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1. 发明授权

US6101164A High density recording by a conductive probe contact with phase change recording layer 失效
标题翻译：通过导电探针的高密度记录与相变记录层接触
公开(公告)号：US6101164A
公开(公告)日：2000-08-08
申请号：US760420
申请日：1996-12-04
申请人： Hiroyuki Kado , Takao Tohda , Osamu Kusumoto , Kazuo Yokoyama
发明人： Hiroyuki Kado , Takao Tohda , Osamu Kusumoto , Kazuo Yokoyama
IPC分类号： G01Q30/04 , G11B5/00 , G11B9/00 , G11B11/00 , G11B11/105 , G11B13/04
CPC分类号： G11B5/00 , B82Y10/00 , G11B11/007 , G11B11/10506 , G11B11/10508 , G11B11/10517 , G11B11/10532 , G11B9/14 , G11B9/1436 , G11B9/1472 , G11B9/149 , G11B13/045 , Y10S977/947
摘要： An information recording and reproducing device includes an inorganic recording medium having at least one material selected from the group consisting of a phase change material, a shape changing material and a magnetic material. A conductive probe, which is proximate to or contacting a recording surface of the recording medium, is movable relative to the recording medium. Information is recorded by heating the recording medium in the area where the conductive probe is proximate or contacting to change a physical state therein. The area of the recording medium where the conductive probe is proximate or contacting is heated by applying voltage between the conductive probe and the recording medium.
摘要翻译：信息记录和再现装置包括具有选自由相变材料，形状改变材料和磁性材料组成的组中的至少一种材料的无机记录介质。靠近或接触记录介质的记录表面的导电探针可相对于记录介质移动。通过在导电探针接近或接触的区域中加热记录介质以改变其中的物理状态来记录信息。通过在导电探针和记录介质之间施加电压来加热导电探针接近或接触的记录介质的区域。

2. 发明授权

US5381753A Fabrication method of fine structures 失效
标题翻译：精细结构的制造方法
公开(公告)号：US5381753A
公开(公告)日：1995-01-17
申请号：US55728
申请日：1993-04-30
申请人： Michio Okajima , Osamu Kusumoto , Takao Tohda , Kazuo Yokoyama , Motoshi Shibata
发明人： Michio Okajima , Osamu Kusumoto , Takao Tohda , Kazuo Yokoyama , Motoshi Shibata
IPC分类号： C30B29/62 , C30B11/00 , C30B11/12 , H01L29/06 , C30B23/00
CPC分类号： B82Y30/00 , B82Y10/00 , C30B11/00 , C30B11/12 , C30B29/60
摘要： A fabrication method provides fine structures which have few carrier trap centers and light absorption levels and find applications in quantum wires and quantum boxes having arbitrary configurations at least within a two-dimensional plane. The fabrication method comprises the steps of having a sharp tip held in close proximity to the surface of a substrate 1 and having a metal constituting the tip evaporated from the top. Alternatively, a metal contained in ambient vapor or a solution decomposed by a tunnel current or the like is provided. The metal is deposited locally on the substrate surface. A finely structured crystal is grown on the locally deposited region by a vapor phase-liquid phase-solid phase reaction.
摘要翻译：制造方法提供了具有很少的载流子阱中心和光吸收水平的精细结构，并且在至少在二维平面内具有任意构型的量子线和量子盒中得到应用。该制造方法包括以下步骤：将锋利的尖端保持在靠近基板1的表面并且具有构成从顶部蒸发的尖端的金属。或者，提供包含在环境蒸气中的金属或由隧道电流等分解的溶液。金属在衬底表面局部沉积。通过气相 - 液相 - 固相反应在局部沉积区域上生长精细结晶的晶体。

3. 发明授权

US5679888A Dynamic quantity sensor and method for producing the same, distortion resistance element and method for producing the same, and angular velocity sensor 失效
标题翻译：动态量传感器及其制造方法，抗变形元件及其制造方法以及角速度传感器
公开(公告)号：US5679888A
公开(公告)日：1997-10-21
申请号：US538577
申请日：1995-10-03
申请人： Takao Tohda , Hiroyuki Kado , Ichiro Tanahashi , Yoshio Manabe , Masaru Yoshida
发明人： Takao Tohda , Hiroyuki Kado , Ichiro Tanahashi , Yoshio Manabe , Masaru Yoshida
IPC分类号： G01B7/16 , G01C19/56 , G01D5/18 , G01K7/22 , G01L1/20 , G01P15/00 , G01P15/08 , G01P15/12 , G01Q10/00 , G01Q20/04 , G01Q60/24 , G01Q60/38 , G01Q70/16 , G01Q90/00 , G01D5/06 , G01B7/34
CPC分类号： G01B7/18 , B82Y35/00 , G01C19/56 , G01K7/226 , G01L1/20 , G01P15/0802 , G01P15/0894 , G01P15/12 , G01Q20/04 , G01P2015/0828
摘要： The dynamic quantity sensor includes an electrically insulating substance layer and at least one pair of electrodes contacting the electrically insulating substance layer, wherein a plurality of conductive particles are dispersed in the electrically insulating substance layer so that a tunnel current flows when a voltage is applied between the at least one pair of electrodes, and a dynamic quantity relating to a distance between the conductive particles is detected based on the tunnel current.
摘要翻译：动态量传感器包括电绝缘物质层和与电绝缘物质层接触的至少一对电极，其中多个导电颗粒分散在电绝缘物质层中，使得当施加电压时隧道电流流动基于隧道电流来检测至少一对电极和与导电粒子之间的距离相关的动态量。

