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    • 2. 发明授权
    • Scanning probe microscope and method for measuring surfaces by using
this microscope
    • 扫描探针显微镜和使用该显微镜测量表面的方法
    • US5468959A
    • 1995-11-21
    • US210397
    • 1994-03-18
    • Takao TohdaHiroyuki KadoShinichi Yamamoto
    • Takao TohdaHiroyuki KadoShinichi Yamamoto
    • G01B5/28G01B7/34G01B21/30G01N27/00G01N37/00G01Q10/04G01Q20/02G01Q30/02G01Q30/04G01Q60/04G01Q60/10G01Q60/24G11B9/14H01J37/28
    • G01Q10/06B82Y35/00G01Q60/04Y10S977/851
    • A microscope comprises a cantilever having a distal end equipped with an electrically conductive probe allowing current to flow and having a fine tip whose voltage is controllable, a position control mechanism for controlling position of a sample with respect to a base end of the cantilever, a small displacement measuring mechanism for measuring a deflection amount of the cantilever, and a deflection control mechanism for controlling deflection of the cantilever so as to adjust a distance between the fine tip of the probe and the sample. A method for measuring surfaces using this novel microscope comprises steps of: maintaining deflection of the cantilever at a constant value by using the small displacement measuring mechanism and the deflection control mechanism; applying a constant voltage between the electrically conductive probe and the sample; scanning the sample along surface of the sample with the probe, while a tunneling current is maintained at a constant value by using the position control mechanism; and measuring a control amount of the position control mechanism in a direction vertical to the sample and a control amount of the deflection control mechanism.
    • 显微镜包括具有远端的悬臂,其具有允许电流流动并具有可控电压的细尖端的导电探针,用于控制样品相对于悬臂的基端的位置的位置控制机构, 用于测量悬臂的偏转量的小位移测量机构,以及用于控制悬臂的偏转的偏转控制机构,以调节探针的细尖端与样品之间的距离。 使用这种新型显微镜测量表面的方法包括以下步骤:通过使用小位移测量机构和偏转控制机构来将悬臂的偏转维持在恒定值; 在导电探针和样品之间施加恒定电压; 用探头沿着样品的表面扫描样品,同时通过使用位置控制机构将隧道电流维持在恒定值; 并且在垂直于样品的方向和偏转控制机构的控制量中测量位置控制机构的控制量。