10T156/10 , Y10T156/1052
摘要： Improved high density, hard tip arrays for use in patterning including an article comprises a handle chip; and a silicon nitride membrane bonded to at least a portion of the handle chip. The silicon nitride membrane comprises an array of a plurality of silicon nitride tips extending directly from a surface of the silicon nitride membrane. A method comprises preparing a silicon nitride membrane comprising an array of a plurality of silicon nitride tips extending directly from a surface of the silicon nitride membrane; preparing a handle wafer; and bonding the silicon nitride membrane to at least a portion of the handle wafer to form an bonded tip array. Another article comprises an elastomeric backing member; and an array of tips disposed on the elastomeric backing member. The tips of the array comprise a refractory material. Another method comprises providing at least one mold for a tip array comprising a plurality of mold regions for tips; filling or coating the mold regions for tips with a refractory material, to form an array of tips comprising a refractory material; and disposing a liquid elastomer precursor material in contact with the refractory material of the tips.
摘要翻译：用于包括制品的图案化中的改进的高密度硬尖头阵列包括手柄芯片; 以及结合到手柄芯片的至少一部分的氮化硅膜。氮化硅膜包括直接从氮化硅膜的表面延伸的多个氮化硅尖端的阵列。一种方法包括制备氮化硅膜，其包括直接从氮化硅膜的表面延伸的多个氮化硅尖端的阵列; 准备一个处理晶圆; 以及将所述氮化硅膜结合到所述处理晶片的至少一部分以形成接合的尖端阵列。另一制品包括弹性体背衬构件; 以及布置在弹性体背衬构件上的尖端阵列。阵列的尖端包括耐火材料。另一种方法包括提供至少一个用于尖端阵列的模具，其包括用于尖端的多个模具区域; 用耐火材料填充或涂覆用于尖端的模具区域，以形成包括耐火材料的尖端阵列; 并且将液体弹性体前体材料设置成与尖端的耐火材料接触。

6. 发明申请

WO2010011398A4 SCANNING PROBE EPITAXY 审中-公开
标题翻译：扫描探针外延
公开(公告)号：WO2010011398A4
公开(公告)日：2010-07-29
申请号：PCT/US2009043866
申请日：2009-05-13
申请人： UNIV NORTHWESTERN , NANOINK INC , MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG , FRAGALA JOSEPH S , HENNING ALBERT K
发明人： MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG , FRAGALA JOSEPH S , HENNING ALBERT K
IPC分类号： G03F7/00 , G01Q70/10
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A dual tip probe for scanning probe epitaxy is disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The dual tip probe further includes a rib disposed on the cantilever arm between the first and second tips. The dual tip probe can also include a strain gauge disposed along the length of the cantilever arm.
摘要翻译：公开了一种用于扫描探针外延的双尖探针。双头探针包括设置在悬臂上的第一和第二尖端。第一和第二尖端可以分别是阅读器尖端和合成尖端。双头探针还包括设置在第一和第二尖端之间的悬臂上的肋。双头探针还可以包括沿着悬臂长度布置的应变计。

7. 发明申请

WO2009140440A1 DUAL-TIP CANTILEVER 审中-公开
标题翻译：双线CANTILEVER
公开(公告)号：WO2009140440A1
公开(公告)日：2009-11-19
申请号：PCT/US2009/043863
申请日：2009-05-13
申请人： NANOINK, INC. , HENNING, Albert, K. , FRAGALA, Joseph, S. , SHILE, Raymond, Roger
发明人： HENNING, Albert, K. , FRAGALA, Joseph, S. , SHILE, Raymond, Roger
IPC分类号： G03F7/00 , G12B21/02 , G12B21/08
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least two tips is described, where the tips have substantially the same tip heights. Methods for making and using such a device are also provided. The height of one tip off of the surface can be more easily determined when the two tips have equal height.
摘要翻译：描述了包括至少一个包括至少两个尖端的悬臂的装置，其中尖端具有基本上相同的尖端高度。还提供了制造和使用这种装置的方法。当两个尖端具有相等的高度时，可以更容易地确定一个尖端离开表面的高度。

8. 发明申请

WO2010011398A2 SCANNING PROBE EPITAXY 审中-公开
标题翻译：扫描探针外延
公开(公告)号：WO2010011398A2
公开(公告)日：2010-01-28
申请号：PCT/US2009/043866
申请日：2009-05-13
申请人： NORTHWESTERN UNIVERSITY , NANOINK, INC. , MIRKIN, Chad, A. , LIU, Chang , WANG, Yuhuang , BRAUNSCHWEIG, Adam, B. , LIAO, Xing , GIAM, Louise, R. , LEE, Byung, Yang , FRAGALA, Joseph, S. , HENNING, Albert, K.
发明人： MIRKIN, Chad, A. , LIU, Chang , WANG, Yuhuang , BRAUNSCHWEIG, Adam, B. , LIAO, Xing , GIAM, Louise, R. , LEE, Byung, Yang , FRAGALA, Joseph, S. , HENNING, Albert, K.
IPC分类号： G01Q60/00
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A dual tip probe for scanning probe epitaxy is disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The dual tip probe further includes a rib disposed on the cantilever arm between the first and second tips. The dual tip probe can also include a strain gauge disposed along the length of the cantilever arm.
摘要翻译：公开了一种用于扫描探针外延的双端探针。双头探针包括设置在悬臂上的第一和第二尖端。第一和第二尖端可以分别是阅读器尖端和合成尖端。双头探针还包括设置在第一和第二尖端之间的悬臂上的肋。双头探针还可以包括沿悬臂长度设置的应变计。

9. 发明申请

WO2009140441A3 PIEZORESISTOR HEIGHT SENSING CANTILEVER 审中-公开
公开(公告)号：WO2009140441A3
公开(公告)日：2010-01-28
申请号：PCT/US2009043865
申请日：2009-05-13
申请人： NANOINK INC , FRAGALA JOSEPH S , HENNING ALBERT K , SHILE RAYMOND ROGER
发明人： FRAGALA JOSEPH S , HENNING ALBERT K , SHILE RAYMOND ROGER
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
摘要翻译：描述了包括至少一个包括至少一个压敏电阻的悬臂的装置，其中悬臂包括氮化硅或碳化硅，并且压电电阻包括掺杂的硅。还提供了制造和使用这种装置的方法。

10. 发明申请

WO2009140442A3 HEATED CANTILEVER 审中-公开
标题翻译：加热CANTILEVER
公开(公告)号：WO2009140442A3
公开(公告)日：2010-01-14
申请号：PCT/US2009043867
申请日：2009-05-13
申请人： HANOINK INC , FRAGALA JOSEPH S , HENNING ALBERT K , SHILE RAYMOND ROGER
发明人： FRAGALA JOSEPH S , HENNING ALBERT K , SHILE RAYMOND ROGER
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device is provided comprising at least one cantilever comprising at least one tip and at least one heating element. Methods for making and using such a device are also provided.
摘要翻译：提供了一种装置，其包括至少一个包括至少一个尖端和至少一个加热元件的悬臂。还提供了制造和使用这种装置的方法。

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