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1. 发明授权

US09726490B2 Angular velocity sensor 有权
公开(公告)号：US09726490B2
公开(公告)日：2017-08-08
申请号：US14241950
申请日：2012-09-03
申请人： Masahide Tamura , Osamu Kawasaki , Takayuki Nakano , Shouhei Niikawa , Hidekazu Yano , Tetsuji Imamura
发明人： Masahide Tamura , Osamu Kawasaki , Takayuki Nakano , Shouhei Niikawa , Hidekazu Yano , Tetsuji Imamura
IPC分类号： G01C19/56 , G01P15/12 , G01P15/18 , H01L41/047 , H01L41/08 , G01C19/5733 , H01L41/09 , H01L41/113
CPC分类号： G01C19/56 , G01C19/5733 , G01P15/12 , G01P15/18 , H01L41/047 , H01L41/0475 , H01L41/0805 , H01L41/0973 , H01L41/1132
摘要： Provided herein is a vibration-type angular velocity sensor capable of improving detection precision of angular velocities around the Z axis and preventing detection precision of angular velocities around the X and Y axes from deteriorating. A weight 3 is columnar or conic. The outline of an outer peripheral portion of a diaphragm 1 has such shape that a straight portion ST is formed at each of four corner portions of a square. Four vibration exciting electrodes 11 are respectively located in four regions partitioned by a first imaginary line L1 and a second imaginary line L2. Four angular velocity sensing electrodes 13 are respectively located in four regions partitioned by a first imaginary diagonal line CL1 and a second imaginary diagonal line Cl2.

2. 发明授权

US09417261B2 Atomic referenced optical accelerometer 有权
标题翻译：原子参考光学加速度计
公开(公告)号：US09417261B2
公开(公告)日：2016-08-16
申请号：US14162697
申请日：2014-01-23
申请人： Honeywell International Inc.
发明人： Kenneth Salit , Mary Salit , Robert Compton , Jeff A. Ridley , Karl Nelson
IPC分类号： G01P15/093 , B81B7/02 , G01P15/12 , G01P1/00 , G01P15/13
CPC分类号： G01P15/093 , B81B7/02 , G01P1/006 , G01P15/08 , G01P15/12 , G01P15/131
摘要： In some examples, a micro-electro-mechanical system (MEMS) optical accelerometer includes a housing comprising an internal chamber that includes a Fabry-Perot cavity and a proof mass affixed to the housing via one or more elastic elements, a light source configured to emit radiation, a first detector configured to receive radiation transmitted through the Fabry-Perot cavity and configured to generate one or more signals that indicate a position of the proof mass. The MEMS optical accelerometer further comprises an atomic wavelength reference and a second detector configured to detect radiation transmitted through the atomic wavelength reference and configured to generate one or more signals that indicate a wavelength of the radiation emitted by the light source, and a servomechanism electrically coupled to the second photo detector and the light source, configured to adjust the light source to maintain the radiation emitted by the light source at approximately a selected wavelength.
摘要翻译：在一些示例中，微电子机械系统（MEMS）光学加速度计包括壳体，该壳体包括内部腔室，该内部腔室包括法布里 - 珀罗空腔和经由一个或多个弹性元件固定到壳体的校验物质，发射辐射，第一检测器被配置为接收透射通过法布里 - 珀罗腔的辐射并被配置为产生指示证明质量位置的一个或多个信号。 MEMS光学加速度计还包括原子波长参考和第二检测器，其被配置为检测透射原子波长参考的辐射并被配置为产生指示由光源发射的辐射的波长的一个或多个信号，以及电耦合的伺服机构所述第二光检测器和所述光源被配置为调节所述光源以将由所述光源发射的辐射保持在大致选定的波长。

