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1. 发明申请

WO02053013A2 AN INTELLECTUAL BIO-CHIP READER FOR ABUNDANT DIAGNOSIS BY USING AN OPTICAL IDENTIFICATION CODE 审中-公开
标题翻译：一个知识型生物芯片阅读器，用于通过使用光学识别代码进行深入诊断
公开(公告)号：WO02053013A2
公开(公告)日：2002-07-11
申请号：PCT/KR0001553
申请日：2000-12-29
申请人： DIACHIP LTD , PAHK HEUI-JAE , HWANG YOUNG-MIN
发明人： PAHK HEUI-JAE , HWANG YOUNG-MIN
IPC分类号： G01N21/64 , A61B
CPC分类号： G01N21/6428
摘要： The present invention relates to a bio-chip reader for abundant diagnosis, more concretely relates to a bio-chip reader by having an optical sensor for abundant diagnosis on medical testing samples on a bio-chip for a short time. The bio-chip reader recognizes an optical identification code on the bio-chip by using its optical sensor. Then, it retrieves patient-related information and bio-chip's information from a database corresponding to the optical identification code and automatically diagnoses the medical testing samples. The bio-chip's information includes at least one selected from the group consisting of sample types of spots, sequences and arrangements of spot-arrays, standard positions and sizes and spaces of spots. Additionally, the bio-chip reader recognizes standard spots sticking on the bio-chip by using its optical sensor. Then, it automatically aligns and classifies spot-arrays sticking on the bio-chip and diagnoses the medical testing samples by using the standard spots.
摘要翻译：本发明涉及用于大量诊断的生物芯片读取器，更具体地涉及一种生物芯片读取器，其具有用于在短时间内在生物芯片上对医学测试样品进行大量诊断的光学传感器。生物芯片读取器通过使用其光学传感器识别生物芯片上的光学识别码。然后，从与光学识别码对应的数据库中检索患者相关信息和生物芯片的信息，并自动诊断医学检测样本。生物芯片的信息包括从斑点的样本类型，点阵列的顺序和排列，标准位置以及斑点的大小和空间中选择的至少一个。此外，生物芯片读取器通过使用其光学传感器识别粘附在生物芯片上的标准点。然后，它自动对准和分类贴在生物芯片上的点阵列，并通过使用标准点诊断医学测试样品。

2. 发明申请

WO2003060594A1 MACHINE AND METHOD FOR INSPECTING FERRULE OF OPTICAL CONNECTOR 审中-公开
标题翻译：检测光连接器的机器和方法
公开(公告)号：WO2003060594A1
公开(公告)日：2003-07-24
申请号：PCT/KR2003/000111
申请日：2003-01-17
申请人： PAHK, Heui-Jae , LEE, Il-Hwan , LEE, Hwa-Kyun , LEE, Dong-Sung
发明人： PAHK, Heui-Jae , LEE, Il-Hwan , LEE, Hwa-Kyun , LEE, Dong-Sung
IPC分类号： G02B27/00
CPC分类号： G01B11/08 , G01B11/12
摘要： Provided is a machine for inspecting ferrules of an optical connector and a method thereof. A fixture arranges the ferrules on a rectangular system to inspect the ferrules. A robot centers first ferrule on a optical system and focuses the first ferrule on the optical system. The optical system includes two cameras for photographing inside diameter image data and outside diameter image data of the ferrule. While the robot moves sequentially the optical system and remaining ferrules, all the inside and outside diameter image data of the ferrules are in sequence obtained by the optical system. Each inside and outside diameter and eccentricity of the ferrules are calculated by the obtained inside and outside diameter image data via a computer program.
摘要翻译：提供一种用于检查光连接器的套圈的机器及其方法。夹具将套管布置在矩形系统上以检查套圈。机器人将光学系统上的第一套圈中心并将第一套圈聚焦在光学系统上。光学系统包括用于拍摄内径图像数据和套圈的外径图像数据的两个相机。当机器人顺序地移动光学系统和剩余的套圈时，套圈的所有内外径图像数据依次由光学系统获得。通过计算机程序通过获得的内外图像数据计算套圈的内外径和偏心度。