4. 发明授权

US5468959A Scanning probe microscope and method for measuring surfaces by using this microscope 失效
标题翻译：扫描探针显微镜和使用该显微镜测量表面的方法
公开(公告)号：US5468959A
公开(公告)日：1995-11-21
申请号：US210397
申请日：1994-03-18
申请人： Takao Tohda , Hiroyuki Kado , Shinichi Yamamoto
发明人： Takao Tohda , Hiroyuki Kado , Shinichi Yamamoto
IPC分类号： G01B5/28 , G01B7/34 , G01B21/30 , G01N27/00 , G01N37/00 , G01Q10/04 , G01Q20/02 , G01Q30/02 , G01Q30/04 , G01Q60/04 , G01Q60/10 , G01Q60/24 , G11B9/14 , H01J37/28
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q60/04 , Y10S977/851
摘要： A microscope comprises a cantilever having a distal end equipped with an electrically conductive probe allowing current to flow and having a fine tip whose voltage is controllable, a position control mechanism for controlling position of a sample with respect to a base end of the cantilever, a small displacement measuring mechanism for measuring a deflection amount of the cantilever, and a deflection control mechanism for controlling deflection of the cantilever so as to adjust a distance between the fine tip of the probe and the sample. A method for measuring surfaces using this novel microscope comprises steps of: maintaining deflection of the cantilever at a constant value by using the small displacement measuring mechanism and the deflection control mechanism; applying a constant voltage between the electrically conductive probe and the sample; scanning the sample along surface of the sample with the probe, while a tunneling current is maintained at a constant value by using the position control mechanism; and measuring a control amount of the position control mechanism in a direction vertical to the sample and a control amount of the deflection control mechanism.
摘要翻译：显微镜包括具有远端的悬臂，其具有允许电流流动并具有可控电压的细尖端的导电探针，用于控制样品相对于悬臂的基端的位置的位置控制机构，用于测量悬臂的偏转量的小位移测量机构，以及用于控制悬臂的偏转的偏转控制机构，以调节探针的细尖端与样品之间的距离。使用这种新型显微镜测量表面的方法包括以下步骤：通过使用小位移测量机构和偏转控制机构来将悬臂的偏转维持在恒定值; 在导电探针和样品之间施加恒定电压; 用探头沿着样品的表面扫描样品，同时通过使用位置控制机构将隧道电流维持在恒定值; 并且在垂直于样品的方向和偏转控制机构的控制量中测量位置控制机构的控制量。

5. 发明授权

US5336369A Method of making a cantilever stylus for an atomic force microscope 失效
标题翻译：制作原子力显微镜的悬臂式触针的方法
公开(公告)号：US5336369A
公开(公告)日：1994-08-09
申请号：US67612
申请日：1993-05-27
申请人： Hiroyuki Kado , Takao Tohda
发明人： Hiroyuki Kado , Takao Tohda
IPC分类号： G01B21/30 , C23F1/02 , G01B7/34 , G01N37/00 , G01Q60/38 , G01Q60/40 , G01Q60/42 , G01R3/00 , H01J37/20 , H01J37/28 , H01L21/465 , H05K3/06
CPC分类号： G01Q60/38 , B82Y35/00 , Y10S977/878 , Y10T29/49007
摘要： A method of making a cantilever stylus for an atomic force microscope comprises forming a film on a surface of a substrate, the film comprising a stylus material that is different from the material of the substrate. A resist thin film of a material different from the stylus material is formed on the surface of the stylus material so as to have a tip. The stylus material is then etched with an isotropic etching technique to a depth of etching greater than the radius of curvature of the tip of the resist film so that the stylus material, having two opposite principal surfaces, has a tip formed on one of the principal surfaces with a radius of curvature less than 0.1 .mu.m which protrudes beyond a tip of the other principal surface. At least the resist thin film and the substrate at the tips of the principal surfaces of the stylus material are then removed.
摘要翻译：制造用于原子力显微镜的悬臂触针的方法包括在基板的表面上形成膜，所述膜包括不同于所述基板的材料的触针材料。在触针材料的表面上形成具有与触针材料不同的材料的抗蚀剂薄膜以具有尖端。然后用各向同性蚀刻技术将触针材料蚀刻到蚀刻深度大于抗蚀剂膜的尖端的曲率半径，使得具有两个相对主表面的触笔材料具有形成在主体之一上的尖端具有小于0.1μm的曲率半径的表面突出超过另一主表面的尖端。然后去除至少抗蚀剂薄膜和触针材料主表面顶端的基底。

