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1. 发明申请

WO2008048938A3 MAKING AND USING CARBON NANOTUBE PROBES 审中-公开
标题翻译：制造和使用碳纳米管探针
公开(公告)号：WO2008048938A3
公开(公告)日：2008-09-12
申请号：PCT/US2007081423
申请日：2007-10-15
申请人： FORMFACTOR INC , ELDRIDGE BENJAMIN N , GRITTERS JOHN K , MARTENS RODNEY I , SLOCUM ALEXANDER H , YAGLIOGLU ONNIK
发明人： ELDRIDGE BENJAMIN N , GRITTERS JOHN K , MARTENS RODNEY I , SLOCUM ALEXANDER H , YAGLIOGLU ONNIK
IPC分类号： F16F1/36 , B82B1/00
CPC分类号： G01R1/06716 , G01R1/06744 , G01R1/0675 , G01R1/06755 , G01R3/00 , H01L2924/0002 , Y10T29/49004 , Y10T29/49147 , Y10T29/49204 , H01L2924/00
摘要： Columns comprising a plurality of vertically aligned carbon nanotubes can be configured as electromechanical contact structures or probes. The columns can be grown on a sacrificial substrate and transferred to a product substrate, or the columns can be grown on the product substrate. The columns can be treated to enhance mechanical properties such as stiffness, electrical properties such as electrical conductivity, and/or physical contact characteristics. The columns can be mechanically tuned to have predetermined spring properties. The columns can be used as electromechanical probes, for example, to contact and test electronic devices such as semiconductor dies, and the columns can make unique marks on terminals of the electronic devices.
摘要翻译：包括多个垂直排列的碳纳米管的柱可以被配置为机电接触结构或探针。柱可以在牺牲衬底上生长并转移到产物基底，或者可以在产物基底上生长柱。可以处理柱以增强诸如刚度，电性能如导电性和/或物理接触特性的机械性能。柱可以被机械调节以具有预定的弹簧性质。这些列可以用作机电探针，例如用于接触和测试诸如半导体管芯的电子器件，并且这些列可以在电子器件的端子上形成独特的标记。

2. 发明申请

WO2010115171A2 CARBON NANOTUBE CONTACT STRUCTURES FOR USE WITH SEMICONDUCTOR DIES AND OTHER ELECTRONIC DEVICES 审中-公开
标题翻译：碳纳米管接触结构与半导体器件和其他电子器件
公开(公告)号：WO2010115171A2
公开(公告)日：2010-10-07
申请号：PCT/US2010029877
申请日：2010-04-03
申请人： FORMFACTOR INC , GRITTERS JOHN K , MARTENS RODNEY I , YAGLIOGLU ONNIK
发明人： GRITTERS JOHN K , MARTENS RODNEY I , YAGLIOGLU ONNIK
IPC分类号： H01L21/60 , B82B3/00
CPC分类号： H01L24/80 , B82Y10/00 , B82Y30/00 , H01B1/20 , H01L23/49811 , H01L24/11 , H01L24/12 , H01L24/16 , H01L24/742 , H01L25/0657 , H01L51/0048 , H01L2224/0401 , H01L2224/0557 , H01L2224/11003 , H01L2224/11334 , H01L2224/13021 , H01L2224/13025 , H01L2224/13082 , H01L2224/1329 , H01L2224/133 , H01L2224/13582 , H01L2224/13624 , H01L2224/13639 , H01L2224/13644 , H01L2224/13647 , H01L2224/16225 , H01L2225/06513 , H01L2225/06517 , H01L2225/06527 , H01L2924/00013 , H01L2924/00014 , H01L2924/0002 , H01L2924/01006 , H01L2924/01013 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/01079 , H01L2924/014 , H01L2924/14 , H01L2924/15174 , H01L2924/15312 , H01L2924/15787 , H01L2924/19041 , H01L2924/19043 , H01L2924/30107 , H05K3/4007 , H05K2201/026 , H05K2201/0323 , H05K2201/0367 , H05K2203/0338 , Y10T29/49147 , Y10T29/49206 , H01L2224/13099 , H01L2224/05552 , H01L2924/00
摘要： A method of making carbon nanotube contact structures on an electronic device includes growing a plurality of carbon nanotube columns on a mandrel. Electrically-conductive adhesive is applied to ends of the columns distal from the mandrel, and the columns are transferred to the electronic device. An electrically-conductive material is deposited onto some or all of the columns. The mandrel can be reused to grow a second plurality of carbon nanotube columns.
摘要翻译：在电子设备上制造碳纳米管接触结构的方法包括在心轴上生长多个碳纳米管柱。将导电粘合剂施加到远离心轴的柱的端部，并且柱被转移到电子装置。导电材料沉积在一些或所有的柱上。心轴可以重新用于生长第二多个碳纳米管柱。