3. 发明申请

WO2002083359A1 ULTRA-PRECISION POSITIONING SYSTEM 审中-公开
标题翻译：超精密定位系统
公开(公告)号：WO2002083359A1
公开(公告)日：2002-10-24
申请号：PCT/KR2001/001338
申请日：2001-08-06
申请人： PARK, Jong-Ho , PAHK, Heui-Jae
发明人： PAHK, Heui-Jae
IPC分类号： B23Q15/00
CPC分类号： B23Q1/626 , B23Q1/34 , B23Q1/36 , Y10T74/20348 , Y10T74/20354
摘要： Provided is an ultra-precision positioning system. The system comprises a base, a motion stage movably provided to the top of the base, and first to sixth feeding mechanisms for moving the motion stage to have six degrees of freedom. The first to sixth feed mechanisms are fixed to the base and the motion stage, respectively. Each of the first to third feeding mechanisms has a piezo actuator and two elastic hinges provided at both sides of the piezo actuator. Each of the fourth to sixth feeding mechanisms has a piezo actuator, three hinge members, and a lever member with a notch hinge which operatively cooperates with the hinge members.
摘要翻译：提供了一种超精密定位系统。该系统包括基座，可移动地设置在基座的顶部的运动台，以及用于使运动台运动以具有六个自由度的第一至第六进给机构。第一至第六进给机构分别固定在底座和运动台上。第一至第三馈送机构中的每一个具有压电致动器和设置在压电致动器两侧的两个弹性铰链。第四至第六馈送机构中的每一个具有压电致动器，三个铰链构件和具有与铰链构件可操作地配合的切口铰链的杠杆构件。

4. 发明申请

WO2010134694A3 METHOD FOR MEASURING A THREE-DIMENSIONAL SHAPE 审中-公开
标题翻译：测量三维形状的方法
公开(公告)号：WO2010134694A3
公开(公告)日：2011-01-13
申请号：PCT/KR2010002230
申请日：2010-04-12
申请人： SNU PRECISION CO LTD , PAHK HEUI-JAE , AHN WOO-JUNG
发明人： PAHK HEUI-JAE , AHN WOO-JUNG
IPC分类号： G01B11/24 , G01B11/02 , G01B11/25
CPC分类号： G01B11/24
摘要： The present invention relates to a method for measuring a three-dimensional shape. The method for measuring the three-dimensional shape of an object having a substrate and a solder ball arranged on the substrate, comprises: a center-determining step of obtaining an image of the solder ball and determining the center of the solder ball; an image-acquiring step of forming a sine wave pattern on the object, and acquiring an integrated image containing images of both the upper surface of the substrate and of the solder ball; a phase value determination step of selecting, from within the integrated image, a reference line which is a virtual line passing through the center of the solder ball, extracting the phase value of the portion onto which the sine wave pattern is projected from the center of the solder ball located on the reference line and determining the extracted phase value to be a phase value of the center of the solder ball, and extracting the phase value of the portion onto which the sine wave pattern is projected from the substrate located on the reference line and determining the extracted phase value to be a phase value of the substrate; and a height calculating step of calculating the height from the upper surface of the substrate to the center of the solder ball using the difference between the phase value of the center of the solder ball and the phase value of the substrate.
摘要翻译：本发明涉及三维形状的测定方法。用于测量具有布置在基板上的基板和焊球的物体的三维形状的方法包括：中心确定步骤，获得焊球的图像并确定焊球的中心; 在所述物体上形成正弦波图案的图像获取步骤，以及获取包含所述基板的上表面和所述焊球两者的图像的积分图像; 相位值确定步骤，从集成图像内选择作为穿过焊球中心的虚拟线的参考线，从其中心提取正弦波图案投影到其上的部分的相位值所述焊球位于所述基准线上，并且将提取的相位值确定为所述焊球的中心的相位值，并且从位于所述参考点上的所述基板提取所述正弦波图案投影到其上的部分的相位值并将提取的相位值确定为衬底的相位值; 以及高度计算步骤，使用焊料球的中心的相位值和基板的相位值之间的差计算从基板的上表面到焊球的中心的高度。