6. 发明授权

US5731598A Single electron tunnel device and method for fabricating the same 失效
标题翻译：单电子隧道装置及其制造方法
公开(公告)号：US5731598A
公开(公告)日：1998-03-24
申请号：US665890
申请日：1996-06-19
申请人： Hiroyuki Kado , Takao Tohda , Ichiro Tanahashi , Yoshio Manabe
发明人： Hiroyuki Kado , Takao Tohda , Ichiro Tanahashi , Yoshio Manabe
IPC分类号： H01L21/335 , H01L21/34 , H01L29/76 , H01L29/88 , H01L29/06 , H01L39/00
CPC分类号： B82Y10/00 , H01L29/66439 , H01L29/66969 , H01L29/7613 , H01L29/88
摘要： The single electron tunnel device of this invention includes: a multiple tunnel junction layer including multiple tunnel junctions; and first and second electrodes for applying a voltage to the multiple tunnel junction layer, wherein the multiple tunnel junction layer includes an electrically insulating thin film and metal particles and/or semiconductor particles dispersed in the electrically insulating thin film.
摘要翻译：本发明的单电子隧道装置包括：多隧道结层，包括多个隧道结; 以及用于向多重隧道结层施加电压的第一和第二电极，其中所述多重隧道结层包括分散在所述电绝缘薄膜中的电绝缘薄膜和金属颗粒和/或半导体颗粒。

7. 发明授权

US5357787A Cantilever for atomic force microscope and method of manufacturing the same 失效
标题翻译：悬臂式原子力显微镜及其制造方法
公开(公告)号：US5357787A
公开(公告)日：1994-10-25
申请号：US201087
申请日：1994-02-24
申请人： Hiroyuki Kado , Takao Tohda
发明人： Hiroyuki Kado , Takao Tohda
IPC分类号： G01Q70/10 , G01B5/28 , G01B7/34 , G01B21/30
CPC分类号： G01Q60/38 , B82Y15/00 , B82Y35/00 , G01Q70/12 , Y10S977/849 , Y10S977/851 , Y10S977/863 , Y10S977/873 , Y10S977/878 , Y10S977/879 , Y10S977/881
摘要： A cantilever for an atomic force microscope, has a probe formed by a structure at least partially including a linear needle crystal. A method of manufacturing the cantilever comprises the steps of applying adhesive to a distal end portion of a cantilever body and placing on the adhesive, in a state where the cantilever body is held substantially horizontally, a structure having the shape of at least four needle crystals combined with one another so as to bond the structure to the distal end portion of the cantilever body.
摘要翻译：用于原子力显微镜的悬臂具有由至少部分包括线性针状晶体的结构形成的探针。制造悬臂的方法包括以下步骤：将粘合剂施加到悬臂体的远端部分并且在悬臂体基本保持水平的状态下放置在粘合剂上，具有至少四个针状结晶形状的结构彼此组合以将结构粘合到悬臂体的远端部分。

