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91. 发明申请

WO2016143500A1 エキシマレーザチャンバ装置审中-公开
标题翻译： EXCIMER激光室设备
公开(公告)号：WO2016143500A1
公开(公告)日：2016-09-15
申请号：PCT/JP2016/055137
申请日：2016-02-23
申请人：ギガフォトン株式会社
发明人：勝海　久和 , 竹澤　和也 , 柿崎　弘司 , 對馬　弘朗 , 浅山　武志
IPC分类号： H01S3/038
CPC分类号： H01S3/038 , H01S3/032 , H01S3/036 , H01S3/0381 , H01S3/0385 , H01S3/0388 , H01S3/08009 , H01S3/0906 , H01S3/09702 , H01S3/0971 , H01S3/0977 , H01S3/134 , H01S3/225
摘要：このエキシマレーザチャンバ装置は、レーザチャンバと、レーザチャンバ内に配置された第１の電極と、レーザチャンバ内で第１の電極と対向して配置された第２の電極と、レーザチャンバ内に配置され、高電圧と接続される電極ホルダと、第１の電極に対する第１の固定部分と電極ホルダに対する第２の固定部分とを含み、第１の電極と電極ホルダとを電気的に接続する少なくとも１つの接続端子と、電極ホルダに保持され、第１の電極を、第１の電極と第２の電極との間の放電方向と第１の電極の長手方向との両方に略垂直な方向において位置決めするガイド部材と、第１の電極を、放電方向と略平行に移動させる電極ギャップ可変装置と、を備えてもよい。
摘要翻译：该准分子激光室装置可以设置有：激光室; 设置在激光室中的第一电极; 设置成与激光室中的第一电极相对的第二电极; 电极保持器，其设置在激光室中并连接到高电压; 至少一个连接端子，其包括相对于所述第一电极的第一固定部分和相对于所述电极保持器的第二固定部分，并且将所述第一电极和所述电极夹子彼此电连接; 引导构件，其由电极保持器保持，并且使第一电极沿与第一电极和第二电极之间的排出方向大致垂直的方向和第一电极的纵向排列; 以及电极间隙可变装置，其使所述第一电极基本上平行于所述排出方向移动。

92. 发明申请

WO2013034218A1 LASER DEVICE 审中-公开
标题翻译：激光装置
公开(公告)号：WO2013034218A1
公开(公告)日：2013-03-14
申请号：PCT/EP2012/003073
申请日：2012-07-19
申请人： ALLTEC ANGEWANDTE LASERLICHT TECHNOLOGIE GMBH , ARMBRUSTER, Kevin, L. , GILMARTIN, Brad, D. , KUECKENDAHL, Peter, J. , RICHARD, Bernard, J. , RYAN, Daniel, J.
发明人： ARMBRUSTER, Kevin, L. , GILMARTIN, Brad, D. , KUECKENDAHL, Peter, J. , RICHARD, Bernard, J. , RYAN, Daniel, J.
IPC分类号： H01S3/07 , H01S3/083 , H01S3/038 , H01S3/223 , H01S3/23
CPC分类号： H01S3/08059 , H01S3/03 , H01S3/0385 , H01S3/0407 , H01S3/041 , H01S3/076 , H01S3/0835 , H01S3/2232
摘要： The invention relates to a laser device comprising at least three linear laser gain volumes (12) for a gas to be excited, connecting elements (20) for connecting adjacent laser gain volumes, the laser gain volumes being mechanically coupled to other, and forming a common volumetric space, excitation means (50) for the laser gain volumes for exciting the gas in the laser gain volumes for generating a laser light, mirrors (22) arranged in the connecting elements for reflecting laser light between the laser gain volumes, a totally reflecting rear mirror (44), and a partially reflecting output coupler (42) for coupling out a laser beam. The laser gain volumes are arranged in the shape of an open or closed ring surrounding a free central space (8) between them. The invention also relates to a method for marking an object.
摘要翻译：本发明涉及一种激光装置，其包括用于待激发的气体的至少三个线性激光增益体积（12），用于连接相邻激光增益体积的连接元件（20），激光增益体积与其它激光增益体积机械耦合，并形成公共体积空间，用于激光增益体积的激光装置（50），用于激发用于产生激光的激光增益体积中的气体，布置在连接元件中的用于在激光增益体积之间反射激光的反射镜（22），完全反射后反射镜（44）和用于耦合出激光束的部分反射的输出耦合器（42）。激光增益体积被布置成围绕它们之间的自由中心空间（8）的开放或闭合的环形。本发明还涉及一种用于标记物体的方法。