5. 发明申请

WO2010128759A2 VISION INSPECTION SYSTEM AND COORDINATE CONVERSION METHOD USING SAME 审中-公开
标题翻译：视觉检查系统和使用相同的坐标转换方法
公开(公告)号：WO2010128759A2
公开(公告)日：2010-11-11
申请号：PCT/KR2010002253
申请日：2010-04-13
申请人： SNU PRECISION CO LTD , KANG SUNG BUM , PAHK HEUI-JAE , AHN WOO-JUNG
发明人： KANG SUNG BUM , PAHK HEUI-JAE , AHN WOO-JUNG
IPC分类号： G01B11/03 , G01C3/10 , G01C3/16
CPC分类号： G01B11/005 , G01B11/03 , G01C11/025
摘要： The present invention relates to a vision inspection system and to a coordinate conversion method using same. The vision inspection system of the present invention comprises: a table which supports an object to be inspected; a stage which enables the table to linearly reciprocate in the Y-axis direction; a plurality of cameras spaced apart from each other along the X-axis direction to acquire images of the object to be inspected or of the table; a plurality of first marks spaced apart from each other at one end of the table along the X-axis direction and intersecting the Y-axis direction; and a plurality of second marks spaced apart from each other at one side of the table along the Y-axis direction from the leftmost first mark from among the first marks, and spaced apart from each other at the other side of the table along the Y-axis direction from the rightmost first mark from among the first marks. The vision inspection system of the present invention acquires images of the first marks and converts coordinate values of the acquired images into coordinate values of the stage, and acquires images of the second marks and converts coordinate values of the acquired images and coordinate values of the stage into absolute coordinate values based on the object to be inspected. The absolute coordinate values based on the object to be inspected are coordinate values in which the accuracy of the stage is corrected.
摘要翻译：本发明涉及视觉检查系统和使用其的坐标转换方法。本发明的视觉检查系统包括：支撑被检查物体的台面; 使台面能够在Y轴方向上直线往复运动的台阶; 沿着X轴方向彼此间隔开的多个照相机，以获取待检查对象或桌子的图像; 在所述工作台的一端沿X轴方向彼此间隔开并与Y轴方向交叉的多个第一标记; 以及从所述第一标记中的最左侧的第一标记沿着Y轴方向在所述工作台的一侧彼此间隔开的多个第二标记，并且沿着所述Y的另一侧彼此间隔开从第一个标记中最右边的第一个标记开始的方向。本发明的视觉检查系统获取第一标记的图像并将所获取的图像的坐标值转换成舞台的坐标值，并且获取第二标记的图像，并且将所获取的图像的坐标值和舞台的坐标值基于待检查对象的绝对坐标值。基于待检查对象的绝对坐标值是校正阶段的精度的坐标值。

6. 发明申请

WO2010117176A2 IMAGE-CENTERING METHOD 审中-公开
标题翻译：图像中心方法
公开(公告)号：WO2010117176A2
公开(公告)日：2010-10-14
申请号：PCT/KR2010002081
申请日：2010-04-06
申请人： SNU PRECISION CO LTD , HWANG YOUNG-MIN , PAHK HEUI-JAE , LEE CHANG-YEOL , HYUN CHANG-HONG
发明人： HWANG YOUNG-MIN , PAHK HEUI-JAE , LEE CHANG-YEOL , HYUN CHANG-HONG
IPC分类号： G01N21/00 , G01B11/00
CPC分类号： G01B11/002 , G01N21/956 , G01N2021/8887
摘要： The present invention relates to an image-centering method, and more particularly, to an image centering method comprising: a registration step of registering an inspection subject as a model image by photographing the inspection subject with an optical system with a first magnifying power and setting a position of an inspection region to be searched in a photographed image of the first magnifying power; a photographing step of photographing the inspection subject with an optical system with a second magnifying power higher than the first magnifying power according to a predetermined order to obtain a target image; a reduction step of reducing the target image obtained from the photographing step to the size of that of image of the first magnifying power to register the target image as an inspection image; a matching step of searching for the inspection image in the model image; and, when the inspection image is found through the matching step, a centering step of moving the optical system with the second magnifying power or the inspection subject to correspond to the position of the inspection region set in the registration step.
摘要翻译：本发明涉及一种图像对中方法，更具体地说，涉及一种图像定心方法，包括：登记步骤，通过用具有第一放大倍数和设定值的光学系统拍摄检查对象，将检查对象登记为模型图像在第一放大倍率的拍摄图像中检索的检查区域的位置; 拍摄步骤，根据预定顺序用具有高于第一放大倍数的第二放大倍率的光学系统拍摄检查对象，以获得目标图像; 减少步骤，将从拍摄步骤获得的目标图像减小为第一放大倍数的图像尺寸，以将目标图像注册为检查图像; 在模型图像中搜索检查图像的匹配步骤; 并且当通过匹配步骤找到检查图像时，使具有第二放大倍率的光学系统或检查对象移动的对中步骤对应于在配准步骤中设置的检查区域的位置。

