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    • 111. 发明申请
    • METHOD FOR MANUFACTURING NANO-IMPRINT MOULD, METHOD FOR MANUFACTURING LIGHT-EMITTING DIODE USING THE NANO IMPRINT MOULD MANUFACTURED THEREBY, AND LIGHT-EMITTING DIODE MANUFACTURED THEREBY
    • 制造纳米印模的方法,使用其制造的纳米印花模制造发光二极管的方法和制造的发光二极管
    • WO2012091271A3
    • 2012-08-23
    • PCT/KR2011008158
    • 2011-10-28
    • POSTECH ACAD IND FOUNDLEE JONG LAMSON JUN HOSONG YANG HEE
    • LEE JONG LAMSON JUN HOSONG YANG HEE
    • B29C33/38B29C59/02G03F7/00
    • H01L33/52B82Y10/00B82Y40/00G03F7/0002G03F7/0017H01L21/02019H01L21/30617H01L29/0665H01L33/005H01L33/0075
    • The present invention relates to a method for manufacturing a nano-imprint mould, a light-emitting diode using same, and a method for manufacturing same. The method for manufacturing a light-emitting diode of the present invention comprises: a step for forming on a temporary substrate an n-type nitride semiconductor layer, a light-emitting layer, and a p-type nitride semiconductor layer; a step for forming on the p-type nitride semiconductor layer a p-type electrode; a step for forming a conductive substrate on the p-type electrode; a step for exposing the n-type nitride semiconductor layer by removing the temporary substrate; a step for forming a nano-imprint resist layer on the n-type nitride semiconductor; a step for transferring a nano-pattern on the nano-imprint resist layer by pressurizing a nano-imprint mould on the nano-imprint resist layer; a step for isolating the nano-imprint mould from the nano-imprint resist layer having formed the nano-pattern; and a step for forming an n-type electrode by etching a part of the nano-imprint resist layer having formed the nano-pattern. The present invention enables a method for manufacturing a nano-imprint mould that can efficiently and economically form a nano-pattern for enhancing the light extraction efficiency of a light-emitting diode, a method for manufacturing a light-emitting diode, and a light-emitting diode using the nano-imprint mould.
    • 本发明涉及一种纳米压印模具的制造方法,使用该方法的发光二极管及其制造方法。 本发明的发光二极管的制造方法包括:在临时衬底上形成n型氮化物半导体层,发光层和p型氮化物半导体层的步骤; 在p型氮化物半导体层上形成p型电极的工序; 在p型电极上形成导电性基板的工序; 通过去除所述临时衬底来暴露所述n型氮化物半导体层的步骤; 在n型氮化物半导体上形成纳米压印抗蚀剂层的步骤; 通过在纳米压印抗蚀剂层上加压纳米压印模具将纳米图案转印到纳米压印抗蚀剂层上的步骤; 从形成纳米图案的纳米压印抗蚀剂层分离纳米压印模具的步骤; 以及通过蚀刻形成纳米图案的纳米压印抗蚀剂层的一部分来形成n型电极的步骤。 本发明使得能够有效且经济地形成用于提高发光二极管的光提取效率的纳米图案的纳米压印模具的制造方法,发光二极管的制造方法和发光二极管的制造方法, 使用纳米压印模具的发光二极管。