93. 发明申请

WO2009131889A2 METHOD AND APPARATUS FOR EXCIMER CURING 审中-公开
标题翻译：用于指导固化的方法和设备
公开(公告)号：WO2009131889A2
公开(公告)日：2009-10-29
申请号：PCT/US2009040809
申请日：2009-04-16
申请人： APPLIED MATERIALS INC , LUBOMIRSKY DMITRY , RASHEED MUHAMMAD M , YIEH ELLIE Y
发明人： LUBOMIRSKY DMITRY , RASHEED MUHAMMAD M , YIEH ELLIE Y
IPC分类号： H01L21/324 , H01L21/205
CPC分类号： H01L21/67115 , H01L21/3105 , H01S3/03 , H01S3/034 , H01S3/0385 , H01S3/225 , H05H1/2406 , H05H2001/2431 , H05H2001/245
摘要： An apparatus for An apparatus for generating excimer radiation is provided. The apparatus includes a housing having a housing wall. An electrode is configured within the housing. A tubular body is around the electrode. The tubular body includes an outer wall and an inner wall. At least one inert gas is between the outer wall and the inner wall, wherein the housing wall and the electrode are configured to excite the inert gas to illuminate an excimer light for curing.
摘要翻译：提供了一种用于产生准分子辐射的设备。该设备包括具有壳体壁的壳体。电极配置在壳体内。管状体围绕电极。管状体包括外壁和内壁。至少一种惰性气体位于外壁和内壁之间，其中外壳壁和电极被配置为激发惰性气体以照射准分子光以固化。

94. 发明申请

WO2008045019A3 PULSED RF HIGH PRESSURE CO 审中-公开
标题翻译：脉冲RF高压CO
公开(公告)号：WO2008045019A3
公开(公告)日：2009-10-29
申请号：PCT/US2006027080
申请日：2006-07-12
申请人： COHERENT INC , LAUGHMAN LANNY , SEGUIN VERNON , CHENAUSKY PETER P , HENSCHKE ROBERT , MUELLER ERIC R
发明人： LAUGHMAN LANNY , SEGUIN VERNON , CHENAUSKY PETER P , HENSCHKE ROBERT , MUELLER ERIC R
IPC分类号： H01S3/03 , H01S3/038 , H01S3/0975 , H01S3/223
CPC分类号： H01S3/2232 , H01S3/0315 , H01S3/0385 , H01S3/041 , H01S3/076 , H01S3/0975
摘要： An improved laser system includes a sealed-off, RF excited, diffusion cooled, high pressure, short pulsed, high peak power waveguide and slab CO2 laser that avoids problems typically associated with obtaining a diffused discharge at high gas pressures, without arcing and without corona, while maintaining the unsaturated gain and gas temperature experienced at low pressures and scaling to higher pressures. Such a system has a long operating life-time, and is capable of operation at high gas pressures to obtain relative fast rise and fall time pulses. The system emits relatively short pulse widths, with pulse energies up to and exceeding 30 mJ, with reasonably high pulse repetition rates. The system also has a low pulsed RF power duty cycle, thereby enabling the generation of high peak power pulses, as well as reasonable average power and reasonably high peak powers.
摘要翻译：改进的激光系统包括密封的，RF激发的，扩散冷却的，高压的，短脉冲的，高峰值功率波导和平板CO 2激光器，其避免了在高气压下获得扩散放电的问题，没有电弧和没有电晕同时保持在低压下经历的不饱和增益和气体温度，并将其缩放到较高的压力。这样的系统具有长的使用寿命，并且能够在高气体压力下操作以获得相对快速的上升和下降时间脉冲。系统发射脉冲宽度相对较短，脉冲能量可达30 mJ，脉冲重复率相当高。该系统还具有低脉冲RF功率占空比，从而能够产生高峰值功率脉冲，以及合理的平均功率和合理的高峰值功率。