3. 发明申请

WO2007081522A3 A PROBE ARRAY STRUCTURE AND A METHOD OF MAKING A PROBE ARRAY STRUCTURE 审中-公开
标题翻译：探索阵列结构和制作探测阵列结构的方法
公开(公告)号：WO2007081522A3
公开(公告)日：2009-02-12
申请号：PCT/US2006048723
申请日：2006-12-19
申请人： FORMFACTOR INC , ELDRIDGE BENJAMIN N , FANG TRELIANT , GRITTERS JOHN K , KHANDROS IGOR Y , MA LUNYU , MATHIEU GAETAN L
发明人： ELDRIDGE BENJAMIN N , FANG TRELIANT , GRITTERS JOHN K , KHANDROS IGOR Y , MA LUNYU , MATHIEU GAETAN L
IPC分类号： G01R31/02
CPC分类号： G01R3/00 , G01R1/06716 , G01R1/06727 , G01R1/06744
摘要： Probe array structures and methods of making probe array structures are disclosed. A plurality of electrically conductive elongate contact structures disposed on a first substrate can be provided. The contact structures can then be partially encased in a securing material such that ends of the contact structures extend from a surface of the securing material. The exposed portions of the contact structures can then be captured in a second substrate.
摘要翻译：公开了探针阵列结构和制造探针阵列结构的方法。可以提供设置在第一基板上的多个导电细长接触结构。然后可以将接触结构部分地包封在固定材料中，使得接触结构的端部从固定材料的表面延伸。然后接触结构的暴露部分可以在第二衬底中被捕获。

4. 发明申请

WO2012128907A3 NON-LINEAR VERTICAL LEAF SPRING 审中-公开
标题翻译：非线性垂直叶片弹簧
公开(公告)号：WO2012128907A3
公开(公告)日：2012-11-08
申请号：PCT/US2012027216
申请日：2012-03-01
申请人： FORMFACTOR INC , BREINLINGER KEITH J , ARMSTRONG MICHAEL J , ELDRIDGE BENJAMIN N , GRITTERS JOHN K , HOBBS ERIC D
发明人： BREINLINGER KEITH J , ARMSTRONG MICHAEL J , ELDRIDGE BENJAMIN N , GRITTERS JOHN K , HOBBS ERIC D
IPC分类号： G01R1/067 , G01R31/26 , G01R31/28
CPC分类号： G01R1/06716 , G01R1/06733 , G01R1/07357 , H01R13/2407 , H01R43/16 , Y10T29/49204
摘要： An electrically conductive contact element can include a first base and a second base with elongate, spaced apart leaves between the bases. A first end of each leaf can be coupled to the first base and an opposite second end of the leaf can be coupled to the second base. A body of the leaf between the first end and the second end can be sufficiently elongate to respond to a force through said contact element substantially parallel with the first axis and the second axis by first compressing axially while said force is less than a buckling force and then bending while said force is greater than the buckling force.
摘要翻译：导电接触元件可以包括第一基座和第二基座，在基座之间具有细长的间隔开的叶片。每个叶片的第一端可以联接到第一基部，并且叶片的相对的第二端部可以联接到第二基部。在第一端和第二端之间的叶片的本体可以充分地伸长以响应通过所述接触元件基本平行于第一轴线和第二轴线的力，同时通过首先轴向压缩，同时所述力小于屈曲力，并且然后在所述力大于屈曲力的情况下弯曲。

