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1. 发明申请

WO2011071753A2 GENERATION OF COMBINATORIAL PATTERNS BY DELIBERATE TILTING OF A POLYMER-PEN ARRAY 审中-公开
标题翻译：通过聚酯笔阵列的倾斜倾斜产生组合图案
公开(公告)号：WO2011071753A2
公开(公告)日：2011-06-16
申请号：PCT/US2010/058773
申请日：2010-12-02
申请人： NORTHWESTERN UNIVERSITY , MIRKIN, Chad, A. , BRAUNSCHWEIG, Adam, B. , CHAI, Jinan , EICHELSDOERFER, Dan, J. , GIAM, Louise, R. , LIAO, Xing , WONG, Lu, Shin
发明人： MIRKIN, Chad, A. , BRAUNSCHWEIG, Adam, B. , CHAI, Jinan , EICHELSDOERFER, Dan, J. , GIAM, Louise, R. , LIAO, Xing , WONG, Lu, Shin
IPC分类号： G03F7/00 , B29C33/38 , B41M1/26
CPC分类号： G03F7/0002 , B01J2219/00387 , B82Y10/00 , B82Y40/00
摘要： The disclosure relates to a method of forming a pattern having pattern elements with a plurality of sizes on a substrate surface with a tilted pen array that includes choosing a tilt geometry for a pen array with respect to a substrate, inducing the tilt geometry between the pen array and the substrate surface, and forming a pattern having pattern elements on the substrate surface with the titled pen array, whereby the size of the formed pattern elements varies across the substrate surface along the tilted axis or axes. For example, the tilt geometry is in reference to the substrate surface and comprises a first angle with respect to a first axis of the substrate and a second angle with respect to a second axis of the substrate, the second axis being perpendicular to the first axis, and at least one of the first and second angles being non-zero.
摘要翻译：本公开涉及一种在衬底表面上形成具有多个尺寸的图案元件的图案的方法，该倾斜笔阵列包括相对于衬底选择笔阵列的倾斜几何形状，从而引起笔之间的倾斜几何形状阵列和衬底表面，并且用标称笔阵列在衬底表面上形成具有图形元素的图案，由此形成的图案元素的尺寸沿着倾斜的轴线或轴线跨越衬底表面变化。例如，倾斜几何形状参考衬底表面并且包括相对于衬底的第一轴线的第一角度和相对于衬底的第二轴线的第二角度，第二轴线垂直于第一轴线并且第一和第二角度中的至少一个是非零。

2. 发明申请

WO2010011398A4 SCANNING PROBE EPITAXY 审中-公开
标题翻译：扫描探针外延
公开(公告)号：WO2010011398A4
公开(公告)日：2010-07-29
申请号：PCT/US2009043866
申请日：2009-05-13
申请人： UNIV NORTHWESTERN , NANOINK INC , MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG , FRAGALA JOSEPH S , HENNING ALBERT K
发明人： MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG , FRAGALA JOSEPH S , HENNING ALBERT K
IPC分类号： G03F7/00 , G01Q70/10
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A dual tip probe for scanning probe epitaxy is disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The dual tip probe further includes a rib disposed on the cantilever arm between the first and second tips. The dual tip probe can also include a strain gauge disposed along the length of the cantilever arm.
摘要翻译：公开了一种用于扫描探针外延的双尖探针。双头探针包括设置在悬臂上的第一和第二尖端。第一和第二尖端可以分别是阅读器尖端和合成尖端。双头探针还包括设置在第一和第二尖端之间的悬臂上的肋。双头探针还可以包括沿着悬臂长度布置的应变计。

3. 发明申请

WO2010011397A4 SCANNING PROBE EPITAXY 审中-公开
公开(公告)号：WO2010011397A4
公开(公告)日：2010-01-28
申请号：PCT/US2009/043864
申请日：2009-05-13
申请人： NORTHWESTERN UNIVERSITY , MIRKIN, Chad, A. , LIU, Chang , WANG, Yuhuang , BRAUNSCHWEIG, Adam, B. , LIAO, Xing , GIAM, Louise, R. , LEE, Byung, Yang
发明人： MIRKIN, Chad, A. , LIU, Chang , WANG, Yuhuang , BRAUNSCHWEIG, Adam, B. , LIAO, Xing , GIAM, Louise, R. , LEE, Byung, Yang
IPC分类号： G01Q70/10 , G03F7/00
摘要： A dual tip probe for scanning probe epitaxy and a method of forming the dual tip probe are disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The first tip can remain in contact with a substrate during writing and provide in situ characterization of the substrate and or structures written, while the second tip can perform in non-contact mode to write and synthesis nanostructures. This feature can allow the dual tip probe to detect errors in a printed pattern using the first tip and correct the errors using the second tip.

