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    • 30. 发明申请
    • MEMORY STRUCTURE AND METHOD FOR FORMING SAME
    • 记忆结构及其形成方法
    • WO2014153834A1
    • 2014-10-02
    • PCT/CN2013/076548
    • 2013-05-31
    • TSINGHUA UNIVERSITY
    • LIU, LibinWANG, JingLIANG, Renrong
    • H01L27/115H01L21/8247
    • H01L27/11578H01L27/11551
    • A memory structure and a method for forming the same are provided. The memory structure comprises: a substrate (100); a plurality of channel structures (200) formed on the substrate (100), in which the plurality of channel structures (200) are parallel with each other, each channel structure (200) comprises a plurality of single crystal semiconductor layers (210) and a plurality of oxide layers (220) alternately stacked in a direction perpendicular to the substrate (100), and at least one of the plurality of oxide layers (220) is a single crystal oxide layer; and a plurality of gate structures (300) matched with the plurality of channel structures (200), in which each gate structure (300) comprises a gate dielectric layer (310) immediately adjacent to the plurality of channel structures and a gate electrode layer (320) immediately adjacent to the gate dielectric layer (310).
    • 提供了一种记忆结构及其形成方法。 存储器结构包括:衬底(100); 多个通道结构(200)形成在所述基板(100)上,所述多个通道结构(200)彼此平行,每个通道结构(200)包括多个单晶半导体层(210)和 在与所述基板(100)垂直的方向上交替层叠的多个氧化物层(220),所述多个氧化物层(220)中的至少一个是单晶氧化物层; 以及与所述多个通道结构(200)匹配的多个栅极结构(300),其中每个栅极结构(300)包括紧邻所述多个沟道结构的栅介质层(310)和栅电极层 320),紧邻栅介质层(310)。