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1. 发明授权

US11619649B1 Atomic force microscope equipped with optical measurement device and method of acquiring information on surface of measurement target using the same 有权
公开(公告)号：US11619649B1
公开(公告)日：2023-04-04
申请号：US17535695
申请日：2021-11-26
申请人： PARK SYSTEMS CORP.
发明人： Sang-il Park , Byoung-Woon Ahn , Seung-Ho Han , Sang-Joon Cho
IPC分类号： G01Q30/02 , G01Q10/04 , G01Q60/40
摘要： An atomic force microscope equipped with an optical measurement device is disclosed. An atomic force microscope equipped with an optical measurement device which acquires characteristics of a surface of a measurement target by moving a probe along the surface of the measurement target while scanning the measurement target on an XY plane using an XY scanner for supporting the measurement target, includes: an optical measurement device including a lighting unit configured to allow light to enter the surface of the measurement target, and a detection unit configured to detect light reflected by the surface of the measurement target, the optical measurement device being configured to acquire the characteristics of the surface of the measurement target by the scanning by the XY scanner; and a control device configured to control an operation of the atomic force microscope and an operation of the optical measurement device.

2. 发明申请

US20190170651A1 PROBE MANUFACTURING METHOD AND PROBE 审中-公开
公开(公告)号：US20190170651A1
公开(公告)日：2019-06-06
申请号：US16313761
申请日：2017-06-30
申请人： KYOTO UNIVERSITY , HORIBA, Ltd.
发明人： Masayuki NISHI , Kazuyuki HIRAO , Daisuke TERANISHI , Hiroki ITASAKA , Nobuyuki NAKA , Yoshito OKUNO , Shinsuke KASHIWAGI , Yasushi NAKATA
IPC分类号： G01N21/65 , G01Q70/18 , G01Q60/42 , G01Q60/40
摘要： A needle-shaped body protrudes from a cantilever made of Si. Furthermore, the rear face of the cantilever is coated with aluminum having a Fermi level higher than that of Si. The cantilever is dipped into an aqueous silver nitride solution containing the ions of Ag serving as a second metal. The electrons of Si flow out to the aqueous silver nitride solution due to the existence of the aluminum, and Ag nanostructures are precipitated at the tip end of the needle-shaped body. A probe for tip-enhanced Raman scattering in which the Ag nanostructures are fixed to the tip end of the needle-shaped body is manufactured. The sizes and shapes of the Ag nanostructures can be controlled properly by adjusting the concentration of the aqueous silver nitride solution and the time during which the cantilever is dipped into the aqueous silver nitride solution.

3. 发明授权

US10107835B2 Tip enhanced laser assisted sample transfer for biomolecule mass spectrometry 有权
公开(公告)号：US10107835B2
公开(公告)日：2018-10-23
申请号：US15541731
申请日：2016-01-07
申请人： BOARD OF SUPERVISORS OF LOUISIANA STATE UNIVERSITY AND AGRICULTURAL AND MECHANICAL COLLEGE
发明人： Kermit King Murray , Suman Ghorai , Chinthaka Aravinda Seneviratne
IPC分类号： H01J49/00 , G01Q30/02 , G01Q60/40 , B23K26/16 , H01J49/04 , H01J49/40
摘要： Disclosed are various embodiments for transferring molecules from a surface for mass spectrometry and other sample analysis methods, and the like. A laser is focused onto a tip of an atomic force microscope to remove and capture a quantity of molecules from the surface, so they can be transferred to a mass spectrometer or another instrument for analysis.