4. 发明申请

WO2010011397A2 SCANNING PROBE EPITAXY 审中-公开
标题翻译：扫描探针外延
公开(公告)号：WO2010011397A2
公开(公告)日：2010-01-28
申请号：PCT/US2009043864
申请日：2009-05-13
申请人： UNIV NORTHWESTERN , MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG
发明人： MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG
IPC分类号： G01Q60/00
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A dual tip probe for scanning probe epitaxy and a method of forming the dual tip probe are disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The first tip can remain in contact with a substrate during writing and provide in situ characterization of the substrate and or structures written, while the second tip can perform in non-contact mode to write and synthesis nanostructures. This feature can allow the dual tip probe to detect errors in a printed pattern using the first tip and correct the errors using the second tip.
摘要翻译：公开了一种用于扫描探针外延的双探针探针和一种形成双探针探针的方法。双头探针包括设置在悬臂上的第一和第二尖端。第一和第二尖端可以分别是阅读器尖端和合成尖端。第一尖端可以在写入期间保持与基板接触并提供所写入的基板和/或结构的原位表征，而第二尖端可以以非接触模式执行以写入和合成纳米结构。此功能可以使双探针探针使用第一个探针检测印刷图案中的错误，并使用第二个探针纠正错误。

5. 发明申请

WO2011103841A3 MICROSTRIP ANTENNA 审中-公开
标题翻译： MICROSTRIP天线
公开(公告)号：WO2011103841A3
公开(公告)日：2012-04-05
申请号：PCT/CN2011073006
申请日：2011-04-19
申请人： HUAWEI TECH CO LTD , FENG ZUJIAN , TANG ZHENYU , LIAO XING , GUO ZHILI
发明人： FENG ZUJIAN , TANG ZHENYU , LIAO XING , GUO ZHILI
IPC分类号： H01Q13/08
CPC分类号： H01Q9/0457 , H01Q5/378 , H01Q9/0414
摘要： A microstrip antenna is provided in the embodiments of the present invention. The microstrip antenna includes that: four layers of medium plates are set in parallel; a first microstrip patch is set in the middle of the upper surface of the first layer of medium plate; a second microstrip patch is set in the middle of the upper surface of the second layer of medium plate; a first grounded layer is set on the upper surface of the third layer of medium plate, a coupling window is set in the middle of the first grounded layer, and a central conductor is set in the middle of the lower surface of the third layer of medium plate; a second grounded layer is set on the lower surface of the forth layer of medium plate; and the third layer of medium plate and the forth layer of medium plate are unsymmetrical media, so that the upper electric field of the central conductor is higher than the lower electric field. The microstrip provided in the embodiments of the present invention enhances the energy coupling efficiency, ensures the antenna bandwidth, reduces backward radiation of the microstrip antenna, the front to back ratio of the microstrip antenna is thereby improved. The integrated thickness of the microstrip antenna is greatly reduced, which is advantageous for integrating transmission and reception circuits of the antenna.
摘要翻译：在本发明的实施例中提供微带天线。微带天线包括：四层中板平行设置; 第一微带贴片设置在第一层中板的上表面的中间; 第二微带贴片设置在第二层中板的上表面的中间; 第一接地层设置在第三层介质板的上表面上，在第一接地层的中间设置耦合窗，并且在第三层的下表面的中间设置中心导体中板; 第二接地层设置在介质板的第四层的下表面上; 第三层介质板和第四层介质是不对称介质，使得中心导体的上电场高于下电场。在本发明实施例中提供的微带线增强了能量耦合效率，确保了天线带宽，减少了微带天线的反向辐射，从而提高了微带天线的前后比。微带天线的集成厚度大大降低，有利于天线的发送和接收电路的集成。