7. 发明申请

WO2011043566A2 APPARATUS AND METHOD FOR PROCESSING SUBSTRATE 审中-公开
标题翻译：用于处理基材的装置和方法
公开(公告)号：WO2011043566A2
公开(公告)日：2011-04-14
申请号：PCT/KR2010/006749
申请日：2010-10-04
申请人： SNU PRECISION CO., LTD , BAK, Byeong-Min , GONG, Doo Won , SON, Sung Kwan , CHO, Whang Sin , JUNG, Sung Jae , PAHK, Heui Jae
发明人： BAK, Byeong-Min , GONG, Doo Won , SON, Sung Kwan , CHO, Whang Sin , JUNG, Sung Jae , PAHK, Heui Jae
IPC分类号： H01L21/20 , H01L31/042
CPC分类号： H01L21/6776 , C23C16/4401 , C23C16/4411 , C23C16/45563 , C23C16/4557 , C23C16/54 , H01L21/6715
摘要： There is provided a substrate processing apparatus and method capable of preventing the substrate from being heated and efficiently collecting residual deposition material. The substrate processing apparatus includes a chamber unit including an inner space divided into an introduction section, a film formation section, and a discharge section, at least one material injection nozzle unit disposed in the film formation section of the chamber unit to inject a deposition material to a substrate being transferred, and a cooling plate unit disposed to surround the film formation section of the chamber unit and adapted to cool inside of the film formation section. In addition, the substrate processing apparatus further includes at least one cold trap unit disposed at a lower part of the material injection nozzle unit to collect residual deposition material not deposited on the substrate but left from the whole deposition material injected from the material injection nozzle unit.
摘要翻译：提供了能够防止衬底被加热并有效地收集残留沉积材料的衬底处理设备和方法。该基板处理装置包括：腔室单元，其包括被分成引入部分，成膜部分和排出部分的内部空间;至少一个材料注入喷嘴单元，其设置在腔室单元的成膜部分中以注入沉积材料与被转印的基板连接的冷却板单元，以及包围该腔室单元的成膜部并适于冷却成膜部的内部的冷却板单元。另外，所述基板处理装置还包括至少一个冷阱单元，所述冷阱单元设置在所述材料注入喷嘴单元的下部，以收集未沉积在所述基板上但是残留在从所述材料注入喷嘴单元注入的整个沉积材料上的残余沉积材料

8. 发明申请

WO2010110535A2 REFLECTANCE DISTRIBUTION CURVE MODELING METHOD, THICKNESS MEASUREMENT SCHEME AND THICKNESS MEASUREMENT REFLECTOMETER USING SAME 审中-公开
标题翻译：反射分布曲线建模方法，厚度测量方案和厚度测量反射计使用相同
公开(公告)号：WO2010110535A2
公开(公告)日：2010-09-30
申请号：PCT/KR2010001131
申请日：2010-02-26
申请人： SNU PRECISION CO LTD , PAHK HEUI JAE , AHN WOO JUNG , KIM SEONG RYONG
发明人： PAHK HEUI JAE , AHN WOO JUNG , KIM SEONG RYONG
IPC分类号： G01B11/06 , H01L21/66
CPC分类号： G01B11/0625
摘要： The reflectance distribution curve modeling method of the present invention is for modeling a reflectance distribution of a thin film layer according to a change in the wavelength of light with respect to a thin film layer having a uniform thickness, and comprises: a reflectance distribution curve preparation step whereby a reflectance distribution curve is prepared to represent reflectance distribution of the thin film layer according to a change in wavelength of light; an input intensity setting step whereby an intensity distribution curve is prepared to represent intensity of light in a certain wavelength band around a specific wavelength for which white light was band-passed, and then the intensity distribution curve is integrated within the wavelength band to set as an input intensity of the specific wavelength; an output intensity setting step whereby a combined intensity distribution curve of the reflectance and intensity distribution curves is integrated within the wavelength band to set an output intensity of the specific wavelength; an integrated reflectance setting step whereby a value obtained by dividing the output intensity of the specific wavelength by the input intensity of the specific wavelength is set as an integration reflectance of the thin film layer for the specific wavelength; and an integration reflectance distribution curve generating step whereby an integration reflectance distribution curve for reflecting the integration reflectance distribution according to a change in wavelength is generated by repeating the input intensity setting step, the output intensity setting step and the integration reflectance setting step, while changing the specific wavelength.
摘要翻译：本发明的反射率分布曲线建模方法用于根据光的波长相对于具有均匀厚度的薄膜层的变化来模拟薄膜层的反射率分布，并且包括：反射率分布曲线制备根据光的波长变化制备反射率分布曲线以表示薄膜层的反射率分布的步骤; 输入强度设定步骤，其中准备强度分布曲线以表示白光被带通的特定波长周围的特定波长带中的光的强度，然后将该强度分布曲线积分在该波长带内以设定为该特定波长的输入强度; 输出强度设定步骤，由此将所述反射率和强度分布曲线的组合强度分布曲线积分在所述波段内，以设定所述特定波长的输出强度; 积分反射率设定步骤，通过将特定波长的输出强度除以特定波长的输入强度而获得的值设定为特定波长的薄膜层的积分反射率; 以及积分反射率分布曲线生成步骤，通过反复进行输入强度设定步骤，输出强度设定步骤和积分反射率设定步骤，生成用于反映与波长的变化对应的积分反射率分布的积分反射率分布曲线特定的波长。