4. 发明申请

US20160033550A1 CONDUCTIVE ATOMIC FORCE MICROSCOPE AND METHOD OF OPERATING THE SAME 有权
标题翻译：导电原子力显微镜及其操作方法
公开(公告)号：US20160033550A1
公开(公告)日：2016-02-04
申请号：US14694115
申请日：2015-04-23
申请人： Samsung Electronics Co., Ltd.
发明人： Hyun-woo KIM , Woo-seok KO , Young-hwan KIM , Jeong-hoi KIM , Baek-man SUNG , Hyung-su SON , Chae-ho SHIN , Yu-sin YANG , Jae-youn WI , Sang-kil LEE , Chung-sam JUN
IPC分类号： G01Q60/40
CPC分类号： G01Q60/40 , G01Q70/06
摘要： A conductive atomic force microscope including a plurality of probe structures each including a probe and a cantilever connected thereto, a power supplier applying a bias voltage, a current detector detecting a first current flowing between a sample object and each of the probes and a second current flowing between a measurement object and each of the probes, and calculating representative currents for the sample and measurement objects based on the first and second currents, respectively, and a controller calculating a ratio between representative currents of the sample object measured by each of the probe structures, calculating a scaling factor for scaling the representative current with respect to the measurement object measured by each of the probes, and determine a reproducible current measurement value based on the second measurement current and the scaling factor may be provided.
摘要翻译：一种导电原子力显微镜，包括多个探针结构，每个探针结构包括探针和连接到其上的悬臂，施加偏置电压的电源，检测在样品物体和每个探针之间流动的第一电流的电流检测器和第二电流在测量对象和每个探针之间流动，并且基于第一和第二电流分别计算样本和测量对象的代表性电流，以及控制器，计算由每个探针测量的样本对象的代表性电流之间的比率计算相对于由每个探针测量的测量对象的代表性电流的缩放因子，并且可以提供基于第二测量电流和缩放因子来确定可重现的电流测量值。

5. 发明申请

US20120192319A1 Fabrication of a microcantilever microwave probe 有权
标题翻译：微型悬臂微波探头的制作
公开(公告)号：US20120192319A1
公开(公告)日：2012-07-26
申请号：US13009990
申请日：2011-01-20
申请人： Xinxin Li , Yongliang Yang
发明人： Xinxin Li , Yongliang Yang
IPC分类号： G01Q60/40
CPC分类号： G01Q60/22 , G01Q60/40
摘要： A microwave probe having a metal tip on the free end of a microcantilever. In one embodiment, a pyramidal pit is isotropically etched in a device wafer of monocrystalline silicon. Oxidation may sharpen the pit. Deposited metal forms the metal tip in the pit and a bottom shield. Other metal sandwiched between equally thick dielectric layers contact the tip and form a conduction path along the cantilever for the probe and detected signals. Further metal forms a top shield overlying the conduction path and the dielectrically isolated tip and having equal thickness to the bottom shield, thus producing together with the symmetric dielectric layers a balanced structure with reduced thermal bending. The device wafer is bonded to a handle wafer. The handle is formed and remaining silicon of the device wafer is removed to release the cantilever.
摘要翻译：微型探针在微型悬臂梁的自由端上具有金属尖端。在一个实施例中，在单晶硅的器件晶片中各向同性蚀刻金字塔形凹坑。氧化可能会削弱坑。沉积的金属在凹坑中形成金属尖端和底部屏蔽。夹在同等厚度的电介质层之间的其他金属接触尖端，并形成沿着悬臂的探针和检测信号的导电路径。另外的金属形成覆盖导电路径和介电隔离尖端的顶部屏蔽，并且具有与底部屏蔽件相等的厚度，从而与对称的电介质层一起产生具有降低的热弯曲的平衡结构。器件晶片被结合到处理晶片。形成手柄并移除器件晶片的剩余硅以释放悬臂。