6. 发明申请

WO2010011398A3 SCANNING PROBE EPITAXY 审中-公开
标题翻译：扫描探头外观
公开(公告)号：WO2010011398A3
公开(公告)日：2010-06-03
申请号：PCT/US2009043866
申请日：2009-05-13
申请人： UNIV NORTHWESTERN , NANOINK INC , MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG , FRAGALA JOSEPH S , HENNING ALBERT K
发明人： MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG , FRAGALA JOSEPH S , HENNING ALBERT K
IPC分类号： G03F7/00 , G01Q70/10
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A dual tip probe for scanning probe epitaxy is disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The dual tip probe further includes a rib disposed on the cantilever arm between the first and second tips. The dual tip probe can also include a strain gauge disposed along the length of the cantilever arm.
摘要翻译：公开了一种用于扫描探针外延的双尖端探针。双尖头探针包括设置在悬臂上的第一和第二尖端。第一和第二提示可以分别是读取器尖端和合成尖端。双尖头探针还包括设置在第一和第二尖端之间的悬臂上的肋条。双尖头探针还可以包括沿着悬臂的长度设置的应变仪。

7. 发明申请

WO2010141836A3 SILICON PEN NANOLITHOGRAPHY 审中-公开
标题翻译：硅笔笔纳米尺度
公开(公告)号：WO2010141836A3
公开(公告)日：2011-03-03
申请号：PCT/US2010037428
申请日：2010-06-04
申请人： UNIV NORTHWESTERN , MIRKIN CHAD A , SHIM WOOYOUNG , BRAUNSCHWEIG ADAM B , LIAO XING , CHAI JINAN , LIM JONG KUK , ZHENG GENGFENG , ZHENG ZIJIAN
发明人： MIRKIN CHAD A , SHIM WOOYOUNG , BRAUNSCHWEIG ADAM B , LIAO XING , CHAI JINAN , LIM JONG KUK , ZHENG GENGFENG , ZHENG ZIJIAN
IPC分类号： H01L21/027
CPC分类号： G03F7/0002 , B81B2203/0361 , B81B2207/056 , B81C1/00111 , B81C1/0046 , B81C2201/0154 , B81C2201/0185 , B82Y10/00 , B82Y40/00 , Y10S977/732
摘要： Disclosed are methods of lithography using a tip array having a plurality of pens attached to a backing layer, where the tips can comprise a metal, metalloid, and/or semi-conducting material, and the backing layer can comprise an elastomeric polymer. The tip array can be used to perform a lithography process in which the tips are coated with an ink (e.g., a patterning composition) that is deposited onto a substrate upon contact of the tip with the substrate surface. The tips can be easily leveled onto a substrate and the leveling can be monitored optically by a change in light reflection of the backing layer and/or near the vicinity of the tips upon contact of the tip to the substrate surface.
摘要翻译：公开了使用具有连接到背衬层的多个笔的尖端阵列的光刻方法，其中尖端可以包括金属，准金属和/或半导电材料，并且背衬层可以包括弹性体聚合物。尖端阵列可用于执行光刻工艺，其中尖端涂覆有当尖端与衬底表面接触时沉积到衬底上的油墨（例如，图案化组合物）。尖端可以容易地平整到基底上，并且可以通过背衬层的光反射的变化和/或在尖端与基底表面接触时靠近尖端附近来光学地监测流平。

