专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2008111705A1 DEVICE FOR PROCESSING MATERIALS BY LASER BEAM 审中-公开
标题翻译：激光加工材料的装置
公开(公告)号：WO2008111705A1
公开(公告)日：2008-09-18
申请号：PCT/KR2007/002925
申请日：2007-06-15
申请人： SNU PRECISION CO., LTD. , PAHK, Heui Jae , KIM, Tai Wook , LEE, Dong Sung , SHIN, Ng Hyun
发明人： PAHK, Heui Jae , KIM, Tai Wook , LEE, Dong Sung , SHIN, Ng Hyun
IPC分类号： B23K26/00
CPC分类号： B23K26/067
摘要： Disclosed is a laser processing device for processing a surface of an object with laser beams. The laser processing device includes: a laser beam generating unit for projecting laser beams; and a micromirror device having a plurality of micromirrors, the micromirrors being configured to reflect and transfer at least a part of laser beams projected from the laser beam generating unit to the surface of the object in a pattern for processing the surface of the object in a desired shape. The micromirrors of the micromirror device are capable of selectively switching the light path of the laser beams projected from the laser beam generating unit. According to the present invention, a surface of an object can be either two-dimensionally or three-dimensionally processed in a desired shape with laser beams.
摘要翻译：公开了一种用激光束处理物体表面的激光加工装置。激光加工装置包括：激光束产生单元，用于投射激光束; 以及具有多个微镜的微反射镜装置，所述微镜被配置为将以从所述激光束产生单元投影的至少一部分激光束以用于处理所述物体的表面的图案的形式反射并传送到所述物体的表面所需形状。微镜器件的微镜能够选择性地切换从激光束产生单元投影的激光束的光路。根据本发明，物体的表面可以用激光束二维或三维地加工成所需的形状。

2. 发明申请

WO2011126220A3 IMAGE ACQUISITION METHOD FOR OBJECT TO BE MEASURED USING CONFOCAL MICROSCOPE STRUCTURE 审中-公开
标题翻译：使用共焦显微结构测量对象的图像采集方法
公开(公告)号：WO2011126220A3
公开(公告)日：2012-01-26
申请号：PCT/KR2011001768
申请日：2011-03-14
申请人： SNU PRECISION CO LTD , KIM TAI WOOK
发明人： KIM TAI WOOK
IPC分类号： G02B21/06 , G01B9/04 , G01N21/17 , G01N21/39
CPC分类号： G02B21/0052
摘要： The present invention relates to an image acquisition method for an object to be measured using a confocal microscope structure. According to the present invention, the image acquisition method of the object to be measured using the confocal microscope structure is to obtain an image by generating light from the upper part of the object to be measured and by sequentially deflecting and scanning the light on XY planes of a scan area through a deflection unit including an acousto-optic deflector. The image acquisition method comprises the steps of: an information setup step for obtaining intensity information of detected light according to optical properties of each scan position surface of the scan area, by using the deflection unit, and mapping the obtained intensity information of the light into location information at each scan position to set to mapping information; a loading step for loading the mapping information stored in the information setup step according to a control signal; a transmission step for setting acoustic intensity information on the basis of the loaded mapping information, and transmitting the set information to the acousto-optic deflector; a scanning step for allowing the light inputted to and outputted from the acousto-optic deflector to be outputted by adjusting the intensity of the light according to the acoustic intensity information as soon as the light is deflected, allowing the outputted light to be scanned and reflected at each scan position through a scanning unit, and allowing the reflected light to be inputted to the scanning unit; a recording step for detecting, by an optical detector, the light which is inputted to the scanning unit after having been reflected from each scan position, and recording detected optical detection signals; a Z-axis scanning step for changing a distance between the scanning unit and the object to be measured to a certain distance in a Z-axis direction, and sequentially performing the transmission step, the scanning step, and the recording step to record the optical detection signals at each scan position in accordance with the distance change, wherein the optical detection signals of each scan position in accordance with the distance change perform the steps at least one time; and an image acquisition step for selecting one of the plurality of optical detection signals at each scan position detected through the Z-axis scanning step, and forming images at each scan position in accordance with the acoustic intensity information to obtain the overall images of the scan area. Thus, the invention provides the image acquisition method for the object to be measured using the confocal microscope structure, in which images are obtained by adjusting the intensity of the scanned light according to the intensity of the light detected from each scan position so as to match with brightness differences of images caused by differences in detection signals which are changed according to surface information such as reflectivity, roughness, and reflection angles or the like at each scan position of the scan area, thereby improving measurement precision of the scan area.
摘要翻译：本发明涉及一种使用共聚焦显微镜结构的待测物体的图像采集方法。根据本发明，使用共聚焦显微镜结构的待测量对象的图像获取方法是通过从被测量物体的上部产生光并通过在XY平面上依次偏转和扫描光来获得图像的扫描区域通过包括声光偏转器的偏转单元。图像获取方法包括以下步骤：信息设置步骤，用于通过使用偏转单元，根据所述扫描区域的每个扫描位置表面的光学特性来获得检测到的光的强度信息，并将所获得的光的强度信息映射到每个扫描位置的位置信息设置为映射信息; 加载步骤，用于根据控制信号加载存储在信息设置步骤中的映射信息; 传输步骤，用于根据加载的映射信息设置声强信息，并将设置信息发送到声光偏转器; 扫描步骤，用于通过一旦光被偏转就通过根据声强度信息调节光的强度来允许从声光偏转器输入和输出的光，从而允许输出的光被扫描和反射在每个扫描位置通过扫描单元，并且允许反射光被输入到扫描单元; 记录步骤，用于通过光学检测器检测在从每个扫描位置反射之后输入到扫描单元的光并记录检测到的光学检测信号; Z轴扫描步骤，用于将扫描单元和待测对象之间的距离在Z轴方向上改变一定距离，并且顺序地执行发送步骤，扫描步骤和记录步骤，以记录光学根据距离变化在每个扫描位置处的检测信号，其中根据距离变化的每个扫描位置的光学检测信号至少执行一次; 以及图像获取步骤，用于选择通过Z轴扫描步骤检测的每个扫描位置处的多个光学检测信号中的一个，并根据声强信息在每个扫描位置形成图像，以获得扫描的整体图像区。因此，本发明提供使用共焦显微镜结构的待测量对象的图像采集方法，其中通过根据从每个扫描位置检测到的光的强度来调整扫描光的强度来获得图像，以便匹配由于由扫描区域的每个扫描位置处根据诸如反射率，粗糙度和反射角度等的表面信息而改变的检测信号的差异引起的图像的亮度差异，从而提高了扫描区域的测量精度。

