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    • 2. 发明申请
    • METHOD AND APPARATUS FOR MEASURING SURFACE PROPERTIES
    • 测量表面特性的方法和装置
    • US20110062964A1
    • 2011-03-17
    • US12991309
    • 2009-04-30
    • Yoshihiro HosokawaKei KobayashiHirofumi YamadaKazumi MatsushigeYukiko Mori
    • Yoshihiro HosokawaKei KobayashiHirofumi YamadaKazumi MatsushigeYukiko Mori
    • G01R27/32
    • G01Q10/06G01Q10/065
    • A method for measuring surface properties according to the present invention includes the steps of: with distance control feedback applied so that a desired physical quantity to be measured that is attributed to an interaction between a probe and a sample is actually measured while changing a measured distance between the probe and the sample in accordance with a relationship between the desired physical quantity and the measured distance, (i) setting a set value, corresponding to the desired physical quantity, which serves to change the measured distance; and (ii) recording, for each set value thus set, a relationship between the measured distance changed by the set value set in the step (i) and a physical quantity measured with the probe and the sample placed at that measured distance. This allows precise and quick measurement of a physical quantity even in a region where the probe and the sample are very close to each other, while avoiding a collision between them.
    • 根据本发明的用于测量表面性质的方法包括以下步骤:应用距离控制反馈,使得实际测量归因于探针和样品之间的相互作用的待测量的待测物理量,同时改变测量距离 根据所需物理量与测量距离之间的关系在探针和样本之间,(i)设置对应于期望物理量的设定值,其用于改变测量的距离; 以及(ii)对于如此设定的每个设定值,记录测量距离变化了步骤(i)中设定的设定值与用探头测量的物理量与放置在该测量距离处的样品之间的关系。 即使在探针和样品彼此非常接近的区域中,也能够精确而快速地测量物理量,同时避免它们之间的碰撞。
    • 4. 发明申请
    • Electret capacitor microphone
    • 驻极体电容麦克风
    • US20050089180A1
    • 2005-04-28
    • US10503653
    • 2003-01-30
    • Shinichi SaekiHirofumi Yamada
    • Shinichi SaekiHirofumi Yamada
    • H04R3/00H04R19/01H04R11/04H04R9/08H04R25/00
    • H04R3/007H04R19/016
    • An electret condenser microphone of small power consumption and capable of rejecting noise over a broad band, the electret condenser microphone being suitable for use as e.g. a microphone in a mobile telephone or a sensor disposed inside an engine room of an automobile. The microphone includes an electro-acoustic transducer (M) having an electret portion (E) provided at least one of a diaphragm (6) acting as an electrode and a stationary electrode (2, 25) disposed in opposition to the diaphragm (6), and an FET (10) effecting an impedance conversion on an output from the electro-acoustic transducer (M) and then outputting the converted output. The FET (10) is of MOS type. Further, a capacitor (11) and a varistor (12) are provided in parallel between the signal line (L) of the FET (10) and the ground (18) and a resistor (13) is incorporated in series in the signal line (L).
    • 驻极体电容麦克风具有功耗低且能够在宽带上抑制噪声的驻极体电容麦克风,驻极体电容麦克风适合用作例如, 移动电话中的麦克风或设置在汽车发动机室内的传感器。 麦克风包括具有驻极体部分(E)的电声换能器(M),所述驻极体部分(E)设置为用作电极的隔膜(6)和与隔膜(6)相对设置的固定电极(2,51)中的至少一个, 以及FET(10),对来自电声换能器(M)的输出进行阻抗转换,然后输出转换的输出。 FET(10)为MOS型。 此外,在FET(10)的信号线(L)和接地(18)之间并联设置电容器(11)和变阻器(12),并且电阻器(13)串联连接在信号线 (L)。
    • 5. 发明授权
    • Method and apparatus for measuring values of physical property
    • 用于测量物理性能值的方法和装置
    • US06823724B1
    • 2004-11-30
    • US10396735
    • 2003-03-25
    • Kei KobayashiHirofumi YamadaKazumi Matsushige
    • Kei KobayashiHirofumi YamadaKazumi Matsushige
    • G01B528
    • G01Q60/30Y10S977/85Y10S977/852
    • A method of detecting the distribution of values of a physical property such as the dopant concentration of a semiconductor without being adversely affected by stray capacitance is offered. A scanning probe microscope capable of implementing this method is also offered. The method starts with applying an AC voltage of angular frequency &ohgr; between a probe and a sample from a fixed oscillator. The output from the oscillator is supplied to a piezoelectric device that drives the cantilever. The cantilever produces a deflection signal corresponding to forces corresponding to interactions between the probe and sample. A signal regarding the amplitude is extracted from the deflection signal. This signal is fed back to a means for controlling the distance between the probe and sample and supplied to a display device. As a result, an image of the surface topography of the sample is obtained. A harmonic component having a frequency higher than the triple or more of the angular frequency &ohgr; and contained in the cantilever deflection signal is extracted by a lock-in amplifier. As a result, information representing an image of differential capacitance (∂C/∂V) is obtained.