95. 发明申请

WO2007038412A3 THERMAL-EXPANSION TOLERANT, PREIONIZER ELECTRODE FOR A GAS DISCHARGE LASER 审中-公开
标题翻译：用于气体放电激光器的热膨胀耐压前置电极
公开(公告)号：WO2007038412A3
公开(公告)日：2007-06-21
申请号：PCT/US2006037225
申请日：2006-09-25
申请人： CYMER INC A NEVADA CORP , STEIGER THOMAS D , UJAZDOWSKI RICHARD C
发明人： STEIGER THOMAS D , UJAZDOWSKI RICHARD C
IPC分类号： H01S3/097
CPC分类号： H01S3/09713 , H01S3/036 , H01S3/0384 , H01S3/0385 , H01S3/0388 , H01S3/225
摘要： A corona-discharge type, preionizer assembly for a gas discharge laser is disclosed. The assembly may include an electrode and a hollow, dielectric tube that defines a tube bore. In one aspect, the electrode may include a first elongated conductive member having a first end disposed in the bore of the tube. In addition, the electrode may include a second elongated conductive member having a first end disposed in the bore and spaced from the first end of the first conductive member. For the assembly, the first and second conductive members may be held at a same voltage potential.
摘要翻译：公开了一种用于气体放电激光器的电晕放电型预电离子组件。该组件可以包括电极和限定管孔的中空电介质管。在一个方面，电极可以包括具有设置在管的孔中的第一端的第一细长导电构件。另外，电极可以包括第二细长导电构件，该第二细长导电构件具有设置在孔中并且与第一导电构件的第一端间隔开的第一端。对于该组件，第一和第二导电构件可以保持在相同的电压电位。

96. 发明申请

WO2007038412A2 THERMAL-EXPANSION TOLERANT, PREIONIZER ELECTRODE FOR A GAS DISCHARGE LASER 审中-公开
标题翻译：耐热膨胀剂，气体放电激光用电极
公开(公告)号：WO2007038412A2
公开(公告)日：2007-04-05
申请号：PCT/US2006/037225
申请日：2006-09-25
申请人： CYMER, INC. (A NEVADA CORPORATION) , STEIGER, Thomas, D. , UJAZDOWSKI, Richard, C.
发明人： STEIGER, Thomas, D. , UJAZDOWSKI, Richard, C.
IPC分类号： H01S3/22 , H01S3/03 , H01S3/097 , H01S3/223
CPC分类号： H01S3/09713 , H01S3/036 , H01S3/0384 , H01S3/0385 , H01S3/0388 , H01S3/225
摘要： A corona-discharge type, preionizer assembly for a gas discharge laser is disclosed. The assembly may include an electrode and a hollow, dielectric tube that defines a tube bore. In one aspect, the electrode may include a first elongated conductive member having a first end disposed in the bore of the tube. In addition, the electrode may include a second elongated conductive member having a first end disposed in the bore and spaced from the first end of the first conductive member. For the assembly, the first and second conductive members may be held at a same voltage potential.
摘要翻译：公开了一种用于气体放电激光器的电晕放电型前置电离器组件。组件可以包括限定管孔的电极和中空的电介质管。在一个方面，电极可以包括第一细长导电构件，其具有设置在管孔中的第一端。此外，电极可以包括第二细长导电构件，其具有设置在孔中并与第一导电构件的第一端隔开的第一端。对于组件，第一和第二导电构件可以保持在相同的电压电位。