3. 发明申请

WO2009104871A3 DARK-FIELD EXAMINATION DEVICE 审中-公开
标题翻译：暗场检测装置
公开(公告)号：WO2009104871A3
公开(公告)日：2009-10-22
申请号：PCT/KR2009000249
申请日：2009-01-16
申请人： SNU PRECISION CO LTD , KIM TAI WOOK , PARK HEUI JAE , LEE IL HWAN
发明人： KIM TAI WOOK , PARK HEUI JAE , LEE IL HWAN
IPC分类号： G02F1/13
CPC分类号： G01N21/956 , G01N2021/8822 , G01N2021/9513 , G02F1/1303
摘要： The present invention relates to a dark-field examination device. The dark-field examination device according to the present invention is characterised in that it comprises: an illumination unit for irradiating light towards an examination object on a base; a reflection unit for reflecting, back towards the examination object, incident light which has been reflected by means of the examination object or incident light which has passed through the base; and an imaging unit for imaging the examination object by receiving light which has been scattered by means of the examination object, and in that the illumination unit, the reflection unit and the imaging unit are arranged in such a way that part of the light which has been irradiated from the illumination unit is scattered by means of the examination object and falls incident upon the imaging unit while another part of the light which has been irradiated from the illumination unit falls incident upon the reflection unit, and the light reflected back towards the examination object by means of the reflection unit is scattered by means of the examination object and falls incident upon the imaging unit.
摘要翻译：本发明涉及一种暗视野检查装置。根据本发明的暗视野检查装置的特征在于，它包括：照明单元，用于向基座上的检查对象照射光; 反射单元，用于向检查对象反射已经通过检查对象反射的入射光或已经穿过基座的入射光; 以及成像单元，用于通过接收通过检查对象散射的光来对检查对象进行成像，并且照明单元，反射单元和成像单元被布置成使得具有从照明单元照射的照射单元通过检查对象物散射并入射到成像单元上，而从照明单元照射的另一部分光入射到反射单元上，并且将光反射回检查通过反射单元的物体通过检查对象散射并落在成像单元上。