5. 发明申请

WO2008024726A2 CARBON NANOTUBE CONTACT STRUCTURES 审中-公开
标题翻译：碳纳米管接触结构
公开(公告)号：WO2008024726A2
公开(公告)日：2008-02-28
申请号：PCT/US2007076345
申请日：2007-08-21
申请人： FORMFACTOR INC , ELDRIDGE BENJAMIN N , GRITTERS JOHN K , KHANDROS IGOR K , MARTENS ROD , MATHIEU GAETAN L
发明人： ELDRIDGE BENJAMIN N , GRITTERS JOHN K , KHANDROS IGOR K , MARTENS ROD , MATHIEU GAETAN L
IPC分类号： D01F9/12
CPC分类号： G01R1/06755 , H01R13/03 , Y10T29/49204
摘要： A carbon nanotube contact structure can be used for making pressure connections to a DUT. The contact structure can be formed using a carbon nanotube film or with carbon nanotubes in solution. The carbon nanotube film can be grown in a trench in a sacrificial substrate in which a contact structure such as a beam or contact element is then formed by metal plating. The film can also be formed on a contact element and have metal posts dispersed therein to provide rigidity and elasticity. Contact structures or portions thereof can also be plated with a solution containing carbon nanotubes. The resulting contact structure can be tough, and can provide good electrical conductivity.
摘要翻译：可以使用碳纳米管接触结构来与DUT进行压力连接。可以使用碳纳米管膜或溶液中的碳纳米管来形成接触结构。碳纳米管膜可以在牺牲基板中的沟槽中生长，其中通过金属电镀形成诸如光束或接触元件的接触结构。膜也可以形成在接触元件上，并且金属柱分散在其中以提供刚性和弹性。接触结构或其部分也可以镀有含有碳纳米管的溶液。所得到的接触结构可以是韧性的，并且可以提供良好的导电性。

6. 发明申请

WO2008082815A3 RESILIENT CONTACT ELEMENT AND METHODS OF FABRICATION 审中-公开
标题翻译：弹性接触元件和制造方法
公开(公告)号：WO2008082815A3
公开(公告)日：2008-08-28
申请号：PCT/US2007085481
申请日：2007-11-25
申请人： FORMFACTOR INC , GRITTERS JOHN K , ELDRIDGE BENJAMIN N , BREINLINGER KEITH J
发明人： GRITTERS JOHN K , ELDRIDGE BENJAMIN N , BREINLINGER KEITH J
IPC分类号： H01R12/00
CPC分类号： H01R31/02 , G01R1/06733 , G01R1/07342 , G01R3/00
摘要： Embodiments of resilient contact elements and methods for fabricating same are provided herein. In one embodiment, a resilient contact element for use in a probe card includes a lithographically formed resilient beam having a first end and an opposing second end; and a tip disposed proximate the first end of the beam and configured to break through an oxide layer of a surface of a device to be tested to establish a reliable electrical connection therewith; wherein at least a central portion of the beam has a continuous sloped profile defining, in a relaxed state, a height measured between the beam and a plane representing an upper surface of a device to be tested that is greater near the second end of the beam than near the first end of the beam.
摘要翻译：本文提供了弹性接触元件的实施例及其制造方法。在一个实施例中，用于探针卡中的弹性接触元件包括光刻成形的弹性梁，其具有第一端和相对的第二端; 以及尖端，所述尖端设置在所述梁的所述第一端附近并且被配置为突破待测试装置的表面的氧化物层以建立与其的可靠电连接; 其中所述梁的至少中心部分具有连续的倾斜轮廓，所述连续的倾斜轮廓在松弛状态下限定在所述梁与代表待测试设备的上表面的平面之间测量的高度，所述平面在所述梁的第二端附近更大比靠近光束的第一端。

7. 发明申请

WO2007124050A3 PROBE STRUCTURES WITH ELECTRONIC COMPONENTS 审中-公开
标题翻译：具有电子元件的探测结构
公开(公告)号：WO2007124050A3
公开(公告)日：2008-03-27
申请号：PCT/US2007009660
申请日：2007-04-19
申请人： FORMFACTOR INC , KHANDROS IGOR K , GRITTERS JOHN K
发明人： KHANDROS IGOR K , GRITTERS JOHN K
IPC分类号： G01R31/02
CPC分类号： G01R31/312 , G01R1/06727 , G01R1/06744 , G01R1/07342 , G01R3/00
摘要： A probe apparatus can include a substrate, a contact structure attached to the substrate, and an electronic component electrically connected to the contact structure. The electronic component can be attached to the contact structure.
摘要翻译：探针装置可以包括衬底，附接到衬底的接触结构和电连接到接触结构的电子部件。电子部件可以附接到接触结构。