9. 发明申请

WO2008111705A1 DEVICE FOR PROCESSING MATERIALS BY LASER BEAM 审中-公开
标题翻译：激光加工材料的装置
公开(公告)号：WO2008111705A1
公开(公告)日：2008-09-18
申请号：PCT/KR2007/002925
申请日：2007-06-15
申请人： SNU PRECISION CO., LTD. , PAHK, Heui Jae , KIM, Tai Wook , LEE, Dong Sung , SHIN, Ng Hyun
发明人： PAHK, Heui Jae , KIM, Tai Wook , LEE, Dong Sung , SHIN, Ng Hyun
IPC分类号： B23K26/00
CPC分类号： B23K26/067
摘要： Disclosed is a laser processing device for processing a surface of an object with laser beams. The laser processing device includes: a laser beam generating unit for projecting laser beams; and a micromirror device having a plurality of micromirrors, the micromirrors being configured to reflect and transfer at least a part of laser beams projected from the laser beam generating unit to the surface of the object in a pattern for processing the surface of the object in a desired shape. The micromirrors of the micromirror device are capable of selectively switching the light path of the laser beams projected from the laser beam generating unit. According to the present invention, a surface of an object can be either two-dimensionally or three-dimensionally processed in a desired shape with laser beams.
摘要翻译：公开了一种用激光束处理物体表面的激光加工装置。激光加工装置包括：激光束产生单元，用于投射激光束; 以及具有多个微镜的微反射镜装置，所述微镜被配置为将以从所述激光束产生单元投影的至少一部分激光束以用于处理所述物体的表面的图案的形式反射并传送到所述物体的表面所需形状。微镜器件的微镜能够选择性地切换从激光束产生单元投影的激光束的光路。根据本发明，物体的表面可以用激光束二维或三维地加工成所需的形状。

10. 发明申请

WO2003058164A1 MACHINE AND METHOD OF INSPECTING INPUT SHAFT OF POWER STEERING SYSTEM 审中-公开
标题翻译：检查动力转向系统输入轴的机器和方法
公开(公告)号：WO2003058164A1
公开(公告)日：2003-07-17
申请号：PCT/KR2002/002255
申请日：2002-11-30
申请人： PAHK, Heui-Jae , HWANG, Moon-Tae , KIM, Jin-Ki
发明人： PAHK, Heui-Jae , HWANG, Moon-Tae , KIM, Jin-Ki
IPC分类号： G01B11/30
CPC分类号： G01B11/00
摘要： Provided is a machine and a method for inspecting an input shaft of a power system. First an second cameras take a photograph of first and second champer of the input shaft from directions perpendicular to the chamfers to capture image data of the chamfers. The input shaft is rotated by an indexing drive until overlapping a central line of first and second chamfers of an input shaft on a standard line of image array coordinate system of a computer. Then, widths of the first and second chamfers of the input shaft is calculated. Thereafter, the indexing drive rotates the input shaft by predetermined degrees. The computer processes image data of another first and second chamfers captured by the first and second cameras and calculates widths of the another first and second chamfers. Continuously, widths of remaining chamfers of the input shaft are calculated.
摘要翻译：提供了一种用于检查电力系统的输入轴的机器和方法。首先，第二台摄像机从垂直于倒角的方向拍摄输入轴的第一和第二个遮阳篷，以捕获倒角的图像数据。输入轴通过分度驱动器旋转，直到在计算机的图像阵列坐标系的标准线上的输入轴的第一和第二倒角的中心线重叠。然后，计算输入轴的第一和第二倒角的宽度。此后，分度驱动器将输入轴旋转一定程度。计算机处理由第一和第二相机捕获的另一个第一和第二倒角的图像数据，并计算另一个第一和第二倒角的宽度。连续地计算输入轴的剩余倒角的宽度。

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