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1. 发明申请

WO2010110535A2 REFLECTANCE DISTRIBUTION CURVE MODELING METHOD, THICKNESS MEASUREMENT SCHEME AND THICKNESS MEASUREMENT REFLECTOMETER USING SAME 审中-公开
标题翻译：反射分布曲线建模方法，厚度测量方案和厚度测量反射计使用相同
公开(公告)号：WO2010110535A2
公开(公告)日：2010-09-30
申请号：PCT/KR2010001131
申请日：2010-02-26
申请人： SNU PRECISION CO LTD , PAHK HEUI JAE , AHN WOO JUNG , KIM SEONG RYONG
发明人： PAHK HEUI JAE , AHN WOO JUNG , KIM SEONG RYONG
IPC分类号： G01B11/06 , H01L21/66
CPC分类号： G01B11/0625
摘要： The reflectance distribution curve modeling method of the present invention is for modeling a reflectance distribution of a thin film layer according to a change in the wavelength of light with respect to a thin film layer having a uniform thickness, and comprises: a reflectance distribution curve preparation step whereby a reflectance distribution curve is prepared to represent reflectance distribution of the thin film layer according to a change in wavelength of light; an input intensity setting step whereby an intensity distribution curve is prepared to represent intensity of light in a certain wavelength band around a specific wavelength for which white light was band-passed, and then the intensity distribution curve is integrated within the wavelength band to set as an input intensity of the specific wavelength; an output intensity setting step whereby a combined intensity distribution curve of the reflectance and intensity distribution curves is integrated within the wavelength band to set an output intensity of the specific wavelength; an integrated reflectance setting step whereby a value obtained by dividing the output intensity of the specific wavelength by the input intensity of the specific wavelength is set as an integration reflectance of the thin film layer for the specific wavelength; and an integration reflectance distribution curve generating step whereby an integration reflectance distribution curve for reflecting the integration reflectance distribution according to a change in wavelength is generated by repeating the input intensity setting step, the output intensity setting step and the integration reflectance setting step, while changing the specific wavelength.
摘要翻译：本发明的反射率分布曲线建模方法用于根据光的波长相对于具有均匀厚度的薄膜层的变化来模拟薄膜层的反射率分布，并且包括：反射率分布曲线制备根据光的波长变化制备反射率分布曲线以表示薄膜层的反射率分布的步骤; 输入强度设定步骤，其中准备强度分布曲线以表示白光被带通的特定波长周围的特定波长带中的光的强度，然后将该强度分布曲线积分在该波长带内以设定为该特定波长的输入强度; 输出强度设定步骤，由此将所述反射率和强度分布曲线的组合强度分布曲线积分在所述波段内，以设定所述特定波长的输出强度; 积分反射率设定步骤，通过将特定波长的输出强度除以特定波长的输入强度而获得的值设定为特定波长的薄膜层的积分反射率; 以及积分反射率分布曲线生成步骤，通过反复进行输入强度设定步骤，输出强度设定步骤和积分反射率设定步骤，生成用于反映与波长的变化对应的积分反射率分布的积分反射率分布曲线特定的波长。

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