3. 发明申请

US20150346235A1 HIGH-OUTPUT MEMS ACCELEROMETER 有权
标题翻译：高输出MEMS加速度计
公开(公告)号：US20150346235A1
公开(公告)日：2015-12-03
申请号：US14293992
申请日：2014-06-02
申请人： Meggitt (Orange County), Inc.
发明人： TOM KWA
IPC分类号： G01P15/12 , B81B3/00
CPC分类号： G01P15/123 , B81B3/0021 , B81B2201/0235 , B81B2203/0109 , G01P15/09 , G01P15/12 , G01P2015/0831
摘要： A MEMS acceleration sensor is provided. In one embodiment, the MEMS acceleration sensor comprises: a frame; a first proofmass located within the frame, the first proofmass including a left side, right side, top, and bottom; an axis running from the left side to the right side at about a median point between the top and bottom; a first flexure running along the axis and coupling the left side to the frame; a second flexure running along the axis and coupling the right side to the frame; a first channel that extends from the bottom up past the axis to a first channel end; a second channel that extends from the top down past the axis to a second channel end; a second proofmass located within the first channel and coupled to the first proofmass via a first hinge and a first gauge at the first channel end and coupled to the frame at the bottom via a second hinge and a second gauge; and a third proofmass located within the second channel and coupled to the first proofmass via a third hinge and a third gauge at the second channel end and coupled to the frame at the top via a fourth hinge and a fourth gauge.
摘要翻译：提供了MEMS加速度传感器。在一个实施例中，MEMS加速度传感器包括：框架; 位于框架内的第一个校样，第一个校样包括左侧，右侧，顶部和底部; 从左侧到右侧的中心点处于顶部和底部之间的中心点的轴线; 第一挠曲件沿轴线延伸并将左侧连接到框架; 第二挠曲件沿轴线延伸并将右侧连接到框架; 从底部向上延伸穿过轴线到第一通道端的第一通道; 第二通道，其从顶部向下延伸穿过轴线到第二通道端; 位于所述第一通道内并且经由第一铰链和所述第一通道端处的第一量规耦合到所述第一校样的第二校正件，并且经由第二铰链和第二量规在所述底部处联接到所述框架; 以及位于所述第二通道内的第三校样物，并且经由所述第二通道端部处的第三铰链和第三量规耦合到所述第一校样，并且经由第四铰链和第四量规耦合到所述顶部的框架。

4. 发明授权

US09021898B2 Microelectromechanical sensor for measuring a force, and corresponding method 有权
标题翻译：用于测量力的微机电传感器及相应的方法
公开(公告)号：US09021898B2
公开(公告)日：2015-05-05
申请号：US13882767
申请日：2011-09-21
申请人： Tino Fuchs
发明人： Tino Fuchs
IPC分类号： G01L1/10 , G01L1/04 , G01L1/00 , B81B3/00 , G01L7/08 , G01L9/00 , G01P15/12 , B81C1/00
CPC分类号： B81B3/0018 , B81C1/00023 , G01L1/00 , G01L1/005 , G01L7/082 , G01L9/0041 , G01P15/12
摘要： A microelectromechanical sensor is configured to measure a force, a pressure, or the like. The sensor includes a substrate and a measuring element. The measuring element includes at least two electrically conductive regions, and at least one of the electrically conductive regions is at least partly connected to the substrate. The sensor also includes at least one changing region, and the changing region lies at least partly between the electrically conductive regions. The changing region is configured in a substantially electrically insulating manner in an unloaded state and in a substantially electrically conductive manner in a loaded state.
摘要翻译：微机电传感器被配置成测量力，压力等。传感器包括基板和测量元件。测量元件包括至少两个导电区域，并且至少一个导电区域至少部分地连接到基板。传感器还包括至少一个变化区域，并且变化区域至少部分地位于导电区域之间。改变区域在负载状态下以基本上电绝缘的方式配置，并且基本上是导电的。

5. 发明申请

US20130283914A1 ACCELERATION SENSOR 审中-公开
标题翻译：加速传感器
公开(公告)号：US20130283914A1
公开(公告)日：2013-10-31
申请号：US13996876
申请日：2012-01-20
申请人： Takashi Imanaka , Hiroyuki Aizawa , Hiroki Umehara
发明人： Takashi Imanaka , Hiroyuki Aizawa , Hiroki Umehara
IPC分类号： G01P15/02
CPC分类号： G01P15/02 , G01P15/12 , G01P15/18 , G01P21/00 , G01P2015/0842
摘要： An acceleration sensor includes a frame having a hollow space at an inside thereof, four beams extending from the frame to the hollow space, four plummets connected to ends of the four beams, and four sensing units provided on the four beams. One ends of the beams is connected to portions of the frame opposite to each other with respect to the hollow space. The two plummets face each other across the center of the hollow space. One ends of the other two beams are connected to portions of the frame opposite to each other with respect to the hollow space. The other two plummets face each other across the center of the hollow space. This acceleration sensor reduces variations and temporal changes in its sensitivity.
摘要翻译：加速度传感器包括在其内部具有中空空间的框架，从框架延伸到中空空间的四个梁，连接到四个梁的端部的四个垂直元件和设置在四个梁上的四个感测单元。梁的一端连接到框架相对于中空空间相对的部分。两个垂直的中心空间相互面对。另外两个梁的一端连接到相对于中空空间彼此相对的框架的部分。另外两个垂直的对面横跨中空空间的中心。该加速度传感器减少其灵敏度的变化和时间变化。