6. 发明授权

US07997125B2 Miniaturized spring element and method for producing the spring element 有权
标题翻译：微型弹簧元件及弹簧元件的制造方法
公开(公告)号：US07997125B2
公开(公告)日：2011-08-16
申请号：US12184679
申请日：2008-08-01
申请人： Alexander Kaya , Michael Huth
发明人： Alexander Kaya , Michael Huth
IPC分类号： G01Q60/40 , G01Q70/14
CPC分类号： G01Q20/04 , Y10S977/89 , Y10S977/956
摘要： A miniaturized spring element is intended to be particularly suitable for use as a beam probe or cantilever for detecting atomic or molecular forces, in particular in an atomic force microscope, and, to this end, is intended to make it possible to detect its deflection in a particularly reliable manner and with high resolution. For this purpose, the spring element contains a basic body which is formed from a matrix containing embedded nanoparticles or defects. The spring element is produced using the principle of local deposition with focused energetic particles or electromagnetic waves or by pyrolytically induced deposition.
摘要翻译：旨在特别适合用作用于检测原子力或分子力的光束探测器或悬臂的微型弹簧元件，特别是在原子力显微镜中，并且为此，旨在使其可以检测其中的偏转特别可靠的方式和高分辨率。为此，弹簧元件包含由包含嵌入的纳米颗粒或缺陷的基体形成的基体。使用具有聚焦能量粒子或电磁波的局部沉积或通过热解诱导沉积的原理制造弹簧元件。

7. 发明授权

US06100524A Torsion type probe and scanning probe microscope using the same 失效
标题翻译：扭转型探头和扫描探针显微镜使用相同
公开(公告)号：US06100524A
公开(公告)日：2000-08-08
申请号：US50932
申请日：1998-03-31
申请人： Takayuki Yagi , Shunichi Shido
发明人： Takayuki Yagi , Shunichi Shido
IPC分类号： G01N37/00 , B81B3/00 , G01B5/28 , G01B7/34 , G01Q20/04 , G01Q60/04 , G01Q60/38 , G01Q60/40 , G01Q70/02 , G01Q70/14 , G02B21/00 , H01J37/00 , G01N13/10
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q20/04 , Y10S977/873
摘要： A torsion type probe for scanning probe microscopes, especially for atomic force microscopes, includes a supporting block, a torsion beam device arranged on the supporting block, a thin-film plane plate rotatably supported by the torsion beam means, and a tip formed on the thin-film plane plate. The torsion beam device include a piezoresistor, which is preferably formed in the surface or lateral walls of the torsion beam device, to detect torsion of the torsion beam device as the probe scans the surface of a sample.
摘要翻译：用于扫描探针显微镜的扭转型探针，特别是用于原子力显微镜的扭转型探针，包括支撑块，布置在支撑块上的扭力梁装置，由扭转梁装置可旋转地支撑的薄膜平面板，以及形成在薄膜平板。扭力梁装置包括优选形成在扭转梁装置的表面或侧壁中的压电电阻器，以便当探头扫描样品的表面时检测扭转束装置的扭转。

8. 发明授权

US6078174A Apparatus for measuring exchange force 失效
标题翻译：用于测量交换力的装置
公开(公告)号：US6078174A
公开(公告)日：2000-06-20
申请号：US59399
申请日：1998-04-14
申请人： Koichi Mukasa , Kazunobu Hayakawa , Kazuhisa Sueoka , Kohji Nakamura , Yuichi Tazuke , Hideo Hasegawa , Tamio Oguchi
发明人： Koichi Mukasa , Kazunobu Hayakawa , Kazuhisa Sueoka , Kohji Nakamura , Yuichi Tazuke , Hideo Hasegawa , Tamio Oguchi
IPC分类号： G01B7/34 , G01B7/00 , G01N23/225 , G01N24/00 , G01N37/00 , G01Q10/06 , G01Q20/04 , G01Q60/24 , G01Q60/36 , G01Q60/40 , G01Q60/50 , G01Q60/54 , G01Q60/56 , G01R33/02
CPC分类号： G01Q60/08 , B82Y35/00 , G01Q60/32 , G01Q60/38 , G01Q60/54 , Y10S977/852
摘要： In an apparatus for measuring an exchange force between a specimen and a probe, the specimen and probe are faced to each other with a distance within a close proximity or RKKY-type exchange interaction region from a distance at which conduction electron clouds begin to be overlapped with each other to a distance at which localized electron clouds are not substantially overlapped with each other. In order to prevent the probe from being attracted to the specimen by a force between the specimen and the force, a piezoelectric element is provided on a cantilever and a control signal supplied to the piezoelectric element is produced in accordance with a displacement of the cantilever to control a spring constant of the cantilever. The exchange force between the specimen and the probe is calculated from the control signal supplied to the piezoelectric element.
摘要翻译：在用于测量样本和探针之间的交换力的装置中，样本和探针彼此面对彼此，距离传导电子云开始重叠的距离在距离近的距离或RKKY型交换相互作用区域彼此间隔一定距离，在该距离处局部电子云基本上不重叠。为了通过试样和力之间的力阻止探针被吸引到样品上，在悬臂上设置压电元件，并且根据悬臂的位移产生供给到压电元件的控制信号控制悬臂的弹簧常数。根据提供给压电元件的控制信号计算样品和探针之间的交换力。