8. 发明申请

WO2010141836A2 SILICON PEN NANOLITHOGRAPHY 审中-公开
标题翻译：硅笔笔纳米尺度
公开(公告)号：WO2010141836A2
公开(公告)日：2010-12-09
申请号：PCT/US2010/037428
申请日：2010-06-04
申请人： NORTHWESTERN UNIVERSITY , MIRKIN, Chad, A. , SHIM, Wooyoung , BRAUNSCHWEIG, Adam, B. , LIAO, Xing , CHAI, Jinan , LIM, Jong, Kuk , ZHENG, Gengfeng , ZHENG, Zijian
发明人： MIRKIN, Chad, A. , SHIM, Wooyoung , BRAUNSCHWEIG, Adam, B. , LIAO, Xing , CHAI, Jinan , LIM, Jong, Kuk , ZHENG, Gengfeng , ZHENG, Zijian
IPC分类号： H01L21/027
CPC分类号： G03F7/0002 , B81B2203/0361 , B81B2207/056 , B81C1/00111 , B81C1/0046 , B81C2201/0154 , B81C2201/0185 , B82Y10/00 , B82Y40/00 , Y10S977/732
摘要： Disclosed are methods of lithography using a tip array having a plurality of pens attached to a backing layer, where the tips can comprise a metal, metalloid, and/or semi-conducting material, and the backing layer can comprise an elastomeric polymer. The tip array can be used to perform a lithography process in which the tips are coated with an ink (e.g., a patterning composition) that is deposited onto a substrate upon contact of the tip with the substrate surface. The tips can be easily leveled onto a substrate and the leveling can be monitored optically by a change in light reflection of the backing layer and/or near the vicinity of the tips upon contact of the tip to the substrate surface.
摘要翻译：公开了使用具有连接到背衬层的多个笔的尖端阵列的光刻方法，其中尖端可以包括金属，准金属和/或半导电材料，并且背衬层可以包括弹性体聚合物。尖端阵列可用于执行光刻工艺，其中尖端涂覆有当尖端与衬底表面接触时沉积到衬底上的油墨（例如，图案化组合物）。尖端可以容易地平整到基底上，并且可以通过背衬层的光反射的变化和/或在尖端与基底表面接触时靠近尖端附近来光学地监测流平。

9. 发明申请

WO2011071753A3 GENERATION OF COMBINATORIAL PATTERNS BY DELIBERATE TILTING OF A POLYMER-PEN ARRAY 审中-公开
标题翻译：由聚合物 - 笔阵列的纵向倾斜生成组合模式
公开(公告)号：WO2011071753A3
公开(公告)日：2011-11-17
申请号：PCT/US2010058773
申请日：2010-12-02
申请人： UNIV NORTHWESTERN , MIRKIN CHAD A , BRAUNSCHWEIG ADAM B , CHAI JINAN , EICHELSDOERFER DAN J , GIAM LOUISE R , LIAO XING , WONG LU SHIN
发明人： MIRKIN CHAD A , BRAUNSCHWEIG ADAM B , CHAI JINAN , EICHELSDOERFER DAN J , GIAM LOUISE R , LIAO XING , WONG LU SHIN
IPC分类号： G03F7/00 , B29C33/38 , B41M1/26
CPC分类号： G03F7/0002 , B01J2219/00387 , B82Y10/00 , B82Y40/00
摘要： The disclosure relates to a method of forming a pattern having pattern elements with a plurality of sizes on a substrate surface with a tilted pen array that includes choosing a tilt geometry for a pen array with respect to a substrate, inducing the tilt geometry between the pen array and the substrate surface, and forming a pattern having pattern elements on the substrate surface with the titled pen array, whereby the size of the formed pattern elements varies across the substrate surface along the tilted axis or axes. For example, the tilt geometry is in reference to the substrate surface and comprises a first angle with respect to a first axis of the substrate and a second angle with respect to a second axis of the substrate, the second axis being perpendicular to the first axis, and at least one of the first and second angles being non-zero.
摘要翻译：本公开涉及一种在具有倾斜的笔阵列的基板表面上形成具有多种尺寸的图案元件的图案的方法，该方法包括：选择笔阵列相对于基板的倾斜几何形状，在笔之间引起倾斜几何形状阵列和衬底表面上形成具有图案元素的图案，并且用标题笔阵列在衬底表面上形成具有图案元素的图案，由此形成的图案元素的尺寸沿着倾斜轴或多个衬底在整个衬底表面上变化。例如，倾斜几何形状参考衬底表面并且包括相对于衬底的第一轴线的第一角度和相对于衬底的第二轴线的第二角度，第二轴线垂直于第一轴线并且第一角度和第二角度中的至少一个角度不为零。

10. 发明申请

WO2010011397A3 SCANNING PROBE EPITAXY 审中-公开
公开(公告)号：WO2010011397A3
公开(公告)日：2010-06-03
申请号：PCT/US2009043864
申请日：2009-05-13
申请人： UNIV NORTHWESTERN , MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG
发明人： MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG
IPC分类号： G01Q70/10 , G03F7/00
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A dual tip probe for scanning probe epitaxy and a method of forming the dual tip probe are disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The first tip can remain in contact with a substrate during writing and provide in situ characterization of the substrate and or structures written, while the second tip can perform in non-contact mode to write and synthesis nanostructures. This feature can allow the dual tip probe to detect errors in a printed pattern using the first tip and correct the errors using the second tip.

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