97. 发明申请

WO2006125433A3 ELECTRICALLY EXCITED GAS DISCHARGE LASER FOR GENERATING HIGH-REPETITION FREQUENCY LIGHT PULSES AND METHOD FOR THE PRODUCTION THEREOF 审中-公开
标题翻译：横截电动激励气体放电激光器，用于生成与高频脉冲序列和方法的光脉冲用于生产
公开(公告)号：WO2006125433A3
公开(公告)日：2007-03-29
申请号：PCT/DE2006000919
申请日：2006-05-23
申请人： LTB LASERTECHNIK GMBH , SCHOLZ MATTHIAS , SCHURACK JOHANNES , SPRANZ EDGAR , SEGSA KARL HEINZ , MUELLER JOACHIM
发明人： SCHOLZ MATTHIAS , SCHURACK JOHANNES , SPRANZ EDGAR , SEGSA KARL HEINZ , MUELLER JOACHIM
IPC分类号： H01S3/03 , H01S3/038 , H01S3/0971 , H01S3/0975 , H01S3/105
CPC分类号： H01S3/09713 , H01S3/03 , H01S3/0384 , H01S3/0385 , H01S3/0388 , H01S3/0975 , H01S3/105
摘要： Gas discharge lasers comprise a discharge tube, main and auxiliary electrodes, resonator mirrors and an electrical excitation circuit, which generates light pulses in a sub-nanosecond range. Said lasers have a large application spectrum, for example in the form of an excitation or ionisation light source for different spectroscopy methods associated with an UV-microscope. The known gas discharge lasers are provided with different seals in the discharge tube area at a final assembly stage and are unable to be adjusted afterwards. The inventive maintenance-free gas discharge laser (GL) exhibits a performance of about 100 millions light pulses, the main electrodes (HE1, HE2) are mounted, for the accurate adjustment thereof, in deformable carrier baths (TW) and the resonator mirrors (RS) are mounted in deformable carrier baths (TR), wherein said baths are assembled by hard soldering (HL) in such a way that they are integrally jointed with partial metal layers (MB) on the discharge tube (ER). All ultra-high vacuum-suitable components are sintered in such a way that water is completely removed at a second water limit (355°C). The preferred production method consists in carrying out hard soldering, at greater than 900 °C, of the carrying components with the metal layers (MB) on the discharge tube (ER), in welding the resonator (RS) mirrors, in sintering at the second water limit and subsequently in carrying out the accurate adjustment.
摘要翻译：气体放电激光器的放电管中，主电极和辅助电极，谐振腔反射镜和电动励磁电路可以产生光脉冲下降到亚纳秒范围内。它们具有广泛的应用范围，例如作为激励或Ionisationslichtquelle在各种光谱技术，以及与所述UV显微镜连接。已知的气体放电激光器具有在放电管的区域不同的密封件，并且不会在最终组装状态下被重新调整。在本发明，免维护气体放电激光器（GL），在大约1亿光脉冲的范围内的效率是用于精细调整时，在可变形的支撑托盘的主电极（HE1，HE2）（TW）和在所述可变形的支承环（TR）的谐振镜（RS）被安装时，通过硬钎焊（HL）与内聚在放电管（ER）部分金属层（MB）被连接。所有超高真空相容的组分是可烘烤通过第二水极限（355℃）的完全除去水。用于制备的优选方法提供了上面在放电管部分金属层（MB）（ER），谐振器反射镜（RS），经由第二水边界和随后的精细调整时的烘烤的焊接的载波要素的900℃的钎焊。

98. 发明申请

WO2005104311A3 DUV LIGHT SOURCE OPTICAL ELEMENT IMPROVEMENTS 审中-公开
标题翻译： DUV光源光学元件的改进
公开(公告)号：WO2005104311A3
公开(公告)日：2007-03-22
申请号：PCT/US2005006932
申请日：2005-03-04
申请人： CYMER INC , SANDSTROM RICHARD L , ALGOTS J MARTIN , BROWN JOSHUA C , CYBULSKY RAYMOND F , DUNLOP JOHN , HOWEY JAMES K , MORTON RICHARD G , PAN XIAOJIANG J , PARTLO WILLIAM N , PUTRIS FIRAS F , WATSON TOM A , YAGER THOMAS A
发明人： SANDSTROM RICHARD L , ALGOTS J MARTIN , BROWN JOSHUA C , CYBULSKY RAYMOND F , DUNLOP JOHN , HOWEY JAMES K , MORTON RICHARD G , PAN XIAOJIANG J , PARTLO WILLIAM N , PUTRIS FIRAS F , WATSON TOM A , YAGER THOMAS A
IPC分类号： H01S3/22 , G01B9/02 , G01J1/42 , G01J9/02 , G03F7/20 , H01S3/00 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/08 , H01S3/081 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/10 , H01S3/102 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/11 , H01S3/13 , H01S3/134 , H01S3/139 , H01S3/223 , H01S3/225 , H01S3/23
CPC分类号： H01S3/02 , G01J1/429 , G01J9/02 , G03F7/70025 , G03F7/70575 , G03F7/70933 , H01S3/0057 , H01S3/0071 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0401 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/0812 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： A high power narrow band, high repetition rate laser light source optical improvement apparatus and methods are disclosed with a fast angularly positionable mirror having a mirror mounting frame, a reflective optic with a coefficient different from that of the mounting frame, at least one flexure mount framed in the mounting frame that is flexible having flexure arm attached the flexture to the mounting frame. The apparatus may include a flexure force mechanism having an elongated rod. The force mechanism may prestress the flexure. The mirror maybe a grating which includes a substrate with metallic layer formed on the substrate, and a protective coating made of silica formed on the reflective metallic layer. The grating maybe actively tuned using an electro- or magneto- sensitive element. Oxides of the metal in the reflective layer may be removed by a hydrogen purge system exposed to deep ultraviolet radiation.
摘要翻译：公开了一种高功率窄带，高重复率激光光源光学改进装置和方法，其具有快速可角度定位的反射镜，其具有镜安装框架，具有与安装框架系数不同的系数的反射光学元件，至少一个弯曲安装座框架在柔性的安装框架中，挠性臂将挠性件连接到安装框架。该装置可以包括具有细长杆的挠曲力机构。力机构可以预应力挠曲。镜子可以是包括在基板上形成有金属层的基板的光栅，以及形成在反射金属层上的由二氧化硅形成的保护涂层。光栅可能会使用电磁感应元件或磁敏元件进行主动调谐。可以通过暴露于深紫外线辐射的氢气清除系统来去除反射层中金属的氧化物。