8. 发明授权

US5497656A Method of measuring a surface profile using an atomic force microscope 失效
标题翻译：使用原子力显微镜测量表面轮廓的方法
公开(公告)号：US5497656A
公开(公告)日：1996-03-12
申请号：US393029
申请日：1995-02-23
申请人： Hiroyuki Kado , Takao Tohda
发明人： Hiroyuki Kado , Takao Tohda
IPC分类号： G01B21/30 , G01Q60/00 , G01B7/34 , G01Q10/06 , G01Q60/24 , H01J37/28
CPC分类号： G01Q10/065 , B82Y35/00 , Y10S977/851 , Y10S977/852
摘要： An atomic force microscope is preferably used to observe a sample surface and measure a surface profile of a sample by making use of interatomic forces existing between a probing tip and the sample surface. The atomic force microscope includes a cantilever having a probing tip, a laser diode for emitting a laser beam, a lens for focusing the laser beam emitted from the laser diode on the cantilever, and a photodiode for detecting a light beam reflected from the cantilever to thereby detect the amount of deflection of the cantilever. The atomic force microscope further includes a mechanism for finely moving one of a sample and the cantilever in three different directions, and a controller or computer for controlling the mechanism and for imaging the sample surface based on the amount of deflection of the cantilever at a plurality of locations of the sample surface. By this construction, after measurement of the sample surface at a first location thereof, the sample is moved away from the probing tip by a given length and is further moved relative to the probing tip so that the probing tip is positioned above a second location of the sample. Thereafter, the sample is further moved towards the probing tip at the second location by a length substantially equal to the given length. The movement of the sample is repeated until measurements of the sample surface at the plurality of locations thereof are completed.
摘要翻译：优选使用原子力显微镜来观察样品表面并通过利用探测尖端和样品表面之间存在的原子力来测量样品的表面轮廓。原子力显微镜包括具有探测尖端的悬臂，用于发射激光束的激光二极管，用于将从激光二极管发射的激光束聚焦在悬臂上的透镜，以及用于检测从悬臂反射的光束的光电二极管从而检测悬臂的偏转量。原子力显微镜还包括用于在三个不同方向上微细地移动样品和悬臂中的一个的机构，以及控制器或计算机，用于控制机构并基于多个悬臂的偏转量来对样品表面进行成像的样品表面的位置。通过这种结构，在样品表面的第一位置测量之后，将样品从探测尖端移动给定长度，并且相对于探测尖端进一步移动，使得探测尖端位于第二位置的第二位置例子。此后，样品进一步在第二位置处朝向探测尖端移动基本上等于给定长度的长度。重复样品的移动，直到其多个位置处的样品表面的测量完成。

9. 发明授权

US5239863A Cantilever stylus for use in an atomic force microscope and method of making same 失效
标题翻译：用于原子力显微镜的CANTILEVER STYLUS及其制造方法
公开(公告)号：US5239863A
公开(公告)日：1993-08-31
申请号：US699951
申请日：1991-05-14
申请人： Hiroyuki Kado , Takao Tohda
发明人： Hiroyuki Kado , Takao Tohda
IPC分类号： G01B21/30 , C23F1/02 , G01B7/34 , G01N37/00 , G01Q60/38 , G01Q60/40 , G01Q60/42 , G01R3/00 , H01J37/20 , H01J37/28 , H01L21/465 , H05K3/06
CPC分类号： G01Q60/38 , B82Y35/00 , Y10S977/878 , Y10T29/49007
摘要： An atomic force microscope for observing a sample surface (7) is internally provided with a cantilever stylus (1, 14, 23) and makes use of atomic forces acting between the cantilever stylus (1, 14, 23) and the sample surface. The cantilever stylus (1, 14, 23) includes a cantilever (2, 15, 22) having a fixed end and a free end and having two principal surfaces. The cantilever stylus (1, 14, 23) further includes two tip portions formed in the principal surfaces of the free end, respectively. One of the two tip portions has a radius of curvature less than 0.1 .mu.m and protrudes beyond the other tip portion so that the former may be used to observe the sample surface (7).
摘要翻译：用于观察样品表面（7）的原子力显微镜在内部设置有悬臂触针（1,14,23），并利用作用在悬臂测针（1,14,23）和样品表面之间的原子力。悬臂触针（1,14,23）包括具有固定端和自由端并具有两个主表面的悬臂（2,15,22）。悬臂触针（1,14,23）还包括分别形成在自由端的主表面中的两个尖端部分。两个尖端部分中的一个具有小于0.1μm的曲率半径并且突出超过另一个尖端部分，使得前者可以用于观察样品表面（7）。

10. 发明授权

US5186789A Method of making a cantilever stylus for use in an atomic force microscope 失效
标题翻译：制造用于原子力显微镜的CANTILEVER STYLUS的方法
公开(公告)号：US5186789A
公开(公告)日：1993-02-16
申请号：US799993
申请日：1991-11-29
申请人： Nobuhiro Tsuda , Hirofumi Yamada , Hiroyuki Kado , Takao Tohda
发明人： Nobuhiro Tsuda , Hirofumi Yamada , Hiroyuki Kado , Takao Tohda
IPC分类号： G01B21/30 , B44C1/22 , B81C1/00 , C03C15/00 , C23F1/00 , G01B7/34 , G01Q60/38 , G01Q70/14 , H01J37/28 , H01L21/306
CPC分类号： G01Q60/38 , B82Y35/00
摘要： A cantilever stylus suited for use in an atomic force microscope is made in the following processes: forming a first film on a substrate; forming a second film of metallic material on an external surface of the first film; forming a photoresist film on an external surface of the second film by making use of a photolithography technique; performing etching with respect to the second film with only a portion thereof covered with the photoresist film left on the first film; and further performing etching with respect to the first film with the second film being used as a resist film so that the first film may be configured into a cantilever stylus.

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