6. 发明申请

US20110192228A1 SENSOR 有权
标题翻译：传感器
公开(公告)号：US20110192228A1
公开(公告)日：2011-08-11
申请号：US13017212
申请日：2011-01-31
申请人： Nobuyuki Nagai , Yusaku Kato
发明人： Nobuyuki Nagai , Yusaku Kato
IPC分类号： G01P15/00
CPC分类号： G01P15/12 , G01C19/00 , G01P15/0888 , G01P15/18
摘要： A sensor includes: a first polymer sensor element generating a first voltage corresponding to a deformation thereof; a second polymer sensor element generating a second voltage corresponding to a deformation thereof; a fixing member fixing a first end of each of the first and the second polymer sensor elements while electrically insulating the first ends from each other; and a detector detecting an acceleration and an angular acceleration based on the first voltage derived from the first polymer sensor element and the second voltage derived from the second polymer sensor element.
摘要翻译：传感器包括：第一聚合物传感器元件，其产生对应于其变形的第一电压; 产生对应于其变形的第二电压的第二聚合物传感器元件; 固定构件，其将所述第一和第二聚合物传感器元件中的每一个的第一端固定，同时使所述第一端部彼此电绝缘; 以及基于从第一聚合物传感器元件导出的第一电压和从第二聚合物传感器元件导出的第二电压来检测加速度和角加速度的检测器。

7. 发明授权

US5945601A Acceleration sensor with temperature resistor elements 失效
标题翻译：带温度电阻元件的加速度传感器
公开(公告)号：US5945601A
公开(公告)日：1999-08-31
申请号：US20999
申请日：1998-02-09
申请人： Takashi Hosoi , Satoshi Hiyama , Sukeyuju Shinotuka , Mizuho Doi , Hiroshi Yamakawa , Nariaki Kuriyama , Tomoyuki Nishio , Atsushi Inaba , Nobuhiro Fueki
发明人： Takashi Hosoi , Satoshi Hiyama , Sukeyuju Shinotuka , Mizuho Doi , Hiroshi Yamakawa , Nariaki Kuriyama , Tomoyuki Nishio , Atsushi Inaba , Nobuhiro Fueki
IPC分类号： G01P15/00 , G01P15/12 , G01P15/18
CPC分类号： G01P15/18 , G01P15/008 , G01P15/12
摘要： A very small and economical acceleration sensor which can detect acting acceleration with high sensitivity and high accuracy by precisely processing a semiconductor substrate and the like by using the photoengraving technique in a semiconductor manufacturing process to accurately form the elements themselves such as a sensor case, a cavity, a heater, a temperature-sensing resistor element, and a heat-type temperature-sensing resistor element, and the relative placement of each element. One embodiment of the acceleration sensor can detect acceleration acting from any of the three-dimensional directions.
摘要翻译：一种非常小且经济的加速度传感器，其可以通过在半导体制造过程中通过使用照相雕刻技术精确地处理半导体衬底等来以高灵敏度和高精度检测作用加速度，以精确地形成元件本身，例如传感器外壳，空腔，加热器，温度感测电阻元件和热型温度感测电阻元件，以及每个元件的相对位置。加速度传感器的一个实施例可以检测从任何三维方向起作用的加速度。

8. 发明授权

US5732289A Detecting apparatus 失效
标题翻译：检测装置
公开(公告)号：US5732289A
公开(公告)日：1998-03-24
申请号：US786098
申请日：1997-01-17
申请人： Daiki Tsukahara , Hidenobu Kaji , Yoshio Imura
发明人： Daiki Tsukahara , Hidenobu Kaji , Yoshio Imura
IPC分类号： G01C9/00 , G01P15/12 , G03B5/00 , G03B17/00 , H01L41/08
CPC分类号： G01P15/12 , G01C9/00 , G03B5/00 , G03B2205/0007 , G03B2217/005
摘要： A detecting apparatus which includes a balancer which generates a moment of rotation around an axis; and a pressure sensing sheet which contacts at one or more contact points with the balancer and outputs a pressure signal corresponding to a force acting on the contact point and depends on the moment of rotation. An attitude detecting apparatus and a detecting apparatus for difference of attitude each of which includes, the detecting apparatus; and an arithmetic circuit which receives a pressure signal at predefined time intervals in order and processes a calculation.
摘要翻译：一种检测装置，其包括平衡器，该平衡器绕轴线产生旋转力矩; 以及压力检测片，其在与平衡器的一个或多个接触点处接触并输出与作用在接触点上的力相对应的压力信号，并且取决于旋转的时刻。一种姿态检测装置和用于姿态差异的检测装置，每个都包括检测装置; 以及运算电路，其按预定的时间间隔接收压力信号并处理计算。