8. 发明申请

WO2008039881A3 SINGLE SUPPORT STRUCTURE PROBE GROUP WITH STAGGERED MOUNTING PATTERN 审中-公开
标题翻译：单一支撑结构探头组与STAGGERED MOUNTING PATTERN
公开(公告)号：WO2008039881A3
公开(公告)日：2009-04-16
申请号：PCT/US2007079611
申请日：2007-09-27
申请人： FORMFACTOR INC , FAN LI , GRITTERS JOHN K
发明人： FAN LI , GRITTERS JOHN K
IPC分类号： G01R31/02
CPC分类号： G01R1/07342 , G01R1/06727 , G01R1/07378 , G01R31/31905
摘要： A probe group can include multiple probes for testing devices having contact pads. The probes can comprise beams, contact tip structures, and mounting portions. The beams can provide for controlled deflection of the probes. The contact tip structures can be connected to the beams and can include contact portions for contacting with the devices. The mounting portions of the beams can be attached to support structures, which can be arranged in a staggered pattern. The beams located in a first row of the staggered pattern can include narrowing regions that lie substantially in line with the mounting portions of a second row of the beams.
摘要翻译：探针组可以包括用于测试具有接触垫的设备的多个探针。探针可以包括梁，接触尖端结构和安装部分。梁可以提供探头的可控偏转。接触尖端结构可以连接到梁，并且可以包括用于与装置接触的接触部分。梁的安装部分可以附接到可以以交错图案布置的支撑结构。位于交错图案的第一行中的光束可以包括基本上与第二排光束的安装部分成一直线的变窄区域。

9. 发明申请

WO2009042946A2 REDUCED SCRUB CONTACT ELEMENT 审中-公开
标题翻译：减少的SCRUB接触元件
公开(公告)号：WO2009042946A2
公开(公告)日：2009-04-02
申请号：PCT/US2008077991
申请日：2008-09-26
申请人： FORMFACTOR INC , GRITTERS JOHN K
发明人： GRITTERS JOHN K
IPC分类号： H01L21/66
CPC分类号： H01R13/2407 , G01R1/06727 , G01R1/06733 , G01R1/07342 , H01R12/714 , H01R13/05 , H01R2201/20 , Y10T29/49204 , Y10T29/49222
摘要： Embodiments of resilient contact elements and methods for fabricating and using same are provided herein. In one embodiment, a resilient contact element includes a lithographically formed resilient beam having a plurality of openings disposed laterally therethrough; and a tip disposed proximate a first end of the beam, the tip and the beam together configured to electrically probe a device to be tested.
摘要翻译：本文提供了弹性接触元件的实施例及其制造和使用方法。在一个实施例中，弹性接触元件包括光刻形成的弹性梁，其具有横向穿过其中设置的多个开口; 以及设置在所述梁的第一端附近的尖端，所述尖端和所述梁一起构造成电探测待测试的装置。

10. 发明申请

WO2007130517A3 EXTENDED PROBE TIPS 审中-公开
标题翻译：扩展的探索提示
公开(公告)号：WO2007130517A3
公开(公告)日：2008-04-17
申请号：PCT/US2007010739
申请日：2007-05-02
申请人： FORMFACTOR INC , GRITTERS JOHN K
发明人： GRITTERS JOHN K
IPC分类号： H01L23/48
CPC分类号： G01R3/00 , G01R1/06727 , G01R1/06738 , G01R1/07342
摘要： Probe tips, methods for making probe tips, and method for using such probe trips are described. The probe tips can include a pedestal portion connected to a beam of a cantilever structure and a contact portion that can contact an electronic component that to be tested. The pedestal portion and contact portions can have a generally trapezoidal shape. The probe tips can also include a rectangular-shaped extension portion located between the base and contact portions. The probe tips can be made using a dual-etching process that creates the generally trapezoidal shape of the base and contact portions and the generally rectangular-shaped extension portion.
摘要翻译：介绍探针提示，探针提示的方法以及使用这种探针跳闸的方法。探针尖端可以包括连接到悬臂结构的梁的基座部分和可以接触待测试的电子部件的接触部分。基座部分和接触部分可以具有大致梯形的形状。探针尖端还可以包括位于基部和接触部分之间的矩形延伸部分。可以使用双蚀刻工艺制造探针尖端，该工艺产生基部和接触部分以及大致矩形延伸部分的大致梯形形状。

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