9. 发明授权

US5883387A SPM cantilever and a method for manufacturing the same 失效
标题翻译： SPM悬臂及其制造方法
公开(公告)号：US5883387A
公开(公告)日：1999-03-16
申请号：US878686
申请日：1997-06-19
申请人： Katsuhiro Matsuyama , Michio Takayama
发明人： Katsuhiro Matsuyama , Michio Takayama
IPC分类号： G01B21/30 , G01Q60/04 , G01Q60/06 , G01Q60/16 , G01Q60/22 , G01Q60/38 , G01Q60/40 , G01Q70/14 , G01B5/28
CPC分类号： G01Q60/06 , B82Y20/00 , B82Y35/00 , G01Q60/04 , G01Q60/16 , G01Q60/22 , G01Q60/38 , G01Q60/40 , G01Q70/14 , Y10S977/873
摘要： An SPM cantilever comprises a cantilever portion shaped as a thin plate and extending between a proximal end and a free end, a supporting portion attached to one surface of the cantilever portion on a side of the proximal end, and a probe projecting from the other surface of the cantilever portion on a side of the free end of the cantilever portion the supporting member, and the cantilever portion and the probe are made of different materials.
摘要翻译： SPM悬臂包括形成为薄板并在近端和自由端之间延伸的悬臂部分，附接到近端侧的悬臂部分的一个表面的支撑部分和从另一表面突出的探针的悬臂部分在支撑部件的悬臂部分的自由端的一侧上，并且悬臂部分和探针由不同的材料制成。

10. 发明授权

US5874734A Atomic force microscope for measuring properties of dielectric and insulating layers 失效
标题翻译：用于测量介电层和绝缘层性能的原子力显微镜
公开(公告)号：US5874734A
公开(公告)日：1999-02-23
申请号：US777655
申请日：1996-12-31
申请人： Virgil B. Elings , Dennis M. Adderton , Dror Sarid
发明人： Virgil B. Elings , Dennis M. Adderton , Dror Sarid
IPC分类号： G01Q60/40 , H01J37/28
CPC分类号： G01Q60/40 , B82Y35/00 , Y10S977/851 , Y10S977/852
摘要： An atomic force microscope that has an electrically-conductive probe and tip includes a feedback control circuit for generating a substantially constant, desired Fowler-Nordheim current between the probe tip and the surface of an electrically-conductive sample having a thin dielectric or insulating film thereon. The feedback circuit maintains the desired Fowler-Nordheim current flow between the probe tip and the sample by adjusting the bias voltage applied to the probe tip, and by tracking and using the changes in the applied bias voltage to provide a measure of the thickness, electrical conductivity or other electrical property of the film.
摘要翻译：具有导电探针和尖端的原子力显微镜包括反馈控制电路，用于在探针尖端和其上具有薄介电层或绝缘膜的导电样品的表面之间产生基本恒定的期望的Fowler-Nordheim电流。反馈电路通过调整施加到探针尖端的偏置电压，并通过跟踪和使用所施加的偏置电压的变化来提供厚度测量，电气测量，保持探针尖端和样品之间所需的Fowler-Nordheim电流。电导率或其他电性能。

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