4. 发明申请

WO2011126219A3 IMAGE ACQUISITION METHOD AND SYSTEM FOR OBJECT TO BE MEASURED USING CONFOCAL MICROSCOPE STRUCTURE 审中-公开
标题翻译：使用协同微结构结构测量对象的图像采集方法和系统
公开(公告)号：WO2011126219A3
公开(公告)日：2012-01-05
申请号：PCT/KR2011001767
申请日：2011-03-14
申请人： SNU PRECISION CO LTD , KIM TAI WOOK
发明人： KIM TAI WOOK
IPC分类号： G02B21/06 , G01B9/04 , G01N21/17 , G01N21/39
CPC分类号： G02B21/0052
摘要： The present invention relates to an image acquisition method and system for an object to be measured using a confocal microscope structure. According to the present invention, the image acquisition method for the object to be measured using the confocal microscope structure, in which: light is generated from the upper part of an object to be measured; and images are obtained by sequentially deflecting and scanning the light on XY planes of a scan area by using an acousto-optic deflector, comprising the steps of: an intensity information acquisition step for generating light through a microscope light source, inputting the generated light to an optical path of a scanning unit so that the generated light is irradiated on the overall scan area, and obtaining and analyzing entire images of the scan area with a camera to obtain intensity information of the light at each scan position; an information setup step for mapping the obtained intensity information of the light at each scan position into location information of each scan position, and setting and storing the information to and as mapping information; a loading step for loading the mapping information stored in the information setup step according to a control signal; a transmission step for setting acoustic intensity information on the basis of the loaded mapping information, and transmitting the set information to the acousto-optic deflector; a scanning step for outputting the light, which has been inputted and outputted to and from the acousto-optic deflector, by adjusting the intensity of the light according to the acoustic intensity information as soon as the light has been deflected, scanning and reflecting the outputted light at each scan position through the scanning unit, and inputting the reflected light to the scanning unit; a recording step for detecting, by a photo detector, the light reflected from each scan position and inputted to the scanning unit, and recording detected optical detection signals; a Z-axis scanning step for changing a distance between the object to be measured and the scanning unit in a Z-axis direction to a certain distance, and recording the optical detection signals at each scan position in accordance with the change in the distance by sequentially performing said transmission step, said scanning step, and said recording step, wherein the optical detection signals at each scan position in accordance with the change in the distance are performed at least one time; and an image acquisition step for selecting one of the plurality of optical detection signals at each scan position detected through the Z-axis scanning step, and forming images at each scan position in accordance with the acoustic intensity information to obtain entire images of the scan area. Thus, the invention provides the image acquisition method and system for the object to be measured using the confocal microscope structure, in which images are obtained by adjusting the intensity of the scanned light according to the intensity of the light detected from each scan position so as to match with brightness differences of images caused by differences in detection signals which are changed according to surface information such as reflectivity, roughness, and reflection angles or the like at each scan position of the scan area, thereby improving measurement precision of the scan area.
摘要翻译：本发明涉及一种使用共聚焦显微镜结构的待测物体的图像采集方法和系统。根据本发明，使用共焦显微镜结构的待测量对象的图像获取方法，其中：从被测量物体的上部产生光; 并且通过使用声光偏转器顺序地偏转和扫描扫描区域的XY平面上的光来获得图像，包括以下步骤：强度信息获取步骤，用于通过显微镜光源产生光，将所产生的光输入到扫描单元的光路，使得所生成的光被照射在整个扫描区域上，并且利用照相机获得和分析扫描区域的整个图像，以获得每个扫描位置处的光的强度信息; 信息设置步骤，用于将获取的每个扫描位置处的光的强度信息映射到每个扫描位置的位置信息，以及将信息设置和存储为映射信息; 加载步骤，用于根据控制信号加载存储在信息设置步骤中的映射信息; 传输步骤，用于根据加载的映射信息设置声强信息，并将设置信息发送到声光偏转器; 一个扫描步骤，用于通过一旦光被偏转来调节根据声强度信息的光的强度来输出已经被输入和从声光偏转器输出的光，扫描和反射输出通过扫描单元在每个扫描位置处的光，并将反射光输入到扫描单元; 记录步骤，用于通过光检测器检测从每个扫描位置反射并输入到扫描单元的光，并记录检测到的光检测信号; Z轴扫描步骤，用于将待测物体与扫描单元之间的距离在Z轴方向上改变到一定距离;以及根据距离变化在每个扫描位置记录光学检测信号; Z轴扫描步骤，依次执行所述发送步骤，所述扫描步骤和所述记录步骤，其中至少一次执行根据所述距离变化的每个扫描位置处的光学检测信号; 以及图像获取步骤，用于选择通过Z轴扫描步骤检测的每个扫描位置处的多个光学检测信号中的一个，并根据声强信息在每个扫描位置形成图像，以获得扫描区域的整个图像。因此，本发明提供了使用共聚焦显微镜结构的待测量对象的图像采集方法和系统，其中通过根据从每个扫描位置检测到的光的强度调节扫描光的强度来获得图像，从而以与由扫描区域的每个扫描位置处根据诸如反射率，粗糙度和反射角等的表面信息而改变的检测信号的差异引起的图像的亮度差匹配，从而提高扫描区域的测量精度。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式