99. 发明申请

WO2006045111A3 WAGON WHEEL OPTICAL CAVITIES 审中-公开
标题翻译： WAGON轮轴光学
公开(公告)号：WO2006045111A3
公开(公告)日：2006-06-08
申请号：PCT/US2005038238
申请日：2005-10-18
申请人： HILLIARD DONALD B
发明人： HILLIARD DONALD B
IPC分类号： H01S3/06 , G02B5/26 , H01S3/07 , H01S3/08
CPC分类号： H01S3/0602 , H01S3/025 , H01S3/0385 , H01S3/042 , H01S3/0604 , H01S3/0612 , H01S3/07 , H01S3/08004 , H01S3/08022 , H01S3/08045 , H01S3/08059 , H01S3/0813 , H01S3/0941 , H01S3/225
摘要： A laser cavity structure (1) is disclosed which pertains to laser resonator geometries possessing circular symmetry, such as in the case of disk or spherical resonators. The term "Wagon Wheel Cavity" herein refers to circular optical cavities formed by VHF Bragg reflectors (5), wherein cavity size is sufficiently large to provide a multitude of modes at the desired wavelength using normal interference filters with relatively large index differences, so that such normal interference means will provide substantial reflectivity for an undesirably large number of modes, since the cavity sizes addressed herein are typically orders of magnitude greater in dimension than the optical wavelength for which they are intended.
摘要翻译：公开了一种激光腔结构（1），其涉及具有圆形对称性的激光谐振器几何形状，例如在盘或球面谐振器的情况下。术语“货车轮腔”是指由VHF布拉格反射器（5）形成的圆形光学腔，其中腔体尺寸足够大，以便使用具有相对大的折射率差异的正常干涉滤光片在期望波长处提供多种模式，使得这样的正常干扰装置将为不期望的大量模式提供实质的反射率，因为这里所述的腔体尺寸通常比它们所期望的光学波长大一个数量级。

100. 发明申请

WO2005013441A3 CATHODES FOR FLUORINE GAS DISCHARGE LASERS 审中-公开
标题翻译：氟气排放激光灯
公开(公告)号：WO2005013441A3
公开(公告)日：2005-10-20
申请号：PCT/US2004023663
申请日：2004-07-21
申请人： CYMER INC , STEIGER THOMAS D , BROWN JOSHUA C , DUFFEY THOMAS P , GILLESPIE WALTER D , MORTON RICHARD G , DYER TIMOTHY S
发明人： STEIGER THOMAS D , BROWN JOSHUA C , DUFFEY THOMAS P , GILLESPIE WALTER D , MORTON RICHARD G , DYER TIMOTHY S
IPC分类号： H01R43/00 , H01S20060101 , H01S3/00 , H01S3/036 , H01S3/038 , H01S3/097 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/038 , H01S3/036 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0388 , H01S3/097 , H01S3/09702 , H01S3/0971 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258
摘要： A fluorine gas discharge laser electrode (70) for a gas discharge laser having a laser gas containing fluorine is disclosed which may comprise a copper and copper alloy cathode body having an upper curved region containing the discharge footprint (74) for the cathode comprising copper and a lower portion comprising a copper alloy.
摘要翻译：公开了一种用于具有含氟激光气体的气体放电激光器的氟气放电激光电极（70），该氟气气体放电激光电极（70）包括铜和铜合金阴极体，该铜和铜合金阴极体具有上部弯曲区域，该上部弯曲区域包含用于阴极的放电足迹（74）包括铜合金的下部。

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