    • 提供了不受杂散电容不利影响的检测诸如半导体的掺杂剂浓度的物理性质的值分布的方法。 还提供了能够实现该方法的扫描探针显微镜。 该方法开始于在来自固定振荡器的探针和样本之间施加角频率ω的交流电压。 来自振荡器的输出被提供给驱动悬臂的压电装置。 悬臂产生对应于对应于探针和样品之间的相互作用的力的偏转信号。 从偏转信号中提取关于振幅的信号。 该信号被反馈到用于控制探针和样品之间的距离并提供给显示装置的装置。 结果,获得样品的表面形貌的图像。 通过锁定放大器提取具有高于角频率ω3的三倍以上并且包含在悬臂偏转信号中的频率的谐波分量。 结果,获得表示差分电容图像(∂C/∂V)的信息。
    • 7. 发明授权
    • Scan device for microscope measurement instrument
    • 扫描仪用于显微镜测量仪器
    • US08796654B2
    • 2014-08-05
    • US13056293
    • 2008-07-31
    • Masahiro OhtaNoriaki OyabuKenjiro KimuraShinichiro IdoKei KobayashiHirofumi YamadaKazumi Matsushige
    • Masahiro OhtaNoriaki OyabuKenjiro KimuraShinichiro IdoKei KobayashiHirofumi YamadaKazumi Matsushige
    • G01N21/86G01V8/00G01N35/10G01Q10/06H01J37/20H01J37/26H01J37/28B82Y35/00
    • G01N35/1011B82Y35/00G01Q10/065H01J37/20H01J37/265H01J37/28H01J2237/20228
    • A probe needle is successively moved to a plurality of measurement points set in a measurement region on a sample so as to measure a z-displacement amount. An excitation control unit feedback-controls a piezoelectric element so that a vibration amplitude of a cantilever is constant in accordance with the detection output by a displacement detection unit. Moreover, a vertical displacement control unit feedback-controls a vertical position scan unit so as to obtain a constant distance between the probe needle and the sample according to a frequency shift by a frequency detection unit. When changes of outputs of two feedback loops at a certain measurement point are both within a predetermined range, a main control unit issues an instruction to a horizontal position control unit to rapidly move to the next measurement point. As a result, it is possible to adaptively decide such a measurement time that both of the two feedback controls at respective measurement points are established. This eliminates an unnecessary measurement time, which in turn reduces the time required for creating one convex/concave image as compared to the conventional technique and improves the throughput.