9. 发明授权

US5621318A Mechanical/electrical displacement transducer 失效
标题翻译：机械/电气位移传感器
公开(公告)号：US5621318A
公开(公告)日：1997-04-15
申请号：US473717
申请日：1995-06-07
申请人： Stephen C. Jacobsen , Michael G. Mladejovsky , John E. Wood
发明人： Stephen C. Jacobsen , Michael G. Mladejovsky , John E. Wood
IPC分类号： G01B7/00 , G01D1/18 , G01D5/14 , G01D5/165 , G01D5/18 , G01D5/241 , G01D5/34 , G01L1/00 , G01P15/093 , G01P15/12 , H04R23/00 , G01B7/14 , H03M1/22
CPC分类号： G01B7/003 , G01D1/18 , G01D5/145 , G01D5/165 , G01D5/18 , G01D5/2412 , G01D5/34 , G01L1/005 , G01P15/093 , G01P15/12 , G01P15/124 , H04R23/00
摘要： Displacement measuring apparatus for measuring the displacement and movement of an object includes a sensor having an operative surface and circuitry for producing an electrical output signal whose value is dependent upon the area of the operative surface covered by an electrical/magnetic field producing member. The apparatus also includes an elongate, flexible band capable of producing an electric/magnetic field, where the band is attached at one end to the sensor to roll over and cover or unroll from over and uncover the operative surface as the object whose displacement is to be measured is moved. The value of the electrical output signal produced by the circuitry is thus dependent upon the area of the operative surface covered by the band and thus by the position and movement of the object.
摘要翻译：用于测量物体的位移和移动的位移测量装置包括具有操作表面的传感器和用于产生电输出信号的电路，该电输出信号的值取决于由电/磁场产生构件覆盖的操作表面的面积。该装置还包括能够产生电/磁场的细长的柔性带，其中带一端连接到传感器上，以便翻转并覆盖或展开作为其位移的物体的操作表面被测量被移动。因此，由电路产生的电输出信号的值取决于被带覆盖的操作表面的面积，并因此取决于物体的位置和移动。

10. 发明授权

US5481905A Transducer circuit having negative integral feedback 失效
标题翻译：具有负整体反馈的传感器电路
公开(公告)号：US5481905A
公开(公告)日：1996-01-09
申请号：US970746
申请日：1992-11-03
申请人： Bud E. Pratt
发明人： Bud E. Pratt
IPC分类号： G01L9/00 , G01L9/04 , G01P15/12 , G01P15/00
CPC分类号： G01L19/0084 , G01L19/0645 , G01L19/148 , G01L9/0042 , G01L9/045 , G01P15/12 , Y10S73/90
摘要： A transducer circuit which includes a Wheatstone bridge balanced by negative integral feedback. The bridge includes responsive elements formed on a thin resilent diaphragm. When subjected to a force, the diaphragm deflects and unbalances the bridge. The unbalanced bridge produces an output voltage which drives an integrator having an output voltage that is an integral of the bridge output voltage. The integrator output voltage is applied to the bridge as negative feedback to rebalance the bridge. The integrator includes a capacitor which introduces a time delay to assure that the feedback is always negative. The negative feedback provides stability for the circuit. The integrator output voltage drives indicating and/or auxiliary devices. The complete transducer circuit may be disposed within a sealed module having the diaphragm as a surface.
摘要翻译：一种换能器电路，其包括由负整体反馈平衡的惠斯通电桥。桥梁包括形成在薄弹性隔膜上的响应元件。当受到力时，隔膜使桥梁偏转和不平衡。不平衡桥产生输出电压，其驱动具有作为桥输出电压的积分的输出电压的积分器。积分器输出电压作为负反馈施加到桥梁，以重新平衡桥。积分器包括引入时间延迟以确保反馈总是为负的电容器。负反馈为电路提供稳定性。积分器输出电压驱动指示和/或辅助设备。完整的换能器电路可以设置在具有隔膜作为表面的密封模块内。

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