    • 将探针连续地移动到设置在样本上的测量区域中的多个测量点,以测量z位移量。 激励控制单元根据位移检测单元的检测输出反馈控制压电元件,使得悬臂的振动振幅恒定。 此外,垂直位移控制单元反馈控制垂直位置扫描单元,以便通过频率检测单元根据频移获得探针和样本之间的恒定距离。 当在某个测量点处的两个反馈回路的输出的变化都在预定范围内时,主控制单元向水平位置控制单元发出指令以快速移动到下一个测量点。 结果,可以自适应地确定建立各测量点的两个反馈控制两者的测量时间。 这消除了不必要的测量时间,这又减少了与传统技术相比创建一个凸/凹图像所需的时间并且提高了吞吐量。
    • 9. 发明申请
    • Scan Device
    • 扫描设备
    • US20110261352A1
    • 2011-10-27
    • US13056293
    • 2008-07-31
    • Masahiro OhtaNoriaki OyabuKenjiro KimuraShinichiro IdoKei KobayashiHirofumi YamadaKazumi Matsushige
    • Masahiro OhtaNoriaki OyabuKenjiro KimuraShinichiro IdoKei KobayashiHirofumi YamadaKazumi Matsushige
    • G01N21/01
    • G01N35/1011B82Y35/00G01Q10/065H01J37/20H01J37/265H01J37/28H01J2237/20228
    • A probe needle is successively moved to a plurality of measurement points set in a measurement region on a sample so as to measure a z-displacement amount. An excitation control unit feedback-controls a piezoelectric element so that a vibration amplitude of a cantilever is constant in accordance with the detection output by a displacement detection unit. Moreover, a vertical displacement control unit feedback-controls a vertical position scan unit so as to obtain a constant distance between the probe needle and the sample according to a frequency shift by a frequency detection unit. When changes of outputs of two feedback loops at a certain measurement point are both within a predetermined range, a main control unit issues an instruction to a horizontal position control unit to rapidly move to the next measurement point. As a result, it is possible to adaptively decide such a measurement time that both of the two feedback controls at respective measurement points are established. This eliminates an unnecessary measurement time, which in turn reduces the time required for creating one convex/concave image as compared to the conventional technique and improves the throughput.
    • 将探针连续地移动到设置在样本上的测量区域中的多个测量点,以测量z位移量。 激励控制单元根据位移检测单元的检测输出反馈控制压电元件,使得悬臂的振动振幅恒定。 此外,垂直位移控制单元反馈控制垂直位置扫描单元,以便通过频率检测单元根据频移获得探针和样本之间的恒定距离。 当在某个测量点处的两个反馈回路的输出的变化都在预定范围内时,主控制单元向水平位置控制单元发出指令以快速移动到下一个测量点。 结果,可以自适应地确定建立各测量点的两个反馈控制两者的测量时间。 这消除了不必要的测量时间,这又减少了与传统技术相比创建一个凸/凹图像所需的时间并且提高了吞吐量。
    • 10. 发明申请
    • Gate valve
    • 闸阀
    • US20090140195A1
    • 2009-06-04
    • US11987309
    • 2007-11-29
    • Yasunari ShibataYoshinori KoyamaSoken TakaseTaizo HoshinoShuji KameyamaYasuhiro SuzukiYoshihiko HorieHitoshi TeradaHirofumi Yamada
    • Yasunari ShibataYoshinori KoyamaSoken TakaseTaizo HoshinoShuji KameyamaYasuhiro SuzukiYoshihiko HorieHitoshi TeradaHirofumi Yamada
    • F16K3/30
    • F16K3/20
    • An object is to provide a gate valve capable of preventing operational deficiencies caused by particulate materials accumulating in a valve box, thus providing superior sealing properties and high durability, having a simple structure, and allowing inspection and maintenance to be performed easily. A gate valve installed in a transport line for transporting fluid containing particulate material at a coal gasification plant includes a valve box having an inlet portion and an outlet portion in which a channel constituting a part of the transport line is formed; a valve unit, provided between the inlet portion and the outlet portion, which extends in an opening-and-closing direction orthogonal to an axial direction of the channel, and which is movable in the opening-and-closing direction; a wedge plate provided between the valve unit and the inlet portion so as to extend in the opening-and-closing direction; and a guide plate provided between the valve unit and the outlet portion so as to extend in the opening-and-closing direction. Areas between the valve unit and the wedge plate and between and the valve unit and guide plate are sealed by means of surface contact.
    • 本发明的目的是提供一种闸阀,其能够防止由于在阀箱中积聚的颗粒材料引起的操作缺陷,从而提供优异的密封性和高耐久性,结构简单,并且容易进行检查和维护。 安装在用于在煤气化装置中输送含有颗粒材料的流体的输送管线的闸阀包括具有入口部分和出口部分的阀箱,其中构成输送线路的一部分的通道; 阀单元,设置在入口部和出口部之间,其沿与通道的轴向正交的开闭方向延伸,并且能够沿开闭方向移动; 楔形板,设置在所述阀单元和所述入口部之间,以沿所述开闭方向延伸; 以及设置在所述阀单元和所述出口部之间以沿所述开闭方向延伸的引导板。 阀单元和楔形板之间以及阀单元和引导板之间的区域通过表面接触而被密封。